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Bleckmann H. The incomparable fascination of comparative physiology: 40 years with animals in the field and laboratory. J Comp Physiol A Neuroethol Sens Neural Behav Physiol 2024; 210:211-226. [PMID: 37987801 PMCID: PMC10995018 DOI: 10.1007/s00359-023-01681-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/30/2023] [Revised: 10/17/2023] [Accepted: 11/06/2023] [Indexed: 11/22/2023]
Abstract
This paper is not meant to be a review article. Instead, it gives an overview of the major research projects that the author, together with his students, colleagues and collaborators, has worked on. Although the main focus of the author's work has always been the fish lateral line, this paper is mainly about all the other research projects he did or that were done in his laboratory. These include studies on fishing spiders, weakly electric fish, seals, water rats, bottom dwelling sharks, freshwater rays, venomous snakes, birds of prey, fire loving beetles and backswimmers. The reasons for this diversity of research projects? Simple. The authors's lifelong enthusiasm for animals, and nature's ingenuity in inventing new biological solutions. Indeed, this most certainly was a principal reason why Karl von Frisch and Alfred Kühn founded the Zeitschrift für vergleichende Physiologie (now Journal of Comparative Physiology A) 100 years ago.
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Affiliation(s)
- Horst Bleckmann
- Institute of Zoology, University of Bonn, Poppelsdorfer Schloss, Bonn, Germany.
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2
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Zhang Z, Pan J, Tang Y, Xu Y, Zhang L, Gong Y, Tong L. Optical micro/nanofibre embedded soft film enables multifunctional flow sensing in microfluidic chips. LAB ON A CHIP 2020; 20:2572-2579. [PMID: 32573608 DOI: 10.1039/d0lc00178c] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Microfluidic chips have been proven to be a powerful technical platform for chemical synthesis, biomedical research, and optofluidic devices. Here, we report a smart microfluidic chip (SMC) with multiple functionality to sense the status or incidents occurring on chip. The SMC is enabled by a soft, flexible and attachable film embedded with optical micro/nanofibres (MNFs), which is highly compatible with microfluidic chips fabricated by lithography. Based on the transition from guided modes to radiation modes of the MNFs, simultaneous flow rate detection in multiple channels is demonstrated on a SMC with high sensitivity. The MNF-enabled SMC is also capable of monitoring the transportation and morphology of microfluidic droplets with fast response. In addition, real-time counting of the magnetic droplets is performed to verify the SMC's anti-electromagnetic interference ability. This SMC is unique and may play an important role in microreactors, droplet microfluidics and optofluidic sensors.
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Affiliation(s)
- Zhang Zhang
- State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
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3
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Bio-inspired Flexible Lateral Line Sensor Based on P(VDF-TrFE)/BTO Nanofiber Mat for Hydrodynamic Perception. SENSORS 2019; 19:s19245384. [PMID: 31817605 PMCID: PMC6960935 DOI: 10.3390/s19245384] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/08/2019] [Revised: 12/03/2019] [Accepted: 12/04/2019] [Indexed: 11/16/2022]
Abstract
Fish and some amphibians can perform a variety of behaviors in confined and harsh environments by employing an extraordinary mechanosensory organ, the lateral line system (LLS). Inspired by the form-function of the LLS, a hydrodynamic artificial velocity sensor (HAVS) was presented in this paper. The sensors featured a polarized poly (vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)]/barium titanate (BTO) electrospinning nanofiber mat as the sensing layer, a polyimide (PI) film with arrays of circular cavities as the substrate, and a poly(methyl methacrylate) (PMMA) pillar as the cilium. The P(VDF-TrFE)/BTO electrospinning nanofiber mat demonstrated enhanced crystallinity and piezoelectricity compared with the pure P(VDF-TrFE) nanofiber mat. A dipole source was employed to characterize the sensing performance of the fabricated HAVS. The HAVS achieved a velocity detection limit of 0.23 mm/s, superior to the conventional nanofiber mat-based flow sensor. In addition, directivity was feasible for the HAVS, which was in accordance with the simulation results. The proposed bio-inspired flexible lateral line sensor with hydrodynamic perception ability shows promising applications in underwater robotics for real-time flow analysis.
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Yang B, Zhang T, Liang Z, Lu C. Research on an Artificial Lateral Line System Based on a Bionic Hair Sensor with Resonant Readout. MICROMACHINES 2019; 10:mi10110736. [PMID: 31671895 PMCID: PMC6915608 DOI: 10.3390/mi10110736] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/26/2019] [Revised: 10/24/2019] [Accepted: 10/27/2019] [Indexed: 11/23/2022]
Abstract
Inspired by the lateral line system of fish, an artificial lateral line system based on bionic hair sensor with resonant readout is presented in this paper. An artificial lateral line system, which possesses great application potential in the field of gas flow visualization, includes two different sensors: a superficial neuromast and a canal neuromast flow velocity sensor, which are used to measure the constant and oscillatory air flow velocity, respectively. The sensitive mechanism of two artificial lateral line sensors is analyzed, and a finite element simulation is implemented to verify the structural design. Then the control circuit of the artificial lateral line system is designed, employing a demodulation algorithm of oscillatory signal based on the least mean square error algorithm, which is used to calculate the oscillatory air flow velocity. Finally, the experiments are implemented to assess the performance of the two artificial lateral line systems. The experimental results show that the artificial lateral line system, which can be used to measure the constant and oscillatory air flow velocity, has a minimum threshold of 0.785 mm/s in the measurement of oscillatory air flow velocity. Moreover, the artificial canal neuromast lateral line system can filter out low-frequency disturbance and has good sensitivity for high-frequency flow velocity.
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Affiliation(s)
- Bo Yang
- School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.
| | - Ting Zhang
- School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.
| | - Zhuoyue Liang
- School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.
| | - Chengfu Lu
- School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.
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5
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Sharif MA, Tan X. A pressure difference sensor inspired by fish canal lateral line. BIOINSPIRATION & BIOMIMETICS 2019; 14:055003. [PMID: 31282390 DOI: 10.1088/1748-3190/ab2fa8] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
It is of interest to exploit the insight from the lateral line system of fish for flow sensing applications. In this paper, a novel fish canal lateral line-inspired pressure difference sensor is proposed by embedding an ionic polymer-metal composite (IPMC) sensor within a canal filled with viscous fluid. Such a sensor could be used by underwater robots and vehicles for object detection, angle of attack measurement, and source localization. Unlike the biological counterpart that has open ends on the surface of the body, the proposed sensor has two pores covered with a latex membrane, which prevents the canal fluid from mixing with the ambient fluid. The design and fabrication of the sensor are presented, where the sensor is integrated with a fish-like body. The sensor output is experimentally characterized as the fish-like body is rotated with respect to a dipole source, which confirms that the sensor is capable of capturing the pressure difference between the two pores. Finite element modeling and simulation that capture fluid-structure interactions and IPMC physics are conducted to shed light on the sensor behavior. Finally, the utility of the sensor in underwater robotics is illustrated via orienting the fish-like body towards the dipole source using feedback from the proposed sensor.
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Affiliation(s)
- Montassar Aidi Sharif
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, United States of America. Department of Computer Engineering, Technical College-Kirkuk, Northern Technical University (NTU), Kirkuk, Iraq
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Wolf BJ, Warmelink S, van Netten SM. Recurrent neural networks for hydrodynamic imaging using a 2D-sensitive artificial lateral line. BIOINSPIRATION & BIOMIMETICS 2019; 14:055001. [PMID: 31239415 DOI: 10.1088/1748-3190/ab2cb3] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The lateral line is a mechanosensory organ found in fish and amphibians that allows them to sense and act on their near-field hydrodynamic environment. We present a 2D-sensitive artificial lateral line (ALL) comprising eight all-optical flow sensors, which we use to measure hydrodynamic velocity profiles along the sensor array in response to a moving object in its vicinity. We then use the measured velocity profiles to reconstruct the object's location, via two types of neural networks: feed-forward and recurrent. Several implementations of feed-forward neural networks for ALL source localisation exist, while recurrent neural networks may be more appropriate for this task. The performance of a recurrent neural network (the long short-term memory, LSTM) is compared to that of a feed-forward neural network (the online-sequential extreme learning machine, OS-ELM) via localizing a 6 cm sphere moving at 13 cm s-1. Results show that, in a 62 cm [Formula: see text] 9.5 cm area of interest, the LSTM outperforms the OS-ELM with an average localisation error of 0.72 cm compared to 4.27 cm, respectively. Furthermore, the recurrent network is relatively less affected by noise, indicating that recurrent connections can be beneficial for hydrodynamic object localisation.
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Affiliation(s)
- Ben J Wolf
- Author to whom correspondence should be addressed
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7
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Jiang Y, Ma Z, Zhang D. Flow field perception based on the fish lateral line system. BIOINSPIRATION & BIOMIMETICS 2019; 14:041001. [PMID: 30995633 DOI: 10.1088/1748-3190/ab1a8d] [Citation(s) in RCA: 17] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Fish are able to perceive the surrounding weak flow and pressure variations with their mechanosensory lateral line system, which consists of a superficial lateral line for flow velocity detection and a canal lateral line for flow pressure gradient perception. Achieving a better understanding of the flow field perception algorithms of the lateral line can contribute not only to the design of highly sensitive flow sensors, but also to the development of underwater smart skin with good hydrodynamic imaging properties. In this review, we discuss highly sensitive flow-sensing mechanisms for superficial and canal neuromasts and flow field perception algorithms. Artificial lateral line systems with different transduction mechanisms are then described with special emphasis on the recent innovations in the field of polymer-based artificial flow sensors. Finally, we discuss our perspective of the technological challenges faced while improving flow sensitivity, durability, and sensing fusion schemes.
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Affiliation(s)
- Yonggang Jiang
- School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, People's Republic of China
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A Polydimethylsiloxane (PDMS) Waveguide Sensor that Mimics a Neuromast to Measure Fluid Flow Velocity. SENSORS 2019; 19:s19040925. [PMID: 30813266 PMCID: PMC6412414 DOI: 10.3390/s19040925] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/31/2019] [Revised: 02/17/2019] [Accepted: 02/19/2019] [Indexed: 11/17/2022]
Abstract
Accurate flow measurement is a ubiquitous task in fields such as industry, medical technology, or chemistry; it remains however challenging due to small measurement ranges or erosive flows. Inspiration for possible measurement methods can come from nature, for example from the lateral line organ of fish, which is comprised of hair cells embedded in a gelatinous cupula. When the cupula is deflected by water movement, the hair cells generate neural signals from which the fish gains an accurate representation of its environment. We built a flow sensor mimicking a hair cell, but coupled it with an optical detection method. Light is coupled into a PDMS waveguide that consists of a core and a cladding with a low refractive index contrast to ensure high bending sensitivity. Fluid flow bends the waveguide; this leads to a measurable light loss. The design of our sensory system allows flow measurement in opaque and corrosive fluids while keeping production costs low. To prove the measurement concept, we evaluated the light loss while (a) reproducibly bending the fiber with masses, and (b) exposing the fiber to air flow. The results demonstrate the applicability of an optical fiber as a flow sensor.
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9
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Abstract
Fishes can avoid colliding with obstacles and track baits depending on the lateral distributed sense nodes which can sense the pressure variances of the surrounding flow field. Fish often uses the lateral-line system as their only means for navigation, especially under poor visual conditions. This sensing mechanism provides a new perspective for researchers and engineers to build such a sensing system that could be applied to control and near field navigation for underwater robots and vehicles. In this article, a pressure-sensing-based is proposed, with 10 pressure sensors acting as lateral line and use the three-dimensional printer to print the fish structure and install the artificial lateral line on it. Through preliminary experiments and numerical simulation, we obtain the pressure sensor data. By comparing the experimental data with the numerical simulation data, it can be verified that the pressure variation of the pressure sensor in the numerical simulation data is consistent with that in the experimental data. The artificial lateral line provides a new sense to man-made underwater vehicles and marine robots, so that they can sense like fish.
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10
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Herzog H, Klein B, Ziegler A. Form and function of the teleost lateral line revealed using three-dimensional imaging and computational fluid dynamics. J R Soc Interface 2018; 14:rsif.2016.0898. [PMID: 28468922 DOI: 10.1098/rsif.2016.0898] [Citation(s) in RCA: 18] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/09/2016] [Accepted: 04/11/2017] [Indexed: 11/12/2022] Open
Abstract
Fishes sense weak water motion using the lateral line. Among the thousands of described fish species, this organ may differ in size, shape and distribution of individual mechanoreceptors or lateral line canals. The reasons for this diversity remain unclear, but are very likely related to habitat preferences. To better understand the performance of the organ in natural hydrodynamic surroundings, various three-dimensional imaging datasets of the cephalic lateral line were gathered using Leuciscus idus as representative freshwater teleost. These data are employed to simulate hydrodynamic phenomena around the head and within lateral line canals. The results show that changes in canal dimensions alter the absolute stimulation amplitudes, but have little effect on the relation between bulk water flow and higher frequency signals. By contrast, depressions in the skin known as epidermal pits reduce bulk flow stimulation and increase the ratio between higher-frequency signals and the background flow stimulus.
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Affiliation(s)
- Hendrik Herzog
- Institut für Zoologie, Rheinische Friedrich-Wilhelms-Universität Bonn, Poppelsdorfer Schloss, 53115 Bonn, Germany
| | - Birgit Klein
- Institut für Zoologie, Rheinische Friedrich-Wilhelms-Universität Bonn, Poppelsdorfer Schloss, 53115 Bonn, Germany
| | - Alexander Ziegler
- Institut für Evolutionsbiologie und Ökologie, Rheinische Friedrich-Wilhelms-Universität Bonn, An der Immenburg 1, 53121 Bonn, Germany
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11
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Bora M, Kottapalli AGP, Miao J, Triantafyllou MS. Sensing the flow beneath the fins. BIOINSPIRATION & BIOMIMETICS 2018; 13:025002. [PMID: 29239859 DOI: 10.1088/1748-3190/aaa1c2] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Flow sensing, maneuverability, energy efficiency and vigilance of surroundings are the key factors that dictate the performance of marine animals. Be it swimming at high speeds, attack or escape maneuvers, sensing and survival hydrodynamics are a constant feature of life in the ocean. Fishes are capable of performing energy efficient maneuvers, including capturing energy from vortical structures in water. These impressive capabilities are made possible by the uncanny ability of fish to sense minute pressure and flow variations on their body. This is achieved by arrays of biological neuromast sensors on their bodies that 'feel' the surroundings through 'touch at a distance' sensing. The main focus of this paper is to review the various biomimetic material approaches in developing superficial neuromast inspired ultrasensitive MEMS sensors. Principals and methods that translate biomechanical filtering properties of canal neuromasts to benefit artificial MEMS sensors have also been discussed. MEMS sensors with ultrahigh flow sensitivity and accuracy have been developed mainly through inspiration from the hair cell and cupula structures in the neuromast. Canal-inspired packages have proven beneficial in hydrodynamic flow filtering in artificial sensors enabling signal amplification and noise attenuation. A special emphasis has been placed on the recent innovations that closely mimic the structural and material designs of stereocilia of neuromasts by exploring soft polymers.
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Affiliation(s)
- Meghali Bora
- Center for Environmental Sensing and Modeling (CENSAM) IRG, Singapore-MIT Alliance for Research and Technology (SMART) Centre, 1 Create Way, Singapore 138602, Singapore. These authors contributed equally to this work
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12
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Abels C, Mastronardi VM, Guido F, Dattoma T, Qualtieri A, Megill WM, De Vittorio M, Rizzi F. Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics. SENSORS 2017; 17:s17051080. [PMID: 28489040 PMCID: PMC5470470 DOI: 10.3390/s17051080] [Citation(s) in RCA: 27] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/14/2017] [Revised: 05/01/2017] [Accepted: 05/05/2017] [Indexed: 11/16/2022]
Abstract
The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, Si x N y /Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.
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Affiliation(s)
- Claudio Abels
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
- Università del Salento, Dipartimento di Ingegneria dell'Innovazione, Lecce 73100, Italy.
- Rhine-Waal University of Applied Sciences, Faculty of Technology and Bionics, Kleve 47533, Germany.
| | - Vincenzo Mariano Mastronardi
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
| | - Francesco Guido
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
| | - Tommaso Dattoma
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
| | - Antonio Qualtieri
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
| | - William M Megill
- Rhine-Waal University of Applied Sciences, Faculty of Technology and Bionics, Kleve 47533, Germany.
| | - Massimo De Vittorio
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
- Università del Salento, Dipartimento di Ingegneria dell'Innovazione, Lecce 73100, Italy.
| | - Francesco Rizzi
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy.
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A Review of Artificial Lateral Line in Sensor Fabrication and Bionic Applications for Robot Fish. Appl Bionics Biomech 2016; 2016:4732703. [PMID: 28115825 PMCID: PMC5223074 DOI: 10.1155/2016/4732703] [Citation(s) in RCA: 27] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/15/2016] [Revised: 08/17/2016] [Accepted: 10/25/2016] [Indexed: 11/17/2022] Open
Abstract
Lateral line is a system of sense organs that can aid fishes to maneuver in a dark environment. Artificial lateral line (ALL) imitates the structure of lateral line in fishes and provides invaluable means for underwater-sensing technology and robot fish control. This paper reviews ALL, including sensor fabrication and applications to robot fish. The biophysics of lateral line are first introduced to enhance the understanding of lateral line structure and function. The design and fabrication of an ALL sensor on the basis of various sensing principles are then presented. ALL systems are collections of sensors that include carrier and control circuit. Their structure and hydrodynamic detection are reviewed. Finally, further research trends and existing problems of ALL are discussed.
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Abels C, Qualtieri A, De Vittorio M, Megill WM, Rizzi F. A bio-inspired real-time capable artificial lateral line system for freestream flow measurements. BIOINSPIRATION & BIOMIMETICS 2016; 11:035006. [PMID: 27257144 DOI: 10.1088/1748-3190/11/3/035006] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
To enhance today's artificial flow sensing capabilities in aerial and underwater robotics, future robots could be equipped with a large number of miniaturized sensors distributed over the surface to provide high resolution measurement of the surrounding fluid flow. In this work we show a linear array of closely separated bio-inspired micro-electro-mechanical flow sensors whose sensing mechanism is based on a piezoresistive strain-gauge along a stress-driven cantilever beam, mimicking the biological superficial neuromasts found in the lateral line organ of fishes. Aiming to improve state-of-the-art flow sensing capability in autonomously flying and swimming robots, our artificial lateral line system was designed and developed to feature multi-parameter freestream flow measurements which provide information about (1) local flow velocities as measured by the signal amplitudes from the individual cantilevers as well as (2) propagation velocity, (3) linear forward/backward direction along the cantilever beam orientation and (4) periodicity of pulses or pulse trains determined by cross-correlating sensor signals. A real-time capable cross-correlation procedure was developed which makes it possible to extract freestream flow direction and velocity information from flow fluctuations. The computed flow velocities deviate from a commercial system by 0.09 m s(-1) at 0.5 m s(-1) and 0.15 m s(-1) at 1.0 m s(-1) flow velocity for a sampling rate of 240 Hz and a sensor distance of 38 mm. Although experiments were performed in air, the presented flow sensing system can be applied to underwater vehicles as well, once the sensors are embedded in a waterproof micro-electro-mechanical systems package.
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Affiliation(s)
- C Abels
- Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia, Arnesano (LE), I-73010, Italy. Rhine-Waal University of Applied Sciences, Faculty of Technology and Bionics, Kleve, D-47533, Germany. Università del Salento, Dipartimento di Ingegneria dell'Innovazione, Lecce (LE), I-73100, Italy
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15
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Fong CF, Dai CL, Wu CC. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. SENSORS 2015; 15:27047-59. [PMID: 26512671 PMCID: PMC4634389 DOI: 10.3390/s151027047] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/26/2015] [Revised: 10/18/2015] [Accepted: 10/20/2015] [Indexed: 11/08/2022]
Abstract
A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
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Affiliation(s)
- Chien-Fu Fong
- Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan.
| | - Ching-Liang Dai
- Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan.
| | - Chyan-Chyi Wu
- Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan.
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