Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

Cellular and biomolecular detection based on suspended microchannel resonators

Suspended microchannel resonators (SMRs) have been developed to measure the buoyant mass of single micro-/nanoparticles and cells suspended in a liquid. They have significantly improved the mass resolution with the aid of vacuum packaging and also increased measurement throughput by fast resonance frequency tracking while target objects travel through the microchannel without stopping or even slowing down. Since their invention, various biological applications have been enabled, including simultaneous measurements of cell growth and cell cycle progression, and measurements of disease associated physicochemical change, to name a few. Extension and advancement towards other promising applications with SMRs are continuously ongoing by adding multiple functionalities or incorporating other complementary analytical metrologies. In this paper, we will thoroughly review the development history, basic and advanced operations, and key applications of SMRs to introduce them to researchers working in biological and biomedical sciences who mostly rely on classical and conventional methodologies. We will also provide future perspectives and projections for SMR technologies.

A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization

CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies, requiring a challenging readout circuitry. This paper presents a transimpedance amplifier (TIA) fabricated using a commercial 0.35-µm CMOS technology specifically oriented to drive and sense monolithically integrated CMOS-MEMS resonators up to 50 MHz with a tunable transimpedance gain ranging from 112 dB to 121 dB. The output voltage noise is as low as 225 nV/Hz^1/2—input-referred current noise of 192 fA/Hz^1/2—at 10 MHz, and the power consumption is kept below 1-mW. In addition, the TIA amplifier exhibits an open-loop gain independent of the parasitic input capacitance—mostly associated with the MEMS layout—representing an advantage in MEMS testing compared to other alternatives such as Pierce oscillator schemes. The work presented includes the characterization of three types of MEMS resonators that have been fabricated and experimentally characterized both in open-loop and self-sustained configurations using the integrated TIA amplifier. The experimental characterization includes an accurate extraction of the electromechanical parameters for the three fabricated structures that enables an accurate MEMS-CMOS circuitry co-design.

Micropipette Resonator Enabling Targeted Aspiration and Mass Measurement of Single Particles and Cells

This paper reports micropipette resonators, mechanical resonator-integrated micropipettes, which enable selective aspiration and mass measurement of particles or cells suspended in liquids with two orthogonal vibration modes. A custom pipette pulling system is built to provide power-modulated linear heating on a rotating glass capillary to make an asymmetric cross section with extended uniformity.A glass capillary is stretched with the custom puller, cut within the pulled region, polished, mounted on a machined metallic jig, and then coated with a metal. As a result, a doubly clamped tube resonator-integrated micropipette is made. For simultaneous frequency readouts of two orthogonal modes, an optical pickup, originally developed for optical data storage, is configured closely above and properly aligned to the micropipette resonator and two digital phase-locked loops are employed. For mass responsivity calibration, frequency shifts of the micropipette resonator are measured with various liquids and glass microparticles. Buoyant masses of unicellular organisms, Paramecium aurelia, freely swimming in a culture dish are successfully measured with two orthogonal modes.