A One-Square-Millimeter Compact Hollow Structure for Microfluidic Pumping on an All-Glass Chip

A Review of Capillary Pressure Control Valves in Microfluidics

Microfluidics offer microenvironments for reagent delivery, handling, mixing, reaction, and detection, but often demand the affiliated equipment for liquid control for these functions. As a helpful tool, the capillary pressure control valve (CPCV) has become popular to avoid using affiliated equipment. Liquid can be handled in a controlled manner by using the bubble pressure effects. In this paper, we analyze and categorize the CPCVs via three determining parameters: surface tension, contact angle, and microchannel shape. Finally, a few application scenarios and impacts of CPCV are listed, which includes how CPVC simplify automation of microfluidic networks, work with other driving modes; make extensive use of microfluidics by open channel, and sampling and delivery with controlled manners. The authors hope this review will help the development and use of the CPCV in microfluidic fields in both research and industry.

Dielectrophoretic Crossover Frequency of Single Particles: Quantifying the Effect of Surface Functional Groups and Electrohydrodynamic Flow Drag Force

We present a comprehensive comparison of dielectrophoretic (DEP) crossover frequency of single particles determined by various experimental methods and theoretical models under the same conditions, and ensure that discrepancy due to uncertain or inconsistent material properties and electrode design can be minimized. Our experiment shows that sulfate- and carboxyl-functionalized particles have higher crossover frequencies than non-functionalized ones, which is attributed to the electric double layer (EDL). To better understand the formation of the EDL, we performed simulations to study the relationship between initial surface charge density, surface ion adsorption, effective surface conductance, and functional groups of both functionalized and nonfunctionalized particles in media with various conductivities. We also conducted detailed simulations to quantify how much error may be introduced if concurrent electrohydrodynamic forces, such as electrothermal and electro-osmotic forces, are not properly avoided during the crossover frequency measurement.

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors.