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For: Liu H, Yu Z, Liu Y, Fang X. A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines. Micromachines (Basel) 2017;8:E304. [PMID: 30400495 DOI: 10.3390/mi8100304] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/20/2017] [Revised: 10/09/2017] [Accepted: 10/10/2017] [Indexed: 11/17/2022]
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