Micro-Electromechanical Acoustic Resonator Coated with Polyethyleneimine Nanofibers for the Detection of Formaldehyde Vapor

A review of piezoelectric MEMS sensors and actuators for gas detection application

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.

Integrated sensing layer of bacterial cellulose and polyethyleneimine to achieve high sensitivity of ST-cut quartz surface acoustic wave formaldehyde gas sensor

Surface acoustic wave (SAW)-based formaldehyde gas sensor using bi-layer nanofilms of bacterial cellulose (BC) and polyethyleneimine (PEI) was developed on an ST-cut quartz substrate using sol-gel and spin coating processes. BC nanofilms significantly improve the sensitivity of PEI films to formaldehyde gas, and reduces response and recovery times. The BC films have superfine filamentary and fibrous network structures, which provide a large number of attachment sites for the PEI particles. Measurement results obtained using in situ diffuse reflectance Fourier transform infrared spectroscopy showed that the primary amino groups of PEI strongly adsorb formaldehyde molecules through nucleophilic reactions, thus resulting in a negative frequency shift of the SAW sensor due to the mass loading effect. In addition, experimental results showed that the frequency shifts of the SAW devices are determined by thickness of PEI film, concentration of formaldehyde and relative humidity. The PEI/BC sensor coated with three layers of PEI as the sensing layer showed the optimal sensing performance, which had a frequency shift of 35.6 kHz for 10 ppm formaldehyde gas, measured at room temperature and 30 % RH. The sensor also showed good selectivity and stability, with a low limit of detection down to 100 ppb.

Electrospun nanofiber from various source of expanded polystyrene (EPS) waste and their characterization as potential air filter media

This paper reported on the fabrication of nanofibrous membranes from various sources of expanded polystyrene (EPS) waste using electrospinning technique and their application as air filter media. The filter membranes were made from four EPS waste sources, i.e. food packaging, EPS craft, instant noodle cup, and electronic packaging. The properties of the membranes fabricated from those sources were compared to obtain the best EPS waste source for air filter application. To make the precursor solutions, those samples were dissolved in d-limonene:DMF with the concentration of 15, 20, and 25 wt%. The solid EPS density, solution viscosity, and surface tension were measured. The fiber diameter and morphology of nanofibers were characterized by scanning electron microscopy (SEM) for each EPS variation. The fabricated membrane properties (crystallinity, wettability, and mechanical strength) and filtration properties (pressure drop, PM_2.5 filtration efficiency, and quality factor) were fully characterized and analyzed. Homogeneous fiber diameter with various morphologies (beaded, wrinkled, and smooth fiber) were obtained from all samples with hydrophobic to super-hydrophobic surface (water contact angle ranging from 106 to 153°). Also, the EPS solid density affected the solution viscosity with the expression of η = 0.132 ρ^0.29, which then affected the fabricated membrane packing density, porosity, and mechanical properties. Overall, the experimental results showed that all EPS nanofiber filters had great potential as an air filter media. The EPS filter made from food packaging waste with the solution concentration of 15 wt% exhibited the highest efficiency and quality factor of 99.99% and 0.15 Pa^-1, respectively.

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique

This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are the stacked aluminum layers that are made using the CMOS process. The sensing material; polypyrrole/reduced graphene oxide (PPy/RGO), is synthesized using the oxidation–reduction method; and the material is characterized using an electron spectroscope for chemical analysis (ESCA), a scanning electron microscope (SEM), and high-resolution X-ray diffraction (XRD). After the CMOS process; the AGS needs post-processing to etch an oxide layer and to deposit the sensing material. The resistance of the AGS changes when it is exposed to ammonia. A non-inverting amplifier circuit converts the resistance of the AGS into a voltage signal. The AGS operates at room temperature. Experiments show that the AGS response is 4.5% at a concentration of 1 ppm NH₃; and it exhibits good repeatability. The lowest concentration that the AGS can detect is 0.1 ppm NH₃

Cabbage-shaped zinc-cobalt oxide (ZnCo2O4) sensing materials: Effects of zinc ion substitution and enhanced formaldehyde sensing properties

Exploiting chemical sensors (CSs) with high-activity sensitive materials is very important for the detection of volatile organic compounds (VOCs). Co-containing spinel oxides are potential candidates for sensing layers. However, the intrinsic activity always hinders their further progress of sensing performances such as sensitivity and selectivity. Here, a facile strategy is successfully developed for the substitution of Co cations into Zn cations in Co₃O₄ without sacrificing multi-shelled hollow structure. The synthesized cabbage-shaped ZnCo₂O₄ exhibited the enhanced formaldehyde sensing capability compared to the Co₃O₄ counterpart. The sensitivity to 100 ppm formaldehyde for ZnCo₂O₄-sensors is 7.4 at 180 °C, which is 6.2 times higher than that of Co₃O₄-sensors. In addition, the ZnCo₂O₄-sensors also show the fast response/recovery time (9/12 s) compared to Co₃O₄-sensors (55/63 s). Interestingly, Zn²⁺ introduction can facilitate the accumulation of holes and generate more defective oxygen and adsorbed oxygen effectively. Consequently, remarkably improved sensitivity, selectively and fast response/recovery process are demonstrated for the ZnCo₂O₄-based sensors. The results offer crucial insights in realization of highly sensitive spinel oxide materials for CSs.