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Li Q, Ye Z, Liu M, Liu W, Zhang P, Sun X, Zhang H, Li Z, Gui L. Precision enhanced alignment bonding technique with sacrificial strategy. Front Bioeng Biotechnol 2023; 11:1105154. [PMID: 36873376 PMCID: PMC9978516 DOI: 10.3389/fbioe.2023.1105154] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/22/2022] [Accepted: 02/06/2023] [Indexed: 02/18/2023] Open
Abstract
This work proposes an "N2-1" sacrificial strategy to help to improve the accuracy of the bonding technique from the existing level. The target micropattern is copied N2 times, and (N2-1) of them are sacrificed to obtain the most accurate alignment. Meanwhile, a method for manufacturing auxiliary solid alignment lines on transparent materials is proposed to visualize auxiliary marks and facilitate the alignment. Though the principle and procedure of alignment are straightforward, the alignment accuracy substantially improved compared to the original method. With this technique, we have successfully fabricated a high-precision 3D electroosmotic micropump just using a conventional desktop aligner. Because of the high precision during the alignment, the flow velocity is up to 435.62 μm/s at a driven voltage of 40 V, which far exceeds the previous similar reports. Thus, we believe that it has great potential for high precision microfluidic device fabrications.
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Affiliation(s)
- Qian Li
- CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.,School of Engineering Science, University of Chinese Academy of Sciences, Beijing, China
| | - Zi Ye
- CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China
| | - Mingyang Liu
- Energy Storage and Novel Technology of Electrical Engineering Department, China Electric Power Research Institute, Beijing, China
| | - Wei Liu
- Energy Storage and Novel Technology of Electrical Engineering Department, China Electric Power Research Institute, Beijing, China
| | - Pan Zhang
- CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.,School of Future Technology, University of Chinese Academy of Sciences, Beijing, China
| | - Xiao Sun
- CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.,School of Future Technology, University of Chinese Academy of Sciences, Beijing, China
| | - Huimin Zhang
- CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.,School of Engineering Science, University of Chinese Academy of Sciences, Beijing, China
| | - Zhenming Li
- Energy Storage and Novel Technology of Electrical Engineering Department, China Electric Power Research Institute, Beijing, China
| | - Lin Gui
- CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.,School of Future Technology, University of Chinese Academy of Sciences, Beijing, China
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