Fabrication of Low Cost and Low Temperature Poly-Silicon Nanowire Sensor Arrays for Monolithic Three-Dimensional Integrated Circuits Applications

Ultrasensitive Silicon Nanowire Biosensor with Modulated Threshold Voltages and Ultra-Small Diameter for Early Kidney Failure Biomarker Cystatin C

Acute kidney injury (AKI) is a frequently occurring severe disease with high mortality. Cystatin C (Cys-C), as a biomarker of early kidney failure, can be used to detect and prevent acute renal injury. In this paper, a biosensor based on a silicon nanowire field-effect transistor (SiNW FET) was studied for the quantitative detection of Cys-C. Based on the spacer image transfer (SIT) processes and channel doping optimization for higher sensitivity, a wafer-scale, highly controllable SiNW FET was designed and fabricated with a 13.5 nm SiNW. In order to improve the specificity, Cys-C antibodies were modified on the oxide layer of the SiNW surface by oxygen plasma treatment and silanization. Furthermore, a polydimethylsiloxane (PDMS) microchannel was involved in improving the effectiveness and stability of detection. The experimental results show that the SiNW FET sensors realize the lower limit of detection (LOD) of 0.25 ag/mL and have a good linear correlation in the range of Cys-C concentration from 1 ag/mL to 10 pg/mL, exhibiting its great potential in the future real-time application.

Polyethylene Glycol Functionalized Silicon Nanowire Field-Effect Transistor Biosensor for Glucose Detection

Accurate monitoring of blood glucose levels is crucial for the diagnosis of diabetes patients. In this paper, we proposed a simple "mixed-catalyzer layer" modified silicon nanowire field-effect transistor biosensor that enabled direct detection of glucose with low-charge in high ionic strength solutions. A stable screening system was established to overcome Debye screening effect by forming a porous biopolymer layer with polyethylene glycol (PEG) modified on the surface of SiNW. The experimental results show that when the optimal ratio (APTMS:silane-PEG = 2:1) modified the surface of silicon nanowires, glucose oxidase can detect glucose in the concentration range of 10 nM to 10 mM. The sensitivity of the biosensor is calculated to be 0.47 μAcm^-2mM^-1, its fast response time not exceeding 8 s, and the detection limit is up to 10 nM. This glucose sensor has the advantages of high sensitivity, strong specificity and fast real-time response. Therefore, it has a potential clinical application prospect in disease diagnosis.

Acrylamide Hydrogel-Modified Silicon Nanowire Field-Effect Transistors for pH Sensing

In this study, we report a pH-responsive hydrogel-modified silicon nanowire field-effect transistor for pH sensing, whose modification is operated by spin coating, and whose performance is characterized by the electrical curve of field-effect transistors. The results show that the hydrogel sensor can measure buffer pH in a repeatable and stable manner in the pH range of 3–13, with a high pH sensitivity of 100 mV/pH. It is considered that the swelling of hydrogel occurring in an aqueous solution varies the dielectric properties of acrylamide hydrogels, causing the abrupt increase in the source-drain current. It is believed that the design of the sensor can provide a promising direction for future biosensing applications utilizing the excellent biocompatibility of hydrogels.

A FRET Fluorescent Sensor for Ratiometric and Visual Detection of Sulfide Based on Carbon Dots and Silver Nanoclusters

In this work, the fluorescent sensor based on fluorescence resonance energy transfer (FRET) and electrostatic interaction (EI) was prepared for the ratiometric and visual detecting S^2-. The FRET fluorescent sensor consists of two fluorophores, with carbon dots (CDs) as energy donors and silver nanoclusters (Ag NCs) as acceptors. At 390 nm excitation, CDs and Ag NCs showed two well-separated peaks at 445 nm and 660 nm, separately. The existence of S^2- caused the red fluorescence at 660 nm to be quenched, whereas the blue fluorescence at 445 nm was restored, and the fluorescence color of the ratiometric sensor changed from pink to blue. It could be employed in ratiometric and visual detecting S^2-. The linear range of quantitative detection S^2- was 0.5-100 μM, and its detection limit was 0.35 μM. CDs-Ag NCs could be used for detecting S^2- in mineral water and tap water. The results showed that the FRET ratiometric fluorescent sensor exhibits good anti-interference and high selectivity for detecting S^2- in environmental water samples.

Effects of Buffer Concentration on the Sensitivity of Silicon Nanobelt Field-Effect Transistor Sensors

In this work, a single-crystalline silicon nanobelt field-effect transistor (SiNB FET) device was developed and applied to pH and biomolecule sensing. The nanobelt was formed using a local oxidation of silicon technique, which is a self-aligned, self-shrinking process that reduces the cost of production. We demonstrated the effect of buffer concentration on the sensitivity and stability of the SiNB FET sensor by varying the buffer concentrations to detect solution pH and alpha fetoprotein (AFP). The SiNB FET sensor was used to detect a solution pH ranging from 6.4 to 7.4; the response current decreased stepwise as the pH value increased. The stability of the sensor was examined through cyclical detection under solutions with different pH; the results were stable and reliable. A buffer solution of varying concentrations was employed to inspect the sensing capability of the SiNB FET sensor device, with the results indicating that the sensitivity of the sensor was negatively dependent on the buffer concentration. For biomolecule sensing, AFP was sensed to test the sensitivity of the SiNB FET sensor. The effectiveness of surface functionalization affected the AFP sensing result, and the current shift was strongly dependent on the buffer concentration. The obtained results demonstrated that buffer concentration plays a crucial role in terms of the sensitivity and stability of the SiNB FET device in chemical and biomolecular sensing.