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Anang FEB, Wei X, Xu J, Cain M, Li Z, Brand U, Peiner E. Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting. MICROMACHINES 2024; 15:261. [PMID: 38398989 PMCID: PMC10892005 DOI: 10.3390/mi15020261] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/26/2024] [Revised: 02/06/2024] [Accepted: 02/07/2024] [Indexed: 02/25/2024]
Abstract
In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of -6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm3, independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm2 NW array area in the range of 20 to 90 nN.
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Affiliation(s)
- Frank Eric Boye Anang
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
- Scientific Metrology Department, Ghana Standards Authority, Accra P.O. Box MB 245, Ghana
| | - Xuanwei Wei
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
| | - Jiushuai Xu
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
| | - Markys Cain
- Electrosciences Ltd., Farnham, Surrey GU9 9QT, UK;
| | - Zhi Li
- Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany; (Z.L.); (U.B.)
| | - Uwe Brand
- Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany; (Z.L.); (U.B.)
| | - Erwin Peiner
- Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany; (X.W.); (J.X.); (E.P.)
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Chrystie RSM. A Review on 1-D Nanomaterials: Scaling-Up with Gas-Phase Synthesis. CHEM REC 2023; 23:e202300087. [PMID: 37309743 DOI: 10.1002/tcr.202300087] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/06/2023] [Revised: 05/04/2023] [Indexed: 06/14/2023]
Abstract
Nanowire-like materials exhibit distinctive properties comprising optical polarisation, waveguiding, and hydrophobic channelling, amongst many other useful phenomena. Such 1-D derived anisotropy can be further enhanced by arranging many similar nanowires into a coherent matrix, known as an array superstructure. Manufacture of nanowire arrays can be scaled-up considerably through judicious use of gas-phase methods. Historically, the gas-phase approach however has been extensively used for the bulk and rapid synthesis of isotropic 0-D nanomaterials such as carbon black and silica. The primary goal of this review is to document recent developments, applications, and capabilities in gas-phase synthesis methods of nanowire arrays. Secondly, we elucidate the design and use of the gas-phase synthesis approach; and finally, remaining challenges and needs are addressed to advance this field.
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Affiliation(s)
- Robin S M Chrystie
- Department of Chemical Engineering, King Fahd University of Petroleum & Minerals, KFUPM Box 5050, Dhahran, 31261, Saudi Arabia
- IRC for Membranes & Water Security, King Fahd University of Petroleum & Minerals, KFUPM Box 5051, Dhahran, 31261, Saudi Arabia
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Consonni V. ZnO Nanowires: Growth, Properties, and Energy Applications. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2519. [PMID: 37764547 PMCID: PMC10535177 DOI: 10.3390/nano13182519] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/24/2023] [Accepted: 08/25/2023] [Indexed: 09/29/2023]
Abstract
As a biocompatible semiconductor composed of abundant elements, ZnO, in the form of nanowires, exhibits remarkable properties, mainly originating from its wurtzite structure and correlated with its high aspect ratio at nanoscale dimensions [...].
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Affiliation(s)
- Vincent Consonni
- Université Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38016 Grenoble, France
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Jalabert T, Pusty M, Mouis M, Ardila G. Investigation of the diameter-dependent piezoelectric response of semiconducting ZnO nanowires by Piezoresponse Force Microscopy and FEM simulations. NANOTECHNOLOGY 2023; 34:115402. [PMID: 36595314 DOI: 10.1088/1361-6528/acac35] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/19/2022] [Accepted: 12/16/2022] [Indexed: 06/17/2023]
Abstract
Semiconducting piezoelectric nanowires (NWs) are promising candidates to develop highly efficient mechanical energy transducers made of biocompatible and non-critical materials. The increasing interest in mechanical energy harvesting makes the investigation of the competition between piezoelectricity, free carrier screening and depletion in semiconducting NWs essential. To date, this topic has been scarcely investigated because of the experimental challenges raised by the characterization of the direct piezoelectric effect in these nanostructures. Here we get rid of these limitations using the piezoresponse force microscopy technique in DataCube mode and measuring the effective piezoelectric coefficient through the converse piezoelectric effect. We demonstrate a sharp increase in the effective piezoelectric coefficient of vertically aligned ZnO NWs as their radius decreases. We also present a numerical model which quantitatively explains this behavior by taking into account both the dopants and the surface traps. These results have a strong impact on the characterization and optimization of mechanical energy transducers based on vertically aligned semiconducting NWs.
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Affiliation(s)
- Thomas Jalabert
- Univ. Grenoble Alpes, CNRS, Grenoble INP, IMEP-LaHC, F-38000 Grenoble, France
| | - Manojit Pusty
- Univ. Grenoble Alpes, CNRS, Grenoble INP, IMEP-LaHC, F-38000 Grenoble, France
| | - Mireille Mouis
- Univ. Grenoble Alpes, CNRS, Grenoble INP, IMEP-LaHC, F-38000 Grenoble, France
| | - Gustavo Ardila
- Univ. Grenoble Alpes, CNRS, Grenoble INP, IMEP-LaHC, F-38000 Grenoble, France
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Bah M, Tlemcani TS, Boubenia S, Justeau C, Vivet N, Chauveau JM, Jomard F, Nadaud K, Poulin-Vittrant G, Alquier D. Assessing the electrical activity of individual ZnO nanowires thermally annealed in air. NANOSCALE ADVANCES 2022; 4:1125-1135. [PMID: 36131772 PMCID: PMC9417669 DOI: 10.1039/d1na00860a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/11/2021] [Accepted: 12/31/2021] [Indexed: 06/15/2023]
Abstract
ZnO nanowires (NWs) are very attractive for a wide range of nanotechnological applications owing to their tunable electron concentration via structural and surface defect engineering. A 2D electrical profiling of these defects is necessary to understand their restructuring dynamics during engineering processes. Our work proposes the exploration of individual ZnO NWs, dispersed on a SiO2/p++-Si substrate without any embedding matrix, along their axial direction using scanning capacitance microscopy (SCM), which is a useful tool for 2D carrier profiling. ZnO NWs are hydrothermally grown using 0-20 mM ammonium hydroxide (NH4OH), one of the reactants of the hydrothermal synthesis, and then annealed in a tube oven at 350 °C/1.5-15 h and 450 °C/15 h. While the as-grown ZnO NWs are highly conductive, the annealed ones exhibit significant SCM data with a high signal-to-noise ratio and temperature-dependent uniformity. The SCM signal of ZnO NWs is influenced by both their reduced dimensionality and the electron screening degree inside them. The electrical activity of ZnO NWs is only observed below a critical defect concentration that depends on the annealing temperature. Optimal SCM signals of 200 and 147 mV are obtained for samples with 0 and 20 mM NH4OH, respectively, and annealed at 350 °C/15 h. The corresponding electron concentrations of 3.27 × 1018 and 4.58 × 1018 cm-3 were estimated from the calibration curve, respectively. While thermal treatment in air of ZnO NWs is an effective approach to tune the defect density, 2D electrical mapping enables identifying their optimal electrical characteristics, which could help to boost the performance of final devices exploiting their coupled semiconducting-piezoelectric properties.
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Affiliation(s)
- Micka Bah
- GREMAN UMR 7347, Université de Tours, CNRS, INSA Centre Val de Loire 37071 Tours France
| | | | - Sarah Boubenia
- GREMAN UMR 7347, Université de Tours, CNRS, INSA Centre Val de Loire 37071 Tours France
| | - Camille Justeau
- GREMAN UMR 7347, Université de Tours, CNRS, INSA Centre Val de Loire 37071 Tours France
| | - Nicolas Vivet
- STMicroelectronics Tours 10 Rue Thalès de Milet 37100 Tours France
| | - Jean-Michel Chauveau
- Université Cote d'azur, CNRS, CRHEA Rue B. Gregory F-06560 Valbonne France
- Université Paris-Saclay, Université Versailles-Saint-Quentin, CNRS, GEMAC 78035 Versailles France
| | - François Jomard
- Université Paris-Saclay, Université Versailles-Saint-Quentin, CNRS, GEMAC 78035 Versailles France
| | - Kevin Nadaud
- GREMAN UMR 7347, Université de Tours, CNRS, INSA Centre Val de Loire 37071 Tours France
| | | | - Daniel Alquier
- GREMAN UMR 7347, Université de Tours, CNRS, INSA Centre Val de Loire 37071 Tours France
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Characterizing and Optimizing Piezoelectric Response of ZnO Nanowire/PMMA Composite-Based Sensor. NANOMATERIALS 2021; 11:nano11071712. [PMID: 34209678 PMCID: PMC8305847 DOI: 10.3390/nano11071712] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/24/2021] [Revised: 06/16/2021] [Accepted: 06/25/2021] [Indexed: 11/27/2022]
Abstract
Due to the outstanding coupling between piezoelectric and semiconducting properties of zinc oxide nanowires, ZnO NW-based structures have been demonstrating promising potential with respect to their applicability in piezoelectric, piezotronic and piezo-phototronic devices. Particularly considering their biocompatibility and biosafety for applications regarding implantable medical detection, this paper proposed a new concept of piezoelectric composite, i.e., one consisting of vertically aligned ZnO NW arrays and an insulating polymer matrix. First, the finite element method (FEM) was employed to drive optimization strategies through adjustment of the key parameters such as Young’s modules and the dielectric constant of the dielectric constituents, together with the density and dimension of nanowire (NW) itself. Second, to investigate the functionality of each individual layer of composite, different designed structures were fabricated and characterized in terms of electrical and piezoelectric properties. Next, experimental and simulation tests were performed, indicating that the decreasing thickness of the top poly(methyl methacrylate) layer (PMMA) can substantially enhance the piezoelectric sensitivity of the ZnO NW composite. Besides the further benefit of no polarization being needed, our material has a comparable charge coefficient (d33) with respect to other lead-free alternatives (e.g., BaTiO3), confirming the high sensing abilities of the developed structure based on vertically aligned ZnO NW arrays. Finally, a time-varying model combining piezoelectricity and electric circuit modules was investigated in detail, giving rise to an estimation of the d33 coefficient for ZnO NWs. Based on this study, the developed material is revealed to be highly promising in medical applications, particularly regarding the FFR technique, where coronary pressure can be measured through a piezoelectric sensor.
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