Research Progress of Graphene Nano-Electromechanical Resonant Sensors—A Review.
MICROMACHINES 2022;
13:mi13020241. [PMID:
35208365 PMCID:
PMC8876833 DOI:
10.3390/mi13020241]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/14/2022] [Revised: 01/24/2022] [Accepted: 01/26/2022] [Indexed: 02/01/2023]
Abstract
Graphene nano-electromechanical resonant sensors have wide application in areas such as seawater desalination, new energy, biotechnology, and aerospace due to their small size, light weight, and high sensitivity and resolution. This review first introduces the physical and chemical properties of graphene and the research progress of four preparation processes of graphene. Next, the principle prototype of graphene resonators is analyzed, and three main methods for analyzing the vibration characteristics of a graphene resonant sheet are described: molecular structural mechanics, non-local elastic theory and molecular dynamics. Then, this paper reviews research on graphene resonator preparation, discussing the working mechanism and research status of the development of graphene resonant mass sensors, pressure sensors and inertial sensors. Finally, the difficulties in developing graphene nano-electromechanical resonant sensors are outlined and the future trend of these sensors is described.
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