Design of Tunable Terahertz Metamaterial Sensor with Single- and Dual-Resonance Characteristic

Nonlinear dynamics of a single-gap terahertz split-ring resonator under electromagnetic radiation

Research into metasurfaces is developing rapidly and is topical due to their importance and applications in various fields such as communications, cryptography, and sensing, to name a few. These materials are artificially engineered to manipulate/control electromagnetic (EM) waves, in order to present a particular functionality. In this regard, nonlinear metasurfaces may present particular functionalities that remain to be discovered. In this paper, we numerically investigate the dynamic behaviors caused by the motion of charge carriers under the intense EM field at the gap of a single nonlinear split-ring resonator (NSRR) in the terahertz (THz) frequency range. We derive the mathematical model that is used to examine the excitation properties of the NSRR and then demonstrate various tuning regions. Analysis of the two-dimensional parameter space reveals that the NSRR exhibits periodic, chaotic patterns as the amplitude of the excitation field and the loss parameter vary. However, this chaotic behavior disappears when the loss parameter is very large. The period doubling that confirms the transition between the periodic and chaotic modes is explored using the bifurcation diagram. The sensitivity of the initial conditions is examined on three dynamic region plots. Our results correctly demonstrate that the NSRR exhibits the attractive phenomenon of multistability. The coexistence of two stable states is studied and confirmed on the basin of attractions for a fixed set of amplitude or loss parameters. The energy balance of the proposed model is well analyzed on the dynamic states and parameters to characterize the different oscillation regimes. The study of the multistability in the work represents an important first step toward the development of photonic memory devices in the THz frequency range.

Design of a Penta-Band Graphene-Based Terahertz Metamaterial Absorber with Fine Sensing Performance

This paper presents a new theoretical proposal for a surface plasmon resonance (SPR) terahertz metamaterial absorber with five narrow absorption peaks. The overall structure comprises a sandwich stack consisting of a gold bottom layer, a silica medium, and a single-layer patterned graphene array on top. COMSOL simulation represents that the five absorption peaks under TE polarization are at fI = 1.99 THz (95.82%), fⅡ = 6.00 THz (98.47%), fⅢ = 7.37 THz (98.72%), fⅣ = 8.47 THz (99.87%), and fV = 9.38 THz (97.20%), respectively, which is almost consistent with the absorption performance under TM polarization. In contrast to noble metal absorbers, its absorption rates and resonance frequencies can be dynamically regulated by controlling the Fermi level and relaxation time of graphene. In addition, the device can maintain high absorptivity at 0~50° in TE polarization and 0~40° in TM polarization. The maximum refractive index sensitivity can reach SV = 1.75 THz/RIU, and the maximum figure of merit (FOM) can reach FOMV = 12.774 RIU-1. In conclusion, our design has the properties of dynamic tunability, polarization independence, wide-incident-angle absorption, and fine refractive index sensitivity. We believe that the device has potential applications in photodetectors, active optoelectronic devices, sensors, and other related fields.

Multi-functional device: manipulating linear and circular-polarization conversion in a terahertz chiral metamaterial

We propose a terahertz chiral metamaterial as a multi-functional device to manipulate asymmetry transmission of linear polarized waves, linear-to-elliptical polarization conversion and circular dichroism in transmission mode while asymmetry reflection of circular polarized waves. For incidence of linear polarized waves, dual-band asymmetry transmission is shown around 0.42 THz and 1.04 THz where asymmetry transmission factors reach up to two peak values: ∼0.51 and ∼0.55, respectively. Intense linear-to-elliptical polarization conversion occurs at 0.81 THz and 0.97 THz, respectively. For incidence of circular polarized waves, a strong circular dichroism appears at 0.36 THz where circular dichroism parameter reaches to ∼0.64 and asymmetry reflection is displayed around 0.36 THz with the maximum of asymmetry reflection factors approaching to 0.55.

Metasurface-Assisted Terahertz Sensing

Terahertz (THz) waves, which fall between microwaves and infrared bands, possess intriguing electromagnetic properties of non-ionizing radiation, low photon energy, being highly sensitive to weak resonances, and non-polar material penetrability. Therefore, THz waves are extremely suitable for sensing and detecting chemical, pharmaceutical, and biological molecules. However, the relatively long wavelength of THz waves (30~3000 μm) compared to the size of analytes (1~100 nm for biomolecules, <10 μm for microorganisms) constrains the development of THz-based sensors. To circumvent this problem, metasurface technology, by engineering subwavelength periodic resonators, has gained a great deal of attention to enhance the resonance response of THz waves. Those metasurface-based THz sensors exhibit high sensitivity for label-free sensing, making them appealing for a variety of applications in security, medical applications, and detection. The performance of metasurface-based THz sensors is controlled by geometric structure and material parameters. The operating mechanism is divided into two main categories, passive and active. To have a profound understanding of these metasurface-assisted THz sensing technologies, we review and categorize those THz sensors, based on their operating mechanisms, including resonators for frequency shift sensing, nanogaps for enhanced field confinement, chirality for handedness detection, and active elements (such as graphene and MEMS) for advanced tunable sensing. This comprehensive review can serve as a guideline for future metasurfaces design to assist THz sensing and detection.

Ultrasensitive optical modulation in hybrid metal-perovskite and metal-graphene metasurface THz devices

Implementation of efficient terahertz (THz) wave control is essential for THz technology development for applications including sixth-generation communications and THz sensing. Therefore, realization of tunable THz devices with large-scale intensity modulation capabilities is highly desirable. By integrating perovskite and graphene with a metallic asymmetric metasurface, two ultrasensitive devices for dynamic THz wave manipulation through low-power optical excitation are demonstrated experimentally here. The perovskite-based hybrid metadevice offers ultrasensitive modulation with a maximum modulation depth for the transmission amplitude reaching 190.2% at the low optical pump power of 5.90 mW/cm². Additionally, a maximum modulation depth of 227.11% is achieved in the graphene-based hybrid metadevice at a power density of 18.87 mW/cm². This work paves the way toward design and development of ultrasensitive devices for optical modulation of THz waves.

Specific detection of n-propanol gas via terahertz metasurface sensor modified by molecularly imprinted polymer

As an organic substance, n-propanol gas has been paid attention to in environmental monitoring and exhalation of lung cancer patient. In this paper a rapid detection method for n-propanol gas is developed based on molecularly imprinted polymers (MIP) and terahertz (THz) metasurface sensors. We first prepared a MIP suitable for detecting the n-propanol gas. And then the n-propanol MIP was modified to the THz metasurface sensor for detecting the n-propanol gas. Since the MIP adsorbed with n-propanol changes the dielectric environment of the sensor, the resonance frequency of the sensor also change. So we based on the n-propanol concentration was analyzed according to the change in resonance frequency. The experimental results showed that the sensor can effectively detect the n-propanol concentration in the range of 50-500 ppm (parts per million). In addition, we also verified the specificity and repeatability of the sensor. This work provides a new idea and method for the sensitive and specific detection of n-propanol gas.

Triple-Band Surface Plasmon Resonance Metamaterial Absorber Based on Open-Ended Prohibited Sign Type Monolayer Graphene

This paper introduces a novel metamaterial absorber based on surface plasmon resonance (SPR). The absorber is capable of triple-mode perfect absorption, polarization independence, incident angle insensitivity, tunability, high sensitivity, and a high figure of merit (FOM). The structure of the absorber consists of a sandwiched stack: a top layer of single-layer graphene array with an open-ended prohibited sign type (OPST) pattern, a middle layer of thicker SiO₂, and a bottom layer of the gold metal mirror (Au). The simulation of COMSOL software suggests it achieves perfect absorption at frequencies of f_I = 4.04 THz, f_II = 6.76 THz, and f_III = 9.40 THz, with absorption peaks of 99.404%, 99.353%, and 99.146%, respectively. These three resonant frequencies and corresponding absorption rates can be regulated by controlling the patterned graphene's geometric parameters or just adjusting the Fermi level (E_F). Additionally, when the incident angle changes between 0~50°, the absorption peaks still reach 99% regardless of the kind of polarization. Finally, to test its refractive index sensing performance, this paper calculates the results of the structure under different environments which demonstrate maximum sensitivities in three modes: S_I = 0.875 THz/RIU, S_II = 1.250 THz/RIU, and S_III = 2.000 THz/RIU. The FOM can reach FOM_I = 3.74 RIU^-1, FOM_II = 6.08 RIU^-1, and FOM_III = 9.58 RIU^-1. In conclusion, we provide a new approach for designing a tunable multi-band SPR metamaterial absorber with potential applications in photodetectors, active optoelectronic devices, and chemical sensors.

Electric Split-Ring Metamaterial Based Microfluidic Chip with Multi-Resonances for Microparticle Trapping and Chemical Sensing Applications

In this work, an integration of terahertz (THz) electrical split-ring metamaterial (eSRM) with microfluidic chip is presented. This eSRM-based microfluidic chip exhibits multiple resonances in the THz spectrum and trapping selectively microparticle size characteristics. The arrangement of eSRM array is dislocation. It generates the fundamental inductive-capacitive (LC) resonant mode, quadrupole, and octupolar plasmon resonant modes and then exhibits high sensitivity to the environmental refraction index. The trapping structures of microparticles are elliptical barricades on eSRM surface. Thus, the electric field energy is strongly confined within the gap of eSRM in transverse electric (TE) mode and then the elliptical trapping structures are anchored on both sides of the split gap to ensure the microparticles can be trapped and located on the gap. To imitate the microparticle sensing ambient environment qualitatively and quantitatively in the THz spectrum, the microparticles are designed different feature sizes with different refraction index from 1.0 to 2.0 in ethanol medium. The results show the proposed eSRM-based microfluidic chip possesses the trapping and sensing abilities in single microparticle and high sensitivity for fungus, microorganism, chemical and environmental applications.

Reconfigurable Split Ring Resonators by MEMS-Driven Geometrical Tuning

A novel approach for dynamic microwave modulation is proposed in the form of reconfigurable resonant circuits. This result is obtained through the monolithic integration of double split ring resonators (DSRRs) with microelectromechanical actuators (MEMS) for geometrical tuning. Two configurations were analyzed to achieve a controlled deformation of the DSRRs' metamaterial geometry by mutual rotation or extrusion along the azimuthal direction of the two constituent rings. Then, the transfer function was numerically simulated for a reconfigurable MEMS-DSRR hybrid architecture where the DSRR is embedded onto a realistic piezo actuator chip. In this case, a 370 MHz resonance frequency shift was obtained under of a 170 µm extrusion driven by a DC voltage. These characteristics in combination with a high Q factor and dimensions compatible with standard CMOS manufacturing techniques provide a step forward for the production of devices with applications in multiband telecommunications and wireless power transfer and in the IoT field.

Dirac semimetal and an all dielectric based tunable ultrasensitive terahertz sensor with multiple bound states in the continuum

Herein, we propose an all dielectric, open-slit, U-shaped resonant arm-based metasurface that achieves three bound states in the continuum (BIC) in the high-frequency terahertz band whose quasi-BIC (QBIC) states can achieve Q factor of the magnitude order of 10⁴. The maximum sensitivities of accidental QBIC and the figure-of-merit were respectively equal to 1717 GHz/RIU and 16670. Furthermore, the dependencies of the three QBICs on the THz incidence angle were different. Finally, the tunable sensor based on the Dirac semimetal metasurface achieves active tuning of the sensitivity and sensing range. This overcomes the shortcomings of the fixed structure without tuning capabilities, and provides a broad applicability platform for THz sensors.

Highly Sensitive Dual-Band Terahertz Metamaterial Absorber for Biomedical Applications: Simulation and Experiment

In this paper, a terahertz (THz) metamaterial absorber (MTMA), incorporating surface Pythagorean tree fractal resonators, was designed and experimentally fabricated on the flexible substrate of polyethylene terephthalate. The design presented two peaks with strong absorption of more than 97% at 0.49 and 0.69 THz. The dual-band absorption peaks were seen to be shifted with the change in the refractive index of the surrounding medium, with a corresponding sensitivity of 0.0968 and 0.1182 THz/RIU. The spectral shift of the reflection resonance dip was utilized as an assessment index to evaluate the sensing performance of the new structure, and it was found to be 2.08 and 2.98 for the two resonance peaks, respectively. It was observed that the proposed structure acted as an epsilon negative material at the first resonance and as a mu negative material at the second resonance. Further investigations on the electric field, magnetic field, and surface current distributions were carried out to elaborate on the absorption characteristics at various resonance frequencies. The proposed sensor is a highly sensitive MTMA which can be used to investigate the interaction of matter with THz waves.

Scalable Fabrication of Nanogratings on GaP for Efficient Diffraction of Near-Infrared Pulses and Enhanced Terahertz Generation by Optical Rectification

We present a process flow for wafer-scale fabrication of a surface phase grating with sub-micron feature sizes from a single semiconductor material. We demonstrate this technique using a 110-oriented GaP semiconductor wafer with second-order nonlinearity to obtain a nanostructured device (800 nm lateral feature size and a 245 nm height modulation) with applications relevant to near-infrared optical diffraction and time-resolved terahertz (THz) technologies. The fabrication process involves a plasma-enhanced chemical deposition of a SiO2 layer on the wafer followed by contact photolithography and inductively coupled plasma reactive ion etching (ICP-RIE). We discuss the required radiation dosage, exposure times, temperatures and other key parameters to achieve high-quality nanogratings in terms of filling ratio, edge profile, and overall shape. The phase-grating properties, such as the pitch, spatial homogeneity, and phase retardation, are characterized with an atomic force microscope, scanning electron microscope and a non-invasive optical evaluation of the optical diffraction efficiency into different orders. We demonstrate an application of this device in a time-domain THz spectroscopy scheme, where an enhanced THz spectral bandwidth is achieved by optical rectification of near-infrared laser pulses incident on the grating and efficiently diffracted into the first orders. Finally, the reported process flow has the potential to be applied to various materials by considering only slight adjustments to the ICP-RIE etching steps, paving the way to scalable fabrication of sub-micron patterns on a large range of substrates.

Modified Coptic Cross Shaped Split-Ring Resonator Based Negative Permittivity Metamaterial for Quad Band Satellite Applications with High Effective Medium Ratio

This research article describes a modified Coptic cross shaped split ring resonator (SRR) based metamaterial that exhibits a negative permittivity and refractive index with a permeability of nearly zero. The metamaterial unit cell consists of an SRR and modified Coptic cross shaped resonator providing quadruple resonance frequency at 2.02, 6.985, 9.985 and 14.425 GHz with the magnitude of −29.45, −25.44, −19.05, and −24.45 dB, respectively. The unit cell that was fabricated on a FR-4 substrate with a thickness of 1.6 mm has an electrical dimension of 0.074λ × 0.074λ; the wavelength (λ) is computed at the frequency of 2.02 GHz. The computer simulation technology (CST) microwave studio was employed to determine the scattering parameters and their effective medium properties, i.e., permittivity, permeability and refractive index, also calculated based on NRW (Nicolson–Ross–Weir) method through the implementation of MATLAB code. The frequency range of 2.02–2.995 GHz, 6.985–7.945 GHz, 9.985–10.6 GHz, and 14.425–15.445 GHz has been found for negative permittivity. An effective medium ratio (EMR) of 13.50 at 2.02 GHz shows that the proposed unit cell is compact and effective. The lumped component based equivalent circuit model is used to validate with simulation results. The proposed unit cell and its array were fabricated for experimental verification. The results show that the simulation result using CST and high-frequency structure simulator (HFSS) simulator, equivalent circuit model result using advanced design system (ADS) simulator and measurement results match each other better. Its near zero permeability, negative permittivity, negative refractive index, high EMR and simple unit cell design allow the proposed metamaterial to be used for S-, C-, X- and Ku-band satellite applications.

High-FOM Temperature Sensing Based on Hg-EIT-Like Liquid Metamaterial Unit

High-performance temperature sensing is a key technique in modern Internet of Things. However, it is hard to attain a high precision while achieving a compact size for wireless sensing. Recently, metamaterials have been proposed to design a microwave, wireless temperature sensor, but precision is still an unsolved problem. By combining the high-quality factor (Q-factor) feature of a EIT-like metamaterial unit and the large temperature-sensing sensitivity performance of liquid metals, this paper designs and experimentally investigates an Hg-EIT-like metamaterial unit block for high figure-of-merit (FOM) temperature-sensing applications. A measured FOM of about 0.68 is realized, which is larger than most of the reported metamaterial-inspired temperature sensors.

Reconfigurable terahertz metamaterials: From fundamental principles to advanced 6G applications

Terahertz (THz) electromagnetic spectrum ranging from 0.1THz to 10THz has become critical for sixth generation (6G) applications, such as high-speed communication, fingerprint chemical sensing, non-destructive biosensing, and bioimaging. However, the limited response of naturally existing materials THz waves has induced a gap in the electromagnetic spectrum, where a lack of THz functional devices using natural materials has occurred in this gap. Metamaterials, artificially composed structures that can engineer the electromagnetic properties to manipulate the waves, have enabled the development of many THz devices, known as "metadevices". Besides, the tunability of THz metadevices can be achieved by tunable structures using microelectromechanical system (MEMS) technologies, as well as tunable materials including phase change materials (PCMs), electro-optical materials (EOMs), and thermo-optical materials (TOMs). Leveraging various tuning mechanisms together with metamaterials, tremendous research works have demonstrated reconfigurable functional THz devices, playing an important role to fill the THz gap toward the 6G applications. This review introduces reconfigurable metadevices from fundamental principles of metamaterial resonant system to the design mechanisms of functional THz metamaterial devices and their related applications. Moreover, we provide perspectives on the future development of THz photonic devices for state-of-the-art applications.

Actively MEMS-Based Tunable Metamaterials for Advanced and Emerging Applications

In recent years, tunable metamaterials have attracted intensive research interest due to their outstanding characteristics, which are dependent on the geometrical dimensions rather than the material composition of the nanostructure. Among tuning approaches, micro-electro-mechanical systems (MEMS) is a well-known technology that mechanically reconfigures the metamaterial unit cells. In this study, the development of MEMS-based metamaterial is reviewed and analyzed based on several types of actuators, including electrothermal, electrostatic, electromagnetic, and stretching actuation mechanisms. The moveable displacement and driving power are the key factors in evaluating the performance of actuators. Therefore, a comparison of actuating methods is offered as a basic guideline for selecting micro-actuators integrated with metamaterial. Additionally, by exploiting electro-mechanical inputs, MEMS-based metamaterials make possible the manipulation of incident electromagnetic waves, including amplitude, frequency, phase, and the polarization state, which enables many implementations of potential applications in optics. In particular, two typical applications of MEMS-based tunable metamaterials are reviewed, i.e., logic operation and sensing. These integrations of MEMS with metamaterial provide a novel route for the enhancement of conventional optical devices and exhibit great potentials in innovative applications, such as intelligent optical networks, invisibility cloaks, photonic signal processing, and so on.

Double Narrow Fano Resonances via Diffraction Coupling of Magnetic Plasmon Resonances in Embedded 3D Metamaterials for High-Quality Sensing

We theoretically demonstrate an approach to generate the double narrow Fano resonances via diffraction coupling of magnetic plasmon (MP) resonances by embedding 3D metamaterials composed of vertical Au U-shaped split-ring resonators (VSRRs) array into a dielectric substrate. Our strategy offers a homogeneous background allowing strong coupling between the MP resonances of VSRRs and the two surface collective optical modes of a periodic array resulting from Wood anomaly, which leads to two narrow hybridized MP modes from the visible to near-infrared regions. In addition, the interaction effects in the VSRRs with various geometric parameters are also systematically studied. Owing to the narrow hybrid MP mode being highly sensitive to small changes in the surrounding media, the sensitivity and the figure of merit (FoM) of the embedded 3D metamaterials with fabrication feasibility were as high as 590 nm/RIU and 104, respectively, which holds practical applications in label-free biosensing, such as the detection of medical diagnoses and sport doping drugs.

A highly stable and sensitive ethanol sensor based on Ru-decorated 1D WO3 nanowires

Decorating materials with noble metal catalysts is an effective method for optimizing the sensing performance of sensors based on tungsten trioxide (WO₃) nanowires. Ruthenium (Ru) exhibits excellent catalytic activity for oxygen adsorption/desorption and chemical reactions between gases and adsorbed oxygen. Herein, small Ru nanoparticles were uniformly distributed on the surface of one-dimensional WO₃ nanowires. The nanowires were prepared by the electrospinning method through an ultraviolet (UV) irradiation process, and decoration with Ru did not change their morphology. A sensor based on 4% Ru nanowires (NWs) shows the highest response (∼120) to 100 ppm ethanol, which was increased around 47 times, and the lowest ethanol detection limit (221 ppb) at a lower temperature (200 °C) displays outstanding repeatability and stability even after 45 days or in higher-humidity conditions. Moreover, it also has faster response–recovery features. The improvement in the sensing performance was attributed to the stable morphology of the nanowires, the sensitization effect of Ru, the catalytic effect of RuO₂ and the optimal atomic utilization efficiency. This work offers an effective and promising strategy for promoting the ethanol sensing performance of WO₃.

Decorating Ru does not effect the morphology of NWs, increased the oxygen vacancies, adsorbed oxygen. This strategy results in a better sensing performance (∼120 to 100 ppm ethanol was increased around 47 times at 200 °C) and humidity resistance.