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Sun H, Liu X, Xu C, Xu L, Chen Y, Yang H, Yang X, Rao P, Sun S, Zhao L. Synergic Effect of N and Se Facilitates Photoelectric Performance in Co-Hyperdoped Silicon. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1591. [PMID: 39404318 PMCID: PMC11478113 DOI: 10.3390/nano14191591] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/25/2024] [Revised: 09/26/2024] [Accepted: 10/01/2024] [Indexed: 10/19/2024]
Abstract
Femtosecond-laser-fabricated black silicon has been widely used in the fields of solar cells, photodetectors, semiconductor devices, optical coatings, and quantum computing. However, the responsive spectral range limits its application in the near- to mid-infrared wavelengths. To further increase the optical responsivity in longer wavelengths, in this work, silicon (Si) was co-hyperdoped with nitrogen (N) and selenium (Se) through the deposition of Se films on Si followed by femtosecond (fs)-laser irradiation in an atmosphere of NF3. The optical and crystalline properties of the Si:N/Se were found to be influenced by the precursor Se film and laser fluence. The resulting photodetector, a product of this innovative approach, exhibited an impressive responsivity of 24.8 A/W at 840 nm and 19.8 A/W at 1060 nm, surpassing photodetectors made from Si:N, Si:S, and Si:S/Se (the latter two fabricated in SF6). These findings underscore the co-hyperdoping method's potential in significantly improving optoelectronic device performance.
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Affiliation(s)
- Haibin Sun
- Key Laboratory of Intelligent Infrared Perception Chinese Academy Science (CAS), Shanghai Institute of Technical Physics, Chinese Academy Science (CAS), Shanghai 200043, China; (H.S.)
- Department of Remote Sensing and Photogrammetry, Finnish Geospatial Research Institute, Vuorimiehentie 5, FI-02150 Espoo, Finland
- State Key Laboratory of Surface Physics, Department of Physics, Fudan University, Shanghai 200433, China
| | - Xiaolong Liu
- Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, FI-02150 Espoo, Finland
| | - Caixia Xu
- School of Primary Education, Chongqing Normal University, Chongqing 400700, China
| | - Long Xu
- Chongqing Key Laboratory of Micro&Nano Structure Optoelectronics, School of Physical Science and Technology, Southwest University, Chongqing 400715, China
| | - Yuwei Chen
- Department of Remote Sensing and Photogrammetry, Finnish Geospatial Research Institute, Vuorimiehentie 5, FI-02150 Espoo, Finland
- State Key Laboratory of Pulsed Power Laser Technology, Electronic Countermeasure Institute, National University of Defense Technology, Hefei 230037, China
| | - Haima Yang
- School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
| | - Xing Yang
- State Key Laboratory of Pulsed Power Laser Technology, Electronic Countermeasure Institute, National University of Defense Technology, Hefei 230037, China
| | - Peng Rao
- Key Laboratory of Intelligent Infrared Perception Chinese Academy Science (CAS), Shanghai Institute of Technical Physics, Chinese Academy Science (CAS), Shanghai 200043, China; (H.S.)
| | - Shengli Sun
- Key Laboratory of Intelligent Infrared Perception Chinese Academy Science (CAS), Shanghai Institute of Technical Physics, Chinese Academy Science (CAS), Shanghai 200043, China; (H.S.)
| | - Li Zhao
- State Key Laboratory of Surface Physics, Department of Physics, Fudan University, Shanghai 200433, China
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Crisci T, Moretti L, Gioffrè M, Casalino M. Mono- and Bilayer Graphene/Silicon Photodetectors Based on Optical Microcavities Formed by Metallic and Double Silicon-on-Insulator Reflectors: A Theoretical Investigation. MICROMACHINES 2023; 14:mi14050906. [PMID: 37241532 DOI: 10.3390/mi14050906] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/10/2023] [Revised: 04/21/2023] [Accepted: 04/22/2023] [Indexed: 05/28/2023]
Abstract
In this work, we theoretically investigate a graphene/silicon Schottky photodetector operating at 1550 nm whose performance is enhanced by interference phenomena occurring inside an innovative Fabry-Pèrot optical microcavity. The structure consists of a hydrogenated amorphous silicon/graphene/crystalline silicon three-layer realized on the top of a double silicon-on-insulator substrate working as a high-reflectivity input mirror. The detection mechanism is based on the internal photoemission effect, and the light-matter interaction is maximized through the concept of confined mode, exploited by embedding the absorbing layer within the photonic structure. The novelty lies in the use of a thick layer of gold as an output reflector. The combination of the amorphous silicon and the metallic mirror is conceived to strongly simplify the manufacturing process by using standard microelectronic technology. Configurations based on both monolayer and bilayer graphene are investigated to optimize the structure in terms of responsivity, bandwidth, and noise-equivalent power. The theoretical results are discussed and compared with the state-of-the-art of similar devices.
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Affiliation(s)
- Teresa Crisci
- Department of Mathematics and Physics, University of Campania "Luigi Vanvitelli", Viale Abramo Lincoln, 5, 81100 Caserta, Italy
- Institute of Applied Science and Intelligent Systems "Eduardo Caianiello" (CNR), Via P. Castellino n. 141, 80131 Naples, Italy
| | - Luigi Moretti
- Department of Mathematics and Physics, University of Campania "Luigi Vanvitelli", Viale Abramo Lincoln, 5, 81100 Caserta, Italy
| | - Mariano Gioffrè
- Institute of Applied Science and Intelligent Systems "Eduardo Caianiello" (CNR), Via P. Castellino n. 141, 80131 Naples, Italy
| | - Maurizio Casalino
- Institute of Applied Science and Intelligent Systems "Eduardo Caianiello" (CNR), Via P. Castellino n. 141, 80131 Naples, Italy
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