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Chung CY, Chen YC, Juang FR, Kao KS, Lee EI. Preparation of MoS 2 Nanospheres using a Hydrothermal Method and Their Application as Ammonia Gas Sensors Based on Delay Line Surface Acoustic Wave Devices. MATERIALS (BASEL, SWITZERLAND) 2023; 16:4703. [PMID: 37445017 DOI: 10.3390/ma16134703] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/24/2023] [Revised: 06/17/2023] [Accepted: 06/21/2023] [Indexed: 07/15/2023]
Abstract
An ammonia sensor based on a delay-line surface acoustic wave (SAW) device is developed in this study by coating the delay line area of the device with a nano-structured molybdenum disulfide (MoS2) sensitive material. A SAW device of 122 MHz was designed and fabricated with a pair of interdigital transducers (IDTs) defined on a 128° y-cut LiNbO3 substrate using photolithography technologies, and the aluminum IDT electrodes were deposited by a DC magnetron sputtering system. By adjusting the pH values of precursor solutions, molybdenum disulfide (MoS2) nanospheres were prepared with various structures using a hydrothermal method. Finally, an NH3 gas sensor with high sensitivity of 4878 Hz/ppm, operating at room temperature, was successfully obtained. The excellent sensitivity performance may be due to the efficient adsorption of NH3 gas molecules on the surfaces of the nanoflower-like MoS2, which has a larger specific surface area and provides more active sites, and results in a larger change in the resonant frequency of the device due to the mass loading effect.
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Affiliation(s)
- Chan-Yu Chung
- Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
| | - Ying-Chung Chen
- Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
- College of Semiconductor and Advanced Technology Research, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
| | - Feng-Renn Juang
- Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
| | - Kuo-Sheng Kao
- Department of Computer and Communication, SHU-TE University, Kaohsiung 82445, Taiwan
| | - En-I Lee
- Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
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Ba Hashwan SS, Khir MHM, Nawi IM, Ahmad MR, Hanif M, Zahoor F, Al-Douri Y, Algamili AS, Bature UI, Alabsi SS, Sabbea MOB, Junaid M. A review of piezoelectric MEMS sensors and actuators for gas detection application. NANOSCALE RESEARCH LETTERS 2023; 18:25. [PMID: 36847870 DOI: 10.1186/s11671-023-03779-8] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/17/2022] [Accepted: 01/25/2023] [Indexed: 05/24/2023]
Abstract
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.
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Affiliation(s)
- Saeed S Ba Hashwan
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia.
| | - Mohd Haris Md Khir
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Illani Mohd Nawi
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Mohamad Radzi Ahmad
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Mehwish Hanif
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Furqan Zahoor
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Y Al-Douri
- Nanotechnology and Catalysis Research Centre (NANOCAT), University of Malaya, Kuala Lumpur, Malaysia
- Department of Mechanical Engineering, Faculty of Engineering, Piri Reis University, Eflatun Sk. No: 8, 34940, Tuzla, Istanbul, Turkey
- Department of Applied Science and Astronomy, College of Sciences, University of Sharjah, Sharjah, United Arab Emirates
| | - Abdullah Saleh Algamili
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Usman Isyaku Bature
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Sami Sultan Alabsi
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Mohammed O Ba Sabbea
- Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada
| | - Muhammad Junaid
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
- Department of Electronic Engineering, Balochistan University of Information Technology, Engineering and Management Sciences, Quetta, 87300, Pakistan
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Photodegradation and Mineralization of Phenol Using TiO2Coated γ-Al2O3: Effect of Thermic Treatment. Processes (Basel) 2022. [DOI: 10.3390/pr10061186] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022] Open
Abstract
It is well-known that γ-Al2O3 possesses large, specific areas and high thermal, chemical, and mechanical resistance. Due to this, it is the most-used support for catalysts, in this case TiO2, as it enables it to achieve better dispersion and improves the activity in catalytic photodegradation reactions. In a previous work, it was observed that the optimal content of TiO2 in γ-Al2O3 was around 15% since the degradation of phenol results were maximized and a synergistic effect was generated by the interaction of both oxides. In addition, an increase in acidity crystal size and the generation of localized, oxygen-vacant, electronic states in the forbidden band of γ-Al2O3, were observed. This study focuses on the effect of the calcination temperature on a γ-Al2O3-TiO2 catalyst (15% w/w of TiO2) and its impact on photocatalytic activity. The catalysts prepared here were characterized by X-ray diffraction, N2 adsorption–desorption, FTIR-pyridine adsorption, MAS-NMR, HRTEM-FFT, UV-vis, and fluorescence spectroscopy.
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Mizsei J. Gas Sensors and Semiconductor Nanotechnology. NANOMATERIALS 2022; 12:nano12081322. [PMID: 35458029 PMCID: PMC9032215 DOI: 10.3390/nano12081322] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Download PDF] [Subscribe] [Scholar Register] [Received: 12/21/2020] [Revised: 02/22/2021] [Accepted: 02/05/2022] [Indexed: 12/15/2022]
Affiliation(s)
- János Mizsei
- Department of Electron Devices, Budapest University of Technology and Economics, Műegyetem rkp. 3, H-1111 Budapest, Hungary
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Facile Synthesis of Potassium-Doped Titanium Oxide Nanostructure (KTiOxs)/AlO(OH) Composites for Enhanced Photocatalytic Performance. Catalysts 2021. [DOI: 10.3390/catal11050548] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022] Open
Abstract
Generally, nanoparticles (NPs) are used as photocatalysts, which sometimes results in difficulties in the separation and recycling of photocatalysts from suspensions after their application in water and wastewater treatment, which hinders industrial applications of NPs that are too fine to be removed by gravitational settling. This can be solved by using support NPs to overcome these problems. -OH enrich AlO(OH), which is produced by a steam coating process, has been could be used as a possible support, because the -OH groups on the surface can interact with foreign molecules; thus, various composite functional materials can be prepared. Potassium doped titanium oxide NPs, which are produced by a wet corrosion process, namely KTiOxs, have been selected as photocatalysts, because KTiOxs have sufficient K+ ions, thereby expecting the chemical bonding with -OH group from AlO(OH). This study fabricated a novel photocataysis system made by combining KTiOxs as catalysts and AlO(OH) as the catalysts’ support, namely KTiOxs/AlO(OH) composites. The KTiOxs nanowires, obtained from 10 mol/L of a KOH solution treated with Ti and AlO(OH) at 280 °C for 24 h through a steam coating process, yielded the highest surface area and the highest photocatalytic performance.
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