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Al-Amri AM. Recent Progress in Printed Photonic Devices: A Brief Review of Materials, Devices, and Applications. Polymers (Basel) 2023; 15:3234. [PMID: 37571128 PMCID: PMC10422352 DOI: 10.3390/polym15153234] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/02/2023] [Revised: 07/26/2023] [Accepted: 07/27/2023] [Indexed: 08/13/2023] Open
Abstract
Printing electronics incorporates several significant technologies, such as semiconductor devices produced by various printing techniques on flexible substrates. With the growing interest in printed electronic devices, new technologies have been developed to make novel devices with inexpensive and large-area printing techniques. This review article focuses on the most recent developments in printed photonic devices. Photonics and optoelectronic systems may now be built utilizing materials with specific optical properties and 3D designs achieved through additive printing. Optical and architected materials that can be printed in their entirety are among the most promising future research topics, as are platforms for multi-material processing and printing technologies that can print enormous volumes at a high resolution while also maintaining a high throughput. Significant advances in innovative printable materials create new opportunities for functional devices to act efficiently, such as wearable sensors, integrated optoelectronics, and consumer electronics. This article provides an overview of printable materials, printing methods, and the uses of printed electronic devices.
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Affiliation(s)
- Amal M Al-Amri
- Physics Department, Collage of Science & Arts, King Abdulaziz University, Rabigh 25724, Saudi Arabia
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2
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Kazanskiy NL, Khonina SN, Butt MA. A Review of Photonic Sensors Based on Ring Resonator Structures: Three Widely Used Platforms and Implications of Sensing Applications. MICROMACHINES 2023; 14:mi14051080. [PMID: 37241703 DOI: 10.3390/mi14051080] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/02/2023] [Revised: 05/17/2023] [Accepted: 05/19/2023] [Indexed: 05/28/2023]
Abstract
Optical ring resonators (RRs) are a novel sensing device that has recently been developed for several sensing applications. In this review, RR structures based on three widely explored platforms, namely silicon-on-insulator (SOI), polymers, and plasmonics, are reviewed. The adaptability of these platforms allows for compatibility with different fabrication processes and integration with other photonic components, providing flexibility in designing and implementing various photonic devices and systems. Optical RRs are typically small, making them suitable for integration into compact photonic circuits. Their compactness allows for high device density and integration with other optical components, enabling complex and multifunctional photonic systems. RR devices realized on the plasmonic platform are highly attractive, as they offer extremely high sensitivity and a small footprint. However, the biggest challenge to overcome is the high fabrication demand related to such nanoscale devices, which limits their commercialization.
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Affiliation(s)
- Nikolay L Kazanskiy
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| | - Svetlana N Khonina
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| | - Muhammad A Butt
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia
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3
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Prasanna Kumaar S, Sivasubramanian A. Analysis of BCB and SU 8 photonic waveguide in MZI architecture for point-of-care devices. SENSORS INTERNATIONAL 2023. [DOI: 10.1016/j.sintl.2022.100207] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Submit a Manuscript] [Subscribe] [Scholar Register] [Indexed: 03/07/2023] Open
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Puumala LS, Grist SM, Morales JM, Bickford JR, Chrostowski L, Shekhar S, Cheung KC. Biofunctionalization of Multiplexed Silicon Photonic Biosensors. BIOSENSORS 2022; 13:bios13010053. [PMID: 36671887 PMCID: PMC9855810 DOI: 10.3390/bios13010053] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/08/2022] [Revised: 12/10/2022] [Accepted: 12/23/2022] [Indexed: 05/28/2023]
Abstract
Silicon photonic (SiP) sensors offer a promising platform for robust and low-cost decentralized diagnostics due to their high scalability, low limit of detection, and ability to integrate multiple sensors for multiplexed analyte detection. Their CMOS-compatible fabrication enables chip-scale miniaturization, high scalability, and low-cost mass production. Sensitive, specific detection with silicon photonic sensors is afforded through biofunctionalization of the sensor surface; consequently, this functionalization chemistry is inextricably linked to sensor performance. In this review, we first highlight the biofunctionalization needs for SiP biosensors, including sensitivity, specificity, cost, shelf-stability, and replicability and establish a set of performance criteria. We then benchmark biofunctionalization strategies for SiP biosensors against these criteria, organizing the review around three key aspects: bioreceptor selection, immobilization strategies, and patterning techniques. First, we evaluate bioreceptors, including antibodies, aptamers, nucleic acid probes, molecularly imprinted polymers, peptides, glycans, and lectins. We then compare adsorption, bioaffinity, and covalent chemistries for immobilizing bioreceptors on SiP surfaces. Finally, we compare biopatterning techniques for spatially controlling and multiplexing the biofunctionalization of SiP sensors, including microcontact printing, pin- and pipette-based spotting, microfluidic patterning in channels, inkjet printing, and microfluidic probes.
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Affiliation(s)
- Lauren S. Puumala
- School of Biomedical Engineering, University of British Columbia, 2222 Health Sciences Mall, Vancouver, BC V6T 1Z3, Canada
- Centre for Blood Research, University of British Columbia, 2350 Health Sciences Mall, Vancouver, BC V6T 1Z3, Canada
| | - Samantha M. Grist
- School of Biomedical Engineering, University of British Columbia, 2222 Health Sciences Mall, Vancouver, BC V6T 1Z3, Canada
- Centre for Blood Research, University of British Columbia, 2350 Health Sciences Mall, Vancouver, BC V6T 1Z3, Canada
- Dream Photonics Inc., Vancouver, BC V6T 0A7, Canada
| | - Jennifer M. Morales
- Army Research Laboratory, US Army Combat Capabilities Development Command, 2800 Powder Mill Rd., Adelphi, MD 20783, USA
| | - Justin R. Bickford
- Army Research Laboratory, US Army Combat Capabilities Development Command, 2800 Powder Mill Rd., Adelphi, MD 20783, USA
| | - Lukas Chrostowski
- Dream Photonics Inc., Vancouver, BC V6T 0A7, Canada
- Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, Canada
- Stewart Blusson Quantum Matter Institute, University of British Columbia, 2355 East Mall, Vancouver, BC V6T 1Z4, Canada
| | - Sudip Shekhar
- Dream Photonics Inc., Vancouver, BC V6T 0A7, Canada
- Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, Canada
| | - Karen C. Cheung
- School of Biomedical Engineering, University of British Columbia, 2222 Health Sciences Mall, Vancouver, BC V6T 1Z3, Canada
- Centre for Blood Research, University of British Columbia, 2350 Health Sciences Mall, Vancouver, BC V6T 1Z3, Canada
- Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, Canada
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Han J, Wu X, Ge X, Xie Y, Song G, Liu L, Yi Y. Highly Sensitive Liquid M-Z Waveguide Sensor Based on Polymer Suspended Slot Waveguide Structure. Polymers (Basel) 2022; 14:polym14193967. [PMID: 36235913 PMCID: PMC9571759 DOI: 10.3390/polym14193967] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/20/2022] [Revised: 09/13/2022] [Accepted: 09/17/2022] [Indexed: 11/16/2022] Open
Abstract
The slot structure has great advantages in improving the sensitivity of integrated waveguide optical sensors and reducing the detection limit. We propose a polymer Mach–Zehnder interferometer (MZI) optical sensor based on the slot structure and adopted the suspended structure to improve optical field interaction with the analyte, hence boosting the sensor’s sensing accuracy. In this paper, the effects of the single waveguide width, slot width, and coupling structure of the slot waveguide on the performance of the sensor operating at a 1550 nm wavelength were analyzed. Under the premise of satisfying single-mode transmission, we designed an MZI with a branch spacing of 10 µm, arm length of 2045 µm, branch span of 700 µm, and slot region of 500 µm. The sensor’s average sensitivity was 972.1 dB/RIU, and its average detection resolution was 1.6 × 10−6 RIU, which is approximately 1.5 times higher than that of the suspended strip waveguide, 1.6 times higher than that of the non-suspended slot structure, and 2.1 times higher than that of the non-suspended strip waveguide.
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Affiliation(s)
- Jiachen Han
- College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
| | - Xihan Wu
- College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China
| | - Xuyang Ge
- College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
| | - Yuqi Xie
- College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
| | - Guoming Song
- College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
| | - Lu Liu
- College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
| | - Yunji Yi
- College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China
- Correspondence: ; Tel.: +86-136-7431-5885
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Butt MA, Tyszkiewicz C, Karasiński P, Zięba M, Kaźmierczak A, Zdończyk M, Duda Ł, Guzik M, Olszewski J, Martynkien T, Bachmatiuk A, Piramidowicz R. Optical Thin Films Fabrication Techniques-Towards a Low-Cost Solution for the Integrated Photonic Platform: A Review of the Current Status. MATERIALS (BASEL, SWITZERLAND) 2022; 15:4591. [PMID: 35806715 PMCID: PMC9267219 DOI: 10.3390/ma15134591] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/19/2022] [Revised: 06/22/2022] [Accepted: 06/27/2022] [Indexed: 02/01/2023]
Abstract
In the past few decades, several methods concerning optical thin films have been established to facilitate the development of integrated optics. This paper provides a brief depiction of different techniques for implementing optical waveguide thin films that involve chemical, physical, and refractive index modification methods. Recent advances in these fabrication methods are also been presented. Most of the methods developed for the realization of the thin-films are quite efficient, but they are expensive and require sophisticated equipment. The major interest of the scientists is to develop simple and cost-effective methods for mass production of optical thin films resulting in the effective commercialization of the waveguide technology. Our research group is focused on developing a silica-titania optical waveguide platform via the sol-gel dip-coating method and implementing active and passive optical elements via the wet etching method. We are also exploring the possibility of using nanoimprint lithography (NIL) for patterning these films so that the fabrication process is efficient and economical. The recent developments of this platform are discussed. We believe that silica-titania waveguide technology developed via the sol-gel dip-coating method is highly attractive and economical, such that it can be commercialized for applications such as sensing and optical interconnects.
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Affiliation(s)
- Muhammad A. Butt
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warszawa, Poland; (A.K.); (R.P.)
| | - Cuma Tyszkiewicz
- Department of Optoelectronics, Silesian University of Technology, ul. B. Krzywoustego 2, 44-110 Gliwice, Poland; (C.T.); (P.K.); (M.Z.)
| | - Paweł Karasiński
- Department of Optoelectronics, Silesian University of Technology, ul. B. Krzywoustego 2, 44-110 Gliwice, Poland; (C.T.); (P.K.); (M.Z.)
| | - Magdalena Zięba
- Department of Optoelectronics, Silesian University of Technology, ul. B. Krzywoustego 2, 44-110 Gliwice, Poland; (C.T.); (P.K.); (M.Z.)
| | - Andrzej Kaźmierczak
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warszawa, Poland; (A.K.); (R.P.)
| | - Maria Zdończyk
- Lukasiewicz Research Network-PORT Polish Center for Technology Development, Stablowicka 147, 54-066 Wroclaw, Poland; (M.Z.); (Ł.D.); (M.G.); (A.B.)
- Faculty of Chemistry, University of Wrocław, ul. F. Joliot-Curie 14, 50-383 Wrocław, Poland
| | - Łukasz Duda
- Lukasiewicz Research Network-PORT Polish Center for Technology Development, Stablowicka 147, 54-066 Wroclaw, Poland; (M.Z.); (Ł.D.); (M.G.); (A.B.)
- Faculty of Chemistry, University of Wrocław, ul. F. Joliot-Curie 14, 50-383 Wrocław, Poland
| | - Malgorzata Guzik
- Lukasiewicz Research Network-PORT Polish Center for Technology Development, Stablowicka 147, 54-066 Wroclaw, Poland; (M.Z.); (Ł.D.); (M.G.); (A.B.)
- Faculty of Chemistry, University of Wrocław, ul. F. Joliot-Curie 14, 50-383 Wrocław, Poland
| | - Jacek Olszewski
- Department of Optics and Photonics, Faculty of Fundamental Problems of Technology, Wroclaw University of Science and Technology, Wybrzeze Wyspianskiego 27, 50-370 Wroclaw, Poland; (J.O.); (T.M.)
| | - Tadeusz Martynkien
- Department of Optics and Photonics, Faculty of Fundamental Problems of Technology, Wroclaw University of Science and Technology, Wybrzeze Wyspianskiego 27, 50-370 Wroclaw, Poland; (J.O.); (T.M.)
| | - Alicja Bachmatiuk
- Lukasiewicz Research Network-PORT Polish Center for Technology Development, Stablowicka 147, 54-066 Wroclaw, Poland; (M.Z.); (Ł.D.); (M.G.); (A.B.)
| | - Ryszard Piramidowicz
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warszawa, Poland; (A.K.); (R.P.)
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Miniaturization of Laser Doppler Vibrometers—A Review. SENSORS 2022; 22:s22134735. [PMID: 35808231 PMCID: PMC9269545 DOI: 10.3390/s22134735] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/30/2022] [Revised: 06/13/2022] [Accepted: 06/20/2022] [Indexed: 02/01/2023]
Abstract
Laser Doppler vibrometry (LDV) is a non-contact vibration measurement technique based on the Doppler effect of the reflected laser beam. Thanks to its feature of high resolution and flexibility, LDV has been used in many different fields today. The miniaturization of the LDV systems is one important development direction for the current LDV systems that can enable many new applications. In this paper, we will review the state-of-the-art method on LDV miniaturization. Systems based on three miniaturization techniques will be discussed: photonic integrated circuit (PIC), self-mixing, and micro-electrochemical systems (MEMS). We will explain the basics of these techniques and summarize the reported miniaturized LDV systems. The advantages and disadvantages of these techniques will also be compared and discussed.
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Interconnection of Few-Mode Fibers and Photonic Integrated Circuits Using Mode-Field Adapters. PHOTONICS 2022. [DOI: 10.3390/photonics9050319] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
We propose a detailed method for the interconnection between optical fibers and waveguides of photonic integrated circuits. Appropriate modal transmission is accomplished by matching the mode field diameters from both waveguide structures. Links from one structure to another are created by an interconnecting waveguide, maintaining a fixed coupling efficiency as its size is modified to adjust to the target waveguide core. This tailored transition acts as a mode field adapter, equalizing the transmission among multiple modes and reducing the mode-dependent losses while coupling. We present an algorithm to design the mode field adapter based on matching the effective mode areas using the power overlap integral. A study case considering a polymer photonic integrated device immediately connected to a few-mode fiber is analyzed. Coupling efficiencies over 90% for every transmitted mode are achieved, showing an evident improvement compared to typical approaches only matching core sizes. Detailed comparison of the results for each transmission mode is presented. This same procedure can be used to interconnect optical waveguides with different refractive index profiles and core geometry.
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Kumar A, Nambiar S, Kallega R, Ranganath P, Ea P, Selvaraja SK. High-efficiency vertical fibre-to-polymer waveguide coupling scheme for scalable polymer photonic circuits. OPTICS EXPRESS 2021; 29:9699-9710. [PMID: 33820124 DOI: 10.1364/oe.412266] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/12/2020] [Accepted: 02/01/2021] [Indexed: 06/12/2023]
Abstract
Polymer photonic circuits offer a versatile platform for various applications, including communication, sensing and optical signal processing. Though polymers offer broadband, linear and nonlinear optical properties, the coupling between an optical fibre and a polymer waveguide has been a challenge. In this work, we propose and demonstrate a wafer-scale vertical coupling scheme for polymer waveguides. The scheme uses a silicon nitride grating coupler with an inverse taper to couple between an optical fibre and a SU8 polymer waveguide. We demonstrate a maximum coupling efficiency of -3.55 dB in the C-band and -2.92 dB in the L-band with a 3-dB bandwidth of 74 and 80 nm, respectively. A detailed design and simulation, fabrication, and characterisation results are presented. The scheme demonstrates a scalable and efficient surface grating approach for polymer photonic integrated circuits.
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Fabrication of Sub-Micron Polymer Waveguides through Two-Photon Polymerization in Polydimethylsiloxane. Polymers (Basel) 2020; 12:polym12112485. [PMID: 33114700 PMCID: PMC7692651 DOI: 10.3390/polym12112485] [Citation(s) in RCA: 14] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/18/2020] [Revised: 10/22/2020] [Accepted: 10/22/2020] [Indexed: 12/21/2022] Open
Abstract
Flexible ultra-compact low-loss optical waveguides play a vital role in the development of soft photonics. The search for suitable materials and innovative fabrication techniques to achieve low loss long polymer optical waveguides and interconnects has proven to be challenging. In this paper, we demonstrate the fabrication of submicron optical waveguides in polydimethylsiloxane (PDMS) using divinylbenzene (DVB) as the photopolymerizable monomer through two-photon polymerization (2PP). We show that the commercial oxime ester photoinitiator Irgacure OXE02 is suitable for triggering the DVB photopolymerization, resulting in a stable and controllable fabrication process for the fabrication of defect-free, 5-cm long waveguides. We further explore a multi-track fabrication strategy to enlarge the waveguide core size up to ~3 μm for better light confinement and reduced cross-talk. In these waveguides, we measured a refractive index contrast on the order of 0.005 and a transmission loss of 0.1 dB/cm at 710 nm wavelength.
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Zhang SR, Yin YX, Lv ZY, Gao DS, Wang XB. 5-Channel Polymer/Silica Hybrid Arrayed Waveguide Grating. Polymers (Basel) 2020; 12:polym12030629. [PMID: 32164181 PMCID: PMC7182877 DOI: 10.3390/polym12030629] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/13/2020] [Revised: 03/04/2020] [Accepted: 03/07/2020] [Indexed: 11/29/2022] Open
Abstract
A 5-channel polymer/silica hybrid arrayed waveguide grating (AWG), fabricated through a simple and low-cost microfabrication process is proposed, which covers the entire O-band (1260–1360 nm) of the optical communication wavelength system. According to the simulation results, the insertion loss is lower than 4.7 dB and the crosstalk within 3-dB bandwidth is lower than ~−28 dB. The actual fiber–fiber insertion loss is lower than 14.0 dB, and the crosstalk of the 5 channels is less than −13.0 dB. The demonstrated AWG is ideally suitable for optical communications, but also has potential in the multi-channel sensors.
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Affiliation(s)
- Sheng-Rui Zhang
- Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China; (S.-R.Z.); (Z.-Y.L.)
| | - Yue-Xin Yin
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;
| | - Zi-Yue Lv
- Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China; (S.-R.Z.); (Z.-Y.L.)
| | - Ding-Shan Gao
- Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China; (S.-R.Z.); (Z.-Y.L.)
- Correspondence: (D.-S.G.); (X.-B.W.)
| | - Xi-Bin Wang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;
- Correspondence: (D.-S.G.); (X.-B.W.)
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Functional Micro–Nano Structure with Variable Colour: Applications for Anti-Counterfeiting. ADVANCES IN POLYMER TECHNOLOGY 2019. [DOI: 10.1155/2019/6519018] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/02/2023]
Abstract
Colour patterns based on micro-nano structure have attracted enormous research interests due to unique optical switches and smart surface applications in photonic crystal, superhydrophobic surface modification, controlled adhesion, inkjet printing, biological detection, supramolecular self-assembly, anti-counterfeiting, optical device and other fields. In traditional methods, many patterns of micro-nano structure are derived from changes of refractive index or lattice parameters. Generally, the refractive index and lattice parameters of photonic crystals are processed by common solvents, salts or reactive monomers under specific electric, magnetic and stress conditions. This review focuses on the recent developments in the fabrication of micro-nano structures for patterns including styles, materials, methods and characteristics. It summarized the advantages and disadvantages of inkjet printing, angle-independent photonic crystal, self-assembled photonic crystals by magnetic field force, gravity, electric field, inverse opal photonic crystal, electron beam etching, ion beam etching, laser holographic lithography, imprinting technology and surface wrinkle technology, etc. This review will provide a summary on designing micro-nano patterns and details on patterns composed of photonic crystals by surface wrinkles technology and plasmonic micro-nano technology. In addition, colour patterns as switches are fabricated with good stability and reproducibility in anti-counterfeiting application. Finally, there will be a conclusion and an outlook on future perspectives.
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Polymer-Based Microring Resonator with the Multimode Interference Coupler Operating at Very-Near-Infrared Wavelengths. APPLIED SCIENCES-BASEL 2019. [DOI: 10.3390/app9132715] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
A microring resonator with the multimode interference coupler is fabricated on the polymer platform by using UV-based soft nanoimprint technique. A unique class of fluorinated polymer, perfluoropolyether (PFPE), is employed for the fabrication of the flexible soft mold. By optimizing the proportion between Ormocore and the thinner maT, the microring resonator is fabricated almost without residual layer. The fabricated device with a Q-factor up to 2.3 × 104 is demonstrated for very-near-infrared wavelengths, which shows high potential for sensing applications.
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