A power-efficient bio-potential acquisition device with DS-MDE sensors for long-term healthcare monitoring applications

A double-sided, single-chip integration scheme using through-silicon-via for neural sensing applications

We present a new double-sided, single-chip monolithic integration scheme to integrate the CMOS circuits and MEMS structures by using through-silicon-via (TSV). Neural sensing applications were chosen as the implementation example. The proposed heterogeneous device integrates standard 0.18 μm CMOS technology, TSV and neural probe array into a compact single chip device. The neural probe array on the back-side of the chip is connected to the CMOS circuits on the front-side of the chip by using low-parasitic TSVs through the chip. Successful fabrication results and detailed characterization demonstrate the feasibility and performance of the neural probe array, TSV and readout circuitry. The fabricated device is 5 × 5 mm(2) in area, with 16 channels of 150 μm-in-length neural probe array on the back-side, 200 μm-deep TSV through the chip and CMOS circuits on the front-side. Each channel consists of a 5 × 6 probe array, 3 × 14 TSV array and a differential-difference amplifier (DDA) based analog front-end circuitry with 1.8 V supply, 21.88 μW power consumption, 108 dB CMRR and 2.56 μVrms input referred noise. In-vivo long term implantation demonstrated the feasibility of presented integration scheme after 7 and 58 days of implantation. We expect the conceptual realization can be extended for higher density recording array by using the proposed method.

Developing barbed microtip-based electrode arrays for biopotential measurement

This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO₃ isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conductance between the tip array on the front side of the wafer and the electrical contact on the back side, a through-silicon via was created during the wet etching process. The experimental results show that the forces required to detach the barbed microtip arrays from human skin, a polydimethylsiloxane (PDMS) polymer, and a polyvinylchloride (PVC) film were larger compared with those required to detach microtip arrays that lacked barbs. The impedances of the skin-electrode interface were measured and the performance levels of the proposed dry electrode were characterized. Electrode prototypes that employed the proposed tip arrays were implemented. Electroencephalogram (EEG) and electrocardiography (ECG) recordings using these electrode prototypes were also demonstrated.

A low-power bio-potential acquisition system with flexible PDMS dry electrodes for portable ubiquitous healthcare applications

This work describes a bio-potential acquisition system for portable ubiquitous healthcare applications using flexible polydimethylsiloxane dry electrodes (FPDEs) and a low-power recording circuit. This novel FPDE used Au as the skin contact layer, which was made using a CO₂ laser and replica method technology. The FPDE was revised from a commercial bio-potential electrode with a conductive snap using dry electrodes rather than wet electrodes that proposed reliable and robust attachment for the purpose of measurement, and attaching velcro made it wearable on the forearm for bio-potential applications. Furthermore, this study proposes a recording device to store bio-potential signal data and provides portability and low-power consumption for the proposed acquisition system. To acquire differential bio-potentials, such as electrocardiogram (ECG) signals, the proposed recording device includes a low-power front-end acquisition chip fabricated using a complementary metal-oxide-semiconductor (CMOS) process, a commercial microcontroller (MSP430F149), and a secure digital (SD) card for portable healthcare applications. The proposed system can obtain ECG signals efficiently and are comfortable to the skin. The power consumption of the system is about 85 mW for continuous working over a 3 day period with two AA batteries. It can also be used as a compact Holter ECG system.

An asynchronous multi-sensor micro control unit for wireless body sensor networks (WBSNs)

In this work, an asynchronous multi-sensor micro control unit (MCU) core is proposed for wireless body sensor networks (WBSNs). It consists of asynchronous interfaces, a power management unit, a multi-sensor controller, a data encoder (DE), and an error correct coder (ECC). To improve the system performance and expansion abilities, the asynchronous interface is created for handshaking different clock domains between ADC and RF with MCU. To increase the use time of the WBSN system, a power management technique is developed for reducing power consumption. In addition, the multi-sensor controller is designed for detecting various biomedical signals. To prevent loss error from wireless transmission, use of an error correct coding technique is important in biomedical applications. The data encoder is added for lossless compression of various biomedical signals with a compression ratio of almost three. This design is successfully tested on a FPGA board. The VLSI architecture of this work contains 2.68-K gate counts and consumes power 496-μW at 133-MHz processing rate by using TSMC 0.13-μm CMOS process. Compared with the previous techniques, this work offers higher performance, more functions, and lower hardware cost than other micro controller designs.