Development of a micro-gripper using piezoelectric bimorphs

A Piezoelectric MEMS Microgripper for Arbitrary XY Trajectory

In this paper, a piezoelectric microgripper for arbitrary 2D trajectory is proposed. The desired trajectory of the specimen under consideration was obtained by the deformability of a structure consisting of 16 straight beams and 12 C-structures. The mechanical action that deforms the structure was obtained by an electrical voltage supplied to piezoelectric plates. In order to verify the proposed model a FEM software (COMSOL) was used and some of the most commonly used trajectories for medical applications, micropositioning, micro-object manipulation, etc., were examined. The results showed that the proposed microgripper was capable of generating any parametrizable trajectory. Parametric studies were also carried out by examining the most relevant parameters highlighting their influence on specimen trajectories.

A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation

This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation of the proper voltage distribution to be supplied to the inner and outer electrodes of each piezoelectric actuator, in order to drive the tip along any desired trajectory. Such a device could be appealing in some microsurgical operations, i.e., the unclogging of arteries, endoluminal treatment of obstructive lesions, but also as a 2D micropositioning stage, etc. Theoretical predictions of voltage versus time that allow several pathways such as circles, ellipses, spirals, etc., to be accomplished have been verified with multiphysics FEM simulations and the numerical outcomes seem to corroborate the proposed model.

Analysis and Optimization of a Microgripper Driven by Linear Ultrasonic Motors

This paper presents the vibration response analysis and optimal structural design of a microgripper driven by linear ultrasonic motors (LUMs) dedicated to improving end-point positioning accuracy. Based on structural vibration theory, a parametric vibration response model of the microgripper finger was established, and the relative sensitivities of the structural and material parameters that affect the vibration amplitude of the fingertip were calculated within the structural and material constraints. Then, according to the sensitivity calculation results, a multidimensional constrained nonlinear optimization model was constructed to suppress the vibration of the end-effector. The improved internal penalty function method combined with Newton iteration was adopted to obtain the optimal structural parameters. Finally, the vibration experimental results show that the vibration amplitude of the initial microgripper fingertip is 16.31 μm, and the value measured after optimization was 2.49 μm, exhibiting a reduction of 84.7%. Therefore, the proposed optimal design method can effectively restrain the vibration of the microgripper end-effector and improve manipulation stability.

Proposal of an Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489 μm and 493 μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.

Modeling and Compensation of a Bimorph Type Piezoelectric Actuator Exhibiting Odd-Harmonic Oscillation and Frequency-Dependent, Interleaved Hysteresis

This paper proposes an improved version of the play model for capturing the frequency-dependent hysteresis of a bimorph piezoelectric actuator that includes odd harmonic oscillation and interleaved hysteresis. The proposed model used a single mathematical structure to capture the changes in the actuator response observed with the increase in the input signal frequency. The refinements on the structure of the original play model for capturing the peculiar behavior of the bimorph piezoelectric actuator have been addressed in detail. The parameter identification has been conducted extensively for a range of 1 Hz to 110 Hz, which exceeds the resonance frequency specified by the manufacturer of the actuator. Improved modeling accuracy was confirmed as compared with our previous enhanced Bouc–Wen model based on the calculation of the fitness index. We also attempted to synthesize a hysteresis compensator based on direct inverse multiplication; the results of the experimental validation of the proposed control system are disclosed.

Optically controlled fiber-optic micro-gripper for sub-millimeter objects

A miniature, fully optically controlled, dielectric, opto-thermally actuated tweezer/micro-gripper that is suitable for the manipulation of small objects is presented. The tweezer/micro-gripper is formed at the tip of an optical fiber and utilizes a mid-power laser diode for its actuation. The manipulation of small objects such as short pieces of optical fibers is demonstrated. Small dimensions, fully dielectric design, non-electric actuation, remote operation through the fiber, and good harsh environment compatibility (chemical, radiation, and temperature) might provide opportunities for micromanipulation in a system and areas where current solutions are inadequate.

Design and Evaluation of a Novel Hybrid Soft Surgical Gripper for Safe Digital Nerve Manipulation

Forceps are essential tools for digital nerve manipulation during digital nerve repair surgery. However, surgeons have to operate forceps with extreme caution to prevent detrimental post-operative complications caused by over-gripping force. Their intrinsically safe characteristics have led to the increasing adoption of soft robotics in various biomedical applications. In this paper, a miniaturized hybrid soft surgical gripper is proposed for safe nerve manipulation in digital nerve repair surgery. This new surgical gripper includes a soft inflatable actuator and a gripper shell with a hook-shaped structure. The ability to achieve a compliant grip and safe interaction with digital nerves is provided by the inflated soft pneumatic actuator, while the rigid hook retractor still allows surgeons to scoop up the nerve from its surrounding tissues during surgery. The performance of the proposed surgical gripper was evaluated by the contact/pulling force sensing experiments and deformation measurement experiments. In the cadaver experiments, this new surgical gripper was able to complete the required nerve manipulation within the limited working space. The average deformation of the digital nerve with an average diameter of 1.45 mm gripped by the proposed surgical gripper is less than 0.22 mm. The average deformity is less than 15% of its original diameter.

Development and Hybrid Position/Force Control of a Dual-Drive Macro-Fiber-Composite Microgripper

This paper reports on the development, implementation and hybrid control of a new micro-fiber-composite microgripper with synchronous position and force control capabilities. In particular, the micro-fiber-composite actuator was composed of rectangular piezoelectric fibers covered by interdigitated electrodes and embedded in structural epoxy. Thus, the micro-fiber-composite microgripper had a larger displacement-volume ratio (i.e., the ratio of the output displacement to the volume of the microgripper) than that of a traditional piezoelectric one. Moreover, to regulate both the gripper position and the gripping force simultaneously, a hybrid position/force control scheme using fuzzy sliding mode control and the proportional-integral controller was developed. In particular, the fuzzy sliding mode control was used to achieve the precision position control under the influence of the system disturbances and uncertainties, and the proportional-integral controller was used to guarantee the force control accuracy of the microgripper. A series of experimental investigations was performed to verify the feasibility of the developed microgripper and the control scheme. The experimental results validated the effectiveness of the designed microgripper and hybrid control scheme. The developed microgripper was capable of precision and multiscale micromanipulation tasks.

An Equivalent Circuit of Longitudinal Vibration for a Piezoelectric Structure with Losses

Equivalent circuits of piezoelectric structures such as bimorphs and unimorphs conventionally focus on the bending vibration modes. However, the longitudinal vibration modes are rarely considered even though they also play a remarkable role in piezoelectric devices. Losses, especially elastic loss in the metal substrate, are also generally neglected, which leads to discrepancies compared with experiments. In this paper, a novel equivalent circuit with four kinds of losses is proposed for a beamlike piezoelectric structure under the longitudinal vibration mode. This structure consists of a slender beam as the metal substrate, and a piezoelectric patch which covers a partial length of the beam. In this approach, first, complex numbers are used to deal with four kinds of losses-elastic loss in the metal substrate, and piezoelectric, dielectric, and elastic losses in the piezoelectric patch. Next in this approach, based on Mason's model, a new equivalent circuit is developed. Using MATLAB, impedance curves of this structure are simulated by the equivalent circuit method. Experiments are conducted and good agreements are revealed between experiments and equivalent circuit results. It is indicated that the introduction of four losses in an equivalent circuit can increase the result accuracy considerably.

Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacoustic spectroscopy is performed to detect oil-soluble gas in transformers, a micro-cantilever beam can be used to detect gas content. The dynamic characteristics of piezoelectric bimorph beams, such as resonant frequency, are important indexes in the applications of these beams. The equivalent circuit model for a piezoelectric bimorph beam is examined in this study and an admittance test is performed on the beam to accurately, quickly, and economically measure and analyze its dynamic characteristics. Then, the least squares method is applied to obtain the characteristic curves of the admittance circle, amplitude frequency, and phase frequency; identify the dynamic characteristics of the piezoelectric bimorph beam (e.g., resonant frequency); and determine the parameters of the equivalent circuit. The resonant frequency of the piezoelectric bimorph beam is 207.67 Hz based on the result of the admittance circle test, which is basically consistent with the results of microscope image method (i.e., 207.85 Hz) and the theoretical calculation (i.e., 222.03 Hz). This finding proves the validity of the proposed test method. This method cannot only improve the detection speed of piezoelectric bimorph beams, but can also provide a fast detection strategy for testing the characteristics of such beams during photoacoustic spectroscopy.

A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials

Micro/nanomaterials and devices have attracted great interest in recent years because of their extensive application prospects in almost all kinds of fields. However, the manipulations of the material at the micro/nanoscale, such as the separation or transfer of a micro/nano-object in the process of assembling micro/nanodevices, are quite difficult. In this paper, we present a micromachined micro-gripper made of photoresist material (SU-8) and driven by piezoelectric Pb(Mg,Nb)O₃-PbTiO₃ single crystal pieces. In order to keep two grasping jaws of the micro-gripper operating in the same plane at the micro/nanometer scale, a fine circular flexure hinge was fabricated for elastically connecting them together. After introducing the interface effect, the relationship between the opening stroke of two jaws and the applied voltage was developed and then confirmed by finite element simulation. The micro-gripper was finally installed on a six degree of freedom stage for performing a pick-up, release, and transfer manipulation of a 2 μm ZnO micro-fiber. The presented piezoelectric micro-gripper shows a great potential for the precise manipulation of a single piece of micro/nanomaterial for micro/nanodevices' assembling.

Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation

To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 μm displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework.

Detection of Prosthetic Knee Movement Phases via In-Socket Sensors: A Feasibility Study

This paper presents an approach of identifying prosthetic knee movements through pattern recognition of mechanical responses at the internal socket's wall. A quadrilateral double socket was custom made and instrumented with two force sensing resistors (FSR) attached to specific anterior and posterior sites of the socket's wall. A second setup was established by attaching three piezoelectric sensors at the anterior distal, anterior proximal, and posterior sites. Gait cycle and locomotion movements such as stair ascent and sit to stand were adopted to characterize the validity of the technique. FSR and piezoelectric outputs were measured with reference to the knee angle during each phase. Piezoelectric sensors could identify the movement of midswing and terminal swing, pre-full standing, pull-up at gait, sit to stand, and stair ascent. In contrast, FSR could estimate the gait cycle stance and swing phases and identify the pre-full standing at sit to stand. FSR showed less variation during sit to stand and stair ascent to sensitively represent the different movement states. The study highlighted the capacity of using in-socket sensors for knee movement identification. In addition, it validated the efficacy of the system and warrants further investigation with more amputee subjects and different sockets types.

Piezoelectric bimorphs' characteristics as in-socket sensors for transfemoral amputees

Alternative sensory systems for the development of prosthetic knees are being increasingly highlighted nowadays, due to the rapid advancements in the field of lower limb prosthetics. This study presents the use of piezoelectric bimorphs as in-socket sensors for transfemoral amputees. An Instron machine was used in the calibration procedure and the corresponding output data were further analyzed to determine the static and dynamic characteristics of the piezoelectric bimorph. The piezoelectric bimorph showed appropriate static operating range, repeatability, hysteresis, and frequency response for application in lower prosthesis, with a force range of 0–100 N. To further validate this finding, an experiment was conducted with a single transfemoral amputee subject to measure the stump/socket pressure using the piezoelectric bimorph embedded inside the socket. The results showed that a maximum interface pressure of about 27 kPa occurred at the anterior proximal site compared to the anterior distal and posterior sites, consistent with values published in other studies. This paper highlighted the capacity of piezoelectric bimorphs to perform as in-socket sensors for transfemoral amputees. However, further experiments are recommended to be conducted with different amputees with different socket types.

Technology efficacy in active prosthetic knees for transfemoral amputees: a quantitative evaluation

Several studies have presented technological ensembles of active knee systems for transfemoral prosthesis. Other studies have examined the amputees' gait performance while wearing a specific active prosthesis. This paper combined both insights, that is, a technical examination of the components used, with an evaluation of how these improved the gait of respective users. This study aims to offer a quantitative understanding of the potential enhancement derived from strategic integration of core elements in developing an effective device. The study systematically discussed the current technology in active transfemoral prosthesis with respect to its functional walking performance amongst above-knee amputee users, to evaluate the system's efficacy in producing close-to-normal user performance. The performances of its actuator, sensory system, and control technique that are incorporated in each reported system were evaluated separately and numerical comparisons were conducted based on the percentage of amputees' gait deviation from normal gait profile points. The results identified particular components that contributed closest to normal gait parameters. However, the conclusion is limitedly extendable due to the small number of studies. Thus, more clinical validation of the active prosthetic knee technology is needed to better understand the extent of contribution of each component to the most functional development.

Modeling of the through-the-thickness electric potentials of a piezoelectric bimorph using the spectral element method

An efficient spectral element (SE) with electric potential degrees of freedom (DOF) is proposed to investigate the static electromechanical responses of a piezoelectric bimorph for its actuator and sensor functions. A sublayer model based on the piecewise linear approximation for the electric potential is used to describe the nonlinear distribution of electric potential through the thickness of the piezoelectric layers. An equivalent single layer (ESL) model based on first-order shear deformation theory (FSDT) is used to describe the displacement field. The Legendre orthogonal polynomials of order 5 are used in the element interpolation functions. The validity and the capability of the present SE model for investigation of global and local responses of the piezoelectric bimorph are confirmed by comparing the present solutions with those obtained from coupled 3-D finite element (FE) analysis. It is shown that, without introducing any higher-order electric potential assumptions, the current method can accurately describe the distribution of the electric potential across the thickness even for a rather thick bimorph. It is revealed that the effect of electric potential is significant when the bimorph is used as sensor while the effect is insignificant when the bimorph is used as actuator, and therefore, the present study may provide a better understanding of the nonlinear induced electric potential for bimorph sensor and actuator.