Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection

Amphibious Multifunctional Hydrogel Flexible Haptic Sensor with Self-Compensation Mechanism

In recent years, hydrogel-based wearable flexible electronic devices have attracted much attention. However, hydrogel-based sensors are affected by structural fatigue, material aging, and water absorption and swelling, making stability and accuracy a major challenge. In this study, we present a DN-SPEZ dual-network hydrogel prepared using polyvinyl alcohol (PVA), sodium alginate (SA), ethylene glycol (EG), and ZnSO4 and propose a self-calibration compensation strategy. The strategy utilizes a metal salt solution to adjust the carrier concentration of the hydrogel to mitigate the resistance drift phenomenon to improve the stability and accuracy of hydrogel sensors in amphibious scenarios, such as land and water. The ExpGrow model was used to characterize the trend of the ∆R/R0 dynamic response curves of the hydrogels in the stress tests, and the average deviation of the fitted curves ϵ¯ was calculated to quantify the stability differences of different groups. The results showed that the stability of the uncompensated group was much lower than that of the compensated group utilizing LiCl, NaCl, KCl, MgCl2, and AlCl3 solutions (ϵ¯ in the uncompensated group in air was 276.158, 1.888, 2.971, 30.586, and 13.561 times higher than that of the compensated group in LiCl, NaCl, KCl, MgCl2, and AlCl3, respectively; ϵ¯ in the uncompensated group in seawater was 10.287 times, 1.008 times, 1.161 times, 4.986 times, 1.281 times, respectively, higher than that of the compensated group in LiCl, NaCl, KCl, MgCl2 and AlCl3). In addition, for the ranking of the compensation effect of different compensation solutions, the concentration of the compensation solution and the ionic radius and charge of the cation were found to be important factors in determining the compensation effect. Detection of events in amphibious environments such as swallowing, robotic arm grasping, Morse code, and finger-wrist bending was also performed in this study. This work provides a viable method for stability and accuracy enhancement of dual-network hydrogel sensors with strain and pressure sensing capabilities and offers solutions for sensor applications in both airborne and underwater amphibious environments.

Nonlinear Dynamic Analysis of an Electrostatically Actuated Clamped-Clamped Beam and Excited at the Primary and Secondary Resonances

This work investigates the primary and secondary resonances of an electrostatically excited double-clamped microbeam and its feasibility to be used for sensing applications. The sensor design can be excited directly in the vicinity of the primary and secondary resonances. This excitation mechanism would portray certain nonlinear phenomena and it would certainly lead in increasing the sensitivity of the device. To achieve this, a nonlinear beam model describing transverse deflection based on the Euler-Bernoulli beam theory was utilized. Then, a reduced-order model (ROM) considering all geometric and electrical nonlinearities was derived. Three different techniques involving time domain, fast Fourier transforms (FFTs), and frequency domain (FRCs) were used to examine the appearance of subharmonic resonance of order of one-half under various excitation waveforms. The results show that higher forcing levels and lower damping are required to activate this resonance. We note that as the forcing increases, the size of the instability region grows fast and the size of the unstable region increases rapidly. This, in fact, is an ideal place for designing bifurcation inertia MEMS sensors.

Nonlinear Dynamic Response of Nanocomposite Microbeams Array for Multiple Mass Sensing

A nonlinear MEMS multimass sensor is numerically investigated, designed as a single input-single output (SISO) system consisting of an array of nonlinear microcantilevers clamped to a shuttle mass which, in turn, is constrained by a linear spring and a dashpot. The microcantilevers are made of a nanostructured material, a polymeric hosting matrix reinforced by aligned carbon nanotubes (CNT). The linear as well as the nonlinear detection capabilities of the device are explored by computing the shifts of the frequency response peaks caused by the mass deposition onto one or more microcantilever tips. The frequency response curves of the device are obtained by a pathfollowing algorithm applied to the reduced-order model of the system. The microcantilevers are described by a nonlinear Euler-Bernoulli inextensible beam theory, which is enriched by a meso-scale constitutive law of the nanocomposite. In particular, the microcantilever constitutive law depends on the CNT volume fraction suitably used for each cantilever to tune the frequency bandwidth of the whole device. Through an extensive numerical campaign, the mass sensor sensitivity estimated in the linear and nonlinear dynamic range shows that, for relatively large displacements, the accuracy of the added mass detectability can be improved due to the larger nonlinear frequency shifts at resonance (up to 12%).

Growth Control of Metal-Organic Framework Films on Marine Biological Carbon and Their Potential-Dependent Dopamine Sensing

Ever-evolving advancements in films have fueled many of the developments in the field of electrochemical sensors. For biosensor application platforms, the fabrication of metal-organic framework (MOF) films on microscopically structured substrates is of tremendous importance. However, fabrication of MOF film-based electrodes always exhibits unsatisfactory performance, and the mechanisms of the fabrication and sensing application of the corresponding composites also need to be explored. Here, we report the fabrication of conformal MIL-53 (Fe) films on carbonized natural seaweed with the assistance of an oxide nanomembrane and a potential-dependent electrochemical dopamine (DA) sensor. The geometry and structure of the composite can be conveniently tuned by the experimental parameters, while the sensing performance is significantly influenced by the applied potential. The obtained sensor demonstrates ultrahigh sensitivity, a wide linear range, a low limit of detection, and a good distinction between DA and ascorbic acid at an optimized potential of 0.3 V. The underneath mechanism is investigated in detail with the help of theoretical calculations. This work bridges the natural material and MOF films and is promising for future biosensing applications.

Metal-Organic Framework Based Gas Sensors

The ever-increasing concerns over indoor/outdoor air quality, industrial gas leakage, food freshness, and medical diagnosis require miniaturized gas sensors with excellent sensitivity, selectivity, stability, low power consumption, cost-effectiveness, and long lifetime. Metal-organic frameworks (MOFs), featuring structural diversity, large specific surface area, controllable pore size/geometry, and host-guest interactions, hold great promises for fabricating various MOF-based devices for diverse applications including gas sensing. Tremendous progress has been made in the past decade on the fabrication of MOF-based sensors with elevated sensitivity and selectivity toward various analytes due to their preconcentrating and molecule-sieving effects. Although several reviews have recently summarized different aspects of this field, a comprehensive review focusing on MOF-based gas sensors is absent. In this review, the latest advance of MOF-based gas sensors relying on different transduction mechanisms, for example, chemiresistive, capacitive/impedimetric, field-effect transistor or Kelvin probe-based, mass-sensitive, and optical ones are comprehensively summarized. The latest progress for making large-area MOF films essential to the mass-production of relevant gas sensors is also included. The structural and compositional features of MOFs are intentionally correlated with the sensing performance. Challenges and opportunities for the further development and practical applications of MOF-based gas sensors are also given.

Advancement in functionalized luminescent frameworks and their prospective applications as inkjet-printed sensors and anti-counterfeit materials

Supramolecular luminescent frameworks with conjugated architectures exhibits interesting photophysical properties with phenomenal chemical and thermal stability. This has instigated global researchers towards its extensive application in toxic analyte detection and the formulation of anti-counterfeit materials. In correlation with this present scenario, luminescent metal-organic frameworks (LMOFs), possessing tailorable structural and functional properties and exceptional physicochemical features, have been categorized as emerging 'smart materials'. Interestingly, LMOFs have assisted in the rapid development of an effectual sensing platform and swift fabrication of anti-counterfeit materials on desirable substrates with the aid of 'Inkjet Printing', which is a viable, low-cost, and high-resolution technology. Inkjet printing is an excellent material deposition technique in the modern era owing to its easy settling over flexible substrates, simplistic emergence of large area image patterns with improved throughput, minimal cost, explicit resolution, and least waste generation. The present review provides state-of-the-art progress on LMOFs based (i) luminescent security ink fabrication with static and dynamic multinodal luminescent materials and (ii) sensory device formulation for the easy and instantaneous recognition of hazardous analytes through the 'Inkjet Printing' technology. This techno-chemical integration will be certainly beneficial to prevent the growth of counterfeit materials and monitor the bioaccumulation of hazardous analytes in our ecological system.

Control of Spring Softening and Hardening in the Squared Daisy

Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and sensors. In this work, a mechanical MEMS structure allowing the designer to determine the type of nonlinearity, that is, softening or hardening, based on its anchor scheme is presented. Effects of the excitation signal on the behavior of the proposed MEMS in the frequency domain are investigated. In this regard, a comprehensive experimental comparison among the nonlinear behaviors of softening and hardening has been conducted. To reduce the hysteresis effect to a minimum, an excitation approach, which is a pulsed sweep in frequency with a discrete resolution, is presented. The maximal velocity, quality factor, bandwidth, and resonant frequency of these two types of nonlinear MEMS resonators are compared under three different types of excitation. Finally, it is shown that the performance and characteristics extracted from nonlinear mechanical MEMS resonating structures are highly dependent on the excitation method. Hence, in the present case, the apparent performances of the MEMS resonator can increase by up to 150% or decrease by up to 21%, depending on the excitation approaches. This implies the necessity of a standardized testing methodology for nonlinear MEMS resonators for given end applications.

Strong internal resonance in a nonlinear, asymmetric microbeam resonator

Exploiting nonlinear characteristics in micro/nanosystems has been a subject of increasing interest in the last decade. Among others, vigorous intermodal coupling through internal resonance (IR) has drawn much attention because it can suggest new strategies to steer energy within a micro/nanomechanical resonator. However, a challenge in utilizing IR in practical applications is imposing the required frequency commensurability between vibrational modes of a nonlinear micro/nanoresonator. Here, we experimentally and analytically investigate the 1:2 and 2:1 IR in a clamped-clamped beam resonator to provide insights into the detailed mechanism of IR. It is demonstrated that the intermodal coupling between the second and third flexural modes in an asymmetric structure (e.g., nonprismatic beam) provides an optimal condition to easily implement a strong IR with high energy transfer to the internally resonated mode. In this case, the quadratic coupling between these flexural modes, originating from the stretching effect, is the dominant nonlinear mechanism over other types of geometric nonlinearity. The design strategies proposed in this paper can be integrated into a typical micro/nanoelectromechanical system (M/NEMS) via a simple modification of the geometric parameters of resonators, and thus, we expect this study to stimulate further research and boost paradigm-shifting applications exploring the various benefits of IR in micro/nanosystems.

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors' performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

Quasi-Static Pull-in: an Instability in Electrostatic Actuators

We identify a new instability in electrostatic actuators dubbed quasi-static pull-in. We report experimental evidence of the instability and study its characteristics in two types of micro actuators operating in ambient air. We found that the underlying mechanism is a fast-slow dynamic interaction between slowly-varying electrostatic excitation and fast resonator response that instigate large non-resonant oscillatory orbits and eventually disappears in a global Shilnikov bifurcation. Based on these findings, we formulate and present a new taxonomy of pull-in instabilities in electrostatic actuators.

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

Nonlinear Nanomechanical Mass Spectrometry at the Single-Nanoparticle Level

Nanoelectromechanical systems (NEMS) have emerged as a promising technology for performing the mass spectrometry of large biomolecules and nanoparticles. As nanoscale objects land on NEMS sensors one by one, they induce resolvable shifts in the resonance frequency of the sensor proportional to their weight. The operational regime of NEMS sensors is often limited by the onset of nonlinearity, beyond which the highly sensitive schemes based on frequency tracking by phase-locked loops cannot be readily used. Here, we develop a measurement architecture with which to operate at the nonlinear regime and measure frequency shifts induced by analytes in a rapid and sensitive manner. We used this architecture to individually characterize the mass of gold nanoparticles and verified the results by performing independent measurements of the same nanoparticles based on linear mass sensing. Once the feasibility of the technique is established, we have obtained the mass spectrum of a 20 nm gold nanoparticle sample by individually recording about 500 single-particle events using two modes working sequentially in the nonlinear regime. The technique obtained here can be used for thin nanomechanical structures that possess a limited dynamic range.

Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal⁻Transversal Vibration

Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear characteristics of coupled longitudinal–transversal vibration are analyzed, while an electrostatically actuated microbeam is designed considering that the frequency ratio is two to one between the first longitudinal vibration and transversal vibration. The nonlinear governing equations are truncated into a set of coupled ordinary differential equations by the Galerkin method. Then the equations are solved using the multiple-scales method and the nonlinear dynamics of the internal resonance is investigated. The influence of bias voltage, longitudinal excitation and frequency detuning parameters are mainly analyzed. Results show that using the pseudo-arclength continuation method, the nonlinear amplitude–response curves can be plotted continuously. The saturation and jump phenomena are greatly affected by the bias voltage and the detuning frequency. Beyond the critical excitation amplitude, the response energy will transfer from the longitudinal motion to the transversal motion, even the excitation is employed on the longitudinal direction. The large-amplitude jump of the low-order vibration mode can be used to detect the variation of the conditions or parameters, which shows great potential in improving precision of MEMS switches.

An updated roadmap for the integration of metal–organic frameworks with electronic devices and chemical sensors

This review highlights the steps needed to bring the properties of MOFs from the chemical lab to the microelectronics fab.

Surface-supported metal–organic framework thin films: fabrication methods, applications, and challenges

Surface-supported metal–organic framework thin films are receiving increasing attention as a novel form of nanotechnology, which hold great promise for photovoltaics, electronic devices, CO₂ reduction, energy storage, water splitting and membranes.