Design of a Novel MEMS Microgripper with Rotatory Electrostatic Comb-Drive Actuators for Biomedical Applications

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials forming the space between the two underlying stationary electrodes. Employing solid dielectric material simplifies fabrication and can reduce the bottom primary electrode's fixed voltage. Through numerical analysis, different materials were examined to assess their impact. The results indicate that the primary electrode's fixed voltage can be reduced with an increase in the dielectric constant, however, with the consequence of reduced benefit to control voltage reduction. Additionally, charge analysis was conducted to compare the actuator's performance using air as the gap-spacing material versus solid materials, from the perspective of energy conservation. It was found that solid materials result in a higher accumulated charge, reducing the need for a high fixed voltage.

An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization

In this paper, we present the investigations of an aluminum micro-tweezer designed for micromanipulation applications. It includes design, simulation, fabrication, characterizations, and experimental measurements. Electro-thermo-mechanical FEM-based simulations using COMSOL Multiphysics were performed to describe the behavior of the micro-electro-mechanical system (MEMS) device. The micro-tweezers were fabricated in aluminum, as structural material, by surface micromachining processes. Experimental measurements were performed and compared with the simulation results. A micromanipulation experiment was performed using titanium microbeads from 10-30 µm to confirm the performance of the micro-tweezer. This study serves as further research regarding the using of aluminum as structural material for MEMS devices designated for pick-and-place operations.

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.

A novel optimized design of a piezoelectric-driven 4-stage amplified compliant microgripper using a 2-step multi-objective algorithm

Abstract

Advancements in microscale technologies have prompted a demand for high precision micro-manipulation. Microgrippers are the primary means of conducting micro-scale operations, and they significantly affect the procedure's performance. This paper presents a novel optimized design for compliant microgrippers, intending to enhance functionality and durability. The mainframe of the proposed microgripper is based on a compact flexure-based compliant structure with four stages of movement amplification. Experiments were designed based on the L25 Taguchi orthogonal arrays. The experiments were conducted using the finite element method in Abaqus 6.14 workbench. Range of motion and maximum created mechanical stress are selected as the two fundamental goals of the optimization. A variety of designs are achieved using the proposed algorithm. The use of Analytical Hierarchy Process has led to the presentation of an efficient and well-defined algorithm to perform decisions. The decision process can be performed with regard to specific requirements of various applications. The presented design process of microgrippers has the potential for customized manufacturing for specific applications.

Article Highlights

Design and Analysis of a Microgripper with Three-Stage Amplification Mechanism for Micromanipulation

This paper proposes a novel microgripper with two working modes. The microgripper is designed with symmetric structure and each part is actuated by one piezoelectric actuator, respectively. To achieve desired output displacement, each part of the microgripper is designed with three-stage amplification mechanism to amplify the displacement of the PZT actuator. According to the size of the microobjects, the grasping operation can be completed by one finger moving or two fingers moving simultaneously. Then, the theoretical analysis is carried out to calculated the key characteristics, including amplification, input stiffness and frequency. Finite element analysis (FEA) is conducted to optimize the structural parameters and investigate the performance of the microgripper. Finally, a prototype is machined by wire electro-discharge machining (WEDM) method and experiments are carried out to verify the performance of the microgripper. The results indicate that the amplification is 10.41 and the motion stroke of one jaw is 118.34 µm when the input voltage is 100 V. The first natural frequency is 746.56 Hz. By picking and placing the wires with different diameters and slices with different thickness, the grasping stability is verified.

Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator

In this paper, we propose a laser actuated microgripper that can be activated remotely for micromanipulation applications. The gripper is based on an optothermally actuated polymeric chevron-shaped structure coated with optimized metallic layers to enhance its optical absorbance. Gold is used as a metallic layer due to its good absorption of visible light. The thermal deformation of the chevron-shaped actuator with metallic layers is first modeled to identify the parameters affecting its behavior. Then, an optimal thickness of the metallic layers that allows the largest possible deformation is obtained and compared with simulation results. Next, microgrippers are fabricated using conventional photolithography and metal deposition techniques for further characterization. The experiments show that the microgripper can realize an opening of 40 µm, a response time of 60 ms, and a generated force in the order of hundreds of µN. Finally, a pick-and-place experiment of 120 µm microbeads is conducted to confirm the performance of the microgripper. The remote actuation and the simple fabrication and actuation of the proposed microgripper makes it a highly promising candidate to be utilized as a mobile microrobot for lab-on-chip applications.

Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation

We present the design, fabrication, and experimental characterization of microsystems achieving large and stepwise discrete displacements. The systems consist of electrostatic bending plate actuators linked in a chain with increasing electrode gaps to allow a stepwise system displacement. A derived analytic transfer function permits to evaluate the influence of the system components on both the total and the stepwise system displacement. Based on calculation and simulation results, systems featuring 5, 8, 10, 13, and 16 steps are modeled and fabricated using a dicing-free SOI-fabrication process. During experimental voltage- and time-dependent system characterization, the minimum switching speed of the electrostatic actuators is 1 ms. Based on the guiding spring stiffness and the switching time, step-by-step and collective activations of the microsystems are performed and the system properties are derived. Furthermore, we analyze the influence of the number of steps on the total system displacement and present 16-step systems with a total maximum displacement of 230.7 ± 0.9 µm at 54 V.

Design and analysis of four-jaws microgripper with integrated thermal actuator and force sensor for biomedical applications

This research paper presents design and analysis of the multi-jaw microgripper that can manipulate microbiological organisms and species, cell probing and measurement, biomedical sample sorting, and preparation. Four jaws, actuated with a single thermal chevron actuator, can grip microbiological species ranging from 300 to 700 μm, 1 to 340 μm, 100 μm pool, and 1 to 120 μm spongy cells, respectively. Jaws are designed in such a way that they can grip regular, irregular, and spongy shaped biological species and their organelles. Parametric analysis of the microgripper exhibited that at 10 V, the efficiency of the thermal actuator is at maximum with respect to displacement, force, and temperature. To enhance displacement to voltage ratio and increase the energy efficiency, a class 3 lever mechanism has been incorporated. The amplification factors at four jaws are 17.21, 13.82, 4.02, and 4.93, respectively. For controlled application of the force to microspecies, two electrostatic force sensors have been amalgamated with jaws having capacitive sensitivities of 1.59 nf/μm, 1.91 nf/μm, 17 nf/μm, and 14.5 nf/μm, respectively. Electrothermal, static, and electrostatic analyses have been carried out with the finite element methods based software IntelliSuite^®. Stress magnitudes are within the limits of structural integrity of silicon having a factor of safety 2.5. Thermal analysis revealed that at a differential voltage of 10 V, the maximum temperature goes up to 425 °C. Buckling analysis results depicted that the critical load for the thermal actuator is 241 μN with the buckling load factor greater than unity. This paper focuses on microbiological applications only; however, the designed microgripper can be used to manipulate micro-objects, microstructures, microelectronics parts, and micro assembly.

Compliant Nano-Pliers as a Biomedical Tool at the Nanoscale: Design, Simulation and Fabrication

This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) μm2, an active clamping area of (2 × 4) μm2, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.

Many Objective Optimization of a Magnetic Micro–Electro–Mechanical (MEMS) Micromirror with Bounded MP-NSGA Algorithm

The paper proposes the automated optimal design of a class of micro–electro–mechanical (MEMS) devices, based on a procedure of finite element analysis coupled to evolutionary optimization algorithms. A magnetic MEMS, used as an optical switch, is considered as the case study. In particular, the geometry of the device is optimized in order to maximize the actuation torque and minimize the power losses and the device volume. The optimization algorithms belong to the genetic class and, in particular, Migrated Parents - Non-Dominated Sorting Genetic Algorithm MP-NSGA, with three objective functions, is compared to NSGA-III.

Dual-Stimuli Responsive Carbon Nanotube Sponge-PDMS Amphibious Actuator

A dual-stimuli responsive soft actuator based on the three-dimensional (3D) porous carbon nanotube (CNT) sponge and its composite with polydimethylsiloxane (PDMS) was developed, which can realize both electrothermal and electrochemical actuation. The bimorph actuator exhibited a bending curvature of 0.32 cm⁻¹·W⁻¹ under electrothermal stimulation on land. The displacement of the electrochemical actuator could reach 4 mm under a 5 V applied voltage in liquid. The dual-responsive actuator has demonstrated the applications on multi-functional amphibious soft robots as a crawling robot like an inchworm, a gripper to grasp and transport the cargo and an underwater robot kicking a ball. Our study presents the versatility of the CNT sponge-based actuator, which can be used both on land and in water.

Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper

This paper deals with the manipulation of micro-objects operated by a new concept multi-hinge multi-DoF (degree of freedom) microsystem. The system is composed of a planar 3-DoF microstage and of a set of one-DoF microgrippers, and it is arranged is such a way as to allow any microgripper to crawl over the stage. As a result, the optimal configuration to grasp the micro-object can be reached. Classical algorithms of kinematic analysis have been used to study the rigid-body model of the mobile platform. Then, the rigid-body replacement method has been implemented to design the corresponding compliant mechanism, whose geometry can be transferred onto the etch mask. Deep-reactive ion etching (DRIE) is suggested to fabricate the whole system. The main contributions of this investigation consist of (i) the achievement of a relative motion between the supporting platform and the microgrippers, and of (ii) the design of a process flow for the simultaneous fabrication of the stage and the microgrippers, starting from a single silicon-on-insulator (SOI) wafer. Functionality is validated via theoretical simulation and finite element analysis, whereas fabrication feasibility is granted by preliminary tests performed on some parts of the microsystem.

A Modified U-Shaped Micro-Actuator with a Compliant Mechanism Applied to a Microgripper

In this paper, a modified U-shaped micro-actuator with a compliant mechanism is proposed. It was analyzed with a uniform and modified thin arm, as well as a similar variation in the corresponding flexure, in order to observe the impact of the compliant lumped mechanism. The use of these compliant mechanisms implies an increment in the deformation and a reduction in the equivalent stress of 25% and 52.25%, respectively. This characterization was developed using the Finite Element Method (FEM) in ANSYS Workbench. The design, analysis and simulation were developed with Polysilicon. In this study, the following performance parameters were also analyzed: force and temperature distribution. This device is supplied with voltage from 0 V up to 3 V, at room temperature. The modified U-shaped actuator was applied in both arms of a microgripper, and to evaluate its electrothermal performance, a static structural analysis has been carried out in Ansys Workbench. The microgripper has an increment in deformation of 22.33%, an equivalent stress reduction of 50%, and a decrease in operation frequency of 10.8%. The force between its jaws is of 367 µN. This low level of force could be useful when sensitive particles are manipulated.

Recursive Least Squares Filtering Algorithms for On-Line Viscoelastic Characterization of Biosamples

The mechanical characterization of biological samples is a fundamental issue in biology and related fields, such as tissue and cell mechanics, regenerative medicine and diagnosis of diseases. In this paper, a novel approach for the identification of the stiffness and damping coefficients of biosamples is introduced. According to the proposed method, a MEMS-based microgripper in operational condition is used as a measurement tool. The mechanical model describing the dynamics of the gripper-sample system considers the pseudo-rigid body model for the microgripper, and the Kelvin–Voigt constitutive law of viscoelasticity for the sample. Then, two algorithms based on recursive least square (RLS) methods are implemented for the estimation of the mechanical coefficients, that are the forgetting factor based RLS and the normalised gradient based RLS algorithms. Numerical simulations are performed to verify the effectiveness of the proposed approach. Results confirm the feasibility of the method that enables the ability to perform simultaneously two tasks: sample manipulation and parameters identification.