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Chang S, Yan S, Liu F, Wang J, Cao Y, Huang B, Zhu C, Wu T, Ren Y. Nanorefractive index transducer using a ring cavity with an internal h-shaped cavity grounded on Fano resonance. PLoS One 2024; 19:e0301007. [PMID: 38758827 PMCID: PMC11101081 DOI: 10.1371/journal.pone.0301007] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/04/2024] [Accepted: 03/10/2024] [Indexed: 05/19/2024] Open
Abstract
Building on the Fano resonance observation, a new refractive index transducer structure at the nanoscale is proposed in this article, which is a refractive index transducer consisting of a metal-insulator-metal (MIM) waveguide structure coupled with a ring cavity internally connected to an h-shaped structure (RCIhS). Using an analytical method based on COMSOL software and finite element method (FEM), the effect of different geometric parameters of the structure on the trans-mission characteristics of the system is simulated and analyzed, which in turn illustrates the effect of the structural parameters on the output Fano curves. As simulation results show, the internally connected h-shaped structure is an influential component in the Fano resonance. By optimizing the geometrical parameters of the structure, the system finally accomplishes a sensitivity (S) of 2400 nm/RIU and a figure of merit (FOM) of 68.57. The sensor has also been demonstrated in the realm of temperature detection, having tremendous potential for utilization in future nano-sensing and optically integrated systems.
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Affiliation(s)
- Shuwen Chang
- School of Electrical and Control Engineering, North University of China, Taiyuan, China
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
- Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring of Zhejiang Province and Belarus, Hangzhou, China
| | - Shubin Yan
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
- Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring of Zhejiang Province and Belarus, Hangzhou, China
| | - Feng Liu
- School of Electrical and Control Engineering, North University of China, Taiyuan, China
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
- Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring of Zhejiang Province and Belarus, Hangzhou, China
| | - Jin Wang
- School of Electrical and Control Engineering, North University of China, Taiyuan, China
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
- Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring of Zhejiang Province and Belarus, Hangzhou, China
| | - Yuhao Cao
- School of Electrical and Control Engineering, North University of China, Taiyuan, China
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
- Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring of Zhejiang Province and Belarus, Hangzhou, China
| | - Biyi Huang
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
| | - Chuanhui Zhu
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
| | - Taiquan Wu
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
| | - Yifeng Ren
- School of Electrical and Control Engineering, North University of China, Taiyuan, China
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Rakib AKM, Rahad R, Faruque MO, Sagor RH. ZrN-based plasmonic sensor: a promising alternative to traditional noble metal-based sensors for CMOS-compatible and tunable optical properties. OPTICS EXPRESS 2023; 31:25280-25297. [PMID: 37475337 DOI: 10.1364/oe.494550] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/01/2023] [Accepted: 07/08/2023] [Indexed: 07/22/2023]
Abstract
In this article, we introduce a novel comb shaped plasmonic refractive index sensor that employs a ZrN-Insulator-ZrN configuration. The sensor is constructed using Zirconium Nitride (ZrN), an alternative refractory material that offers advantages over traditional metals such as silver and gold, as ZrN is standard Complementary Metal Oxide Semiconductor (CMOS)-compatible and has tunable optical properties. The sensor has recorded a maximum sensitivity, figure of merit (FOM), and sensing resolution of 1445.46 nm/RIU, 140.96, and 6.91 × 10-7RIU-1, respectively. Beyond that, the integration of ZrN offers the sensor with various advantages, including higher hardness, thermal stability at high temperatures, better corrosion and abrasion resistance, and lower electrical resistivity, whereas traditional plasmonic metals lack these properties, curtailing the real-world use of plasmonic devices. As a result, our suggested model surpasses the typical noble material based Metal-Insulator-Metal (MIM) arrangement and offers potential for the development of highly efficient, robust, and durable nanometric sensing devices which will create a bridge between nanoelectronics and plasmonics.
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Kazanskiy NL, Khonina SN, Butt MA. A Review of Photonic Sensors Based on Ring Resonator Structures: Three Widely Used Platforms and Implications of Sensing Applications. MICROMACHINES 2023; 14:mi14051080. [PMID: 37241703 DOI: 10.3390/mi14051080] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/02/2023] [Revised: 05/17/2023] [Accepted: 05/19/2023] [Indexed: 05/28/2023]
Abstract
Optical ring resonators (RRs) are a novel sensing device that has recently been developed for several sensing applications. In this review, RR structures based on three widely explored platforms, namely silicon-on-insulator (SOI), polymers, and plasmonics, are reviewed. The adaptability of these platforms allows for compatibility with different fabrication processes and integration with other photonic components, providing flexibility in designing and implementing various photonic devices and systems. Optical RRs are typically small, making them suitable for integration into compact photonic circuits. Their compactness allows for high device density and integration with other optical components, enabling complex and multifunctional photonic systems. RR devices realized on the plasmonic platform are highly attractive, as they offer extremely high sensitivity and a small footprint. However, the biggest challenge to overcome is the high fabrication demand related to such nanoscale devices, which limits their commercialization.
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Affiliation(s)
- Nikolay L Kazanskiy
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| | - Svetlana N Khonina
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| | - Muhammad A Butt
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia
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Numerical Assessment of a Metal-Insulator-Metal Waveguide-Based Plasmonic Sensor System for the Recognition of Tuberculosis in Blood Plasma. MICROMACHINES 2023; 14:729. [PMCID: PMC10143205 DOI: 10.3390/mi14040729] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/15/2023] [Revised: 03/23/2023] [Accepted: 03/24/2023] [Indexed: 06/01/2023]
Abstract
In this paper, a numerical analysis of a plasmonic sensor based on a metal-insulator-metal (MIM) waveguide is conducted for the detection of tuberculosis (TB)-infected blood plasma. It is not straightforward to directly couple the light to the nanoscale MIM waveguide, because of which two Si3N4 mode converters are integrated with the plasmonic sensor. This allows the efficient conversion of the dielectric mode into a plasmonic mode, which propagates in the MIM waveguide via an input mode converter. At the output port, the plasmonic mode is converted back to the dielectric mode via the output mode converter. The proposed device is employed to detect TB-infected blood plasma. The refractive index of TB-infected blood plasma is slightly lower than that of normal blood plasma. Therefore, it is important to have a sensing device with high sensitivity. The sensitivity and figure of merit of the proposed device are ~900 nm/RIU and 11.84, respectively.
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Cicek K, Boybay MS, Topkaya R, Agarwal AM. C-band operating plasmonic sensor with a high Q-factor/figure of merit based on a silicon nano-ring. APPLIED OPTICS 2023; 62:1290-1295. [PMID: 36821229 DOI: 10.1364/ao.480642] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/18/2022] [Accepted: 01/09/2023] [Indexed: 06/18/2023]
Abstract
In this paper, we take advantage of the high refractive index property of silicon to design a practical and sensitive plasmonic sensor on a photonic integrated circuit (PIC) platform. It has been demonstrated that a label-free refractive index sensor with sensitivity up to 1124 nm/RIU can be obtained using a simple design of a silicon nano-ring with a concentric hexagonal plasmonic cavity. It has also been shown that, with optimum structural parameters, a quality factor (Q-factor) of 307 and a figure of merit (FOM) of 234R I U -1 can be achieved, which are approximately 8 times and 5 times higher than the proposed sensors counterparts, respectively. In addition, the resonance mode of the hexagonal cavity with Si nano-ring (HCS) sensor can be adjusted to operate in the C-band, which is a highly desirable wavelength range in terms of compatibility with devices in PIC technology.
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Wu Q, Zhang Y, Qu D, Li C. MIM waveguide system with independently tunable double resonances and its application for two-parameter detection. APPLIED OPTICS 2022; 61:7409-7414. [PMID: 36256042 DOI: 10.1364/ao.465922] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/08/2022] [Accepted: 08/09/2022] [Indexed: 06/16/2023]
Abstract
A metal-insulator-metal (MIM) waveguide system consisting of a MIM waveguide, a ring cavity, and a semi-ring cavity is proposed. Using the finite element method, the transmission characteristics of the MIM waveguide system are discussed under the different geometry parameters. By detecting the resonance wavelength and varying the refractive index, the sensing performance of the MIM waveguide system is analyzed. The proposed structure can be used as a refractive index sensor with the maximum sensitivity of 2412 nm/RIU. Due to isolating the ring cavity and semi-ring cavity, the independent tuning of double resonances can be realized by changing the refractive index of the insulator in the ring cavity or the semi-ring cavity. Benefiting from two independent refractive index sensing modes, the structure with two isolated resonators can realize the simultaneous measurement of glucose solution concentration and blood plasma concentration. The sensitivity of glucose solution sensing in the ring cavity is 0.13133 nm/(g/L). Meanwhile, the blood plasma concentration detection in the semi-ring cavity is realized with the sensitivity of 0.358 nm/(g/L). The system with two isolated cavities has the potential to be used as an efficient nano sensor, which can achieve simultaneous measurement of two parameters.
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Multiparameter Sensing Based on Tunable Fano Resonances in MIM Waveguide Structure with Square-Ring and Triangular Cavities. PHOTONICS 2022. [DOI: 10.3390/photonics9050291] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
In this paper, a metal–insulator–metal (MIM) surface plasmon waveguide structure is proposed and numerically investigated. It is composed of a square-ring cavity with a silver baffle, an isosceles triangle cavity, and a bus waveguide with a silver baffle. The results show that the structure can produce triple Fano resonances that can be independently tuned by changing the structural parameters. The detection of refractive indexes at different positions in the structure was also accomplished, with a maximum sensitivity of 2259.56 nm/RIU. On the basis of this, the simultaneous measurement of multiple parameters (plasma concentration and glucose concentration) was performed. The numerical simulation results are beneficial to the applications of MIM waveguide structure in nanosensing and biosensing with time-sharing or simultaneous measurement of multiple parameters.
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Rohimah S, Tian H, Wang J, Chen J, Li J, Liu X, Cui J, Hao Y. Tunable multiple Fano resonances based on a plasmonic metal-insulator-metal structure for nano-sensing and plasma blood sensing applications. APPLIED OPTICS 2022; 61:1275-1283. [PMID: 35201006 DOI: 10.1364/ao.450084] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/01/2021] [Accepted: 01/17/2022] [Indexed: 06/14/2023]
Abstract
A base plasmonic metal-insulator-metal (MIM) waveguide structure consisting of a baffle waveguide and an obround-shaped resonator is designed to produce Fano resonance. The simulation results exhibit that double Fano resonances can be achieved. Based on this structure, an inner obround-shaped resonator is spliced to the former obround-shaped resonator through a slot resonator to form the expanded structure. Then quadruple Fano resonances are produced by the interference between the broadband continuous state arising from the baffle waveguide and the narrowband discrete state arising from the interaction among the inner obround-shaped resonator, the outer obround-shaped resonator, and the slot resonator. The Fano resonance and refractive index sensing characteristics are investigated, and the sensitivity and the figure of merit can reach 1636 nm/RIU and 33562, respectively. Furthermore, the structure filled with blood plasma can be used for detecting plasma concentrations with different refractive indices, and the sensitivity can reach 2.88nm⋅L/g. The proposed structure with the simple baffle waveguide and obround-shaped resonators may have potential applications in biosensing and nanoscale optical sensing.
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Li J, Chen J, Liu X, Tian H, Wang J, Cui J, Rohimah S. Optical sensing based on multimode Fano resonances in metal-insulator-metal waveguide systems with X-shaped resonant cavities. APPLIED OPTICS 2021; 60:5312-5319. [PMID: 34263768 DOI: 10.1364/ao.427862] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/14/2021] [Accepted: 05/26/2021] [Indexed: 06/13/2023]
Abstract
A plasmonic metal-insulator-metal (MIM) waveguide system is proposed, which is composed of a symmetrical X-shaped resonant cavity and a bus waveguide with a baffle, and its Fano resonance and optical sensing characteristics are investigated by using the finite element method (FEM). The results show that the system allows easy implementation of up to four Fano resonances, and the maximum refractive index sensitivity and figure of merit are 1303 nm/RIU and 3113, respectively. The influences of the geometric parameters of the system on the Fano resonances are also investigated, and further the independent adjustments of the Fano resonance line shape and wavelength are realized. Moreover, when an additional X-shaped resonant cavity is added to the system, more ultrasharp Fano resonances with considerable performances are obtained, which may enhance the parallel processing capability of the system. The proposed plasmonic MIM waveguide system may have potential applications in integrated photonic devices and nanoscale optical sensing.
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Liu X, Li J, Chen J, Rohimah S, Tian H, Wang J. Fano resonance based on D-shaped waveguide structure and its application for human hemoglobin detection. APPLIED OPTICS 2020; 59:6424-6430. [PMID: 32749309 DOI: 10.1364/ao.397976] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/19/2020] [Accepted: 06/19/2020] [Indexed: 06/11/2023]
Abstract
Fano resonance is a pervasive resonance phenomenon which can be applied to high sensitivity sensing, perfect absorption, electromagnetic-induced transparency, and slow-light photonic devices. In this paper, we propose a metal-insulator-metal (MIM) waveguide structure consisting of a D-shaped cavity and a bus waveguide with a silver-air-silver barrier. The Fano resonance can be achieved by the interaction between the D-shaped cavity and the bus waveguide. The finite element method is used to analyze the transmission characteristics and magnetic-field distributions of the structure in detail. Simulation results show the Fano resonance can be adjusted by altering the geometric parameters of the MIM waveguide structure or the refractive index of the D-shaped cavity. The maximum refractive index sensitivity of the structure can reach up to 1510 nm/RIU, and there is a good linear relationship between resonance wavelength and refractive index. Since it has good sensitivity and tunability, the MIM waveguide structure can be used in bio-sensing, such as human hemoglobin detection. We show its applicability for the detection of three different human blood groups as well.
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Chen Y, Chen L, Wen K, Hu Y, Lin W. Independently tunable Fano resonances in a metal-insulator-metal coupled cavities system. APPLIED OPTICS 2020; 59:1484-1490. [PMID: 32225407 DOI: 10.1364/ao.381381] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/24/2019] [Accepted: 01/05/2020] [Indexed: 06/10/2023]
Abstract
Herein, multiple Fano resonances with excellent ability to be tuned independently are produced in a sub-wavelength metal-insulator-metal system. The input and output waveguides are separated by a metal gap, and a stub and an end-coupled cavity are placed below and to the right side of the input waveguide, respectively, as discrete states. Owing to the mode interferences, double ultra-sharp and asymmetric Fano resonant peaks are observed in the transmission spectrum. Successfully, the basic structure is extended by two extra rectangular cavities, giving rise to four Fano resonances with high refractive index sensitivity and figure of merit. Due to the discrete modes of Fano resonances from different coupling cavities, their resonant wavelengths can be controlled independently, which can provide greater flexibility for tuning Fano resonances. The performances of the proposed structure are investigated by both the finite-difference time-domain method and the multimode interference coupled-mode theory. It is believed that the research can provide important guidance in designing Fano resonance structures, and the proposed structure has a wide application in sensors, switches, and nano-photonic integrated circuit devices.
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Cheng L, Wang Z, He X, Cao P. Plasmonic nanosensor based on multiple independently tunable Fano resonances. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2019; 10:2527-2537. [PMID: 31921531 PMCID: PMC6941414 DOI: 10.3762/bjnano.10.243] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/19/2019] [Accepted: 11/26/2019] [Indexed: 06/10/2023]
Abstract
A novel refractive index nanosensor with compound structures is proposed in this paper. It consists of three different kinds of resonators and two stubs which are side-coupled to a metal-dielectric-metal (MDM) waveguide. By utilizing numerical investigation with the finite element method (FEM), the simulation results show that the transmission spectrum of the nanosensor has as many as five sharp Fano resonance peaks. Due to their different resonance mechanisms, each resonance peak can be independently tuned by adjusting the corresponding parameters of the structure. In addition, the sensitivity of the nanosensor is found to be up to 1900 nm/RIU. For practical application, a legitimate combination of various different components, such as T-shaped, ring, and split-ring cavities, has been proposed which dramatically reduces the nanosensor dimensions without sacrificing performance. These design concepts pave the way for the construction of compact on-chip plasmonic structures, which can be widely applied to nanosensors, optical splitters, filters, optical switches, nonlinear photonic and slow-light devices.
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Affiliation(s)
- Lin Cheng
- Institute of Optoelectronics & Electromagnetic Information, Lanzhou University, Lanzhou 730000, China
| | - Zelong Wang
- Institute of Optoelectronics & Electromagnetic Information, Lanzhou University, Lanzhou 730000, China
| | - Xiaodong He
- Institute of Optoelectronics & Electromagnetic Information, Lanzhou University, Lanzhou 730000, China
| | - Pengfei Cao
- Institute of Optoelectronics & Electromagnetic Information, Lanzhou University, Lanzhou 730000, China
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Yang X, Hua E, Wang M, Wang Y, Wen F, Yan S. Fano Resonance in a MIM Waveguide with Two Triangle Stubs Coupled with a Split-Ring Nanocavity for Sensing Application. SENSORS 2019; 19:s19224972. [PMID: 31731585 PMCID: PMC6891347 DOI: 10.3390/s19224972] [Citation(s) in RCA: 18] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/30/2019] [Revised: 11/11/2019] [Accepted: 11/13/2019] [Indexed: 02/05/2023]
Abstract
Herein, a compact refractive index nanosensor comprising a metal- insulator- metal (MIM) waveguide with symmetric two triangle stubs coupled with a circular split-ring resonance cavity (CSRRC) is theoretically presented. An analysis of the propagation characteristics of the designed structure is discussed employing the finite element method (FEM). The calculation results revealed that a Fano resonance outline emerged, which results from an interaction between the continuous broadband state of the waveguide with two symmetric triangle stubs and the discrete narrowband state of the CSRRC. The influence of geometric parameters on sensing properties was studied in detail. The maximum sensitivity reached 1500 nm/RIU with a high figure of merit of 65.2. The presented structure has great applications for on-chip plasmonic nanosensors.
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Affiliation(s)
- Xiaoyu Yang
- School of Instrument and Electronics, North University of China, Taiyuan 030051, China; (X.Y.); (M.W.); (Y.W.); (F.W.)
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China;
| | - Ertian Hua
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China;
| | - Mengmeng Wang
- School of Instrument and Electronics, North University of China, Taiyuan 030051, China; (X.Y.); (M.W.); (Y.W.); (F.W.)
| | - Yifei Wang
- School of Instrument and Electronics, North University of China, Taiyuan 030051, China; (X.Y.); (M.W.); (Y.W.); (F.W.)
| | - Feng Wen
- School of Instrument and Electronics, North University of China, Taiyuan 030051, China; (X.Y.); (M.W.); (Y.W.); (F.W.)
| | - Shubin Yan
- School of Instrument and Electronics, North University of China, Taiyuan 030051, China; (X.Y.); (M.W.); (Y.W.); (F.W.)
- School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou 310018, China;
- Correspondence: ; Tel.: +86-186-3611-2255
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Lin G, Yang H, Deng Y, Wu D, Zhou X, Wu Y, Cao G, Chen J, Sun W, Zhou R. Ultra-compact high-sensitivity plasmonic sensor based on Fano resonance with symmetry breaking ring cavity. OPTICS EXPRESS 2019; 27:33359-33368. [PMID: 31878406 DOI: 10.1364/oe.27.033359] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/03/2019] [Accepted: 10/12/2019] [Indexed: 06/10/2023]
Abstract
Miniaturizing optical devices with desired functionality is a key prerequisite for nanoscale photonic circuits. Based on Fano resonance, an on-chip high-sensitivity sensor, composed of two waveguides coupling with a symmetry breaking ring resonator, is theoretically and numerically investigated. The established theoretical model agrees well with the finite-difference time-domain simulations, which reveals the physics of Fano resonance. Differing with the coupled cavities, the Fano resonance originates from the interference between symmetry-mode and asymmetry-mode in a single symmetry-broken cavity. The spectral responses and sensing performances of the plasmonic structure rely on the degree of asymmetry of cavity. In particular, the plasmonic sensor can detect the refractive index changes as small as 10-5, and the figure of merit (FOM) of symmetry-breaking cavity structure is 17 times larger than that of symmetrical cavity system. Additionally, the sensitivity to temperature of ethanol analyte achieves 0.701 nm/○C. Compared with the coupled cavities, the on-chip high-sensitivity sensor using a single cavity is more compact, which paves the way toward highly integrated photonic devices.
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Novel S-Bend Resonator Based on a Multi-Mode Waveguide with Mode Discrimination for a Refractive Index Sensor. SENSORS 2019; 19:s19163600. [PMID: 31430898 PMCID: PMC6720186 DOI: 10.3390/s19163600] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/29/2019] [Revised: 08/03/2019] [Accepted: 08/15/2019] [Indexed: 11/24/2022]
Abstract
In this paper, a multi-mode waveguide-based optical resonator is proposed for an integrated optical refractive index sensor. Conventional optical resonators have been studied for single-mode waveguide-based resonators to enhance the performance, but mass production is limited owing to the high fabrication costs of nano-scale structures. To overcome this problem, we designed an S-bend resonator based on a micro-scale multi-mode waveguide. In general, multi-mode waveguides cannot be utilized as optical resonators, because of a performance degradation resulting from modal dispersion and an output transmission with multi-peaks. Therefore, we exploited the mode discrimination phenomenon using the bending loss, and the resulting S-bend resonator yielded an output transmission without multi-peaks. This phenomenon is utilized to remove higher-order modes efficiently using the difference in the effective refractive index between the higher-order and fundamental modes. As a result, the resonator achieved a Q-factor and sensitivity of 2.3 × 103 and 52 nm/RIU, respectively, using the variational finite-difference time-domain method. These results show that the multi-mode waveguide-based S-bend resonator with a wide line width can be utilized as a refractive index sensor.
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