A High Sensitivity Temperature Sensing Probe Based on Microfiber Fabry-Perot Interference

Small-size temperature/high-pressure integrated sensor via flip-chip method

Hydraulic technology with smaller sizes and higher reliability trends, including fault prediction and intelligent control, requires high-performance temperature and pressure-integrated sensors. Current designs rely on planar wafer- or chip-level integration, which is limited by pressure range, chip size, and low reliability. We propose a small-size temperature/high-pressure integrated sensor via the flip-chip technique. The pressure and temperature units are arranged vertically, and the sensing signals of the two units are integrated into one plane through silicon vias and gold-gold bonding, reducing the lateral size and improving the efficiency of signal transmission. The flip-chip technique ensures a reliable electrical connection. A square diaphragm with rounded corners is designed and optimised with simulation to sense high pressure based on the piezoresistive effect. The temperature sensing unit with a thin-film platinum resistor measures temperature and provides back-end high-precision compensation, which will improve the precision of the pressure unit. The integrated chip is fabricated by MEMS technology and packaged to fabricate the extremely small integrated sensor. The integrated sensor is characterised, and the pressure sensor exhibits a sensitivity and sensitivity drift of 7.97 mV/MPa and -0.19% FS in the range of 0-20 MPa and -40 to 120 °C. The linearity, hysteresis, repeatability, accuracy, basic error, and zero-time drift are 0.16% FS, 0.04% FS, 0.06% FS, 0.18% FS, ±0.23% FS and 0.04% FS, respectively. The measurement error of the temperature sensor and temperature coefficient of resistance is less than ±1 °C and 3142.997 ppm/°C, respectively. The integrated sensor has broad applicability in fault diagnosis and safety monitoring of high-end equipment such as automobile detection, industrial equipment, and oil drilling platforms.

PDMS-filled micro-spring Fabry-Perot cavity for temperature sensing

A highly sensitive fiber-tipped temperature sensor based on polydimethylsiloxane (PDMS)-filled spring Fabry-Perot (FP) cavity has been proposed and experimentally demonstrated. The spring FP cavity is first fabricated on the fiber endface by the two-photon polymerization lithography. After that, PDMS is filled into the cavity to drive the elongation of the flexible spring and thus to functionalize high-performance temperature sensing. Benefiting from the large thermal expansion coefficient of PDMS, the proposed sensor exhibits a maximal temperature sensitivity of 704.3 pm/°C with excellent operating repeatability and stability. Besides, by selecting a proper spring constant k, the FP sensitivity can be precisely adjusted in the range of 100-700 pm/°C. Thanks to the advantages of high fabrication accuracy and designable property, the proposed sensor could promote numerous usages for customizable temperature sensing.

Ultra-sensitive temperature and pressure sensor based on PDMS-based FPI and Vernier effect

An ultra-sensitive sensor, based on two Fabry-Perot interferometers (FPIs), has been realized for temperature and pressure sensing. A polydimethylsiloxane (PDMS)-based FPI₁ was used as a sensing cavity, and a closed capillary-based FPI₂ was used as a reference cavity for its insensitivity to both temperature and pressure. The two FPIs were connected in series to obtain a cascaded FPIs sensor, showing a clear spectral envelope. The temperature and pressure sensitivities of the proposed sensor reach up to 16.51 nm/°C and 100.18 nm/MPa, which are 25.4 and 21.6 times, respectively, larger than these of the PDMS-based FPI₁, showing a great Vernier effect.

Fabry-Pérot angle sensor using a mode-locked femtosecond laser source

An angle sensor based on multiple beam interference of a Fabry-Pérot etalon employing a mode-locked femtosecond laser as the measurement beam is proposed. Output angles are evaluated by using estimated local maxima within a measurement bandwidth of an output fringe spectrum detected by an optical spectrum analyzer. In the proposed method, fringe spectra produced by beams from transmittance and a reflectance side of the Fabry-Pérot etalon are detected individually, and intensities of two spectra are divided to increase the visibility by narrowing a spectrum width. Confirmation of an increase in the visibility is conducted by comparing full width half maximum values of spectra obtained by a constructed optical setup, and evaluation accuracies were compared by repeating measurements for 100 times. The output angle using estimated local maxima of the divided spectra is then evaluated to verify the feasibility of the proposed method. As a result, it is confirmed that the proposed method improves the accuracy of angle determination by one order of magnitude.

Fabry-Perot interferometers for highly-sensitive multi-point relative humidity sensing based on Vernier effect and digital signal processing

A highly sensitive relative humidity (RH) sensor based on Fabry-Perot interferometers (FPI) is proposed and experimentally demonstrated. The sensor is fabricated by splicing a segment of hollow core Bragg fiber (HCBF) with single mode fiber (SMF) and functionalized with chitosan and ultraviolet optical adhesive (UVOA) composite at the end of HCBF to form a hygroscopic polymer film. The reflection beams from the splicing point and the two surfaces of the polymer film generate the Vernier effect in the reflection spectrum, which significantly improves the humidity sensitivity of the sensor. To demodulate the envelope based on the Vernier effect and realize multi-point sensing, a digital signal processing (DSP) algorithm is proposed to process the reflection spectrum. The performance of the DSP algorithm is theoretically analyzed and experimentally verified. The proposed sensor demonstrates a high sensitivity of 1.45 nm/% RH for RH ranging from 45% RH to 90% RH. The compact size, high sensitivity and multiplexing capability make this sensor a promising candidate for RH monitoring. Furthermore, the proposed DSP can potentially be applied to other sensors based on the Vernier effect to analyze and extract valuable information from the interference spectrum.

Highly Sensitive Temperature Sensor Based on Cascaded Polymer-Infiltrated Fiber Mach–Zehnder Interferometers Operating near the Dispersion Turning Point

High-accuracy temperature measurement plays a vital role in biomedical, oceanographic, and photovoltaic industries. Here, a highly sensitive temperature sensor is proposed and demonstrated based on cascaded polymer-infiltrated Mach–Zehnder interferometers (MZIs), operating near the dispersion turning point. The MZI was constructed by splicing a half-pitch graded index fiber (GIF) and two sections of single-mode fiber and creating an inner air cavity based on femtosecond laser micromachining. The UV-curable polymer-infiltrated air cavity functioned as one of the interference arms of MZI, and the residual GIF core functioned as the other. Two MZIs with different cavity lengths and infiltrated with the UV-curable polymers, having the refractive indexes on the different sides of the turning point, were created. Moreover, the effects of the length and the bending way of transmission SMF between the first and the second MZI were studied. As a result, the cascaded MZI temperature sensor exhibits a greatly enhanced temperature sensitivity of −24.86 nm/°C based on wavelength differential detection. The aforementioned result makes it promising for high-accuracy temperature measurements in biomedical, oceanographic, and photovoltaic applications.

High-Precision Cavity Length Demodulation Method for Fiber-Optic Fabry-Perot Sensors Based on Dual Superluminescent Diodes

A high-precision cross-correlation cavity length demodulation method for fiber-optic Fabry-Perot (F-P) sensors based on two different wavelength superluminescent diodes (SLDs) was proposed. This method can solve the problem of low demodulation accuracy caused by the difficulty in identifying the maximum cross-correlation coefficient when the cavity length of the fiber-optic F-P fiber sensor is too short, or when the spectral bandwidth of the illuminating single-light source is too narrow. This demodulation method is based on the principle that the two main peaks of the two cross-correlation curves corresponding to two different spectral ranges should match, and the average value of the two calculated cavity lengths corresponding to the two matched peaks is determined as the real cavity length. The cavity length demodulation of fiber-optic F-P sensors in the range of 20-200 μm shows a maximum measurement deviation of 0.008 μm, which is significantly smaller than the demodulation result obtained with a single light source, and the standard deviation of the measurement results is only approximately 0.0005 μm, indicating the high precision and stability of a dual SLD cross-correlation demodulation method.

Study of the Vernier Effect Based on the Fabry–Perot Interferometer: Methodology and Application

The optical Vernier effect is a powerful tool for improving the sensitivity of an optical sensor, which relies on the use of two sensor units with slightly detuned frequencies. However, an improper amount of detuning can easily cause the Vernier effect to be unusable. In this work, the effective generation range of the Vernier effect and the corresponding interferometer configuration are suggested and experimentally demonstrated through a tunable cascaded Fabry–Perot interferometer structure. We further demonstrate a practical method to increase the magnification factor of the Vernier effect based on the device bandwidth. Only the optical path length of an interferometer probe and the sensitivity of the measurement parameters are needed to design this practical interferometer based on the Vernier effect. Our results provide potential insights for the sensing applications of the Vernier effect.

In-Fiber Interferometric-Based Sensors: Overview and Recent Advances

In-fiber interferometric-based sensors are a rapidly growing field, as these sensors exhibit many desirable characteristics compared to their regular fiber-optic counterparts and are being implemented in many promising devices. These sensors have the capability to make extremely accurate measurements on a variety of physical or chemical quantities such as refractive index, temperature, pressure, curvature, concentration, etc. This article is a comprehensive overview of the different types of in-fiber interferometric sensors that presents and discusses recent developments in the field. Basic configurations, a brief approach of the operating principle and recent applications are introduced for each interferometric architecture, making it easy to compare them and select the most appropriate one for the application at hand.

Special Issue "Fiber Optic Sensors and Applications": An Overview

We present here the recent advance in exploring new detection mechanisms, materials, processes, and applications of fiber optic sensors.

Highly Sensitive Temperature Sensing Performance of a Microfiber Fabry-Perot Interferometer with Sealed Micro-Spherical Reflector

A temperature probe has been proposed by inserting a microfiber taper into a silica hollow core fiber with a microsphere end. The sealed air cavity in the microsphere and the inserted microfiber acted as the two reflectors of a Fabry-Perot interferometer, respectively. The contribution of both microfiber diameter and cavity length on the interference spectra was analyzed and discussed in detail. The temperature change was experimentally determined by monitoring the wavelength location of the special resonance dip. By filling the air cavity with poly-dimethylsiloxane (PDMS), a high temperature sensitivity of 3.90 nm/°C was experimentally demonstrated. This temperature probe with the diameter of 150 μm and length of 10 mm will be a promising candidate for exploring the miniature or implantable sensors.