Broadband Time-Resolved Absorption and Dispersion Spectroscopy of Methane and Ethane in a Plasma Using a Mid-Infrared Dual-Comb Spectrometer

Removing biases in dual frequency comb spectroscopy due to digitizer nonlinearity

Operation of any dual-comb spectrometer requires digitization of the interference signal before further processing. Nonlinearities in the analog-to-digital conversion can alter the apparent gas concentration by multiple percent, limiting both precision and accuracy of this technique. This work describes both the measurement of digitizer nonlinearity and the development of a model that quantitatively describes observed concentration bias over a range of conditions. We present hardware methods to suppress digitizer-induced bias of concentration retrievals below 0.1%.

Fast gas sensing scheme with multi-component gas measurement capacity based on non-dispersive frequency comb spectroscopy (ND-FCS)

A fast gas sensing scheme based on a non-dispersive frequency comb spectroscopy (ND-FCS) is proposed and experimentally demonstrated. Its capacity for multi-component gas measurement is experimentally investigated as well, by using the time-division-multiplexing (TDM) method to realize specific wavelength selection of the fiber laser optical frequency comb (OFC). A dual-channel optical fiber sensing scheme is established with a sensing path consisting of a multi-pass gas cell (MPGC), and a reference path with a calibrated signal to track the repetition frequency drift of the OFC for a real-time lock-in compensation and system stabilization. The long-term stability evaluation and the simultaneous dynamic monitoring are carried out, with the target gases of ammonia (NH₃), carbon monoxide (CO) and carbon dioxide (CO₂). The fast CO₂ detection in human breath is also conducted. The experimental results show that at an integration time of 10 ms, the detection limits of the three species are evaluated to be 0.0048%, 0.1869% and 0.0467%, respectively. A low minimum detectable absorbance (MDA) down to 2.8 × 10^-4 can be achieved and a dynamic response with millisecond time can be realized. Our proposed ND-FCS exhibits excellent gas sensing performance with merits of high sensitivity, fast response and long-term stability. It also shows great potential for multi-component gas monitoring in atmospheric monitoring applications.

Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process

The importance of monitoring the electron density uniformity of plasma has attracted significant attention in material processing, with the goal of improving production yield. This paper presents a non-invasive microwave probe for in-situ monitoring electron density uniformity, called the Tele-measurement of plasma Uniformity via Surface wave Information (TUSI) probe. The TUSI probe consists of eight non-invasive antennae and each antenna estimates electron density above the antenna by measuring the surface wave resonance frequency in a reflection microwave frequency spectrum (S11). The estimated densities provide electron density uniformity. For demonstration, we compared it with the precise microwave probe and results revealed that the TUSI probe can monitor plasma uniformity. Furthermore, we demonstrated the operation of the TUSI probe beneath a quartz or wafer. In conclusion, the demonstration results indicated that the TUSI probe can be used as an instrument for a non-invasive in-situ method for measuring electron density uniformity.

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density.

Mid-infrared supercontinuum-based Fourier transform spectroscopy for plasma analysis

Broadband mid-infrared (MIR) spectroscopy is a well-established and valuable diagnostic technique for reactive plasmas. Plasmas are complex systems and consist of numerous (reactive) types of molecules; it is challenging to measure and control reaction specificity with a good sensitivity. Here, we demonstrate the first use of a novel MIR supercontinuum (SC) source for quantitative plasma spectroscopy. The SC source has a wide spectral coverage of 1300–2700 cm⁻¹ (wavelength range 3.7–7.7 μm), thus enabling broadband multispecies detection. The high spatial coherence of the MIR SC source provides long interaction path lengths, thereby increasing the sensitivity for molecular species. The combination of such a SC source with a custom-built FTIR spectrometer (0.1 cm⁻¹ spectral resolution) allows detection of various gases with high spectral resolution. We demonstrate its potential in plasma applications by accurate identification and quantification of a variety of reaction products (e.g. nitrogen oxides and carbon oxides) under low-pressure conditions, including the molecular species with overlapping absorbance features (e.g. acetone, acetaldehyde, formaldehyde, etc.).

Frequency axis for swept dual-comb spectroscopy with quantum cascade lasers

In dual-comb spectroscopy, there is a one-to-one map between the frequencies of the measured beat notes and the frequencies of the optical comb lines. Its determination usually involves the use of one or more reference lasers with known frequencies. Quantum cascade laser frequency combs, however, are often operated in a free-running mode, and without a reference, the determination of the RF-to-optical frequency map is not trivial. Here, we propose a method by which the comb shift is measured with an unbalanced Mach-Zehnder interferometer, and the spectral point spacing is determined through the intermode beat measured on the laser electrodes. The frequency axis is accurate within ∼ 0.001 cm^-1.