Design of Flexible Pressure Sensor Based on Conical Microstructure PDMS-Bilayer Graphene

Non-Secondary Activating Flexible Liquid Metal Sensors with Excellent Waterproof Capability for Detection of Human Signals

In recent years, flexible sensors have gained increasing attention due to their excellent flexibility. Liquid metal (LM) has gradually become an ideal material for fabricating flexible sensors, thanks to its outstanding electrical conductivity and low-temperature fluidity. However, oxidation and the need for secondary activation of LM present significant technical challenges in the development of flexible LM sensors. In this paper, we introduce a simple method that integrates the flexibility of polydimethylsiloxane (PDMS) to fabricate flexible LM sensors with a sandwich structure. The sandwich-structured sensor demonstrates superior conductivity and effectively prevents LM oxidation and the need for secondary mechanical activation. Additionally, the PDMS-LM sensor exhibits excellent performance under various conditions, with a fast response time to mechanical stimuli (0.5 s), as well as outstanding durability and stability (>10,000 s of cycling). These remarkable properties give the sandwich PDMS-LM sensor great potential for the field of human motion monitoring, bringing further development and direction for intelligent sensing technology.

Enhanced Sensitivity of a Resistive Pressure Sensor Based on a PEDOT:PSS Thin Film on PDMS with a Random-Height Micropyramid Structure

The use of flexible pressure sensors has become increasingly widespread in a variety of applications, including wearable electronics and electronic skin. These sensors need to exhibit high sensitivity, wide detection limits, a fast response time, a linear response, and mechanical stability. In this study, we demonstrate a resistive pressure sensor based on randomly arranged micropyramid polydimethylsiloxane (PDMS) with a conductive poly(3,4-ethylenedioxythiophene): polystyrenesulfonate (PEDOT:PSS) thin film with a sensitivity of 391 kPa-1, a response time of 52.91 ms, a recovery time of 4.38 ms, and a limit of detection (LOD) of 0.35 kPa. Electrodes are then connected to a pair of the proposed resistive pressure sensors that face each other to fabricate a pressure sensing device. We examine various characteristics of the fabricated device, including the changes observed when applying loads ranging from 0 to 2.58 kPa. The proposed sensor exhibits high sensitivity and a rapid response time.

Flexible Pressure Sensors in Human-Machine Interface Applications

Flexible sensors are highly flexible, malleable, and capable of adapting todifferent shapes, surfaces, and environments, which opens a wide range ofpotential applications in the field of human-machine interface (HMI). Inparticular, flexible pressure sensors as a crucial member of the flexiblesensor family, are widely used in wearable devices, health monitoringinstruments, robots and other fields because they can achieve accuratemeasurement and convert the pressure into electrical signals. The mostintuitive feeling that flexible sensors bring to people is the change ofhuman-machine interface interaction, from the previous rigid interaction suchas keyboard and mouse to flexible interaction such as smart gloves, more inline with people's natural control habits. Many advanced flexible pressuresensors have emerged through extensive research and development, and to adaptto various fields of application. Researchers have been seeking to enhanceperformance of flexible pressure sensors through improving materials, sensingmechanisms, fabrication methods, and microstructures. This paper reviews the flexible pressure sensors in HMI in recent years, mainlyincluding the following aspects: current cutting-edge flexible pressuresensors; sensing mechanisms, substrate materials and active materials; sensorfabrication, performances, and their optimization methods; the flexiblepressure sensors for various HMI applications and their prospects.

Highly Sensitive Flexible Pressure Sensors with Hybrid Microstructures Similar to Volcano Sponge

Preparing hybrid microstructures on flexible substrates is a crucial approach to achieving highly sensitive flexible pressure sensors. However, the preparation of hybrid microstructures on soft materials often faces complex, time-consuming, and costly problems, which hampers the advancement of highly sensitive flexible sensors. Herein, based on a 3D-printing template and a household microwave oven, a simple, green, and one-step microwave irradiation process using glucose porogen is applied to develop a flexible pressure sensor with a volcano-sponge-like porous dome structure based on porous polydimethylsiloxane (PDMS). Due to the easily deformable porous dome on the porous PDMS substrate, the flexible pressure sensor showcases exceptional sensitivity of 611.85 kPa-1 in 0-1 and 50.31 kPa-1 over a wide range of 20-80 kPa. Additionally, the sensor takes only 43 ms to respond, 123 ms to recover, and presents excellent stability (>1100 cycles). In application testing, the sensor effectively captures pulse signals, speech signals, tactile signals from a mechanical gripper, and gesture signals, demonstrating its potential applications in medical diagnosis and robotics. In conclusion, the microwave irradiation method based on template and glucose porogen provides a new way for the simple, low-cost, and green preparation of porous-surface hybrid microstructures on polymers and high-performance flexible pressure sensors.

Flexible Piezoresistive Sensors from Polydimethylsiloxane Films with Ridge-like Surface Structures

Developing flexible sensors and actuators is of paramount importance for wearable devices and systems. In this research, we developed a simple and facile technique to construct flexible piezoresistive sensors from polydimethylsiloxane films with ridge-like surface structures and laser-induced porous graphene. Using a replication strategy, we prepared the ridge-like surface structures from sandpapers. The piezoresistive sensors exhibit excellent sensitivity with a response time of less than 50 ms and long-term cyclic stability under mechanical loading. The smallest weight they can sense is ~96 mg. We demonstrated applications of the piezoresistive sensors in the sensing of bio-related activities, including muscle contraction, finger flexion, wrist flexion, elbow bending, knee bending, swallowing, respiration, sounds, and pulses.

Flexible and Stretchable Pressure Sensors: From Basic Principles to State-of-the-Art Applications

Flexible and stretchable electronics have emerged as highly promising technologies for the next generation of electronic devices. These advancements offer numerous advantages, such as flexibility, biocompatibility, bio-integrated circuits, and light weight, enabling new possibilities in diverse applications, including e-textiles, smart lenses, healthcare technologies, smart manufacturing, consumer electronics, and smart wearable devices. In recent years, significant attention has been devoted to flexible and stretchable pressure sensors due to their potential integration with medical and healthcare devices for monitoring human activity and biological signals, such as heartbeat, respiratory rate, blood pressure, blood oxygen saturation, and muscle activity. This review comprehensively covers all aspects of recent developments in flexible and stretchable pressure sensors. It encompasses fundamental principles, force/pressure-sensitive materials, fabrication techniques for low-cost and high-performance pressure sensors, investigations of sensing mechanisms (piezoresistivity, capacitance, piezoelectricity), and state-of-the-art applications.

Process method of Si3N4 ceramic brazing sealed cavity for high-temperature application

The process method of a Si3N4 ceramic sealed cavity is realized by vacuum brazing and chemical reaction at 1,100°C and 0.5 MPa pressure. Through the combination of Si3N4 ceramic polishing and thinning, inductively coupled plasma etching, and high-temperature metal filler (Ti-Zr-Cu-Ni) brazing process, a vacuum-sealed cavity suitable for high-temperature environments was prepared. The cross section of the bonding interface was characterized by scanning electron microscope (SEM) and energy dispersive spectrometer (EDS), which indicated that the two Si3N4 ceramic were well bonded, the cavity structure remained intact, and the bonding interface strength exceeded 5.13 MPa. Furthermore, it retained its strong bonding strength after in high-temperature environments of 1,000, 1,050, and 1,100°C for 1 h. This indicates that a brazed vacuum-sealed cavity can be used in high-temperature environments. Through the proposed method, pressure sensor that can withstand high temperatures can be developed.

Research on the High Sensitivity Detection Method of Carbon Nanotube/Polydimethylsiloxane Composites Structure

In this paper, a carbon nanotube (CNT)/polydimethylsiloxane (PDMS) composite force-sensitive structure with good flexibility is proposed and fabricated, and the measurement of scanning electron microscopy (SEM) and Raman are carried out. The equivalent circuit of force-sensitive test of structure is performed and analyzed under direct current (DC) and alternating current (AC) conditions. Under AC conditions, experimental results further show that the sensitivity and sensitivity factors of force-sensitive structures are 0.15 KPa-1 and 2.17 in the pressure range of 600-1000 KPa compressive stress and 20-50% tensile stress, respectively. These results are increased by 36.4% and 38.2% compared to the results of compressive stress (0.11 KPa-1) and tensile stress (1.57) under DC conditions, respectively. It shows that the carbon nanotube/PDMS composite has higher test accuracy under AC conditions.

Applications of Graphene-Based Materials in Sensors: A Review

With the research and the development of graphene-based materials, new sensors based on graphene compound materials are of great significance to scientific research and the consumer market. However, in the past ten years, due to the requirements of sensor accuracy, reliability, and durability, the development of new graphene sensors still faces many challenges in the future. Due to the special structure of graphene, the obtained characteristics can meet the requirements of high-performance sensors. Therefore, graphene materials have been applied in many innovative sensor materials in recent years. This paper introduces the important role and specific examples of sensors based on graphene and its base materials in biomedicine, photoelectrochemistry, flexible pressure, and other fields in recent years, and it puts forward the difficulties encountered in the application of graphene materials in sensors. Finally, the development direction of graphene sensors has been prospected. For the past two years of the COVID-19 epidemic, the detection of the virus sensor has been investigated. These new graphene sensors can complete signal detection based on accuracy and reliability, which provides a reference for researchers to select and manufacture sensor materials.

Fabrication of Suspended PMMA-Graphene Membrane for High Sensitivity LC-MEMS Pressure Sensor

The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in biomedical applications, which require a highly-sensitive sensor to measure low-pressure variations. This study presents the microfabrication of an LC wireless MEMS pressure sensor that utilizes a PMMA-Graphene (PMMA/Gr) membrane supported on a silicon trench as the deformable structure. The (PMMA/Gr) membrane was employed to increase the sensor's sensitivity due to its very low elastic modulus making it easy to deform under extremely low pressure. The overall size of the fabricated sensor was limited to 8 mm × 8 mm. The experimental results showed that the capacitance value changed from 1.64 pF to 12.32 pF when the applied pressure varied from 0 to 5 psi. This capacitance variation caused the frequency response to change from 28.74 MHz to 78.76 MHz. The sensor sensitivity was recorded with a value of 193.45 kHz/mmHg and a quality factor of 21. This study concludes that the (PMMA/Gr) membrane-based LC-MEMS pressure sensor has been successfully designed and fabricated and shows good potential in biomedical sensor applications.

Micellar Carriers of Active Substances Based on Amphiphilic PEG/PDMS Heterograft Copolymers: Synthesis and Biological Evaluation of Safe Use on Skin

Amphiphilic copolymers containing polydimethylsiloxane (PDMS) and polyethylene glycol methyl ether (MPEG) were obtained via an azide-alkyne cycloaddition reaction between alkyne-functionalized copolymer of MPEG methacrylate and azide-functionalized PDMS. “Click” reactions were carried out with an efficiency of 33–47% increasing grafting degrees. The grafted copolymers were able to carry out the micellization and encapsulation of active substances, such as vitamin C (VitC), ferulic acid (FA) and arginine (ARG) with drug loading content (DLC) in the range of 2–68% (VitC), and 51–89% (FA or ARG). In vitro release studies (phosphate buffer saline, PBS; pH = 7.4 or 5.5) demonstrated that the maximum release of active substances was mainly after 1–2 h. The permeability of released active substances through membrane mimicking skin evaluated by transdermal tests in Franz diffusion cells indicated slight diffusion into the solution (2–16%) and their remaining in the membrane. Studies on the selected carrier with FA showed no negative effect on cell viability, proliferation capacity or senescence, as well as cell apoptosis/necrosis differences or cell cycle interruption in comparison with control cells. These results indicated that the presented micellar systems are good candidates for carriers of cosmetic substances according to physicochemical characterization and biological studies.