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Zhang Z, Zhao D, He H, Tang L, He Q. Analysis of Noise-Detection Characteristics of Electric Field Coupling in Quartz Flexible Accelerometer. MICROMACHINES 2023; 14:535. [PMID: 36984945 PMCID: PMC10058819 DOI: 10.3390/mi14030535] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/01/2023] [Revised: 02/22/2023] [Accepted: 02/22/2023] [Indexed: 06/18/2023]
Abstract
The internal electric field coupling noise of a quartz flexible accelerometer (QFA) restricts the improvement of the measurement accuracy of the accelerometer. In this paper, the internal electric field coupling mechanism of a QFA is studied, an electric field coupling detection noise model of the accelerometer is established, the distributed capacitance among the components of the QFA is simulated, the structure of the detection noise transfer system of different carrier modulation differential capacitance detection circuits is analyzed, and the influence of each transfer chain on the detection noise is discussed. The simulation results of electric field coupling detection noise show that the average value of detection noise can reach 41.7 μg, which is close to the effective resolution of the QFA, 50 μg. This confirms that electric field coupling detection noise is a non-negligible factor affecting the measurement accuracy of the accelerometer. A method of adding a high-pass filter to the front of the phase-shifting circuit is presented to suppress the noise of electric field coupling detection. This method attenuates the average value of the detected noise by about 78 dB, and reduces the average value of the detected noise to less than 0.1 μg, which provides a new approach and direction for effectively breaking through the performance of the QFA.
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Affiliation(s)
- Zhigang Zhang
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Dongxue Zhao
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Huiyong He
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Lijun Tang
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Qian He
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
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Cold Starting Temperature Drift Modeling and Compensation of Micro-Accelerometer Based on High-Order Fourier Transform. MICROMACHINES 2022; 13:mi13030413. [PMID: 35334705 PMCID: PMC8951622 DOI: 10.3390/mi13030413] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/31/2022] [Revised: 03/01/2022] [Accepted: 03/03/2022] [Indexed: 12/10/2022]
Abstract
The traditional temperature modeling method is based on the full heating of the accelerometer to achieve thermal balance, which is not suitable for the cold start-up phase of the micro-accelerometer. For decreasing the complex temperature drift of the cold start-up phase, a new temperature compensation method based on a high-order Fourier transform combined model is proposed. The system structure and repeatability test of the micro digital quartz flexible accelerometer are provided at first. Additionally, we analyzed where the complex temperature drift of the cold start-up phase comes from based on the system structure and repeatability test. Secondly, a high-order temperature compensation model combined with K-means clustering and the symbiotic organisms search (SOS) algorithm is established with repeatability test data as training data. To verify the proposed temperature compensation model, a test platform was built to transmit the measured values before and after compensation with the proposed Fourier-related model and the other time-related model, which is also a model aiming at temperature compensation in the cold start-up phase. The experimental results indicate that the proposed method achieves better compensation accuracy compared with the traditional temperature compensation methods and the time-related compensation model. Furthermore, the compensation for the cold start-up phase has no effect on the original accuracy over the whole temperature range. The stability of the accelerometer can be significantly improved to about 30 μg in the start-up phase of different temperatures after compensation.
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Ferri G, Barile G, Leoni A. Electronics for Sensors. SENSORS 2021; 21:s21062226. [PMID: 33806723 PMCID: PMC8005044 DOI: 10.3390/s21062226] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Download PDF] [Subscribe] [Scholar Register] [Received: 03/11/2021] [Accepted: 03/18/2021] [Indexed: 11/16/2022]
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