An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation

Three-axis angle measurement method based on an optical wedge

A three-axis angle measurement method is proposed using an optical wedge as a reflector. In this paper, the mathematical model of three-axis angle solving corresponding to the method is derived, and it is verified and corrected by establishing an optical simulation model, and, finally, the feasibility and measurement accuracy of the method are verified by using a principle prototype. The experimental results show that the RMS values of the measurement errors of pitch angle α, yaw angle β, and roll angle γ are 6.27 ' ' , 4.35 ' ' , and 17.68 ' ' , respectively, within the measurement range of ±2∘, and the measurement accuracy is insensitive to the measurement distance.

Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser

Two algorithms of data processing are proposed to shorten the unmeasurable dead-zone close to the zero-position of measurement, i.e., the minimum working distance of a dispersive interferometer using a femtosecond laser, which is a critical issue in millimeter-order short-range absolute distance measurement. After demonstrating the limitation of the conventional data processing algorithm, the principles of the proposed algorithms, namely the spectral fringe algorithm and the combined algorithm that combines the spectral fringe algorithm with the excess fraction method, are presented, together with simulation results for demonstrating the possibility of the proposed algorithms for shortening the dead-zone with high accuracy. An experimental setup of a dispersive interferometer is also constructed for implementing the proposed data processing algorithms over spectral interference signals. Experimental results demonstrate that the dead-zone using the proposed algorithms can be as small as half of that of the conventional algorithm while measurement accuracy can be further improved using the combined algorithm.

Confocal probe based on the second harmonic generation for measurement of linear and angular displacements

A measurement method based on a confocal probe on the second harmonic generation that can measure linear and angular displacements in the focusing point is proposed. In the proposed method, a pinhole or an optical fiber placed in front of the detector in conventional confocal probes is replaced by a nonlinear optical crystal, which is utilized as a medium generating second harmonic wave whose light intensity changes by the linear and angular displacements of a target under measurement. The feasibility of the proposed method is verified by theoretical calculations and experiments with the newly designed optical setup. Experimental results have demonstrated that the developed confocal probe has a resolution of 20 nm and 5 arc-seconds for measurement of linear and angular displacements, respectively.

A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser

An optical angle sensor based on the collimated mode-locked femtosecond laser (Fs) beam, in which the angle measurement is carried out by observing the second harmonic wave generated by irradiating the Fs beam towards MgO:LiNbO3 crystal, is proposed. The angle detection is demonstrated by identifying the second harmonic generation (SHG) spectrum peaks against the angular position of the rotating stage-mounted MgO:LiNbO3 crystal that represents the measurement object. The MgO:LiNbO3 with a length of 2 mm, a cut-off angle of 47°, a diameter of 5 mm, and 5% of MgO:LN, is rotated within the phase-matching angle over a wavelength range from 1480 nm to 1640 nm. Angle measurement is also carried out by placing the crystal at different positions along the laser beam propagation direction to confirm the feasibility of the angle sensor where the measurement range, measurement sensitivity, and resolution of the proposed method are also evaluated. The result shows that the proposed angle sensor can overcome the working distance limitation of conventional angle sensors and has no specific material target requirement. Since the configuration of the proposed angle sensor is not limited by the specification of the measurement target, it is expected to have wide potential applications, especially in the manufacturing process and inspection process.

Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe

This paper proposes to utilize a femtosecond Maker fringe for angular measurement to expand the measurement range by using the characteristic of the multiple visible peaks in the Maker fringe. Four different z-cut nonlinear materials and three different polarization combinations of SHG were considered in the study, and various theoretical results are calculated for both the intensity-based angle measurement and the frequency-domain angle measurement. As a result, the p-s polarization shows a significant angle dependence in the range of ±20° compared with the other polarization. In addition, the BBO and KDP are superior to the other investigated materials because of the relatively higher sensitivity and visibility. The refractive index difference was introduced in this paper, and it was applied to explain the angle measurement performance of the Maker fringe successfully.