A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor

A Novel Design Nomogram for Optimization of Micro Search Coil Magnetometer for Energy Monitoring in Smart Buildings

In this paper, a new analytical method to achieve the maximum signal-to-noise ratio (SNR) of a micro search coil magnetometer (µSCM) is presented. A planar spiral inductor was utilized to miniaturize conventional bulky search coil magnetometers. First, dimensional analysis was applied to identify three dimensionless parameters for the µSCM's key performance indices (sensitivity (S_e), noise, and SNR). The effect of the parameters on the µSCM's performance was carefully investigated, and a novel 4D nomogram was developed. Furthermore, an SNR analysis considering noise sources of a low-noise amplifier was performed. By combining the results from the nomogram and the effect of the noise sources from the amplifier circuit, optimum values for the dimensionless parameters were calculated. According to the calculation results, the dominant noise source varied with an increase in the track width ratio to the outer diameter. Seven different samples were fabricated by a single-mask lithography process. The sensitivity of 1612 mV/mT was demonstrated at a 50 Hz input magnetic field, which was better than the previous µSCM (S_e = 6.5 mV/mT) by more than 2 orders of magnitude. Finally, one of the fabricated µSCMs was employed to measure the online power consumption of a personal computer while different types of software were running.

Multiple Quartz Crystals Connected in Parallel for High-Resolution Sensing of Capacitance Changes

We present a new highly sensitive, low-value capacitance sensor method that uses multiple quartz crystals connected in parallel inside the oscillator. In the experimental setup, the measured (sensible) reactance (capacitance) is connected in parallel to the total shunt capacitance of the quartz crystals, oscillating in the oscillator. Because AT-cut crystals have a certain nonlinear frequency−temperature dependence, we use the switching mode method, by which we achieve a temperature compensation of the AT-cut crystals’ frequency−temperature characteristics in the temperature range between 0−50 °C. The oscillator switching method also compensates for any other influences on the frequency of the oscillator, such as ageing of the crystals and oscillator elements, supply voltage fluctuations, and other parasitic impedances in the oscillating circuit. Subsequently using two 50-ms-delayed switches between the measuring and reference capacitors, the experimental error in measuring the capacitance is lowered for measurements under a dynamic temperature variation in the range of 0−50 °C. The experimental results show that the switching method, which includes a multiple quartz connection and high-temperature compensation improvement of the quartz crystals’ characteristics, enables a sub-aF resolution. It converts capacitance changes in the range 10 zF−200 fF to frequencies in the range 4 kHz−100 kHz.