Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature Measurement

Effect of Surface Topology on the Apparent Thermal Diffusivity of Thin Samples at LFA Measurements

This paper deals with the problem of the influence of surface topography on the results of thermal diffusivity measurements when determined using the instantaneous surface heat source method, also called the pulse method. The analysis was based on numerical tests carried out using Comsol Multiphysics software. The results of experimental investigations on the actual material structure using an electron microscope, an optical microscope and a profilometer were used to develop a numerical model. The influence of the non-uniformity of the surface of the tested sample on the determined values of half-time of the thermal response of the sample’s rough surface to the impulse forcing on the opposing flat surface was determined by developing the data for simulated measurements. The effect of the position of the response data reading area on the obtained simulation results was also analyzed. The obtained results can be used to improve the accuracy of experimental heat transfer studies performed on thin-film engineering structures depending on the uniformity and parallelism of the material applied to engineering structures. The difference in half-life determination error results for various analyzed models can be as high as 16.7%, depending on the surface from which the responses of the heating impulse are read. With an equivalent model in which 10% of the material volume corresponds to the rough part as a single inclusion, hemisphere, the error in determining thermal diffusivity was equal to 3.8%. An increase in the number of inclusions with smaller weight reduces an error in the determination of thermal diffusivity, as presented in the paper.