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Dąbrowski A, Nawrot W, Czok M, Babij M, Bielówka P, Malecha K. LTCC Strip Electrode Arrays for Gas Electron Multiplier Detectors. SENSORS 2022; 22:s22020623. [PMID: 35062586 PMCID: PMC8779883 DOI: 10.3390/s22020623] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/13/2021] [Revised: 01/11/2022] [Accepted: 01/12/2022] [Indexed: 02/01/2023]
Abstract
The Low Temperature Cofired Ceramic (LTCC) technology has proven to be highly suitable for 3D microstructures manufacturing in electronic devices due to its excellent electrical and mechanical properties. In this paper, a novel idea of implementing the LTCC structures into high-energy particle detectors technology is proposed. It can be applied in High Energy Physics (HEP) laboratories, where such sophisticated sensors are constantly exposed to particles of the TeV energy range for many years. The most advanced applications of the concept are based on dedicated gas amplifier systems coupled with readout microstructures. Typically, the readout microstructures are made in the Printed Circuit Boards (PCB) technology and processed in a sophisticated and patent-protected way. This article presents the manufacturing process and parameters of the novel microstructures made in the LTCC technology. The structures were implemented into the high-energy particle detector, and the first results are presented.
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Affiliation(s)
- Arkadiusz Dąbrowski
- Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, wyb. S. Wyspiańskiego 27, 50-370 Wrocław, Poland; (A.D.); (W.N.); (M.C.); (M.B.); (P.B.)
| | - Witold Nawrot
- Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, wyb. S. Wyspiańskiego 27, 50-370 Wrocław, Poland; (A.D.); (W.N.); (M.C.); (M.B.); (P.B.)
| | - Mateusz Czok
- Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, wyb. S. Wyspiańskiego 27, 50-370 Wrocław, Poland; (A.D.); (W.N.); (M.C.); (M.B.); (P.B.)
| | - Michał Babij
- Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, wyb. S. Wyspiańskiego 27, 50-370 Wrocław, Poland; (A.D.); (W.N.); (M.C.); (M.B.); (P.B.)
- Technology Transfer Agency TECHTRA Sp. z o.o., ul. Duńska 13, 54-427 Wrocław, Poland
| | - Piotr Bielówka
- Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, wyb. S. Wyspiańskiego 27, 50-370 Wrocław, Poland; (A.D.); (W.N.); (M.C.); (M.B.); (P.B.)
- Technology Transfer Agency TECHTRA Sp. z o.o., ul. Duńska 13, 54-427 Wrocław, Poland
| | - Karol Malecha
- Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, wyb. S. Wyspiańskiego 27, 50-370 Wrocław, Poland; (A.D.); (W.N.); (M.C.); (M.B.); (P.B.)
- Correspondence:
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