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Ilgaz F, Spetzler E, Wiegand P, Faupel F, Rieger R, McCord J, Spetzler B. Miniaturized double-wing ∆E-effect magnetic field sensors. Sci Rep 2024; 14:11075. [PMID: 38744882 PMCID: PMC11094197 DOI: 10.1038/s41598-024-59015-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/30/2024] [Accepted: 04/05/2024] [Indexed: 05/16/2024] Open
Abstract
Magnetoelastic micro-electromechanical systems (MEMS) are integral elements of sensors, actuators, and other devices utilizing magnetostriction for their functionality. Their sensitivity typically scales with the saturation magnetostriction and inversely with magnetic anisotropy. However, large saturation magnetostriction and small magnetic anisotropy make the magnetoelastic layer highly susceptible to minuscule anisotropic stress. It is inevitably introduced during the release of the mechanical structure during fabrication and severely impairs the device's reproducibility, performance, and yield. To avoid the transfer of residual stress to the magnetic layer, we use a shadow mask deposition technology. It is combined with a free-free magnetoelectric microresonator design to minimize the influence of magnetic inhomogeneity on device performance. Magnetoelectric resonators are experimentally and theoretically analyzed regarding local stress anisotropy, magnetic anisotropy, and the ΔE-effect sensitivity in several resonance modes. The results demonstrate an exceptionally small device-to-device variation of the resonance frequency < 0.2% with large sensitivities comparable with macroscopic ΔE-effect magnetic field sensors. This development marks a promising step towards highly reproducible magnetoelastic devices and the feasibility of large-scale, integrated arrays.
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Affiliation(s)
- Fatih Ilgaz
- Chair for Multicomponent Materials, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Elizaveta Spetzler
- Nanoscale Magnetic Materials - Magnetic Domains, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Patrick Wiegand
- Networked Electronic Systems, Department of Electrical and Information Engineering, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Franz Faupel
- Chair for Multicomponent Materials, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Robert Rieger
- Networked Electronic Systems, Department of Electrical and Information Engineering, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Jeffrey McCord
- Nanoscale Magnetic Materials - Magnetic Domains, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Benjamin Spetzler
- Micro- and Nanoelectronic Systems, Department of Electrical Engineering and Information Technology, Ilmenau University of Technology, 98693, Ilmenau, Germany.
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