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Palneedi H, Patil DR, Priya S, Woo K, Ye J, Woo YM, Hwang YS, Hwang GT, Park JH, Ryu J. Intense Pulsed Light Thermal Treatment of Pb(Zr,Ti)O 3 /Metglas Heterostructured Films Resulting in Extreme Magnetoelectric Coupling of over 20 V cm -1 Oe -1. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2303553. [PMID: 37199707 DOI: 10.1002/adma.202303553] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/17/2023] [Revised: 05/13/2023] [Indexed: 05/19/2023]
Abstract
Magnetoelectric (ME) film composites consisting of piezoelectric and magnetostrictive materials are promising candidates for application in magnetic field sensors, energy harvesters, and ME antennas. Conventionally, high-temperature annealing is required to crystallize piezoelectric films, restricting the use of heat-sensitive magnetostrictive substrates that enhance ME coupling. Herein, a synergetic approach is demonstrated for fabricating ME film composites that combines aerosol deposition and instantaneous thermal treatment based on intense pulsed light (IPL) radiation to form piezoelectric Pb(Zr,Ti)O3 (PZT) thick films on an amorphous Metglas substrate. IPL rapidly anneals PZT films within a few milliseconds without damaging the underlying Metglas. To optimize the IPL irradiation conditions, the temperature distribution inside the PZT/Metglas film is determined using transient photothermal computational simulation. The PZT/Metglas films are annealed using different IPL pulse durations to determine the structure-property relationship. IPL treatment results in an enhanced crystallinity of the PZT, thus improving the dielectric, piezoelectric, and ME properties of the composite films. An ultrahigh off-resonance ME coupling (≈20 V cm-1 Oe-1 ) is obtained for the PZT/Metglas film that is IPL annealed at a pulse width of 0.75 ms (an order of magnitude higher than that reported for other ME films), confirming the potential for next-generation, miniaturized, and high-performance ME devices.
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Affiliation(s)
- Haribabu Palneedi
- Materials Research Institute/Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA, 16802, USA
| | - Deepak Rajaram Patil
- School of Materials Science and Engineering, Yeungnam University, Gyeongsan, 38541, South Korea
- Institute of Materials Technology, Yeungnam University, Daehak-ro, Gyeongsan, 38541, South Korea
| | - Shashank Priya
- Materials Research Institute/Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA, 16802, USA
| | - Kyoohee Woo
- Nano-Convergence Manufacturing Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 34103, South Korea
| | - Jiwon Ye
- School of Materials Science and Engineering, Yeungnam University, Gyeongsan, 38541, South Korea
- Institute of Materials Technology, Yeungnam University, Daehak-ro, Gyeongsan, 38541, South Korea
| | - Yu Mi Woo
- Department of Mechanical Engineering (Department of Aeronautics, Mechanical and Electronic Convergence Engineering), Kumoh National Institute of Technology, 61 Daehak-ro, Gumi, Gyeongbuk, 39177, South Korea
| | - Yun Sik Hwang
- Department of Mechanical Design Engineering, Kumoh National Institute of Technology, 61 Daehak-ro, Gumi, Gyeongbuk, 39177, South Korea
| | - Geon-Tae Hwang
- Department of Materials Science and Engineering, Pukyong National University, Busan, 42601, South Korea
| | - Jung Hwan Park
- Department of Mechanical Engineering (Department of Aeronautics, Mechanical and Electronic Convergence Engineering), Kumoh National Institute of Technology, 61 Daehak-ro, Gumi, Gyeongbuk, 39177, South Korea
| | - Jungho Ryu
- School of Materials Science and Engineering, Yeungnam University, Gyeongsan, 38541, South Korea
- Institute of Materials Technology, Yeungnam University, Daehak-ro, Gyeongsan, 38541, South Korea
- Department of Materials Science and Engineering, Pukyong National University, Busan, 42601, South Korea
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Niekiel MF, Meyer JM, Lewitz H, Kittmann A, Nowak MA, Lofink F, Meyners D, Zollondz JH. What MEMS Research and Development Can Learn from a Production Environment. SENSORS (BASEL, SWITZERLAND) 2023; 23:5549. [PMID: 37420715 DOI: 10.3390/s23125549] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/21/2023] [Revised: 06/01/2023] [Accepted: 06/09/2023] [Indexed: 07/09/2023]
Abstract
The intricate interdependency of device design and fabrication process complicates the development of microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools and methods to overcome challenges and facilitate volume production. By now, these are only hesitantly being picked up and implemented in academic research. In this perspective, the applicability of these methods to research-focused MEMS development is investigated. It is found that even in the dynamics of a research endeavor, it is beneficial to adapt and apply tools and methods deduced from volume production. The key step is to change the perspective from fabricating devices to developing, maintaining and advancing the fabrication process. Tools and methods are introduced and discussed, using the development of magnetoelectric MEMS sensors within a collaborative research project as an illustrative example. This perspective provides both guidance to newcomers as well as inspiration to the well-versed experts.
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Affiliation(s)
- Malte Florian Niekiel
- Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany
| | - Jana Marie Meyer
- Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany
| | - Hanna Lewitz
- Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany
| | - Anne Kittmann
- Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany
| | - Marc Alexander Nowak
- Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany
| | - Fabian Lofink
- Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany
| | - Dirk Meyners
- Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany
| | - Jens-Hendrik Zollondz
- Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany
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Physics of Composites for Low-Frequency Magnetoelectric Devices. SENSORS 2022; 22:s22134818. [PMID: 35808313 PMCID: PMC9269355 DOI: 10.3390/s22134818] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/06/2022] [Revised: 06/23/2022] [Accepted: 06/23/2022] [Indexed: 11/17/2022]
Abstract
The article discusses the physical foundations of the application of the linear magnetoelectric (ME) effect in composites for devices in the low-frequency range, including the electromechanical resonance (EMR) region. The main theoretical expressions for the ME voltage coefficients in the case of a symmetric and asymmetric composite structure in the quasi-static and resonant modes are given. The area of EMR considered here includes longitudinal, bending, longitudinal shear, and torsional modes. Explanations are given for finding the main resonant frequencies of the modes under study. Comparison of theory and experimental results for some composites is given.
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