Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers

Review of the applications of principles of insect hearing to microscale acoustic engineering challenges

When looking for novel, simple, and energy-efficient solutions to engineering problems, nature has proved to be an incredibly valuable source of inspiration. The development of acoustic sensors has been a prolific field for bioinspired solutions. With a diverse array of evolutionary approaches to the problem of hearing at small scales (some widely different to the traditional concept of 'ear'), insects in particular have served as a starting point for several designs. From locusts to moths, through crickets and mosquitoes among many others, the mechanisms found in nature to deal with small-scale acoustic detection and the engineering solutions they have inspired are reviewed. The present article is comprised of three main sections corresponding to the principal problems faced by insects, namely frequency discrimination, which is addressed by tonotopy, whether performed by a specific organ or directly on the tympana; directionality, with solutions including diverse adaptations to tympanal structure; and detection of weak signals, through what is known as active hearing. The three aforementioned problems concern tiny animals as much as human-manufactured microphones and have therefore been widely investigated. Even though bioinspired systems may not always provide perfect performance, they are sure to give us solutions with clever use of resources and minimal post-processing, being serious contenders for the best alternative depending on the requisites of the problem.

Beyond biology: alternative uses of cantilever-based technologies

Micromechanical cantilever sensors are attracting a lot of attention because of the need for characterizing, detecting, and monitoring chemical and physical properties, as well as compounds at the nanoscale. The fields of application of micro-cantilever sensors span from biological and point-of-care, to military or industrial sectors. The purpose of this work focuses on thermal and mechanical characterization, environmental monitoring, and chemical detection, in order to provide a technical review of the most recent technical advances and applications, as well as the future prospective of micro-cantilever sensor research.

High-Acceleration Vibration Calibration System Based on Phase-Locked Resonance Control

In order to ensure the measurement accuracy of high-acceleration vibration sensors used in engineering applications, it is necessary to calibrate their key performance parameters at high acceleration. The high-acceleration vibration calibration system produces high-acceleration vibration by utilizing the resonance amplification principle; however, the resonance frequency of the resonant beam changes with increasing amplitude, affected by the influences of nonlinear and other factors. In this study, a phase-locked resonance tracking control method based on the phase resonance principle is proposed to accurately and quickly track the resonance frequency of the resonant beam, which can improve the accuracy and stability of resonance control. The resonant beam is able to produce stable vibration with an amplitude exceeding 7500 m/s² by phase-locking and tracking the resonant frequency. A calibration system built with this method can provide stable vibration with an amplitude of 500-10,000 m/s² in the range of 80-4000 Hz. Comparison experiments with the commonly used amplitude iteration amplification method demonstrate that the proposed method can give an acceleration stability control index of less than 0.5% and a resonance tracking time of less than 0.1 s.

Concurrent Lamination and Tapering Optimization of Cantilever Composite Plates under Shear

The operational performance of cantilever composite structures can benefit from both stiffness tailoring and geometric design, yet, this potential has not been fully utilized in existing studies. The present study addresses this problem by simultaneously optimizing layer and taper angles of cantilever laminates. The design objective is selected as minimizing the average deflection of the tip edge subjected to shear loads while keeping the length and total volume constant. The plate stiffness properties are described by lamination parameters to eliminate the possible solution dependency on the initial assumptions regarding laminate configuration. The responses are computed via finite element analyses, while optimal design variables are determined using genetic algorithms. The results demonstrate that the plate aspect ratio significantly influences the effectiveness of stiffness tailoring and tapering as well as the optimal layer and taper angles. In addition, concurrent exploitation of the lamination characteristics and plate geometry is shown to be essential for achieving maximum performance. Moreover, individual and simultaneous optimization of layer and taper angles produce different optimal results, indicating the possible drawback of using sequential approaches in similar composite design problems.

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors' performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

Theoretical Analysis for Bending of Single-Stranded DNA Adsorption on Microcantilever Sensors

An energy-based model is presented to establish the bending deformation of microcantilever beams induced by single-stranded DNA (ssDNA) adsorption. The total free energy of the DNA-microcantilever sensor was obtained by considering the excluded-volume energy and the polymer stretching energy of DNA chains from mean-field theory, and the mechanical energy of three non-biological layers. The radius of curvature and deflection of the cantilever were determined through the minimum principle of energy. The efficiency of the present model was confirmed through comparison with experimental data. The effects of length, grafting density, salt concentration, thickness, and elastic modulus of substrate on tip deflections are also discussed in this paper. These factors can significantly affect the deflections of the biosensor. This work demonstrates that it is useful to develop a theoretical model for the label-free nanomechanical detection technique.

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si₃N₄ Bimorph Microcantilevers for Static Mode Sensing

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si₃N₄ microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers.

A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers were designed based on the simulation results and fabricated using the micro electromechanical systems (MEMS) technology. Finally, the MEMS resonant sensor was packaged with the sensing chip to measure the densities and viscosities of eight different fluids under the flexural and torsional vibrating modes separately. The relative errors of the measured densities from 600 kg/m³ to 900 kg/m³ and viscosities from 200 μPa·s to 1000 μPa·s were calculated and analyzed with different microcantilevers under various vibrating modes. The experimental results showed that the effects of the shape and vibrating mode of micro-cantilever on the measurement accuracies of fluid density and viscosity were analyzed in detail.

High S/N ratio slotted step piezoresistive microcantilever designs for biosensors

This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts.

Stepwise motion of a microcantilever driven by the hydrolysis of viral ATPases

The biomolecular machines involved in DNA packaging by viruses generate one of the highest mechanical powers observed in nature. One component of the DNA packaging machinery, called the terminase, has been proposed as the molecular motor that converts chemical energy from ATP hydrolysis into mechanical movement of DNA during bacteriophage morphogenesis. However, the conformational changes involved in this energy conversion have never been observed. Here we report a real-time measurement of ATP-induced conformational changes in the terminase of bacteriophage T7 (gp19). The recording of the cantilever bending during its functionalization shows the existence of a gp19 monolayer arrangement confirmed by atomic force microscopy of the immobilized proteins. The ATP hydrolysis of the gp19 terminase generates a stepped motion of the cantilever and points to a mechanical cooperative effect among gp19 oligomers. Furthermore, the effect of ATP can be counteracted by non-hydrolyzable nucleotide analogs.

Electrostatic excitation for the force amplification of microcantilever sensors

This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially the microcantilever is excited by electrostatic force to near pull-in voltage. The nonlinear behavior of the microcantilever in near pull-in voltage i.e., the inverse-square relation between displacement and electrostatic force provides a novel method for force amplification. In this situation, any external load applied to the sensor will be amplified by electrostatic force leading to more displacement. We prove that the proposed microcantilever sensor can be 2 to 100 orders more sensitive compared with traditional microcantilevers sensors of the same dimensions. The results for surface stress and the free-end point force load are discussed.

Design of a pressure sensor based on optical fiber Bragg grating lateral deformation

This paper describes steps involved in the design and realization of a new type of pressure sensor based on the optical fiber Bragg grating. A traditional pressure sensor has very limited usage in heavy industrial environments, particularly in explosive or electromagnetically noisy environments. Utilization of optics in these environments eliminates all surrounding influences. An initial motivation for our development was the research, experimental validation, and realization of a complex smart pressure sensor based on the optical principle. The main benefit of this solution consists of increasing sensitivity, resistance to electromagnetic interference, dimensions, and potential increased accuracy.

An analytical model of joule heating in piezoresistive microcantilevers

The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The commercial finite element software ANSYS Multiphysics was used to study the effect of electrical potential on temperature and deflection produced in the cantilevers. The effect of piezoresistor width on Joule heating is also studied. Results show that Joule heating strongly depends on the applied potential and width of piezoresistor and that a silicon substrate cantilever has better thermal characteristics than a silicon dioxide cantilever.

Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors

This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantilever biosensors, both the deflection and the resonant frequency of the cantilever should be increased. The effect of the cantilever profile change and the cantilever cross-section shape change is first investigated separately and then together. A finite element code ANSYS Multiphysics is used and solid finite elements cantilever models are solved. A surface stress of 0.05 N/m was applied to the top surface of the cantilevers. The cantilevers are made of silicon with elastic modulus 130 GPa and Poisson’s ratio 0.28. To show the conformity of this study, the numerical results are compared against their analytical ones. Results show that triangular and step cantilevers have better deflection and frequency characteristics than rectangular ones.