Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors' performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

Theoretical Analysis for Bending of Single-Stranded DNA Adsorption on Microcantilever Sensors

An energy-based model is presented to establish the bending deformation of microcantilever beams induced by single-stranded DNA (ssDNA) adsorption. The total free energy of the DNA-microcantilever sensor was obtained by considering the excluded-volume energy and the polymer stretching energy of DNA chains from mean-field theory, and the mechanical energy of three non-biological layers. The radius of curvature and deflection of the cantilever were determined through the minimum principle of energy. The efficiency of the present model was confirmed through comparison with experimental data. The effects of length, grafting density, salt concentration, thickness, and elastic modulus of substrate on tip deflections are also discussed in this paper. These factors can significantly affect the deflections of the biosensor. This work demonstrates that it is useful to develop a theoretical model for the label-free nanomechanical detection technique.

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si₃N₄ Bimorph Microcantilevers for Static Mode Sensing

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si₃N₄ microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers.

Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems

Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully implantable in the middle/inner ear and includes the following components: frequency selective microphone or accelerometer, energy harvesting device, speech processor, and cochlear multielectrode. Here we demonstrate a low volume, piezoelectric micro-electromechanical system (MEMS) cantilever array which is sensitive, even in the lower part of the voice frequency range (300–700 Hz). The test array consisting of 16 cantilevers has been fabricated by standard bulk micromachining using a Si-on-Insulator (SOI) wafer and aluminum nitride (AlN) as a complementary metal-oxide-semiconductor (CMOS) and biocompatible piezoelectric material. The low frequency and low device footprint are ensured by Archimedean spiral geometry and Si seismic mass. Experimentally detected resonance frequencies were validated by an analytical model. The generated open circuit voltage (3–10 mV) is sufficient for the direct analog conversion of the signals for cochlear multielectrode implants.

Numerical Modeling and Experimental Validation by Calorimetric Detection of Energetic Materials Using Thermal Bimorph Microcantilever Array: A Case Study on Sensing Vapors of Volatile Organic Compounds (VOCs)

Bi-layer (Au-Si₃N₄) microcantilevers fabricated in an array were used to detect vapors of energetic materials such as explosives under ambient conditions. The changes in the bending response of each thermal bimorph (i.e., microcantilever) with changes in actuation currents were experimentally monitored by measuring the angle of the reflected ray from a laser source used to illuminate the gold nanocoating on the surface of silicon nitride microcantilevers in the absence and presence of a designated combustible species. Experiments were performed to determine the signature response of this nano-calorimeter platform for each explosive material considered for this study. Numerical modeling was performed to predict the bending response of the microcantilevers for various explosive materials, species concentrations, and actuation currents. The experimental validation of the numerical predictions demonstrated that in the presence of different explosive or combustible materials, the microcantilevers exhibited unique trends in their bending responses with increasing values of the actuation current.

Finite element analysis of electrically excited quartz tuning fork devices

Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.

Analysis of detection enhancement using microcantilevers with long-slit-based sensors

The present work analyzes theoretically and verifies the advantage of utilizing rectangular microcantilevers with long-slits in microsensing applications. The deflection profile of these microcantilevers is compared with that of typical rectangular microcantilevers under the action of dynamic disturbances. Various force-loading conditions are considered. The theory of linear elasticity for thin beams is used to obtain the deflection-related quantities. The disturbance in these quantities is obtained based on wave propagation and beam vibration theories. It is found that detections of rectangular microcantilevers with long-slits based on maximum slit opening length can be more than 100 times the deflections of typical rectangular microcantilevers. Moreover, the disturbance (noise effect) in the detection quantities of the microcantilever with long-slits is found to be always smaller than that of typical microcantilevers, regardless of the wavelength, force amplitude, and the frequency of the dynamic disturbance. Eventually, the detection quantities of the microcantilever with long-slits are found to be almost unaffected by dynamic disturbances, as long as the wavelengths of these disturbances are larger than 3.5 times the microcantilever width. Finally, the present work recommends implementation of microcantilevers with long-slits as microsensors in robust applications, including real analyte environments and out of laboratory testing.

Atomic force microscopy as a tool applied to nano/biosensors

This review article discusses and documents the basic concepts and principles of nano/biosensors. More specifically, we comment on the use of Chemical Force Microscopy (CFM) to study various aspects of architectural and chemical design details of specific molecules and polymers and its influence on the control of chemical interactions between the Atomic Force Microscopy (AFM) tip and the sample. This technique is based on the fabrication of nanomechanical cantilever sensors (NCS) and microcantilever-based biosensors (MC-B), which can provide, depending on the application, rapid, sensitive, simple and low-cost in situ detection. Besides, it can provide high repeatability and reproducibility. Here, we review the applications of CFM through some application examples which should function as methodological questions to understand and transform this tool into a reliable source of data. This section is followed by a description of the theoretical principle and usage of the functionalized NCS and MC-B technique in several fields, such as agriculture, biotechnology and immunoassay. Finally, we hope this review will help the reader to appreciate how important the tools CFM, NCS and MC-B are for characterization and understanding of systems on the atomic scale.

Electrostatic excitation for the force amplification of microcantilever sensors

This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially the microcantilever is excited by electrostatic force to near pull-in voltage. The nonlinear behavior of the microcantilever in near pull-in voltage i.e., the inverse-square relation between displacement and electrostatic force provides a novel method for force amplification. In this situation, any external load applied to the sensor will be amplified by electrostatic force leading to more displacement. We prove that the proposed microcantilever sensor can be 2 to 100 orders more sensitive compared with traditional microcantilevers sensors of the same dimensions. The results for surface stress and the free-end point force load are discussed.

Fano-like resonance in an optically driven atomic force microscope cantilever

We observe Fano-like resonance in the vibration spectrum of an optically driven atomic force microscope cantilever system. The vibration of the cantilever is photothermally induced by exciting it with a 780-nm laser diode. The asymmetry of the resonance curve strongly depends on the position of the excitation spot along the central axis of the cantilever. By using a simple physical model, we could extract and analyze the hidden resonance and continuous components in the vibration spectrum.

Design of a pressure sensor based on optical fiber Bragg grating lateral deformation

This paper describes steps involved in the design and realization of a new type of pressure sensor based on the optical fiber Bragg grating. A traditional pressure sensor has very limited usage in heavy industrial environments, particularly in explosive or electromagnetically noisy environments. Utilization of optics in these environments eliminates all surrounding influences. An initial motivation for our development was the research, experimental validation, and realization of a complex smart pressure sensor based on the optical principle. The main benefit of this solution consists of increasing sensitivity, resistance to electromagnetic interference, dimensions, and potential increased accuracy.