Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.

Atypical perceptual and neural processing of emotional prosodic changes in children with autism spectrum disorders

OBJECTIVE

The present study explored the processing of emotional speech prosody in school-aged children with autism spectrum disorders (ASD) but without marked language impairments (children with ASD [no LI]).

METHODS

The mismatch negativity (MMN)/the late discriminative negativity (LDN), reflecting pre-attentive auditory discrimination processes, and the P3a, indexing involuntary orienting to attention-catching changes, were recorded to natural word stimuli uttered with different emotional connotations (neutral, sad, scornful and commanding). Perceptual prosody discrimination was addressed with a behavioral sound-discrimination test.

RESULTS

Overall, children with ASD (no LI) were slower in behaviorally discriminating prosodic features of speech stimuli than typically developed control children. Further, smaller standard-stimulus event related potentials (ERPs) and MMN/LDNs were found in children with ASD (no LI) than in controls. In addition, the amplitude of the P3a was diminished and differentially distributed on the scalp in children with ASD (no LI) than in control children.

CONCLUSIONS

Processing of words and changes in emotional speech prosody is impaired at various levels of information processing in school-aged children with ASD (no LI).

SIGNIFICANCE

The results suggest that low-level speech sound discrimination and orienting deficits might contribute to emotional speech prosody processing impairments observed in ASD.

Musical training facilitates the neural discrimination of major versus minor chords in 13-year-old children

Music practice since childhood affects the development of hearing skills. An important classification in Western music is the chords' major-minor dichotomy. Its preattentive auditory discrimination was studied here using a mismatch negativity (MMN) paradigm in 13-year-olds with active hobbies, music-related (music group) or other (control group). In a context of root major chords, root minor chords and inverted major chords were presented infrequently. The interval structure of inverted majors differs more from root majors than the interval structure of root minors. However, the identity of the chords is the same in inverted and root majors (major), but different in root minors. The deviant chords introduced no new frequencies to the paradigm. Hence, an MMN caused by physical deviance was prevented. An MMN was elicited by the minor chords but not by the inverted majors. The MMN amplitude in the music group was larger than in the control group. Thus, the conceptual discrimination skills are present already in the preattentive processing level of the auditory cortex, and musical training can advance these skills.

Side radiation of Rayleigh waves from synchronous SAW resonators

Surface acoustic wave (SAW) resonators on lithium tantalate (LiTaO3) and lithium niobate (LiNbO3) are investigated. The amplitude of the acoustic fields in the resonators are measured using a scanning laser interferometer. The amplitude profiles of the surface vibrations reveal the presence of distinct acoustic beams radiated from the transducer region of the SAW resonators and propagating with low attenuation. We suggest that this radiation is generated by the charges accumulating at the tips of the finger electrodes. The periodic system of sources, namely oscillating charges at the fingertips, generates Rayleigh-wave beams in the perpendicular and oblique directions. Green's function theory is used to calculate the coupling strength and slowness of the Rayleigh waves on 42 degrees Y-cut LiTaO3 and Y-cut LiNbO3 substrates as a function of the propagation direction. Furthermore, the propagation angles of the Rayleigh-wave beams as a function of frequency are calculated. The computed angles are compared with the measured ones for both the LiTaO3 and LiNbO3 substrates.

Longitudinal leaky SAW resonators and filters on YZ-LiNbO3

The high-phase velocity (above 6100 m/s in an aluminum (Al) grating on lithium niobate (LiNbOs)) of the longitudinal leaky surface acoustic wave (SAW) (LLSAW) mode makes it attractive for application in high-frequency SAW ladder filters in the 2-5 GHz range. We investigate the dependence of one-port synchronous LLSAW resonator performance on YZ-LiNbO3 on the metallization thickness and metallization ratio, both experimentally and theoretically. Our results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness, with the optimal thickness that produces the highest Q values being about 8%. The optimal thickness increases with the metallization ratio. The observed behavior is interpreted with the help of simulations using a combined finite element method (FEM)/boundary element method (BEM) technique. As an application, bandpass filters have been fabricated in the 2.8 GHz frequency regime, based on LLSAWs. The synchronous resonators constituting the ladder filters operate in the fundamental mode. The filters feature low insertion losses below 3 dB and wide relative passbands of 4.5-5%.

Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.

Acoustic loss mechanisms in leaky SAW resonators on lithium tantalate

We discuss acoustic losses in synchronous leaky surface acoustic wave (LSAW) resonators on rotated Y-cut lithium tantalate (LiTaO3) substrates. Laser probe measurements and theoretical models are employed to identify and characterize the radiation of leaky waves into the busbars of the resonator and the excitation of bulk acoustic waves. Escaping LSAWs lead to a significant increase in the conductance, typically occurring in the vicinity of the resonance and in the stopband, but they do not explain the experimentally observed deterioration of the electrical response at the antiresonance. At frequencies above the stop-band, the generation of fast shear bulk acoustic waves is the dominant loss mechanism.

Finite element simulations of thin-film composite BAW resonators

A finite element method (FEM) formulation is presented for the numerical solution of the electroelastic equations that govern the linear forced vibrations of piezoelectric media. A harmonic time dependence is assumed. Both of the approaches, that of solving the field problem (harmonic analysis) and that of solving the corresponding eigenvalue problem (modal analysis), are described. A FEM software package has been created from scratch. Important aspects central to the efficient implementation of FEM are explained, such as memory management and solving the generalized piezoelectric eigenvalue problem. Algorithms for reducing the required computer memory through optimization of the matrix profile, as well as Lanczos algorithm for the solution of the eigenvalue problem are linked into the software from external numerical libraries. Our FEM software is applied to detailed numerical modeling of thin-film bulk acoustic wave (BAW) composite resonators. Comparison of results from 2D and full 39 simulations of a resonator are presented. In particular, 3D simulations are used to investigate the effect of the top electrode shape on the resonator electrical response. The validity of the modeling technique is demonstrated by comparing the simulated and measured displacement profiles at several frequencies. The results show that useful information on the performance of the thin-film resonators can be obtained even with relatively coarse meshes and, consequently, moderate computational resources.

Surface acoustic wave impedance element ISM duplexer: modeling and optical analysis

Surface acoustic wave (SAW) impedance element antenna duplexers provide compact, high performance, front-end components apt for industrial fabrication. We describe investigations on the design and modeling of a compact ISM antenna duplexer fabricated on a 36 degrees YX-cut LiTaO3 substrate based on SAW impedance elements. In particular, we have performed 3-D modeling of the inductive and capacitive electromagnetic couplings caused by the package parasitics for the duplexer. The use of a 1:3 IDT structure for the reduction of the passband width is discussed. The frequency response of the duplexer is predicted with the help of circuit simulation; the modeling is refined by optimization of the model parameters to improve the fit between the measured and simulated responses. We also report scanning optical imaging of the acoustic field within the resonator structures with the help of laser interferometry; this provides insight into the loss mechanisms beyond that attainable in mere electric measurements.

Bioactive glass granules and polytetrafluoroethylene membrane in the repair of bone defects adjacent to titanium and bioactive glass implants

An experimental animal model was used to investigate the effect of bioactive glass (BG) granules and nonresorbable polytetrafluoroethylene (PTFE) membrane on the repair of cortical bone defects adjacent to titanium and BG implants. Thirty-two Astra(R) (diameter 3.5 mm) dental implants were inserted bicortically and 42 conical BG implants (diameter 2.5-3.0 mm) monocortically, into fitted holes of rabbit tibia. Before implantation, a standardized bone defect was created by drilling an extra hole (diameter 3.0 mm) adjacent to each implant site. Twenty-eight defects were filled with BG granules (diameter 630-800 microm) (BG group) and 28 defects were left empty but covered with PTFE membrane (PTFE group). No material was used in 18 control defects (control group). Morphometrical evaluation with a digital image analysis system was used to measure bone repair as percentages of the defect area on scanning electron microscopy (SEM) and light microscopy pictures. Bone-implant contact was measured as percentages of the thickness of the cortical bone. At 6 and 12 wk, bone repair in defects in connection with titanium implants was 23.2% and 36.6% in the BG group, 23.2% and 32.4% in the PTFE group, and 47.2% and 46.2% in control defects. Corresponding figures for BG implants were 33.2% and 40.1% in the BG group, 16.6% and 33.5% in the PTFE group, and 25.7% and 54.9% in control defects, BG granules and new bone together filled 82.7% and 68.5% of the defect area adjacent to titanium implants, and 75.9% and 74.4% of the defect adjacent to BG implants at 6 and 12 wk, respectively. Better bone-implant contact was achieved at the defect side with BG than titanium implants (77.0% versus 45.0% at 12 wk). The results indicate that BG granules are useful in treatment of bone defects adjacent to dental implants. BG coating of the implant seems to improve osseointegration in the defect area.

Pilocarpine and carbacholine in treatment of radiation-induced xerostomia

Twenty-four patients with radiation-related xerostomia were treated with oral pilocarpine solution 6 mg t.i.d., and after a 4-week drug-free period 16 of these patients were treated with carbacholine 2 mg tablets t.i.d. Basal and stimulated whole saliva flow rates were measured before commencing the drug treatment, and after 1 and 12 weeks on treatment. On a subjective linear scale both pilocarpine (p = 0.01) and carbacholine (p = 0.02) improved mouth moistness. Only 2 of the 8 patients with no basal or stimulated saliva flow reported some subjective benefit from the drug treatment, whereas all 8 patients with less severe xerostomia improved (p = 0.007). However, the salivary flow rates measured 12 h after the last drug dose did not improve with either drug. Both drugs were generally well tolerated. It is concluded that both drugs may be useful in the treatment of radiation-induced xerostomia among patients with residual salivary function.