Molecular bridge-mediated ultralow-power gas sensing

We report the electrical detection of captured gases through measurement of the quantum tunneling characteristics of gas-mediated molecular junctions formed across nanogaps. The gas-sensing nanogap device consists of a pair of vertically stacked gold electrodes separated by an insulating 6 nm spacer (~1.5 nm of sputtered α-Si and ~4.5 nm ALD SiO₂), which is notched ~10 nm into the stack between the gold electrodes. The exposed gold surface is functionalized with a self-assembled monolayer (SAM) of conjugated thiol linker molecules. When the device is exposed to a target gas (1,5-diaminopentane), the SAM layer electrostatically captures the target gas molecules, forming a molecular bridge across the nanogap. The gas capture lowers the barrier potential for electron tunneling across the notched edge region, from ~5 eV to ~0.9 eV and establishes additional conducting paths for charge transport between the gold electrodes, leading to a substantial decrease in junction resistance. We demonstrated an output resistance change of >10⁸ times upon exposure to 80 ppm diamine target gas as well as ultralow standby power consumption of <15 pW, confirming electron tunneling through molecular bridges for ultralow-power gas sensing.

Lightweight Smart Autofocusing Eyeglasses

More than 100 million people in the United States of America alone suffer from age-related presbyopia caused by a loss of focal accommodation of the eye crystalline lens as the lens stiffens with age. The resulting accommodative error or lag produces blurred images of objects placed at different distances. Conventional fixed uniform or graded power eyeglasses cannot provide accommodation thus resulting in significant visual impairment. In this paper we will discuss the implementation of lightweight auto-focusing eyeglasses that augment the accommodative range thus partially or fully restoring normal vision function. The paper discusses some aspects of the construction of tunable power eyepieces and the implementation of accommodation correction algorithms.

Microballoon pressure sensors for particle imaging manometry in liquid and gaseous media

We present the fabrication and testing of engineered microballoon particles that expand and contract under external pressure changes hence serving as microscopic pressure sensors. The particles consist of 12 μm hollow flexible 0.4 μm-thick parylene-C shells with and without a coating of ultrathin Al2O3 diffusion barriers, and the changes in the particle radius are measured from the particle spectral reflectivity. The microballoons display radial pressure sensitivities of 0.64 nm psi(-1) and 0.44 nm psi(-1), respectively in agreement with theoretical estimates. The microballoon devices were used for mapping the internal pressure drop within microfluidic chips. These devices experience nearly spherical symmetry which could make them potential flow-through sensors for the augmentation of particle-based flow characterization methodologies extending today's capabilities of particle imaging velocimetry.

Suppression of Stiction in MEMS

Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS. Stiction failures require first a collapse force that brings the elastic member contact with the substrate followed by an intersolid adhesion sufficiently large to overcome the elastic restoring force. Stiction failure mechanisms have been studied extensively elsewhere [1]. This paper briefly summarizes these mechanisms in a the practical way. Over the last decade, stiction failure rates in MEMS have been minimized using a wide variety of processing, surface treatment, and physical schemes. An update of these methods is provided.

Probing protein binding spectra with Fourier microfluidics

New developments in microfluidic chip technology enable the construction of chemical spectrum analyzers that can probe the binding interactions between chemical entities. In this paper we report the implementation of a microfluidic chip suitable for Fourier transform measurements of biochemical interactions. The chip consists of a chemical signal generator, a flow cell and a binding sensor surface. The microfluidic signal generator produces a periodic stream of protein plugs in solution flowing at constant velocity through the cell. This flow produces periodic association and dissociation cycles of the protein to a functionalized gold sensing surface placed inside the cell. The sensor activity corresponding to the phasor response of the chemical interaction at the excitation frequency is measured optically using surface plasmon resonance (SPR) imaging. We demonstrated the feasibility of the technique using a model system of carbonic anhydrase-II (CA-II) and immobilized 4-(2-Aminoethyl) benzenesulfonamide (ABS) ligand. The observed transfer function showed a dominant pole at 10.2 mHz corresponding to association and dissociation constants of 4.8 × 10(3) M(-1)·s(-1), and 3.5 × 10(-2) s(-1) respectively.

A combinatorial multicomponent plug mixer for systems chemistry

We report the construction and testing of a combinatorial multicomponent plug mixer (CMPM) chip that generates a large number of mix ratios. The CMPM chip has been designed to study ribonucleotide reductase (RNR) protein-protein/protein-ligand interaction networks. The 4-component chip is capable of 5400 different combinations in a 30 plug cycle. CMPM chips were tested producing fluorescent dye and dihydrofolate reductase NADPH/MX mixtures with plug lengths of 2 mm.

Generation of dynamic chemical signals with pulse code modulators

The on-chip generation of dynamic chemical signals in a flow stream via pulse code modulation (PCM) is demonstrated. In this chip the output signal concentration is determined by dispersion and averaging of a serial stream of digitally encoded plugs of concentrated solute and pure solvent as the plugs flow through a long dispersive capillary. A two-bit PCM chemical signal generator was fabricated in two-level PDMS technology. The chip was capable of generating 31 distinct output levels with 10-plug cycles. Several example chemical waveforms (sawtooth and cosine) were generated at flow rates of 43.2 nL s(-1), and plug frequencies of up to 15 Hz, with maximum output signal bandwidth of up to about 1 Hz. The modulator chip was also used to synthesize physiological signals emulating intracellular beta-cell cytosolic Ca(2+) oscillations, extracellular beta-cell insulin release and rat-striatum dopamine release.

Fourier microfluidics

We present a new experimental technique for the separation of dynamic chemical signals based on their frequency domain characteristics. Such a technique can be used to create filters that separate slow signals from fast signals from a common input flow stream. The propagation of time-varying chemical waves through networks of microfluidic channels is first examined. Mathematical models and a set of simple experiments are developed that demonstrate that short microfluidic channels behave as linear delay lines. The observed dispersive broadening and delay behavior can be explained in Fourier space in terms of corresponding phase delay, amplitude decay and characteristic transfer functions. Such delay components can be utilized to implement frequency dependent interference filters. An 8th order PDMS bandpass filter chip demonstrating these ideas was constructed. The filter chip has a central frequency of 0.17 Hz and a bandwith of 0.04 Hz at a flow rate of 4 microL h(-1).

Generation of dynamic chemical signals with microfluidic C-DACs

The utilization of microfluidic "lab-on-a-chip" devices in fundamental medical research, drug discovery and clinical diagnostics has rapidly increased in the past decade. Lab-on-a-chip devices process small volumes of analytes and reagents through on-chip microfluidic signal processing circuits. This paper discusses the implementation of a basic microfluidic circuit block, the concentration digital-to-analog converter (or C-DAC) which produces discretized chemical concentrations in a constant stream of solvent. The chemical concentration is controlled by a time-varying digital word; hence C-DACs are suitable for on-chip generation of arbitrary chemical signals. A 4-bit continuous-flow C-DAC was fabricated in two-level PDMS technology and tested. Several chemical waveforms (sawtooth, cosine, and ramp) were generated at flow rates of 2 microL min(-1) and frequencies of 0.6-4 mHz. The frequency cut off of this C-DAC was approximately 500 mHz.

Mobility, diffusion and dispersion of single-stranded DNA in sequencing gels

Electrophoresis of single-stranded DNA in denaturing polyacrylamide gels is presently a standard procedure for the sequencing of DNA fragments. A thorough understanding of the factors that determine the resolution of DNA fractionated in polyacrylamide gels is necessary to optimize the performance of DNA sequencers. Significant research on the mobility of double-stranded (ds)DNA molecules in agarose and polyacrylamide gels has been performed, and the phenomenon of band broadening of single-stranded (ss)DNA fragments in DNA sequencing gels has received attention only recently. In this paper, we present a detailed study of mobility, diffusion and dispersion of ssDNA in sequencing gels as a function of molecular size, gel concentration and electric field strength. DNA mobility is shown to be essentially independent of electric field in the range of 0-60 V/cm. The band broadening is greatly enhanced in the presence of an electric field and the dispersion coefficient (DE) can be an order of magnitude higher than the field-free diffusion coefficient. The measured migration parameters approximately follow the predictions of the biased reptation including fluctuations (BRF) theory. However, deviations due to nonidealities of the separation conditions are observed. The measured migration parameters can be used to optimize the performance of separation systems.

On-chip thermopneumatic pressure for discrete drop pumping

A class of "lab-on-a-chip" devices use external air pressure for pumping discrete drops in a microchannel network. External air connectors can be cumbersome and are real-estate intensive. We have developed an on-chip technique to generate pressures required for metering and pumping of nanoliter-volume discrete drops. This is achieved by heating of trapped air in a pressure-generating chamber. The pressure-generating chamber is connected to the point of pressure application in the liquid-conveying microchannel through an air-delivery channel. The trapped air volume on the order of 100 nL is heated by resistive metal heaters by tens of degrees celcius to generate air pressures on the order of 7.5 kN/m2. The rate of discrete drop pumping is electronically controlled in the microchannel device by controlling the rate of air heating. Flow rates on the order of 20 nL/s are obtained in the microchannel (300 microns x 30 microns) by heating the air chamber at the rate of approximately 6 degrees C/s. In this paper, we describe the design, fabrication, and operation of this new technique of generating on-chip air pressure, used for metering and pumping nanoliter discrete drops in microchannels.

Monolithic capillary electrophoresis device with integrated fluorescence detector

A monolithic capillary electrophoresis system with integrated on-chip fluorescence detector has been microfabricated on a silicon substrate. Photodiodes in the silicon substrate measure fluorescence emitted from eluting molecules. The device incorporates an on-chip thin-film interference filter that prevents excitation light from inhibiting the fluorescence detection. A transparent AZO conducting ground plane is also used to prevent the high electric fields used for the separation from interfering with the photodiode response. Separations of DNA restriction fragments have been performed in these devices with femtogram detection limits using SYBR Green I intercalating dye.

Nanoliter liquid metering in microchannels using hydrophobic patterns

Nanoliter-sized liquid drops can be accurately metered inside hydrophilic microchannels using a combination of hydrophobic surface treatment and air pressure. The technique involves spontaneously filling the microchannels up to a hydrophobic region and splitting a liquid drop by injecting air through a hydrophobic side channel. The hydrophobic regions are fabricated by using a patterned metal mask on a substrate. The patterned substrate is immersed in an isooctane solution containing 1H,1H,2H,2H-per-fluorodecyltrichlorosilane to form hydrophobic patches on the exposed surface. Stripping the metal mask leaves the hydrophobic patches and restores the hydrophilic substrate surface. Precise and accurate liquid volumes, ranging from 0.5 to 125 nanoliters, have been metered using this technique. Theoretical predictions of the pressure needed to meter drops compare well with the experimental values.

An integrated nanoliter DNA analysis device

A device was developed that uses microfabricated fluidic channels, heaters, temperature sensors, and fluorescence detectors to analyze nanoliter-size DNA samples. The device is capable of measuring aqueous reagent and DNA-containing solutions, mixing the solutions together, amplifying or digesting the DNA to form discrete products, and separating and detecting those products. No external lenses, heaters, or mechanical pumps are necessary for complete sample processing and analysis. Because all of the components are made using conventional photolithographic production techniques, they operate as a single closed system. The components have the potential for assembly into complex, low-power, integrated analysis systems at low unit cost. The availability of portable, reliable instruments may facilitate the use of DNA analysis in applications such as rapid medical diagnostics and point-of-use agricultural testing.

Electrophoretic separations using sweeping fields

Sweeping-field electrophoresis is investigated as a method for increasing the resolution of low-voltage slab gel separations. In this technique a low direct current (DC) voltage is time multiplexed to an array of periodically spaced electrodes placed along the length of the slab in a manner that follows the band migration. Because the electrode spacing is smaller than the slab length, a larger field is generated, yielding an improved separation. The effect of the nonuniform electric field on band distortion is studied in some detail. Experimental band distortion results showed good agreement with theoretical predictions in a macroscopic sweeping-field electrophoresis system. Both analytical and numerical results show that band distortion can be effectively minimized when an appropriate sweep rate is selected for a narrow band range. Using this scheme we have achieved the same number of theoretical plates as a DC-driven system with one third of the drive voltage.

Microfabricated structures for integrated DNA analysis

Photolithographic micromachining of silicon is a candidate technology for the construction of high-throughput DNA analysis devices. However, the development of complex silicon microfabricated systems has been hindered in part by the lack of a simple, versatile pumping method for integrating individual components. Here we describe a surface-tension-based pump able to move discrete nanoliter drops through enclosed channels using only local heating. This thermocapillary pump can accurately mix, measure, and divide drops by simple electronic control. In addition, we have constructed thermal-cycling chambers, gel electrophoresis channels, and radiolabeled DNA detectors that are compatible with the fabrication of thermocapillary pump channels. Since all of the components are made by conventional photolithographic techniques, they can be assembled into more complex integrated systems. The combination of pump and components into self-contained miniaturized devices may provide significant improvements in DNA analysis speed, portability, and cost. The potential of microfabricated systems lies in the low unit cost of silicon-based construction and in the efficient sample handling afforded by component integration.

Microfabricated incandescent lamps

A silicon filament vacuum sealed incandescent light source has been fabricated using IC technology. The incandescent source consists of a heavily doped p(+) polysilicon filament coated with silicon nitride and enclosed in a vacuum sealed ( approximately 80-mT) cavity in the silicon chip surface. The filament is electrically heated to reach incandescence at a temperature near 1400 K. The power required to achieve this temperature for a filament 510 x 5 x 1 microm(3) is 5 mW yielding a total optical power of 250 microW with a peak distribution wavelength near 2.5 microm. The radiation emitted by this source approximately follows Lambert's cosine law. The energy conversion efficiency is 5%.