Reference Citation Analysis: Find an Article, Find a Category, Find a Journal, Find a Scholar

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Chian-Yuh Sin

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Number	Citation Analysis
1	Effect of halogen in high-density oxygen plasmas on photoresist trimming. AIChE J 2004. [DOI: 10.1002/aic.10145] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse
2	Photoresist Trimming in Oxygen-Based High-Density Plasmas: Effect of HBr and Cl₂ Addition to CF₄/O₂ Mixtures. Ind Eng Chem Res 2003. [DOI: 10.1021/ie030059p] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022] Abstract Collapse Key Words Collapse MESH Headings Collapse Grants Collapse