Characterising the performance of an ultrawide field-of-view 3D atom probe.
Ultramicroscopy 2023;
253:113826. [PMID:
37573667 DOI:
10.1016/j.ultramic.2023.113826]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/11/2023] [Revised: 07/16/2023] [Accepted: 07/28/2023] [Indexed: 08/15/2023]
Abstract
The CAMECA Invizo 6000 atom probe microscope uses ion optics that differ significantly from the local electrode atom probe (LEAP). It uses dual antiparallel deep ultraviolet lasers, a flat counter electrode, and a series of accelerating and decelerating lenses to increase the field-of-view of the specimen without reducing the mass resolving power. In this work we characterise the performance of the Invizo 6000 using three material case studies: a model Al-Mg-Si alloy, a commercially-available Ni-based superalloy, and a Zr alloy, using a combination of air and vacuum-transfer between instruments. The ion optics of the Invizo 6000 significantly increase the field-of-view compared to the same specimen on a LEAP 4000 X Si. We also observe a significant increase in specimen yield, especially for the Zr alloy. These results combine to make the Invizo 6000 well-suited to research projects requiring large analysis volumes, particularly so for traditionally difficult samples such as oxides.
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