A novel multi-detection technique for three-dimensional reciprocal-space mapping in grazing-incidence X-ray diffraction.
JOURNAL OF SYNCHROTRON RADIATION 2008;
15:549-557. [PMID:
18955760 DOI:
10.1107/s0909049508023856]
[Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/27/2008] [Accepted: 07/28/2008] [Indexed: 05/27/2023]
Abstract
A new scattering technique in grazing-incidence X-ray diffraction geometry is described which enables three-dimensional mapping of reciprocal space by a single rocking scan of the sample. This is achieved by using a two-dimensional detector. The new set-up is discussed in terms of angular resolution and dynamic range of scattered intensity. As an example the diffuse scattering from a strained multilayer of self-assembled (In,Ga)As quantum dots grown on GaAs substrate is presented.
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