μ-Biomimetic flow-sensors--introducing light-guiding PDMS structures into MEMS

In the area of biomimetics, engineers use inspiration from natural systems to develop technical devices, such as sensors. One example is the lateral line system of fish. It is a mechanoreceptive system consisting of up to several thousand individual sensors called neuromasts, which enable fish to sense prey, predators, or conspecifics. So far, the small size and high sensitivity of the lateral line is unmatched by man-made sensor devices. Here, we describe an artificial lateral line system based on an optical detection principle. We developed artificial canal neuromasts using MEMS technology including thick film techniques. In this work, we describe the MEMS fabrication and characterize a sensor prototype. Our sensor consists of a silicon chip, a housing, and an electronic circuit. We demonstrate the functionality of our μ-biomimetic flow sensor by analyzing its response to constant water flow and flow fluctuations. Furthermore, we discuss the sensor robustness and sensitivity of our sensor and its suitability for industrial and medical applications. In sum, our sensor can be used for many tasks, e.g. for monitoring fluid flow in medical applications, for detecting leakages in tap water systems or for air and gas flow measurements. Finally, our flow sensor can even be used to improve current knowledge about the functional significance of the fish lateral line.

The development of a μ-biomimetic uncooled IR-Sensor inspired by the infrared receptors of Melanophila acuminata

The beetle Melanophila acuminata uses a specialized organ to detect infrared radiation. The organ consists of about 100 individual sensilla. The main component of the sensillum is a pressure chamber. Upon absorption of radiation, the pressure increases, and the tip of a dendrite is deformed. A unique feature of the organ is a compensation mechanism that prevents large pressures. The beetle uses this organ to detect forest fires and to navigate inside burning woods. However, the sensitivity is part of a long-lasting discussion, providing thresholds between [Formula: see text] and [Formula: see text]. To end the decade-long discussion and to provide a novel type of infrared sensor, we are developing an uncooled μ-biomimetic infrared (IR) sensor inspired by Melanophila acuminata using MEMS technology. Here, we present the development of a μ-capacitor that is used to detect pressure changes and the characterization of the compensation mechanism. We describe the microtechnological fabrication process for air-filled capacitors with a ratio of diameter-to-electrode distance of 1000 and a technique to fill the sensor bubble-free with water. Finally, we estimate the sensitivity of the beetle using a theoretical model of the sensillum.

3D hybrid electrode structure as implantable interface for a vestibular neural prosthesis in humans

Implantable interfaces are essential components of vestibular neural prostheses. They interface the biological system with electrical stimulation that is used to restore transfer of vestibular information. Regarding the anatomical situation special 3D structures are required. In this paper, the design and the manufacturing process of a novel 3D hybrid microelectrode structure as interface to the human vestibular system are described. Photolithography techniques, assembling technology and rapid prototyping are used for manufacturing.