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Gui D, Shao JJ, Hao M, Xing ZX, Lee HS, Shen YQ, Li XM, Cha LZ. TOF SIMS analysis of fatty acid outgassing from wafer boxes adsorbed on wafers. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5636] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- D. Gui
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - J. J. Shao
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - M. Hao
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - Z. X. Xing
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - H. S. Lee
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - Y. Q. Shen
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - X. M. Li
- Wintech Nano-Technology Services Pte. Ltd.; #03-26 The Alpha, 10 Science Park Road Singapore 117684 Singapore
| | - L. Z. Cha
- Department of Electronic Engineering; Tsinghua University; Beijing 100084 China
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Gui D, Huang YH, Nistala RR, Xing ZX, Mo ZQ, Hua YN, Cha LZ. Numerical approach to resolve mass interference in depth profiling As in SiGe. SURF INTERFACE ANAL 2010. [DOI: 10.1002/sia.3540] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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