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Fu Y, Jiang J, Zhao Z, Zhao Z, Chen K, Tao M, Chang Y, Lo G, Song J. Fully Integrated Line Array Angular Displacement Sensing Chip. Sensors (Basel) 2023; 23:2431. [PMID: 36904635 PMCID: PMC10007283 DOI: 10.3390/s23052431] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/07/2023] [Revised: 02/14/2023] [Accepted: 02/21/2023] [Indexed: 06/18/2023]
Abstract
The angular displacement sensor is a digital angular displacement measurement device that integrates optics, mechanics, and electronics. It has important applications in communication, servo control, aerospace, and other fields. Although conventional angular displacement sensors can achieve extremely high measurement accuracy and resolution, they cannot be integrated because complex signal processing circuitry is required at the photoelectric receiver, which limits their suitability for robotics and automotive applications. The design of a fully integrated line array angular displacement-sensing chip is presented for the first time using a combination of pseudo-random and incremental code channel designs. Based on the charge redistribution principle, a fully differential 12-bit, 1 MSPS sampling rate successive approximation analog-to-digital converter (SAR ADC) is designed for quantization and subdivision of the incremental code channel output signal. The design is verified with a 0.35 μm CMOS process and the area of the overall system is 3.5 × 1.8 mm2. The fully integrated design of the detector array and readout circuit is realized for the angular displacement sensing.
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Affiliation(s)
- Yunhao Fu
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Jiaqi Jiang
- Faw Jiefang Group Co., Ltd., Changchun 130012, China
| | - Zhuang Zhao
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Zhongyuan Zhao
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Kaixin Chen
- Northeast Electric Power Design Institute Co., Ltd. of China Power Engineering Consulting Group, Changchun 130000, China
| | - Min Tao
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Yuchun Chang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
- School of Microelectronics, Dalian University of Technology, Dalian 116620, China
| | - Guoqiang Lo
- Advance Micro Foundry Pte. Ltd., Singapore 117685, Singapore
| | - Junfeng Song
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
- Peng Cheng Laboratory, Shenzhen 518000, China
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Zhou N, Ding X, Li H, Ni Y, Pu Y, Mao H. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. Micromachines (Basel) 2021; 12:1554. [PMID: 34945404 DOI: 10.3390/mi12121554] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/19/2021] [Revised: 12/08/2021] [Accepted: 12/10/2021] [Indexed: 11/22/2022]
Abstract
A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices.
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Tsai ZY, Shih PJ, Tsai YC, Dai CL. Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process. Sensors (Basel) 2021; 21:1396. [PMID: 33671232 DOI: 10.3390/s21041396] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/20/2021] [Revised: 02/11/2021] [Accepted: 02/12/2021] [Indexed: 11/17/2022]
Abstract
A radio frequency microelectromechanical system switch (MSS) manufactured by the complementary metal oxide semiconductor (CMOS) process is presented. The MSS is a capacitive shunt type. Structure for the MSS consists of coplanar waveguide (CPW) lines, a membrane, and springs. The membrane locates over the CPW lines. The surface of signal line for the CPW has a silicon dioxide dielectric layer. The fabrication of the MSS contains a CMOS process and a post-process. The MSS has a sacrificial oxide layer after the CMOS process. In the post-processing, a wet etching of buffer oxide etch (BOE) etchant is employed to etch the sacrificial oxide layer, so that the membrane is released. Actuation voltage for the MSS is simulated using the CoventorWare software. The springs have a low stiffness, so that the actuation voltage reduces. The measured results reveal that actuation voltage for the MSS is 10 V. Insertion loss for the MSS is 0.9 dB at 41 GHz and isolation for the MSS is 30 dB at 41 GHz.
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Abstract
BACKGROUND AND OBJECTIVE Recently, with the increase in the population of hearing impaired people, various types of hearing aids have been rapidly developed. In particular, a fully implantable middle ear hearing device (F-IMEHD) is developed for people with sensorineural hearing loss. The F-IMEHD system comprises an implantable microphone, a transducer, and a signal processor. The signal processor should have a small size and consume less power for implantation in a human body. METHODS In this study, we designed and fabricated a signal-processing chip using the modified FFT algorithm. This algorithm was developed focusing on eliminating time delay and system complexity in the transform process. The designed signal-processing chip comprises a 4-channel WDRC, a fitting memory, a communication 1control part, and a pulse density modulator. Each channel is separated using a 64-point fast Fourier transform (FFT) method and the gain value is matched using the fitting table in the fitting memory. RESULTS AND CONCLUSION The chip was designed by Verilog-HDL and the designed HDL codes were verified by Modelsim-PE 10.3 (Mentor graphics, USA). The chip was fabricated using a 0.18 μm CMOS process (SMIC, China). Experiments were performed on a cadaver to verify the performance of the fabricated chip.
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Affiliation(s)
- Jyung Hyun Lee
- Department of Biomedical Engineering, School of Medicine, Kyungpook National University, Daegu, Korea
| | - Dong Wook Kim
- Gyeongbuk Branch Office, Korea Testing Certification, Daegu, Korea
| | - Ki Woong Seong
- Department of Biomedical Engineering, Kyungpook National University Hospital, Daegu, Korea
| | - Myoung Nam Kim
- Department of Biomedical Engineering, School of Medicine, Kyungpook National University, Daegu, Korea
| | - Jin-Ho Cho
- Institute of Biomedical Engineering Research, Kyungpook National University Korea, Daegu, Korea
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Shen WC, Shih PJ, Tsai YC, Hsu CC, Dai CL. Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique. Micromachines (Basel) 2020; 11:E92. [PMID: 31952151 DOI: 10.3390/mi11010092] [Citation(s) in RCA: 21] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/10/2019] [Revised: 01/11/2020] [Accepted: 01/12/2020] [Indexed: 11/16/2022]
Abstract
This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are the stacked aluminum layers that are made using the CMOS process. The sensing material; polypyrrole/reduced graphene oxide (PPy/RGO), is synthesized using the oxidation–reduction method; and the material is characterized using an electron spectroscope for chemical analysis (ESCA), a scanning electron microscope (SEM), and high-resolution X-ray diffraction (XRD). After the CMOS process; the AGS needs post-processing to etch an oxide layer and to deposit the sensing material. The resistance of the AGS changes when it is exposed to ammonia. A non-inverting amplifier circuit converts the resistance of the AGS into a voltage signal. The AGS operates at room temperature. Experiments show that the AGS response is 4.5% at a concentration of 1 ppm NH3; and it exhibits good repeatability. The lowest concentration that the AGS can detect is 0.1 ppm NH3
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Ambriz-Vargas F, Kolhatkar G, Broyer M, Hadj-Youssef A, Nouar R, Sarkissian A, Thomas R, Gomez-Yáñez C, Gauthier MA, Ruediger A. A Complementary Metal Oxide Semiconductor Process-Compatible Ferroelectric Tunnel Junction. ACS Appl Mater Interfaces 2017; 9:13262-13268. [PMID: 28368099 DOI: 10.1021/acsami.6b16173] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
In recent years, experimental demonstration of ferroelectric tunnel junctions (FTJ) based on perovskite tunnel barriers has been reported. However, integrating these perovskite materials into conventional silicon memory technology remains challenging due to their lack of compatibility with the complementary metal oxide semiconductor process (CMOS). This communication reports the fabrication of an FTJ based on a CMOS-compatible tunnel barrier Hf0.5Zr0.5O2 (6 unit cells thick) on an equally CMOS-compatible TiN electrode. Analysis of the FTJ by grazing angle incidence X-ray diffraction confirmed the formation of the noncentrosymmetric orthorhombic phase (Pbc21, ferroelectric phase). The FTJ characterization is followed by the reconstruction of the electrostatic potential profile in the as-grown TiN/Hf0.5Zr0.5O2/Pt heterostructure. A direct tunneling current model across a trapezoidal barrier was used to correlate the electronic and electrical properties of our FTJ devices. The good agreement between the experimental and theoretical model attests to the tunneling electroresistance effect (TER) in our FTJ device. A TER ratio of ∼15 was calculated for the present FTJ device at low read voltage (+0.2 V). This study suggests that Hf0.5Zr0.5O2 is a promising candidate for integration into conventional Si memory technology.
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Affiliation(s)
- Fabian Ambriz-Vargas
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
| | - Gitanjali Kolhatkar
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
| | - Maxime Broyer
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
| | - Azza Hadj-Youssef
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
| | - Rafik Nouar
- Plasmionique Inc. , 9092 Rimouski, Brossard, Québec J4X2S3, Canada
| | | | - Reji Thomas
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
| | - Carlos Gomez-Yáñez
- Departamento de Ingeniería en Metalurgia y Materiales, Instituto Politécnico Nacional , Zacatenco 07738, México
| | - Marc A Gauthier
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
| | - Andreas Ruediger
- Centre Énergie, Matériaux et Télécommunications, INRS , Varennes, Québec J3X1S2, Canada
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Deng F, He Y, Li B, Zhang L, Wu X, Fu Z, Zuo L. Design of an Embedded CMOS Temperature Sensor for Passive RFID Tag Chips. Sensors (Basel) 2015; 15:11442-53. [PMID: 25993518 PMCID: PMC4481890 DOI: 10.3390/s150511442] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/22/2015] [Accepted: 05/12/2015] [Indexed: 11/19/2022]
Abstract
This paper presents an ultra-low embedded power temperature sensor for passive RFID tags. The temperature sensor converts the temperature variation to a PTAT current, which is then transformed into a temperature-controlled frequency. A phase locked loop (PLL)-based sensor interface is employed to directly convert this temperature-controlled frequency into a corresponding digital output without an external reference clock. The fabricated sensor occupies an area of 0.021 mm2 using the TSMC 0.18 1P6M mixed-signal CMOS process. Measurement results of the embedded sensor within the tag system shows a 92 nW power dissipation under 1.0 V supply voltage at room temperature, with a sensing resolution of 0.15 °C/LSB and a sensing accuracy of −0.7/0.6 °C from −30 °C to 70 °C after 1-point calibration at 30 °C.
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Affiliation(s)
- Fangming Deng
- School of Electrical and Electronic Engineering, East China Jiaotong University, Nanchang 330013, China.
- School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China.
| | - Yigang He
- School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China.
| | - Bing Li
- School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China.
| | - Lihua Zhang
- School of Electrical and Electronic Engineering, East China Jiaotong University, Nanchang 330013, China.
| | - Xiang Wu
- School of Electrical and Electronic Engineering, East China Jiaotong University, Nanchang 330013, China.
| | - Zhihui Fu
- School of Electrical and Electronic Engineering, East China Jiaotong University, Nanchang 330013, China.
| | - Lei Zuo
- School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China.
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Zhao X, Wen D, Li G. Fabrication and characteristics of an nc-Si/c-Si heterojunction MOSFETs pressure sensor. Sensors (Basel) 2012; 12:6369-79. [PMID: 22778646 DOI: 10.3390/s120506369] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/12/2012] [Revised: 05/02/2012] [Accepted: 05/03/2012] [Indexed: 11/17/2022]
Abstract
A novel nc-Si/c-Si heterojunction MOSFETs pressure sensor is proposed in this paper, with four p-MOSFETs with nc-Si/c-Si heterojunction as source and drain. The four p-MOSFETs are designed and fabricated on a square silicon membrane by CMOS process and MEMS technology where channel resistances of the four nc-Si/c-Si heterojunction MOSFETs form a Wheatstone bridge. When the additional pressure is P, the nc-Si/c-Si heterojunction MOSFETs pressure sensor can measure this additional pressure P. The experimental results show that when the supply voltage is 3 V, length-width (L:W) ratio is 2:1, and the silicon membrane thickness is 75 μm, the full scale output voltage of the pressure sensor is 15.50 mV at room temperature, and pressure sensitivity is 0.097 mV/kPa. When the supply voltage and L:W ratio are the same as the above, and the silicon membrane thickness is 45 μm, the full scale output voltage is 43.05 mV, and pressure sensitivity is 2.153 mV/kPa. Therefore, the sensor has higher sensitivity and good temperature characteristics compared to the traditional piezoresistive pressure sensor.
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