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Fast Acoustic Light Sculpting for On-Demand Maskless Lithography. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2019;6:1900304. [PMID: 31380209 PMCID: PMC6662050 DOI: 10.1002/advs.201900304] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/08/2019] [Revised: 04/01/2019] [Indexed: 06/10/2023]
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