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Ishikawa R, Tanaka R, Morishita S, Kohno Y, Sawada H, Sasaki T, Ichikawa M, Hasegawa M, Shibata N, Ikuhara Y. Reprint of: Automated geometric aberration correction for large-angle illumination STEM. Ultramicroscopy 2021; 231:113410. [PMID: 34756616 DOI: 10.1016/j.ultramic.2021.113410] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/30/2020] [Revised: 01/14/2021] [Accepted: 01/19/2021] [Indexed: 10/20/2022]
Abstract
Depth resolution in scanning transmission electron microscopy (STEM) is physically limited by the illumination angle. In recent notable progress on aberration correction technology, the illumination angle is significantly improved to be larger than 60 milliradians, which is 2 or 3 times larger than those in the previous generation. However, for three-dimensional depth sectioning with the large illumination angles, it is prerequisite to ultimately minimize lower orders of aberrations such as 2- and 3-fold astigmatisms and axial coma. Here, we demonstrate a live aberration correction using atomic-resolution STEM images rather than Ronchigram images. The present method could save the required time for aberration correction, and moreover, it is possible to build up a fully automated program. We demonstrate the method should be useful not only for axial depth sectioning but also phase imaging in STEM including differential phase-contrast imaging.
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Affiliation(s)
- Ryo Ishikawa
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan.
| | - Riku Tanaka
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan
| | | | - Yuji Kohno
- JEOL Ltd, 3-1-2, Akishima, Tokyo 196-8558, Japan
| | | | - Takuya Sasaki
- Department of Materials Physics, Nagoya University, Nagoya, Aichi 464-8603, Japan
| | - Masanari Ichikawa
- Department of Materials Physics, Nagoya University, Nagoya, Aichi 464-8603, Japan
| | - Masashi Hasegawa
- Department of Materials Physics, Nagoya University, Nagoya, Aichi 464-8603, Japan
| | - Naoya Shibata
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Aichi 456-8587, Japan
| | - Yuichi Ikuhara
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Aichi 456-8587, Japan
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Ishikawa R, Tanaka R, Morishita S, Kohno Y, Sawada H, Sasaki T, Ichikawa M, Hasegawa M, Shibata N, Ikuhara Y. Automated geometric aberration correction for large-angle illumination STEM. Ultramicroscopy 2021; 222:113215. [PMID: 33548863 DOI: 10.1016/j.ultramic.2021.113215] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/30/2020] [Revised: 01/14/2021] [Accepted: 01/19/2021] [Indexed: 10/22/2022]
Abstract
Depth resolution in scanning transmission electron microscopy (STEM) is physically limited by the illumination angle. In recent notable progress on aberration correction technology, the illumination angle is significantly improved to be larger than 60 milliradians, which is 2 or 3 times larger than those in the previous generation. However, for three-dimensional depth sectioning with the large illumination angles, it is prerequisite to ultimately minimize lower orders of aberrations such as 2- and 3-fold astigmatisms and axial coma. Here, we demonstrate a live aberration correction using atomic-resolution STEM images rather than Ronchigram images. The present method could save the required time for aberration correction, and moreover, it is possible to build up a fully automated program. We demonstrate the method should be useful not only for axial depth sectioning but also phase imaging in STEM including differential phase-contrast imaging.
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Affiliation(s)
- Ryo Ishikawa
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan.
| | - Riku Tanaka
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan
| | | | - Yuji Kohno
- JEOL Ltd, 3-1-2, Akishima, Tokyo 196-8558, Japan
| | | | - Takuya Sasaki
- Department of Materials Physics, Nagoya University, Nagoya, Aichi 464-8603, Japan
| | - Masanari Ichikawa
- Department of Materials Physics, Nagoya University, Nagoya, Aichi 464-8603, Japan
| | - Masashi Hasegawa
- Department of Materials Physics, Nagoya University, Nagoya, Aichi 464-8603, Japan
| | - Naoya Shibata
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Aichi 456-8587, Japan
| | - Yuichi Ikuhara
- Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Aichi 456-8587, Japan
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