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Low Dark Current Operation in InAs/GaAs(111)A Infrared Photodetectors: Role of Misfit Dislocations at the Interface. ACS APPLIED MATERIALS & INTERFACES 2023. [PMID: 37286339 DOI: 10.1021/acsami.3c05725] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
We demonstrate an extended short-wave infrared (e-SWIR) photodetector composed of an InAs/GaAs(111)A heterostructure with interface misfit dislocations. The layer structure of the photodetector consists simply of an n-InAs optical absorption layer directly grown with a thin undoped-GaAs spacer layer on n-GaAs by molecular beam epitaxy. The lattice mismatch was abruptly relaxed by forming a misfit dislocation network at the initial stage of the InAs growth. We found high-density threading dislocations (1.5 × 109 cm-2) in the InAs layer. The current-voltage characteristics of the photodetector at 77 K had a very low dark current density (<1 × 10-9 A cm-2) at a positive applied voltage (electrons flow from n-GaAs to n-InAs) of up to ∼+1 V. Simulation of the band structure revealed that the direct connection of GaAs and InAs and the formation of interfacial states by the misfit dislocations play significant positive roles in suppressing dark current. Under illumination with e-SWIR light at 77 K, a clear photocurrent signal was observed with a 2.6 μm cutoff wavelength, which is consistent with the bandgap of InAs. We also demonstrated e-SWIR detection at room temperature with a 3.2 μm cutoff wavelength. The maximum detectivity at 294 K exceeds 2 × 108 cm Hz0.5 W-1 for the detection of e-SWIR light at 2 μm.
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Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits. MICROMACHINES 2023; 14:mi14050948. [PMID: 37241572 DOI: 10.3390/mi14050948] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/25/2023] [Revised: 04/24/2023] [Accepted: 04/25/2023] [Indexed: 05/28/2023]
Abstract
The rapid expansion of the applications of infrared (IR) sensing in the commercial market has driven the need to develop new materials and detector designs for enhanced performance. In this work, we describe the design of a microbolometer that uses two cavities to suspend two layers (sensing and absorber). Here, we implemented the finite element method (FEM) from COMSOL Multiphysics to design the microbolometer. We varied the layout, thickness, and dimensions (width and length) of different layers one at a time to study the heat transfer effect for obtaining the maximum figure of merit. This work reports the design, simulation, and performance analysis of the figure of merit of a microbolometer that uses GexSiySnzOr thin films as the sensing layer. From our design, we obtained an effective thermal conductance of 1.0135×10-7 W/K, a time constant of 11 ms, responsivity of 5.040×105 V/W, and detectivity of 9.357×107 cm-Hz1/2/W considering a 2 μA bias current.
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High-Performance Near-Infrared Photodetector Based on PbS Colloidal Quantum Dots/ZnO-Nanowires Hybrid Nanostructures. SENSORS (BASEL, SWITZERLAND) 2023; 23:2254. [PMID: 36850852 PMCID: PMC9961084 DOI: 10.3390/s23042254] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/29/2022] [Revised: 01/19/2023] [Accepted: 01/20/2023] [Indexed: 06/18/2023]
Abstract
Quantum dots have found significant applications in photoelectric detectors due to their unique electronic and optical properties, such as tunable bandgap. Recently, colloidal quantum dots (CQDs) have attracted much interest because of the ease of controlling the dot size and low production cost. In this paper, a high-performance ZnO/PbS heterojunction photodetector was fabricated by spin-coating PbS CQDs onto the surface of a hydrothermally grown vertical array of ZnO nanowires (NWs) on an indium tin oxide (ITO) substrate. Under 940 nm near-infrared light illumination, the device demonstrated a responsivity and detectivity of ~3.9 × 104 A/W and ~9.4 × 1013 Jones, respectively. The excellent performances and low cost of this nanocomposite-based photodetector show that it has the potential for widespread applications ranging from medical diagnosis to environmental monitoring.
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GaN/AlN Multi-Quantum Wells Infrared Detector with Short-Wave Infrared Response at Room Temperature. SENSORS (BASEL, SWITZERLAND) 2022; 22:4239. [PMID: 35684859 PMCID: PMC9185584 DOI: 10.3390/s22114239] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/14/2022] [Revised: 05/28/2022] [Accepted: 05/30/2022] [Indexed: 06/15/2023]
Abstract
GaN-based quantum well infrared detectors can make up for the weakness of GaAs-based quantum well infrared detectors for short-wave infrared detection. In this work, GaN/AlN (1.8 nm/1.8 nm) multi-quantum wells have been epitaxially grown on sapphire substrate using MBE technology. Meanwhile, based on this device structure, the band positions and carrier distributions of a single quantum well are also calculated. At room temperature, the optical response of the device is 58.6 μA/W with a bias voltage of 0.5 V, and the linearity between the optical response and the laser power is R2 = 0.99931. This excellent detection performance can promote the research progress of GaN-based quantum well infrared detectors in the short-wave infrared field.
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Design and Fabrication of a Low-Cost Thermopile Infrared Detector. MICROMACHINES 2021; 12:mi12091134. [PMID: 34577777 PMCID: PMC8464669 DOI: 10.3390/mi12091134] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/20/2021] [Revised: 09/16/2021] [Accepted: 09/17/2021] [Indexed: 11/28/2022]
Abstract
In this paper, we design and optimize a low-cost, closed-film structure of a microelectromechanical systems (MEMS) thermopile infrared detector. By optimizing the circular arrangement of thermocouple strips and the thermal isolation design of the cold end to pursue a higher temperature difference, in addition to eliminating the absorption region, silicon nitride is deposited on the whole device surface as a passivated absorption layer. This reduces the cost while maintaining the voltage response and is suitable for mass production. The optimized detector had a 22.6% improvement in the response rate to 34.2 V/W, a detection rate of 1.02 × 108 cm·Hz1/2/W, and a response time of 26.9 ms. The design optimization of this detector provides a reference for further development of IR detectors.
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Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection. MICROMACHINES 2020; 11:E1073. [PMID: 33271897 PMCID: PMC7759807 DOI: 10.3390/mi11121073] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/12/2020] [Revised: 11/25/2020] [Accepted: 11/29/2020] [Indexed: 11/17/2022]
Abstract
We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O2 environment. Substrates were kept at variable temperatures during the deposition. The PCT films were annealed at various temperatures in an O2 environment for 15 min. X-ray diffraction results confirm the polycrystalline nature of these films. Energy dispersive spectroscopy function of scanning electron microscope showed that the films are stoichiometric (Ca0.43Pb0.57) TiO3 (Ca/Ti = 0.5, Pb/Ti = 0.66). Temperature dependence of capacitance, pyroelectric current, and pyroelectric coefficient was investigated for different PCT films. Our results show that films deposited at 550 °C and 600 °C demonstrate better quality and larger values of the pyroelectric coefficient. On the other hand, the capacitance fabricated on the PCT films at 550 °C showed the highest value of pyroelectric current and pyroelectric coefficient which were 14 pA and at 30 °C was ~2 µC/m2K respectively at a higher temperature. In addition, we used density functional theory to determine the atomic and band structure, real and imaginary parts of dielectric constant and refractive index, and absorption and reflection constants with energy.
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InAs/InAsSb Type-II Strained-Layer Superlattice Infrared Photodetectors. MICROMACHINES 2020; 11:mi11110958. [PMID: 33114617 PMCID: PMC7692601 DOI: 10.3390/mi11110958] [Citation(s) in RCA: 17] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/22/2020] [Revised: 10/19/2020] [Accepted: 10/21/2020] [Indexed: 11/17/2022]
Abstract
The InAs/InAsSb (Gallium-free) type-II strained-layer superlattice (T2SLS) has emerged in the last decade as a viable infrared detector material with a continuously adjustable band gap capable of accommodating detector cutoff wavelengths ranging from 4 to 15 µm and beyond. When coupled with the unipolar barrier infrared detector architecture, the InAs/InAsSb T2SLS mid-wavelength infrared (MWIR) focal plane array (FPA) has demonstrated a significantly higher operating temperature than InSb FPA, a major incumbent technology. In this brief review paper, we describe the emergence of the InAs/InAsSb T2SLS infrared photodetector technology, point out its advantages and disadvantages, and survey its recent development.
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Infrared Thin Film Detectors Based on Thermoresponsive Microgels with Linear Shrinkage Behavior and Gold Nanorods. ACS APPLIED MATERIALS & INTERFACES 2020; 12:34180-34189. [PMID: 32634306 DOI: 10.1021/acsami.0c08049] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
To overcome the drawbacks of existing infrared detectors, infrared thin film detectors based on microgels and gold nanorods (Au NRs) are investigated. The microgels with a linear shrinkage of the hydrodynamic diameter between 10 and 55 °C are copolymerized by monomers di(ethylene glycol) methyl ether methacrylate, oligo(ethylene glycol) methyl ether methacrylate, and acrylic acid with a molar ratio of 1:1:1. Homogenous thin films are obtained by spin coating from an aqueous solution on silicon substrates. Upon heating in a water vapor atmosphere, the film thickness of the hybrid films linearly decreases. Heat generation from a plasmon resonance enhanced absorption of the infrared radiation by the Au NRs triggers a linear shrinkage in the hybrid microgel-Au NR films as well. A linear correlation between the film thickness and the applied infrared power density is observed. The sensitivity is enhanced by a slight increase in the amount of Au NRs in the films. Infrared detectors are constructed from the hybrid microgel-Au NR films by adding two electrodes via deposition of two silver layers at the film ends. By monitoring the ohmic resistance, the intensity of the incident infrared light can be obtained. The detectors not only possess a good reversibility and fast response rate but also show a high stability after the resistance measurements. Compared with the traditional infrared detectors, the infrared thin film detectors based on microgels are sensitivity adjustable. Thus, they can be promising candidates for replacing expensive inorganic infrared detectors in areas of daily life applications.
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A Median-Ratio Scene-Based Non-Uniformity Correction Method for Airborne Infrared Point Target Detection System. SENSORS (BASEL, SWITZERLAND) 2020; 20:s20113273. [PMID: 32521798 PMCID: PMC7309176 DOI: 10.3390/s20113273] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/13/2020] [Revised: 06/04/2020] [Accepted: 06/05/2020] [Indexed: 06/11/2023]
Abstract
Infrared detectors suffer from severe non-uniform noise which highly reduces image resolution and point target signal-to-noise ratio. This is the restriction for airborne point target detection systems in reaching the background limit. The existing methods are either not accurate enough, or too complex to be applied to engineering. To improve the precision and reduce the algorithm complexity of scene-based Non-Uniformity Correction (NUC) for an airborne point target detection system, a Median-Ratio Scene-based NUC (MRSBNUC) method is proposed. The method is based on the assumption that the median value of neighboring pixels is approximately constant. The NUC coefficients are calculated recursively by selecting the median ratio of adjacent pixels. Several experiments were designed and conducted. For both the clear sky scene and scene with clouds, the non-uniformity is effectively reduced. Furthermore, targets were detected in outfield experiments. For Target 1 48.36 km away and Target 2 50.53 km away, employing MRSBNUC the SNR of the target increased 2.09 and 1.73 times respectively compared to Two-Point NUC. It was concluded that the MRSBNUC method can reduce the non-uniformity of the detector effectively which leads to a longer detection distance and fewer false alarms of the airborne point target detection system.
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Study on a High Performance MEMS Infrared Thermopile Detector. MICROMACHINES 2019; 10:mi10120877. [PMID: 31847124 PMCID: PMC6953050 DOI: 10.3390/mi10120877] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/28/2019] [Revised: 12/08/2019] [Accepted: 12/12/2019] [Indexed: 11/17/2022]
Abstract
This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.
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A MEMS-Based Quad-Wavelength Hybrid Plasmonic-Pyroelectric Infrared Detector. MICROMACHINES 2019; 10:mi10060413. [PMID: 31234295 PMCID: PMC6631002 DOI: 10.3390/mi10060413] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/03/2019] [Revised: 03/28/2019] [Accepted: 03/29/2019] [Indexed: 12/16/2022]
Abstract
Spectrally selective detection is of crucial importance for diverse modern spectroscopic applications such as multi-wavelength pyrometry, non-dispersive infrared gas sensing, biomedical analysis, flame detection, and thermal imaging. This paper reports a quad-wavelength hybrid plasmonic-pyroelectric detector that exhibited spectrally selective infrared detection at four wavelengths-3.3, 3.7, 4.1, and 4.5 μm. The narrowband detection was achieved by coupling the incident infrared light to the resonant modes of the four different plasmonic perfect absorbers based on Al-disk-array placed on a Al2O3-Al bilayer. These absorbers were directly integrated on top of a zinc oxide thin film functioning as a pyroelectric transducer. The device was fabricated using micro-electromechanical system (MEMS) technology to optimize the spectral responsivity. The proposed detector operated at room temperature and exhibited a responsivity of approximately 100-140 mV/W with a full width at half maximum of about 0.9-1.2 μm. The wavelength tunability, high spectral resolution, compactness and robust MEMS-based platform of the hybrid device demonstrated a great advantage over conventional photodetectors with bandpass filters, and exhibited impressive possibilities for miniature multi-wavelength spectroscopic devices.
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Update of Single Event Effects Radiation Hardness Assurance of Readout Integrated Circuit of Infrared Image Sensors at Cryogenic Temperature. SENSORS 2018; 18:s18072338. [PMID: 30022012 PMCID: PMC6068564 DOI: 10.3390/s18072338] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/04/2018] [Revised: 07/15/2018] [Accepted: 07/16/2018] [Indexed: 11/30/2022]
Abstract
This paper review presents Single Event Effects (SEE) irradiation tests under heavy ions of the test-chip of D-Flip-Flop (DFF) cells and complete readout integrated circuits (ROIC) as a function of temperature, down to 50 K. The analyses of the experimental data are completed using the SEE prediction tool MUSCA SEP3. The conclusions derived from the experimental measurements and related analyses allow to update the current SEE radiation hardness assurance (RHA) for readout integrated circuits of infrared image sensors used at cryogenic temperatures. The current RHA update is performed on SEE irradiation tests at room temperature, as opposed to the operational cryogenic temperature. These tests include SET (Single Event Transient), SEU (Single Event Upset) and SEFI (Single Event Functional Interrupt) irradiation tests. This update allows for reducing the cost of ROIC qualifications and the test setup complexity for each space mission.
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Wavelength- or Polarization-Selective Thermal Infrared Detectors for Multi-Color or Polarimetric Imaging Using Plasmonics and Metamaterials. MATERIALS (BASEL, SWITZERLAND) 2017; 10:E493. [PMID: 28772855 PMCID: PMC5459055 DOI: 10.3390/ma10050493] [Citation(s) in RCA: 48] [Impact Index Per Article: 6.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/27/2017] [Revised: 04/26/2017] [Accepted: 04/27/2017] [Indexed: 12/19/2022]
Abstract
Wavelength- or polarization-selective thermal infrared (IR) detectors are promising for various novel applications such as fire detection, gas analysis, multi-color imaging, multi-channel detectors, recognition of artificial objects in a natural environment, and facial recognition. However, these functions require additional filters or polarizers, which leads to high cost and technical difficulties related to integration of many different pixels in an array format. Plasmonic metamaterial absorbers (PMAs) can impart wavelength or polarization selectivity to conventional thermal IR detectors simply by controlling the surface geometry of the absorbers to produce surface plasmon resonances at designed wavelengths or polarizations. This enables integration of many different pixels in an array format without any filters or polarizers. We review our recent advances in wavelength- and polarization-selective thermal IR sensors using PMAs for multi-color or polarimetric imaging. The absorption mechanism defined by the surface structures is discussed for three types of PMAs-periodic crystals, metal-insulator-metal and mushroom-type PMAs-to demonstrate appropriate applications. Our wavelength- or polarization-selective uncooled IR sensors using various PMAs and multi-color image sensors are then described. Finally, high-performance mushroom-type PMAs are investigated. These advanced functional thermal IR detectors with wavelength or polarization selectivity will provide great benefits for a wide range of applications.
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Enhancing the Responsivity of Uncooled Infrared Detectors Using Plasmonics for High-Performance Infrared Spectroscopy. SENSORS 2017; 17:s17040908. [PMID: 28425964 PMCID: PMC5426832 DOI: 10.3390/s17040908] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/01/2017] [Revised: 04/15/2017] [Accepted: 04/18/2017] [Indexed: 12/03/2022]
Abstract
A lead zirconate titanate (PZT;Pb(Zr0.52Ti0.48)O3) layer embedded infrared (IR) detector decorated with wavelength-selective plasmonic crystals has been investigated for high-performance non-dispersive infrared (NDIR) spectroscopy. A plasmonic IR detector with an enhanced IR absorption band has been designed based on numerical simulations, fabricated by conventional microfabrication techniques, and characterized with a broadly tunable quantum cascade laser. The enhanced responsivity of the plasmonic IR detector at specific wavelength band has improved the performance of NDIR spectroscopy and pushed the limit of detection (LOD) by an order of magnitude. In this paper, a 13-fold enhancement in the LOD of a methane gas sensing using NDIR spectroscopy is demonstrated with the plasmonic IR detector.
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Graphene-aluminum nitride NEMS resonant infrared detector. MICROSYSTEMS & NANOENGINEERING 2016; 2:16026. [PMID: 31057826 PMCID: PMC6444720 DOI: 10.1038/micronano.2016.26] [Citation(s) in RCA: 23] [Impact Index Per Article: 2.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/19/2016] [Revised: 03/27/2016] [Accepted: 04/11/2016] [Indexed: 05/26/2023]
Abstract
The use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated, showing thermal detection capabilities that could potentially outperform conventional microbolometers. The scaling of the device thickness in the nanometer range and the achievement of high infrared absorption in such a subwavelength thickness, without sacrificing the electromechanical performance, are the two key challenges for the implementation of fast, high-resolution micro-/nanoelectromechanical resonant infrared detectors. In this paper, we show that by using a virtually massless, high-electrical-conductivity, and transparent graphene electrode, floating at the van der Waals separation of a few angstroms from a piezoelectric aluminum nitride nanoplate, it is possible to implement ultrathin (460 nm) piezoelectric nanomechanical resonant structures with improved electromechanical performance (>50% improved frequency×quality factor) and infrared detection capabilities (>100× improved infrared absorptance) compared with metal-electrode counterparts, despite their reduced volumes. The intrinsic infrared absorption capabilities of a submicron thin graphene-aluminum nitride plate backed with a metal electrode are investigated for the first time and exploited for the first experimental demonstration of a piezoelectric nanoelectromechanical resonant thermal detector with enhanced infrared absorptance in a reduced volume. Moreover, the combination of electromagnetic and piezoelectric resonances provided by the same graphene-aluminum nitride-metal stack allows the proposed device to selectively detect short-wavelength infrared radiation (by tailoring the thickness of aluminum nitride) with unprecedented electromechanical performance and thermal capabilities. These attributes potentially lead to the development of uncooled infrared detectors suitable for the implementation of high performance, miniaturized and power-efficient multispectral infrared imaging systems.
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Development of a Bolometer Detector System for the NIST High Accuracy Infrared Spectrophotometer. JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 1998; 103:605-614. [PMID: 28009364 PMCID: PMC4890956 DOI: 10.6028/jres.103.039] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Accepted: 08/25/1998] [Indexed: 06/06/2023]
Abstract
A bolometer detector system was developed for the high accuracy infrared spectrophotometer at the National Institute of Standards and Technology to provide maximum sensitivity, spatial uniformity, and linearity of response covering the entire infrared spectral range. The spatial response variation was measured to be within 0.1 %. The linearity of the detector output was measured over three decades of input power. After applying a simple correction procedure, the detector output was found to deviate less than 0.2 % from linear behavior over this range. The noise equivalent power (NEP) of the bolometer system was 6 × 10-12 [Formula: see text] at the frequency of 80 Hz. The detector output 3 dB roll-off frequency was 200 Hz. The detector output was stable to within ± 0.05 % over a 15 min period. These results demonstrate that the bolometer detector system will serve as an excellent detector for the high accuracy infrared spectrophotometer.
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