Surface Modification of Magnetoactive Elastomers by Laser Micromachining

It has been recently demonstrated that laser micromachining of magnetoactive elastomers is a very convenient method for fabricating dynamic surface microstructures with magnetically tunable properties, such as wettability and surface reflectivity. In this study, we investigate the impact of the micromachining process on the fabricated material's structural properties and its chemical composition. By employing scanning electron microscopy, we investigate changes in size distribution and spatial arrangement of carbonyl iron microparticles dispersed in the polydimethylsiloxane (PDMS) matrix as a function of laser irradiation. Based on the images obtained by a low vacuum secondary electron detector, we analyze modifications of the surface topography. The results show that most profound modifications occur during the low-exposure (8 J/cm2) treatment of the surface with the laser beam. Our findings provide important insights for developing theoretical models of functional properties of laser-sculptured microstructures from magnetoactive elastomers.

A Flexible Printed Circuit Board Based Microelectromechanical Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator

Micromachined electric field mills have received much interest for the measurement of DC fields; however, conventional designs with lateral moving shutters could have shutter lifting in the presence of strong fields, which affects their performance. This paper presents a MEMS electric field mill utilizing a vertical movement shutter to address this issue. The sensor is designed and fabricated based on a flexible PCB substrate and is released using a laser-cutting process. The movement of the shutter is driven by an electrostatic actuator. When the driving signal is a sine wave, the shutter moves in the same direction during both the positive and negative half-periods. This facilitates the application of a lock-in amplifier to synchronize with the signal at twice the frequency of the driving signal. In experimental testing, when the vertical shutter is driven at a resonance of 840 Hz, the highest sensitivity of the sensor is achieved and is measured to be 5.1 V/kVm-1. The sensor also demonstrates a good linearity of 1.1% for measuring DC electric fields in the range of 1.25 kV/m to 25 kV/m.

Minimally Invasive Intradiscal Delivery of BM-MSCs via Fibrous Microscaffold Carriers

Current treatments of degenerated intervertebral discs often provide only temporary relief or address specific causes, necessitating the exploration of alternative therapies. Cell-based regenerative approaches showed promise in many clinical trials, but limitations such as cell death during injection and a harsh disk environment hinder their effectiveness. Injectable microscaffolds offer a solution by providing a supportive microenvironment for cell delivery and enhancing bioactivity. This study evaluated the safety and feasibility of electrospun nanofibrous microscaffolds modified with chitosan (CH) and chondroitin sulfate (CS) for treating degenerated NP tissue in a large animal model. The microscaffolds facilitated cell attachment and acted as an effective delivery system, preventing cell leakage under a high disc pressure. Combining microscaffolds with bone marrow-derived mesenchymal stromal cells demonstrated no cytotoxic effects and proliferation over the entire microscaffolds. The administration of cells attached to microscaffolds into the NP positively influenced the regeneration process of the intervertebral disc. Injectable poly(l-lactide-co-glycolide) and poly(l-lactide) microscaffolds enriched with CH or CS, having a fibrous structure, showed the potential to promote intervertebral disc regeneration. These features collectively address critical challenges in the fields of tissue engineering and regenerative medicine, particularly in the context of intervertebral disc degeneration.

Formation of Multiscale Pattern Structures by Combined Patterning of Nanotransfer Printing and Laser Micromachining

Various lithography techniques have been widely used for the fabrication of next-generation device applications. Micro/nanoscale pattern structures formed by lithographic methods significantly improve the performance capabilities of the devices. Here, we introduce a novel method that combines the patterning of nanotransfer printing (nTP) and laser micromachining to fabricate multiscale pattern structures on a wide range of scales. Prior to the formation of various nano-in-micro-in-millimeter (NMM) patterns, the nTP process is employed to obtain periodic nanoscale patterns on the target substrates. Then, an optimum laser-based patterning that effectively engraves various nanopatterned surfaces, in this case, spin-cast soft polymer film, rigid polymer film, a stainless still plate, and a Si substrate, is established. We demonstrate the formation of well-defined square and dot-shaped multiscale NMM-patterned structures by the combined patterning method of nTP and laser processes. Furthermore, we present the generation of unusual text-shaped NMM pattern structures on colorless polyimide (CPI) film, showing optically excellent rainbow luminescence based on the configuration of multiscale patterns from nanoscale to milliscale. We expect that this combined patterning strategy will be extendable to other nano-to-micro fabrication processes for application to various nano/microdevices with complex multiscale pattern geometries.

Hole Depth Prediction in a Femtosecond Laser Drilling Process Using Deep Learning

In high-aspect ratio laser drilling, many laser and optical parameters can be controlled, including the high-laser beam fluence and number of drilling process cycles. Measurement of the drilled hole depth is occasionally difficult or time consuming, especially during machining processes. This study aimed to estimate the drilled hole depth in high-aspect ratio laser drilling by using captured two-dimensional (2D) hole images. The measuring conditions included light brightness, light exposure time, and gamma value. In this study, a method for predicting the depth of a machined hole by using a deep learning methodology was devised. Adjusting the laser power and the number of processing cycles for blind hole generation and image analysis yielded optimal conditions. Furthermore, to forecast the form of the machined hole, we identified the best circumstances based on changes in the exposure duration and gamma value of the microscope, which is a 2D image measurement instrument. After extracting the data frame by detecting the contrast data of the hole by using an interferometer, the hole depth was predicted using a deep neural network with a precision of within 5 μm for a hole within 100 μm.

Thermodynamical Analysis of the Formation of α-Si Ring Structures on Silicon Surface

Superficial modifications on silicon wafers produced by single-shot focused femtosecond laser irradiation having a 1030 nm wavelength and 300 fs pulse duration were experimentally and theoretically analyzed. The laser fluence window when the amorphous silicon phase develops, resulting in a ring-like modification shape, was experimentally estimated to be between 0.26 J/cm2 and 0.40 J/cm2 and was independent of the silicon dopant type and laser focusing conditions; however, the window was narrower when compared to results reported for shorter pulse durations. In addition, we present a simplified numerical model that can explain and predict the formation of these patterns based on the caloric coefficients of silicon and the energy distribution of the deposited material.

Pin-Shaped Surface Structures Generated by Laser Single Pulse Drilling for High-Strength Interfaces in Thermally Joined Polymer-Metal Hybrids

Laser structuring is by far the most investigated metal surface-pretreatment method for creating adhesion in polymer-metal hybrids. Especially, cone-like protrusions show excellent wetting behaviour as well as high compound strength. However, the processing time is extremely high. Therefore, this paper assesses a process strategy for creating pin structures with scalable height by single pulse drilling with an Nd/YVO₄ nanosecond laser system on EN AW-6082 aluminium alloy. The strength testing is carried out by butt-bonded hollow cylinder torsion. The samples are manufactured by heat-conduction thermal joining with polyamide 6. Ten different surface structures with two different ablation diameters are investigated and compared to cone-like protrusions in terms of processing time, wetting behaviour, shear strength and fracture behaviour. The experimental results show that pulse drilling pins structures with high aspect ratio reach-strength values close to cone-like protrusions but with 31 times higher processing rate.

Laser-based sample preparation for high-resolution X-ray-computed tomography of glasses and glass ceramics

X-ray-computed tomography with sub-micron resolution (nano-CT) is one of the most useful techniques to examine the 3D microstructure of materials down to voxel sizes 10 nm. However, since size and shape of samples have considerable influence on acquisition time and data quality, adapted and universally applicable workflows are needed. Three novel workflows for sample preparation using ultra-short pulsed lasers are presented which allow for reproducible fabrication, safe extraction and mounting of samples. Their application potential is illustrated via nano-CT measurements of glass ceramics as well as a laser-modified glass. Since the according sample geometries take also the requirements of other analytical techniques such as transmission electron microscopy into account, samples prepared according to the new workflows can be furthermore seen as a starting point for correlative microstructural analyses involving multiple techniques.

A Polymeric Piezoelectric Tactile Sensor Fabricated by 3D Printing and Laser Micromachining for Hardness Differentiation during Palpation

Tactile sensors are important bionic microelectromechanical systems that are used to implement an artificial sense of touch for medical electronics. Compared with the natural sense of touch, this artificial sense of touch provides more quantitative information, augmenting the objective aspects of several medical operations, such as palpation-based diagnosis. Tactile sensors can be effectively used for hardness differentiation during the palpation process. Since palpation requires direct physical contact with patients, medical safety concerns are alleviated if the sensors used can be made disposable. In this respect, the low-cost, rapid fabrication of tactile sensors based on polymers is a possible alternative. The present work uses the 3D printing of elastic resins and the laser micromachining of piezoelectric polymeric films to make a low-cost tactile sensor for hardness differentiation through palpation. The fabricated tactile sensor has a sensitivity of 1.52 V/mm to mechanical deformation at the vertical direction, a sensitivity of 11.72 mV/HA in sensing material hardness with a pressing depth of 500 µm for palpation, and a validated capability to detect rigid objects buried in a soft tissue phantom. Its performance is comparable with existing piezoelectric tactile sensors for similar applications. In addition, the tactile sensor has the additional advantage of providing a simpler microfabrication process.

Robust Anti-Icing Surfaces Based on Dual Functionality─Microstructurally-Induced Ice Shedding with Superimposed Nanostructurally-Enhanced Water Shedding

Research into anti-icing surfaces often conflates the two separate problems of ice accumulation: water adhesion and ice adhesion. The body feathers of perpetually ice-free penguins are very good natural examples of anti-icing surfaces, which use two different mitigation strategies for the two disparate problems. Herein, we mimic the form of the feather's wire-like structure, which is decorated with superimposed nanogrooves by laser micromachining fine woven wire cloths. Post-processing techniques also allow us to isolate the role of surface chemistry by creating both hydrophilic and hydrophobic versions of the synthetic anti-icing surfaces. Our results show that water-shedding and ice-shedding characteristics are indeed derived from different physical functions of the hierarchical structure. The microstructure of the woven wire cloth leads to facile interfacial cracking and therefore extremely low ice adhesion strengths; the superimposed laser-induced periodic surface structures with hydrophobic surface chemistry lead to water shedding. Our work shows that by first taking a fracture mechanics approach to designing the ice-shedding function, a robust anti-icing surface can be engineered by separately designing the water-shedding functions.

Microstructured Magnetoactive Elastomers for Switchable Wettability

We demonstrate the control of wettability of non-structured and microstructured magnetoactive elastomers (MAEs) by magnetic field. The synthesized composite materials have a concentration of carbonyl iron particles of 75 wt.% (≈27 vol.%) and three different stiffnesses of the elastomer matrix. A new method of fabrication of MAE coatings on plastic substrates is presented, which allows one to enhance the response of the apparent contact angle to the magnetic field by exposing the particle-enriched side of MAEs to water. A magnetic field is not applied during crosslinking. The highest variation of the contact angle from (113 ± 1)° in zero field up to (156 ± 2)° at about 400 mT is achieved in the MAE sample with the softest matrix. Several lamellar and pillared MAE structures are fabricated by laser micromachining. The lateral dimension of surface structures is about 50 µm and the depth varies between 3 µm and 60 µm. A systematic investigation of the effects of parameters of laser processing (laser power and the number of passages of the laser beam) on the wetting behavior of these structures in the absence and presence of a magnetic field is performed. In particular, strong anisotropy of the wetting behavior of lamellar structures is observed. The results are qualitatively discussed in the framework of the Wenzel and Cassie–Baxter models. Finally, directions of further research on magnetically controlled wettability of microstructured MAE surfaces are outlined. The obtained results may be useful for the development of magnetically controlled smart surfaces for droplet-based microfluidics.

Fabrication of Polymer Microfluidics: An Overview

Microfluidic platform technology has presented a new strategy to detect and analyze analytes and biological entities thanks to its reduced dimensions, which results in lower reagent consumption, fast reaction, multiplex, simplified procedure, and high portability. In addition, various forces, such as hydrodynamic force, electrokinetic force, and acoustic force, become available to manipulate particles to be focused and aligned, sorted, trapped, patterned, etc. To fabricate microfluidic chips, silicon was the first to be used as a substrate material because its processing is highly correlated to semiconductor fabrication techniques. Nevertheless, other materials, such as glass, polymers, ceramics, and metals, were also adopted during the emergence of microfluidics. Among numerous applications of microfluidics, where repeated short-time monitoring and one-time usage at an affordable price is required, polymer microfluidics has stood out to fulfill demand by making good use of its variety in material properties and processing techniques. In this paper, the primary fabrication techniques for polymer microfluidics were reviewed and classified into two categories, e.g., mold-based and non-mold-based approaches. For the mold-based approaches, micro-embossing, micro-injection molding, and casting were discussed. As for the non-mold-based approaches, CNC micromachining, laser micromachining, and 3D printing were discussed. This review provides researchers and the general audience with an overview of the fabrication techniques of polymer microfluidic devices, which could serve as a reference when one embarks on studies in this field and deals with polymer microfluidics.

Study of Through-Hole Micro-Drilling in Sapphire by Means of Pulsed Bessel Beams

Ultrashort Bessel beams have been used in this work to study the response of a 430-μm-thick monocrystalline sapphire sample to laser–matter interaction when injecting the beam orthogonally through the whole sample thickness. We show that with a 12° Bessel beam cone angle, we are able to internally modify the material and generate tailorable elongated microstructures while preventing the formation of surface cracks, even in the picosecond regime, contrary to what was previously reported in the literature. On the other hand, by means of Bessel beam machining combined with a trepanning technique where very high energy pulses are needed, we were able to generate 100 μm diameter through-holes, eventually with negligible cracks and very low taper angles thanks to an optimization achieved by using a 60-μm-thick layer of Kapton Polyimide removable tape.

Adhesive Joints with Laser Shaped Surface Microstructures

One of the most commonly applied methods of joining dissimilar materials is gluing. This could be mainly attributed to the applicability of this technique in various industries. The article presents a method of material surface treatment, which increases the shear strength of adhesive joints for lightweight metals such as aluminum with plastics. For this purpose, laser surface microstructuring was performed on each of the selected construction materials. As a result of the performed treatment, the active surface of the glued area was increased, which increased the adhesive strength. The picosecond laser with UV radiation used in the research is TruMicro 5325c with which material can be removed as a result of the cold ablation phenomenon. The applied parameters of the laser device did not cause thermal damage to the surface of the microstructured materials, which was confirmed by microscopic examination. Laser micromachining did not deteriorate the degree of wetting of the tested materials, either, as was confirmed by the contact angle and surface energy measurements with the use of water as the measuring liquid. In investigated cases of microstructure types, the presented method significantly increased the shear strength of the joints formed, as demonstrated by the presented strength test results. Research has shown that created joints with microstructure made according to the described method, are characterized by a significant increase in strength, up to 376%, compared to materials without microstructure. The presented results are part of a series of tests aimed at selecting the operating laser parameters for the implementation of geometric shapes of microstructures which will increase the strength of adhesive joints in selected materials.

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

Influence of Holes Manufacture Technology on Perforated Plate Aerodynamics

Transpiration flow is a very important and still open subject in many technical applications. Perforated walls are useful for the purpose of “flow control”, as well as for the cooling of walls and blades (effusive cooling) in gas turbines. We are still not able to include large numbers of holes in the numerical calculations and therefore we need physical models. Problems are related also to the quality of the holes in perforated plates. The present transpiration analysis concerns with experimental investigations of the air flow through perforated plates with microholes of 125 and 300 µm diameters. A good accordance of the results with other experiments, simulations and theory was obtained. The received results very clearly show that technology manufacturing of plate holes influences on their aerodynamic characteristics. It turned out that the quality of the plate microholes using laser technology and, consequently, the shape of the hole, can affect the flow losses. Therefore, this effect was investigated and the flow characteristics in both directions were measured, i.e., for two plate settings.

Laser Surface Modification of Powder Metallurgy-Processed Ti-Graphite Composite Which Can Enhance Cells' Osteo-Differentiation

The paper examines the surface functionalization of a new type of Ti-graphite composite, a dental biomaterial prepared by vacuum low-temperature extrusion of hydrogenated-dehydrogenated titanium powder mixed with graphite flakes. Two experimental surfaces were prepared by laser micromachining applying different levels of incident energy of the fiber nanosecond laser working at 1064 nm wavelength. The surface integrity of the machined surfaces was evaluated, including surface roughness parameters measurement by contact profilometry and confocal laser scanning microscopy. The chemical and phase composition were comprehensively evaluated by scanning electron microscopy, energy-dispersive X-ray spectroscopy and X-ray diffraction analyses. Finally, the in vitro tests using human mesenchymal stem cells were conducted to compare the influence of the laser processing parameters used on the cell's cultivation and osteo-differentiation. The bioactivity results confirmed that the surface profile with positive kurtosis, platykurtic distribution curve and higher value of peaks spacing exhibited better bioactivity compared to the surface profile with negative kurtosis coefficient, leptokurtic distribution curve and lower peaks spacing.

Low-Cost Laser Micromachining Super Hydrophilic-Super Hydrophobic Microgrooves for Robotic Capillary Micromanipulation of Microfibers

Capillary self-alignment technique can achieve highly accurate and fast alignment of micro components. Capillary self-alignment technique relies on the confinement of liquid droplets at receptor sites where hydrophobic–hydrophilic patterns are widely used. This paper reports a low-cost microsecond pulse laser micromachining method for fabrication of super hydrophilic–super hydrophobic grooves as receptor sites for capillary self-alignment of microfibers. We investigated the influence of major manufacturing parameters on groove sizes and wetting properties. The effects of the width (20 µm–100 µm) and depth (8 µm–36 µm) of the groove on the volume of water droplet contained inside the groove were also investigated. We show that by altering scanning speed, using a de-focused laser beam, we can modify the wetting properties of the microgrooves from 10° to 120° in terms of the contact angle. We demonstrated that different types of microfibers including natural and artificial microfibers can self-align to the size matching super hydrophilic–super hydrophobic microgrooves. The results show that super hydrophilic–super hydrophobic microgrooves have great potential in microfiber micromanipulation applications such as natural microfiber categorization, fiber-based microsensor construction, and fiber-enforced material development.

Laser Processing of Transparent Wafers with a AlGaN/GaN Heterostructures and High-Electron Mobility Devices on a Backside

Sapphire and silicon carbide substrates are used for growth of the III-N group heterostructures to obtain the electronic devices for high power and high frequency applications. Laser micromachining of deep channels in the frontside of the transparent wafers followed by mechanical cleavage along the ablated trench is a useful method for partitioning of such substrates after the development of the electronics on a backside. However, in some cases damage to the component performance occurs. Therefore, the influence of various parameters of the laser processing, such as fluence in the spot size, substrate thickness, orientation, and the polarization of focused laser beam, to the formation of damage zones at both sides of the transparent substrate with thin coatings when ablating the trenches from one side was investigated. The vicinity effect of the ablated trenches on the performance of the electronics was also evaluated, confirming the laser micromachining suitability for the dicing of transparent wafers with high accuracy and flexibility.

Evaluation of the Cross-Sectional Shape of μ-Grooves Produced in Stainless Steel 304 by Laser-Induced Etching Technique

The variation in cross-sectional profile of a microgroove fabricated with focused and diverging laser irradiation is demonstrated with ray tracing. To verify the result of ray tracing, stainless-steel 304 microgrooves were manufactured utilizing the conventional lens-based and optical fiber-based laser-induced etching techniques in phosphoric acid solution. Three distinctive groove geometries, i.e., a flat surface with no groove, an intermediate stage groove, and a fully developed V-groove, were rendered for numerical analysis. For focusing mode, the first and second reflections were caused by high laser intensity and the second reflected beam could lead to variation in the groove shape such as a U-shaped groove or a V-shaped groove in accordance with etchant concentration. On the contrary, a weak laser entirely distributed at the groove sidewall could not induce a chemical reaction, leading to a V-shaped groove. The effect of process variables such as laser power (intensity) and etchant concentration on the cross-sectional profiles of a groove are closely examined through the computed simulation results.

Suturable elastomeric tubular grafts with patterned porosity for rapid vascularization of 3D constructs

Vascularization is considered to be one of the key challenges in engineering functional 3D tissues. Engineering suturable vascular grafts containing pores with diameter of several tens of microns in tissue engineered constructs may provide an instantaneous blood perfusion through the grafts improving cell infiltration and thus, allowing rapid vascularization and vascular branching. The aim of this work was to develop suturable tubular scaffolds to be integrated in biofabricated constructs, enabling the direct connection of the biofabricated construct with the host blood stream, providing an immediate blood flow inside the construct. Here, tubular grafts with customizable shapes (tubes, Y-shape capillaries) and controlled diameter ranging from several hundreds of microns to few mm are fabricated based on poly(glycerol sebacate) (PGS) / poly(vinyl alcohol) (PVA) electrospun scaffolds. Furthermore, a network of pore channels of diameter in the order of 100 µm was machined by laser femtosecond ablation in the tube wall. Both non-machined and laser machined tubular scaffolds elongated more than 100% of their original size have shown suture retention, being 5.85 and 3.96 N/mm2 respectively. To demonstrate the potential of application, the laser machined porous grafts were embedded in gelatin methacryloyl (GelMA) hydrogels, resulting in elastomeric porous tubular graft/GelMA 3D constructs. These constructs were then co-seeded with osteoblast-like cells (MG-63) at the external side of the graft and endothelial cells (HUVEC) inside, forming a bone osteon model. The laser machined pore network allowed an immediate endothelial cell flow towards the osteoblasts enabling the osteoblasts and endothelial cells to interact and form 3D structures. This rapid vascularization approach could be applied, not only for bone tissue regeneration, but also for a variety of tissues and organs.

Droplet Self-Propulsion on Superhydrophobic Microtracks

Liquid transport (continuous or segmented) in microfluidic platforms typically requires pumping devices or external fields working collaboratively with special fluid properties to enable fluid motion. Natural liquid adhesion on surfaces deters motion and promotes the possibility of liquid or surface contamination. Despite progress, significant advancements are needed before devices for passive liquid propulsion, without the input of external energy and unwanted contamination, become a reality in applications. Here we present an unexplored and facile approach based on the Laplace pressure imbalance, manifesting itself through targeted track texturing, driving passively droplet motion, while maintaining the limited contact of the Cassie-Baxter state on superhydrophobic surfaces. The track topography resembles out-of-plane, backgammon-board, slowly converging microridges decorated with nanotexturing. This design naturally deforms asymmetrically the menisci formed at the bottom of a droplet contacting such tracks and causes a Laplace pressure imbalance that drives droplet motion. We investigate this effect over a range of opening track angles and develop a model to explain and quantify the underlying mechanism of droplet self-propulsion. We further implement the developed topography for applications relevant to microfluidic platform functionalities. We demonstrate control of the rebound angle of vertically impacting droplets, achieve horizontal self-transport to distances up to 65 times the droplet diameter, show significant uphill motion against gravity, and illustrate a self-driven droplet-merging process.

Performance and Accuracy of the Shifted Laser Surface Texturing Method

A shifted laser surface texturing method (sLST) was developed for the improvement of the production speed of functional surface textures to enable their industrial applicability. This paper compares the shifted method to classic methods using a practical texturing example, with a focus on delivering the highest processing speed. The accuracy of the texture is assessed by size and circularity measurements with the use of LabIR paint and by a depth profile measurement using a contact surface profiler. The heat accumulation temperature increase and laser usage efficiency were also calculated. The classic methods (path filling and hatch) performed well (deviation ≤ 5%) up to a certain scanning speed (0.15 and 0.7 m/s). For the shifted method, no scanning speed limit was identified within the maximum of the system (8 m/s). The depth profile shapes showed similar deviations (6% to 10%) for all methods. The shifted method in its burst variant achieved the highest processing speed (11 times faster, 146 mm²/min). The shifted method in its path filling variant achieved the highest processing efficiency per needed laser power (64 mm²/(min·W)), lowest heat accumulation temperature increase (3 K) and highest laser usage efficiency (99%). The advantages of the combination of the shifted method with GHz burst machining and the multispot approach were described.

Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications

A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg_1/3Nb_2/3)-x%PbTiO3 (PMN-x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN-31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN-31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d₃₃*~1200 pm/V). Our results are promising for fabricating superior PMN-31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.

Introducing Fractal Dimension for Interlaminar Shear and Tensile Strength Assessment of Mechanically Interlocked Polymer-Metal Interfaces

The interlaminar strength of mechanically interlocked polymer–metal interfaces is strongly dependent on the surface structure of the metal component. Therefore, this contribution assesses the suitability of the fractal dimension for quantification of the surface structure, as well as interlaminar strength prediction of aluminum/polyamide 6 polymer–metal hybrids. Seven different surface structures, manufactured by mechanical blasting, combined mechanical blasting and etching, thermal spraying, and laser ablation, are investigated. The experiments are carried out on a butt-bonded hollow cylinder testing method that allows shear and tensile strength determination with one specific specimen geometry. The fractal dimension of the metal surfaces is derived from cross-sectional images. For comparison, the surface roughness slope is determined and related to the interlaminar strength. Finally, a fracture analysis is conducted. For the investigated material combination, the experimental results indicate that the fractal dimension is an appropriate measure for predicting the interlaminar strength.

Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications

This paper presents a micromachining process for lithium niobate (LiNbO₃) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 μm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called "border-bulk micromachining", is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness.

Fabrication of Silicon Microfluidic Chips for Acoustic Particle Focusing Using Direct Laser Writing

We have developed a fast and simple method for fabricating microfluidic channels in silicon using direct laser writing. The laser microfabrication process was optimised to generate microfluidic channels with vertical walls suitable for acoustic particle focusing by bulk acoustic waves. The width of the acoustic resonance channel was designed to be 380 µm, branching into a trifurcation with 127 µm wide side outlet channels. The optimised settings used to make the microfluidic channels were 50% laser radiation power, 10 kHz pulse frequency and 35 passes. With these settings, six chips could be ablated in 5 h. The microfluidic channels were sealed with a glass wafer using adhesive bonding, diced into individual chips, and a piezoelectric transducer was glued to each chip. With acoustic actuation at 2.03 MHz a half wavelength resonance mode was generated in the microfluidic channel, and polystyrene microparticles (10 µm diameter) were focused along the centre-line of the channel. The presented fabrication process is especially interesting for research purposes as it opens up for rapid prototyping of silicon-glass microfluidic chips for acoustofluidic applications.

Effect of Process Parameters and Material Properties on Laser Micromachining of Microchannels

Laser micromachining has emerged as a promising technique for mass production of microfluidic devices. However, control and optimization of process parameters, and design of substrate materials are still ongoing challenges for the widespread application of laser micromachining. This article reports a systematic study on the effect of laser system parameters and thermo-physical properties of substrate materials on laser micromachining. Three dimensional transient heat conduction equation with a Gaussian laser heat source was solved using finite element based Multiphysics software COMSOL 5.2a. Large heat convection coefficients were used to consider the rapid phase transition of the material during the laser treatment. The depth of the laser cut was measured by removing material at a pre-set temperature. The grid independent analysis was performed for ensuring the accuracy of the model. The results show that laser power and scanning speed have a strong effect on the channel depth, while the level of focus of the laser beam contributes in determining both the depth and width of the channel. Higher thermal conductivity results deeper in cuts, in contrast the higher specific heat produces shallower channels for a given condition. These findings can help in designing and optimizing process parameters for laser micromachining of microfluidic devices.

Laser-Inscribed Glass Microfluidic Device for Non-Mixing Flow of Miscible Solvents

In recent years, there has been significant research on integrated microfluidic devices. Microfluidics offer an advantageous platform for the parallel laminar flow of adjacent solvents of potential use in modern chemistry and biology. To reach that aim, we worked towards the realization of a buried microfluidic Lab-on-a-Chip which enables the separation of the two components by exploiting the non-mixing properties of laminar flow. To fabricate the aforementioned chip, we employed a femtosecond laser irradiation technique followed by chemical etching. To optimize the configuration of the chip, several geometrical and structural parameters were taken into account. The diffusive mass transfer between the two fluids was estimated and the optimal chip configuration for low diffusion rate of the components was defined.

Fabrication of a Hydrophilic Line on a Hydrophobic Surface by Laser Ablation Processing

A hydrophilic line on a hydrophobic surface was fabricated by using plasma etching and laser ablation processing in this paper. We fabricated the nanospikes on a polyimide surface by using the plasma etching processing. CHF₃ plasma treatment for hydrophobic coating was conducted on these nanospikes. We fabricated the microgrooves on the hydrophobic nanospikes surface using laser ablation processing. The microgroove had hydrophilic characteristics. In order to measure the hydrophilic characteristics of the microgroove, a solution that was dispersed with silver nanoparticles was used. The hydrophilic line on the hydrophobic surface was dipped in the silver nanoparticle solution. The silver nanoparticles were attached on the hydrophilic microgroove and not on the hydrophobic surface. We concluded that the laser heat affected zone should be reduced for reducing the hydrophilic line width. This hydrophilic pattern on the hydrophobic surface can be used for cell growth, protein manipulation, the spotting of biomolecules, micro-fluidics and water collection. This functional surface can especially be used for an electric flexible circuit, which is newly proposed in this paper.

Progress on the Use of Commercial Digital Optical Disc Units for Low-Power Laser Micromachining in Biomedical Applications

The development of organ-on-chip and biological scaffolds is currently requiring simpler methods for microstructure biocompatible materials in three dimensions, to fabricate structural and functional elements in biomaterials, or modify the physicochemical properties of desired substrates. Aiming at addressing this need, a low-power CD-DVD-Blu-ray laser pickup head was mounted on a programmable three-axis micro-displacement system in order to modify the surface of polymeric materials in a local fashion. Thanks to a specially-designed method using a strongly absorbing additive coating the materials of interest, it has been possible to establish and precisely control processes useful in microtechnology for biomedical applications. The system was upgraded with Blu-ray laser for additive manufacturing and ablation on a single platform. In this work, we present the application of these fabrication techniques to the development of biomimetic cellular culture platforms thanks to the simple integration of several features typically achieved with traditional, less cost-effective microtechnology methods in one step or through replica-molding. Our straightforward approach indeed enables great control of local laser microablation or polymerization for true on-demand biomimetic micropatterned designs in transparent polymers and hydrogels and is allowing integration of microfluidics, microelectronics, surface microstructuring, and transfer of superficial protein micropatterns on a variety of biocompatible materials.

High-Speed Focus Inspection System Using a Position-Sensitive Detector

Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.

In-Situ Real-Time Focus Detection during Laser Processing Using Double-Hole Masks and Advanced Image Sensor Software

In modern high-intensity ultrafast laser processing, detecting the focal position of the working laser beam, at which the intensity is the highest and the beam diameter is the lowest, and immediately locating the target sample at that point are challenging tasks. A system that allows in-situ real-time focus determination and fabrication using a high-power laser has been in high demand among both engineers and scientists. Conventional techniques require the complicated mathematical theory of wave optics, employing interference as well as diffraction phenomena to detect the focal position; however, these methods are ineffective and expensive for industrial application. Moreover, these techniques could not perform detection and fabrication simultaneously. In this paper, we propose an optical design capable of detecting the focal point and fabricating complex patterns on a planar sample surface simultaneously. In-situ real-time focus detection is performed using a bandpass filter, which only allows for the detection of laser transmission. The technique enables rapid, non-destructive, and precise detection of the focal point. Furthermore, it is sufficiently simple for application in both science and industry for mass production, and it is expected to contribute to the next generation of laser equipment, which can be used to fabricate micro-patterns with high complexity.

Fabrication of Patterned Superhydrophobic/Hydrophilic Substrates by Laser Micromachining for Small Volume Deposition and Droplet-Based Fluorescence

The deposition of nanoliter and subnanoliter volumes is important in chemical and biochemical droplet-based microfluidic systems. There are several techniques that have been established for the deposition/generation of small volumes including the use of surfaces with patterned differences in wettability. Many such methods require complex and time-consuming lithographic techniques. Here, we present a facile method for the fabrication of superhydrophobic surfaces with patterned hydrophilic regions by laser micromachining. A comprehensive study of fabrication parameters (laser machining speed, laser power, and patch size) on the material, patch wettability, and droplet volume is presented. Patch sizes as small as 100 μm diameter and as large as 1500 μm diameter were investigated, and volumes as low as 400 pL were observed. As an example application of such patterned materials and the deposition of small volumes, halide salts were preconcentrated on the hydrophilic patches, and their fluorescence quenching constants were rapidly calculated using a 3D-printed device coupled to a fluorescence spectrometer.

Implementation of a real-time reference and calibration grid platform for improved screening - mapping in Pap test slides

Cervical cancer screening based on the Papanicolaou (Pap) test is a widely applied but not always efficient practice for detecting Human Papillomavirus (HPV) mediated lesions, partially due to a non-systematic and inadequate screening process. Our aim was to introduce an inexpensive easy-to-use direct screening platform for improved detection of abnormal cells indicative of underlying cervical neoplasia as well as persisting HPV infection. By employing a novel, efficient technique of laser-based micromachining, we achieved the fabrication of spatial grids on commercially available coverslips allowing visual segmentation of the slide for efficient screening. Abnormal and formerly diagnosed as negative for intraepithelial lesion or malignancy (NILM) Pap test slides (n = 200) were analyzed by conventional and grid-based screening. Grid-based microscopy led to a more reliable diagnosis compared to the conventional by identifying an increased number of abnormal cells (P = 0.001). It decreased borderline ASCUS, AGC diagnosis, increasing LSIL, HSIL and in situ AdenoCa detection rates closely related with biopsy (P = 0.015; kappa = 0.978). Concerning the set of NILM diagnoses in rapid re-screening, the method upgraded six cases (n = 6) to LSIL (P = 0.001). The proposed technical solution offers a calibration and orientation visual aid during the on-site screening process providing significant advantages compared to expensive digital imaging techniques.

Design and Performance of a Focus-Detection System for Use in Laser Micromachining

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

Large-acceptance diamond planar refractive lenses manufactured by laser cutting

For the first time, single-crystal diamond planar refractive lenses have been fabricated by laser micromachining in 300 µm-thick diamond plates which were grown by chemical vapour deposition. Linear lenses with apertures up to 1 mm and parabola apex radii up to 500 µm were manufactured and tested at the ESRF ID06 beamline. The large acceptance of these lenses allows them to be used as beam-conditioning elements. Owing to the unsurpassed thermal properties of single-crystal diamond, these lenses should be suitable to withstand the extreme flux densities expected at the planned fourth-generation X-ray sources.

Laser micro-grooved, Arginine-Glycine-Apspartic acid (RGD) coated dental implants, a 5 years radiographic follow-up

OBJECTIVES

This work has utilized laser direct writing to produce 10 microns wide uniform grooves on the surface of custom made titanium (Ti-6Al-4V) dental implants, and the tri-peptide RGD coating to produce a micromechanical and a chemical union with the tissues around the implant crest module and minimize crestal bone loss. The aim of this study was to follow these implants radiographically after five years of service under a mandibular overdenture.

METHODOLOGY

Standardized digital periapical radiographs and the computer software "Image J" were used to evaluate the bone density profile and vertical bone loss along the mesial and distal sides of the implants used in this study.

RESULTS

The results of this study demonstrated less vertical bone loss and higher bone density profiles next to the laser microgrooved implants coated with the RGD than those only having the laser micro-grooves.

CONCLUSION

The RGD coating has improved the bone density profile and reduced the vertical bone loss around the studied dental implants. However, further studies are needed to compare the effects of the laser micro-grooves versus other uniform or non uniform surface features; also, the RGD coating should be compared to other biomimetic surface coating materials.

A simple 96 well microfluidic chip combined with visual and densitometry detection for resource-poor point of care testing

There is a well-recognized need for low cost biodetection technologies for resource-poor settings with minimal medical infrastructure. Lab-on-a-chip (LOC) technology has the ability to perform biological assays in such settings. The aim of this work is to develop a low cost, high-throughput detection system for the analysis of 96 samples simultaneously outside the laboratory setting. To achieve this aim, several biosensing elements were combined: a syringe operated ELISA lab-on-a-chip (ELISA-LOC) which integrates fluid delivery system into a miniature 96-well plate; a simplified non-enzymatic reporter and detection approach using a gold nanoparticle-antibody conjugate as a secondary antibody and silver enhancement of the visual signal; and Carbon nanotubes (CNT) to increase primary antibody immobilization and improve assay sensitivity. Combined, these elements obviate the need for an ELISA washer, electrical power for operation and a sophisticated detector. We demonstrate the use of the device for detection of Staphylococcal enterotoxin B, a major foodborne toxin using three modes of detection, visual detection, CCD camera and document scanner. With visual detection or using a document scanner to measure the signal, the limit of detection (LOD) was 0.5ng/ml. In addition to visual detection, for precise quantitation of signal using densitometry and a CCD camera, the LOD was 0.1ng/ml for the CCD analysis and 0.5 ng/ml for the document scanner. The observed sensitivity is in the same range as laboratory-based ELISA testing. The point of care device can analyze 96 samples simultaneously, permitting high throughput diagnostics in the field and in resource poor areas without ready access to laboratory facilities or electricity.