Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm² and -10 C/m², respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.

Microstructure Evolution with Rapid Thermal Annealing Time in (001)-Oriented Piezoelectric PZT Films Integrated on (111) Si

In our recently published paper (Y.-Y. Wang et al., High performance LaNiO₃-buffered, (001)-oriented PZT piezoelectric films integrated on (111) Si, Appl. Phys. Lett. 121, 182902, 2022), highly (001)-oriented PZT films with a large transverse piezoelectric coefficient e_31,f prepared on (111) Si substrates were reported. This work is beneficial for the development of piezoelectric micro-electro-mechanical systems (Piezo-MEMS) because of (111) Si's isotropic mechanical properties and desirable etching characteristics. However, the underlying mechanism for the achievement of a high piezoelectric performance in these PZT films going through a rapid thermal annealing process has not been thoroughly analyzed. In this work, we present complete sets of data in microstructure (XRD, SEM and TEM) and electrical properties (ferroelectric, dielectric and piezoelectric) for these films with typical annealing times of 2, 5, 10 and 15 min. Through data analyses, we revealed competing effects in tuning the electrical properties of these PZT films, i.e., the removal of residual PbO and proliferation of nanopores with an increasing annealing time. The latter turned out to be the dominating factor for a deteriorated piezoelectric performance. Therefore, the PZT film with the shortest annealing time of 2 min showed the largest e_31,f piezoelectric coefficient. Furthermore, the performance degradation occurred in the PZT film annealed for 10 min can be explained by a film morphology change, which involved not only the change in grain shape, but also the generation of a large amount of nanopores near its bottom interface.

A Tiled Ultrasound Matrix Transducer for Volumetric Imaging of the Carotid Artery

High frame rate three-dimensional (3D) ultrasound imaging would offer excellent possibilities for the accurate assessment of carotid artery diseases. This calls for a matrix transducer with a large aperture and a vast number of elements. Such a matrix transducer should be interfaced with an application-specific integrated circuit (ASIC) for channel reduction. However, the fabrication of such a transducer integrated with one very large ASIC is very challenging and expensive. In this study, we develop a prototype matrix transducer mounted on top of multiple identical ASICs in a tiled configuration. The matrix was designed to have 7680 piezoelectric elements with a pitch of 300 μm × 150 μm integrated with an array of 8 × 1 tiled ASICs. The performance of the prototype is characterized by a series of measurements. The transducer exhibits a uniform behavior with the majority of the elements working within the -6 dB sensitivity range. In transmit, the individual elements show a center frequency of 7.5 MHz, a -6 dB bandwidth of 45%, and a transmit efficiency of 30 Pa/V at 200 mm. In receive, the dynamic range is 81 dB, and the minimum detectable pressure is 60 Pa per element. To demonstrate the imaging capabilities, we acquired 3D images using a commercial wire phantom.

Tiny Piezoelectric Multi-Layered Actuators with Application in a Compact Camera Module-Design, Fabrication, Assembling and Testing Issues

Piezoelectric actuators with multi-layer structures have largely gained attention from academic and industry experts. This is due to its distinctive advantages of fast response time, huge generative force and the inherent good planar electromechanical coupling factor, as well as other mechanical qualities. Typically, lead zirconate titanate (PZT) is one of the most represented piezoelectric ceramic materials that have been used for multi-layer piezoelectric actuators. Piezoelectric multi-layered actuators (PMLAs) were developed vigorously in the past decades due to the emergence of portable devices, such as smartphones with a highly compact camera module (CCM) and an image stabilizer (IS). This study reviewed the progress made in the field of PMLA applications, with a particular focus on the miniaturized dimensions and associated generated output force, speed and maximum output power requirement for various loads. Several commercial attempts, such as Helimorph, Lobster and the two-degrees-of-freedom ultrasonic motor (USM), were investigated. The proposed simple bimorph and multi-layer bimorph USMs experimentally showed thrust as high as 3.08 N and 2.57 N with good free speed and structural thicknesses of 0.7 and 0.6 mm, respectively. When compared with the other 14 reported linear USMs, they ranked as the top 1 and 2 in terms of the thrust-to-volume ratio. The proposed design shows great potential for cellphone camera module application, especially in moving sensor image stabilization. This study also provided outlooks for future developments for piezoelectric materials, configurations, fabrication and applications.

Comparison of Metal-Based PZT and PMN-PT Energy Harvesters Fabricated by Aerosol Deposition Method

In this study, polycrystalline lead magnesium niobate–lead titanate (PMN–PT) was explored as an alternative piezoelectric material, with a higher power density for energy harvesting (EH), and comprehensively compared to the widely used polycrystalline lead zirconate titanate (PZT). First, the size distribution and piezoelectric properties of PZT and PMN–PT raw powders and ceramics were compared. Thereafter, both materials were deposited on stainless-steel substrates as 10 μm thick films using the aerosol deposition method. The films were processed as {3–1}-mode cantilever-type EH devices using microelectromechanical systems. The films with different annealing temperatures were characterized by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and dielectric behavior measurements. Furthermore, the mechanical and electrical properties of PMN–PT- and PZT-based devices were measured and compared. The PMN–PT-based devices showed a higher Young’s modulus and lower damping ratio. Owing to their higher figure of merit and lower piezoelectric voltage constant, they showed a higher power and lower voltage than the PZT-based devices. Finally, when poly-PMN–PT material was the active layer, the output power was enhanced by 26% at the 0.5 g acceleration level. Thus, these devices exhibited promising properties, meeting the high current and low voltage requirements in integrated circuit designs.

A New Method to Perform Direct Efficiency Measurement and Power Flow Analysis in Vibration Energy Harvesters

Measuring the efficiency of piezo energy harvesters (PEHs) according to the definition constitutes a challenging task. The power consumption is often established in a simplified manner, by ignoring the mechanical losses and focusing exclusively on the mechanical power of the PEH. Generally, the input power is calculated from the PEH’s parameters. To improve the procedure, we have designed a method exploiting a measurement system that can directly establish the definition-based efficiency for different vibration amplitudes, frequencies, and resistance loads. Importantly, the parameters of the PEH need not be known. The input power is determined from the vibration source; therefore, the method is suitable for comparing different types of PEHs. The novel system exhibits a combined absolute uncertainty of less than 0.5% and allows quantifying the losses. The approach was tested with two commercially available PEHs, namely, a lead zirconate titanate (PZT) MIDE PPA-1011 and a polyvinylidene fluoride (PVDF) TE LDTM-028K. To facilitate comparison with the proposed efficiency, we calculated and measured the quantity also by using one of the standard options (simplified efficiency). The standard concept yields higher values, especially in PVDFs. The difference arises from the device’s low stiffness, which produces high displacement that is proportional to the losses. Simultaneously, the insufficient stiffness markedly reduces the PEH’s mechanical power. This effect cannot be detected via the standard techniques. We identified the main sources of loss in the damping of the movement by the surrounding air and thermal losses. The latter source is caused by internal and interlayer friction.

Phase Evolution, Filler-Matrix Interactions, and Piezoelectric Properties in Lead Zirconate Titanate (PZT)-Filled Polymer-Derived Ceramics (PDCs)

PZT-silsesquioxane-based 0-3 hybrid materials are prepared by mixing lead zirconate titanate (Pb(Zr,Ti)O₃; PZT) powder with a [R-SiO_3/2]_n (R = H, CH₃, CH=CH₂, C₆H₅) silsequioxane preceramic polymer. A PZT load up to 55 vol.% can be reached in the final composite. The piezoelectric and mechanical properties are investigated as a function of the filler content and are compared with theoretical models and reference samples made of the pure preceramic polymer or PZT filler. The piezoelectric response of the composites, as expressed by the relative permittivity and the piezoelectric coefficients d₃₃ and g₃₃, increases with an increasing PZT content. The bending strength of the composites ranges between 15 MPa and 31 MPa without a clear correlation to the filler content. The thermal conductivity increases significantly from 0.14 W∙m⁻¹∙K⁻¹ for the pure polymer-derived ceramic (PDC) matrix to 0.30 W∙m⁻¹∙K⁻¹ for a sample containing 55 vol.% PZT filler. From X-ray diffraction experiments (XRD), specific interactions between the filler and matrix are observed; the crystallization of the PDC matrix in the presence of the PZT filler is inhibited; conversely, the PDC matrix results in a pronounced decomposition of the filler compared to the pure PZT material.

Detecting Debonding between Steel Beam and Reinforcing CFRP Plate Using Active Sensing with Removable PZT-Based Transducers

Carbon fiber reinforced polymer (CFRP) plates are widely used to retrofit or reinforce steel structures, and the debonding damage between the steel structure and the CFRP plate is a typical failure in strengthening steel structures. This paper proposes a new approach to detecting debonding between a steel beam and a reinforcing CFRP plate by using removable lead zirconate titanate (PZT)-based transducers and active sensing. The removable PZT-based transducers are used to implement the active sensing approach, in which one transducer, as an actuator, is used to generate stress wave, and another transducer, as a sensor, is used to detect the stress wave that propagates across the bonding between the steel beam and the reinforcing CFRP plate. The bonding condition significantly influences the received sensor signal, and a wavelet-packet-based energy index (WPEI) is used to quantify the energy of the received signal to evaluate the severity of debonding between the steel beam and the reinforcing CFRP plate. To validate the proposed approach, experimental studies were performed, and two removable PZT-based transducers were designed and fabricated to detect the debonding between a steel beam and the reinforcing CRFP plate. The experimental results demonstrate the feasibility of the proposed method in detecting the debonding between a steel beam and the reinforcing CFRP plate using removable PZT-based transducers.

Advances in the Structural Health Monitoring of Bridges Using Piezoelectric Transducers

With the rapid development of the world’s transportation infrastructure, many long-span bridges were constructed in recent years, especially in China. However, these bridges are easily subjected to various damages due to dynamic loads (such as wind-, earthquake-, and vehicle-induced vibration) or environmental factors (such as corrosion). Therefore, structural health monitoring (SHM) is vital to guarantee the safety of bridges in their service lives. With its wide frequency response range, fast response, simple preparation process, ease of processing, low cost, and other advantages, the piezoelectric transducer is commonly employed for the SHM of bridges. This paper summarizes the application of piezoelectric materials for the SHM of bridges, including the monitoring of the concrete strength, bolt looseness, steel corrosion, and grouting density. For each problem, the application of piezoelectric materials in different research methods is described. The related data processing methods for four types of bridge detection are briefly summarized, and the principles of each method in practical application are listed. Finally, issues to be studied when using piezoelectric materials for monitoring are discussed, and future application prospects and development directions are presented.

A Novel Damage Indicator Based on the Electromechanical Impedance Principle for Structural Damage Identification

This paper presents a novel structural damage detection indicator, i.e., fourth-order voltage statistical moment (FVSM) based on the electromechanical impedance (EMI) principle, and then proposes a two-step damage detection method based on the novel indicator and a differential evolution algorithm (DEA). In this study, several lead zirconate titanate (PZT) sensors bonded to an experimental steel beam were utilized to acquire the time-domain voltage responses. On this basis, the fourth-order voltage statistical moments (FVSMs) of the voltage responses are computed to locate the damage element in the detected structure, and the proposed damage detection method is utilized to quantify the damage. In addition, theoretical PZT voltage responses are also calculated based on the piezoelectric theory and the spectral element method (SEM). Experimental results verify the accuracy of the theoretical voltage values and the effectiveness of the proposed damage indicator. Results indicate that the FVSM is effective in locating the damage element. Integrated with DEA, the proposed technique is capable of quantifying damage.

Monitoring of Pre-Load on Rock Bolt Using Piezoceramic-Transducer Enabled Time Reversal Method

Rock bolts ensure structural stability for tunnels and many other underground structures. The pre-load on a rock bolt plays an important role in the structural reinforcement and it is vital to monitor the pre-load status of rock bolts. In this paper, a rock bolt pre-load monitoring method based on the piezoceramic enabled time reversal method is proposed. A lead zirconate titanate (PZT) patch transducer, which works as an actuator to generate stress waves, is bonded onto the anchor plate of the rock bolt. A smart washer, which is fabricated by sandwiching a PZT patch between two metal rings, is installed between the hex nut and the anchor plate along the rock bolt. The smart washer functions as a sensor to detect the stress wave. With the increase of the pre-load values on the rock bolt, the effective contact surface area between the smart washer and the anchor plate, benefiting the stress wave propagation crossing the contact surface. With the help of time reversal technique, experimental results reveal that the magnitude of focused signal clearly increases with the increase of the pre-load on a rock bolt before the saturation which happens beyond a relatively high value of the pre-load. The proposed method provides an innovative and real time means to monitor the pre-load level of a rock bolt. By employing this method, the pre-load degradation process on a rock bolt can be clearly monitored. Please note that, currently, the proposed method applies to only new rock bolts, on which it is possible to install the PZT smart washer.

Concrete Infill Monitoring in Concrete-Filled FRP Tubes Using a PZT-Based Ultrasonic Time-of-Flight Method

Concrete-filled fiber-reinforced polymer tubes (CFFTs) have attracted interest for their structural applications in corrosive environments. However, a weak interfacial strength between the fiber-reinforced polymer (FRP) tube and the concrete infill may develop due to concrete shrinkage and inadequate concrete compaction during concrete casting, which will destroy the confinement effect and thereby reduce the load bearing capacity of a CFFT. In this paper, the lead zirconate titanate (PZT)-based ultrasonic time-of-flight (TOF) method was adopted to assess the concrete infill condition of CFFTs. The basic idea of this method is that the velocity of the ultrasonic wave propagation in the FRP material is about half of that in concrete material. Any voids or debonding created along the interface between the FRP tube and the concrete will delay the arrival time between the pairs of PZT transducers. A comparison of the arrival times of the PZT pairs between the intact and the defected CFFT was made to assess the severity of the voids or the debonding. The feasibility of the methodology was analyzed using a finite-difference time-domain-based numerical simulation. Experiments were setup to validate the numerical results, which showed good agreement with the numerical findings. The results showed that the ultrasonic time-of-flight method is able to detect the concrete infill condition of CFFTs.

Monitoring of Grouting Compactness in a Post-Tensioning Tendon Duct Using Piezoceramic Transducers

A post-tensioning tendon duct filled with grout can effectively prevent corrosion of the reinforcement, maintain bonding behavior between the reinforcement and concrete, and enhance the load bearing capacity of concrete structures. In practice, grouting of the post-tensioning tendon ducts always causes quality problems, which may reduce structural integrity and service life, and even cause accidents. However, monitoring of the grouting compactness is still a challenge due to the invisibility of the grout in the duct during the grouting process. This paper presents a stress wave-based active sensing approach using piezoceramic transducers to monitor the grouting compactness in real time. A segment of a commercial tendon duct was used as research object in this study. One lead zirconate titanate (PZT) piezoceramic transducer with marble protection, called a smart aggregate (SA), was bonded on the tendon and installed in the tendon duct. Two PZT patch sensors were mounted on the top outside surface of the duct, and one PZT patch sensor was bonded on the bottom outside surface of the tendon duct. In the active sensing approach, the SA was used as an actuator to generate a stress wave and the PZT sensors were utilized to detect the wave response. Cement or grout in the duct functions as a wave conduit, which can propagate the stress wave. If the cement or grout is not fully filled in the tendon duct, the top PZT sensors cannot receive much stress wave energy. The experimental procedures simulated four stages during the grout pouring process, which includes empty status, half grouting, 90% grouting, and full grouting of the duct. Experimental results show that the bottom PZT sensor can detect the signal when the grout level increases towards 50%, when a conduit between the SA and PZT sensor is formed. The top PZT sensors cannot receive any signal until the grout process is completely finished. The wavelet packet-based energy analysis was adopted in this research to compute the total signal energy received by PZT sensors. Experimental results show that the energy levels of the PZT sensors can reflect the degree of grouting compactness in the duct. The proposed method has the potential to be implemented to monitor the tendon duct grouting compactness of the reinforced concrete structures with post tensioning.