151
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Yu S, Kim JM, Ahn H. Micro-contact printing of polydiacetylene liposomes using hydrophilic stamps. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 2011; 11:6034-6038. [PMID: 22121653 DOI: 10.1166/jnn.2011.4362] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Micron-sized polydiacetylene (PDA) liposome patterns have been fabricated on titanium (Ti) substrates using a micro-contact printing (micro-CP) technique. Two types of stamps (PDMS and agarose) and inking methods ("soaking" and "dropping") are used for micro-CP, and we compare their effect on the morphology of the PDA patterns. The size and morphology of the patterned PDA liposomes are analysized by optical and fluorescence microscopies and atomic force microscopy (AFM). When the agarose stamp is inked by the "dropping" method, PDA patterns are most efficiently transferred to the Ti substrate. However, the thickness of the transferred PDA patterns is not homogeneous, with the edge of the transferred pattern being thicker than its center. In contrast, when the PDMS stamp is used for micro-CP, the center of the pattern is thicker than the edge. Red fluorescence patterns are readily obtained by heat treatment of the PDA-immobilized solid substrate. The intensity of the fluorescence of the samples is consistent with the results of optical microscopy and AFM experiments.
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152
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Barboni V. [Illustrated translation of the Naturalis Historia: venetian woodblock edition of 1513 printed by Melchiorre Sessa]. ARCHIVES INTERNATIONALES D'HISTOIRE DES SCIENCES 2011; 61:115-136. [PMID: 22701939] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [MESH Headings] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
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153
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Shestopalov AA, Morris CJ, Vogen BN, Hoertz A, Clark RL, Toone EJ. Soft-lithographic approach to functionalization and nanopatterning oxide-free silicon. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2011; 27:6478-6485. [PMID: 21520913 DOI: 10.1021/la200373g] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
We report a simple, reliable high-throughput method for patterning passivated silicon with reactive organic monolayers and demonstrate selective functionalization of the patterned substrates with both small molecules and proteins. The approach completely protects silicon from chemical oxidation, provides precise control over the shape and size of the patterned features in the 100 nm domain, and gives rapid, ready access to chemically discriminated patterns that can be further functionalized with both organic and biological molecules.
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154
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Chen CH, Yang KL. Improving protein transfer efficiency and selectivity in affinity contact printing by using UV-modified surfaces. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2011; 27:5427-5432. [PMID: 21466171 DOI: 10.1021/la200535c] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
Affinity contact printing (αCP) is a technique that allows the selective capture of a target protein from solutions to a polymeric stamp decorated with an antibody, and then the target protein is printed onto a solid surface. The success of αCP critically relies on the precise control of protein-surface interactions. Here, we report a study on the effect of UV on the protein-surface interactions between protein and polydimethylsiloxane stamps and between protein and glass slides decorated with N,N-dimethyl-n-octadecyl-3-aminopropyltrimethoxysilyl chloride (DMOAP). Our results show that UV-modified surfaces can be used to improve the transfer efficiency and selectivity of proteins during αCP. For example, the protein transfer efficiency of human IgG onto a DMOAP-coated slide increases from 7.2% to 45.1% after the UV treatment. On the basis of these results, UV-modified surfaces were employed to develop a αCP system for protein detection. The detection limit of anti-IgG in this system is around 10 ng/mL, and the dynamic range is 4 orders of magnitude.
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155
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Tsioris K, Tao H, Liu M, Hopwood JA, Kaplan DL, Averitt RD, Omenetto FG. Rapid transfer-based micropatterning and dry etching of silk microstructures. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2011; 23:2015-9. [PMID: 21445939 PMCID: PMC3401411 DOI: 10.1002/adma.201004771] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/30/2010] [Revised: 02/09/2011] [Indexed: 05/22/2023]
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156
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Kong YK, Lee I, Jung MC, Song YW. The effects of age, viewing distance, display type, font type, colour contrast and number of syllables on the legibility of Korean characters. ERGONOMICS 2011; 54:453-465. [PMID: 21547790 DOI: 10.1080/00140139.2011.568635] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
This study evaluated the effects of age (20s and 60s), viewing distance (50 cm, 200 cm), display type (paper, monitor), font type (Gothic, Ming), colour contrast (black letters on white background, white letters on black background) and number of syllables (one, two) on the legibility of Korean characters by using the four legibility measures (minimum letter size for 100% correctness, maximum letter size for 0% correctness, minimum letter size for the least discomfort and maximum letter size for the most discomfort). Ten subjects in each age group read the four letters presented on a slide (letter size varied from 80 pt to 2 pt). Subjects also subjectively rated the reading discomfort of the letters on a 4-point scale (1 = no discomfort, 4 = most discomfort). According to the ANOVA procedure, age, viewing distance and font type significantly affected the four dependent variables (p < 0.05), while the main effect of colour contrast was not statistically significant for any measures. Two-syllable letters had smaller letters than one-syllable letters in the two correctness measures. The younger group could see letter sizes two times smaller than the old group could and the viewing distance of 50 cm showed letters about three times smaller than those at a 200 cm viewing distance. The Gothic fonts were smaller than the Ming fonts. Monitors were smaller than paper for correctness and maximum letter size for the most discomfort. From a comparison of the results for correctness and discomfort, people generally preferred larger letter sizes to those that they could read. The findings of this study may provide basic information for setting a global standard of letter size or font type to improve the legibility of characters written in Korean. STATEMENT OF RELEVANCE: Results obtained in this study will provide basic information and guidelines for setting standards of letter size and font type to improve the legibility of characters written in Korean. Also, the results might offer useful information for people who are working on design of visual displays.
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157
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Wilson ME, Kota N, Kim Y, Wang Y, Stolz DB, LeDuc PR, Ozdoganlar OB. Fabrication of circular microfluidic channels by combining mechanical micromilling and soft lithography. LAB ON A CHIP 2011; 11:1550-5. [PMID: 21399830 DOI: 10.1039/c0lc00561d] [Citation(s) in RCA: 49] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/12/2023]
Abstract
The fabrication of microfluidic channels with complex three-dimensional (3D) geometries presents a major challenge to the field of microfluidics, because conventional lithography methods are mainly limited to rectangular cross-sections. In this paper, we demonstrate the use of mechanical micromachining to fabricate microfluidic channels with complex cross-sectional geometries. Micro-scale milling tools are first used to fabricate semi-circular patterns on planar metallic surfaces to create a master mold. The micromilled pattern is then transferred to polydimethylsiloxane (PDMS) through a two-step reverse molding process. Using these semi-circular PDMS channels, circular cross-sectioned microchannels are created by aligning and adhering two channels face-to-face. Straight and serpentine-shaped microchannels were fabricated, and the channel geometry and precision of the metallic master and PDMS molds were assessed through scanning electron microscopy and non-contact profilometry. Channel functionality was tested by perfusion of liquid through the channels. This work demonstrates that micromachining enabled soft lithography is capable of fabricating non-rectangular cross-section channels for microfluidic applications. We believe that this approach will be important for many fields from biomimetics and vascular engineering to microfabrication and microreactor technologies.
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158
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Scharnweber T, Truckenmüller R, Schneider AM, Welle A, Reinhardt M, Giselbrecht S. Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography. LAB ON A CHIP 2011; 11:1368-71. [PMID: 21327278 DOI: 10.1039/c0lc00567c] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/21/2023]
Abstract
Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 µm and a depth of 10 µm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.
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159
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Coyer SR, Delamarche E, García AJ. Protein tethering into multiscale geometries by covalent subtractive printing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2011; 23:1550-3. [PMID: 21449060 PMCID: PMC3131134 DOI: 10.1002/adma.201003744] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/11/2010] [Revised: 12/09/2010] [Indexed: 05/22/2023]
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160
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Lee SW, Lee KS, Ahn J, Lee JJ, Kim MG, Shin YB. Highly sensitive biosensing using arrays of plasmonic Au nanodisks realized by nanoimprint lithography. ACS NANO 2011; 5:897-904. [PMID: 21222487 DOI: 10.1021/nn102041m] [Citation(s) in RCA: 97] [Impact Index Per Article: 7.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
We describe the fabrication of elliptical Au nanodisk arrays as a localized surface plasmon resonance (LSPR) sensing substrate for clinical immunoassay via thermal nanoimprint lithography (NIL) and enhancement in the sensitivity of the detection of the prostate-specific antigen (PSA) using the precipitation of 5-bromo-4-chloro-3-indolyl phosphate p-toluidine/nitro blue tetrazolium (BCIP/NBT), catalyzed by alkaline phosphatase. Au nanodisks were fabricated on glass through an unconventional tilted evaporation, which could preserve the thickness of imprinted resists and create an undercut beneficial to the subsequent lift-off process without any damage to pattern dimension and the glass while removing the residual polymers. To investigate the optically anisotropic property of the LSPR sensors, a probe light with linear polarization parallel to and perpendicular to the long axis of the elliptical nanodisk array was utilized, and their sensitivity to the bulk refractive index (RI) was measured as 327 and 167 nm/RIU, respectively. To our knowledge, this is the first application of enzyme-substrate reaction to sandwich immunoassay-based LSPR biosensors that previously suffered from a low sensitivity due to the short penetration depth of the plasmon field, especially when large-sized antibodies were used as bioreceptors. As a result, a large change in local refractive index because of the precipitation on the Au nanodisks amplified the wavelength shift of the LSPR peak in the vis-NIR spectrum, resulting in femtomolar detection limits, which was ∼10(5)-fold lower than the label-free detection without the enzyme precipitation. This method can be extended easily to the other clinical diagnostics with a high sensitivity.
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161
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Vazquez-Mena O, Sannomiya T, Villanueva LG, Voros J, Brugger J. Metallic nanodot arrays by stencil lithography for plasmonic biosensing applications. ACS NANO 2011; 5:844-53. [PMID: 21192666 DOI: 10.1021/nn1019253] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
The fabrication of gold nanodots by stencil lithography and its application for optical biosensing based on localized surface plasmon resonance are presented. Arrays of 50-200 nm wide nanodots with different spacing of 50-300 nm are fabricated without any resist, etching, or lift-off process. The dimensions and morphology of the nanodots were characterized by scanning electron and atomic force microscopy. The fabricated nanodots showed localized surface plasmon resonance in their extinction spectra in the visible range. The resonance wavelength depends on the periodicity and dimensions of the nanodots. Bulk refractive index measurements and model biosensing of streptavidin were successfully performed based on the plasmon resonance shift induced by local refractive index change when biomolecules are adsorbed on the nanodots. These results demonstrate the potential of stencil lithography for the realization of plasmon-based biosensing devices.
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162
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Xia D, Ku Z, Lee SC, Brueck SRJ. Nanostructures and functional materials fabricated by interferometric lithography. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2011; 23:147-79. [PMID: 20976672 DOI: 10.1002/adma.201001856] [Citation(s) in RCA: 49] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/18/2023]
Abstract
Interferometric lithography (IL) is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium, such as a photoresist, that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with IL are a platform for further fabrication of nanostructures and growth of functional materials and are building blocks for devices. This article provides a brief review of IL technologies and focuses on various applications for nanostructures and functional materials based on IL including directed self-assembly of colloidal nanoparticles, nanophotonics, semiconductor materials growth, and nanofluidic devices. Perspectives on future directions for IL and emerging applications in other fields are presented.
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163
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Abstract
A review is provided of contact-printing technologies for the fabrication of planar protein microarrays. The key printing performance parameters for creating protein arrays are reviewed. Solid pin and quill pin technologies are described and their strengths and weaknesses compared.
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164
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Taylor ZR, Sanchez ES, Keay JC, Johnson MB, Schmidtke DW. Patterning of quantum dot bioconjugates via particle lithography. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2010; 26:18938-18944. [PMID: 21073161 DOI: 10.1021/la103468u] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
We present a simple technique to fabricate hexagonally ordered quantum dot bioconjugate (QDBC) dot arrays on glass coverslips. We used particle lithography to create periodic holes in a layer of methoxy-poly(ethylene glycol)-silane and then adsorbed QDBCs into the holes. To demonstrate the versatility of this technique, we made separate periodic arrays of quantum dots (QDs) conjugated to three different biologically important molecules: biotin, streptavidin, and anti-mouse IgG. The diameters of the regions where the QDBCs adsorbed were 500-600 nm and independent of the QDBC patterned. The site density of the QDBCs in the patterned holes could be varied by simply adjusting the coating concentration of the QDBC solution. We demonstrate the applicability of these substrates by designing a QDBC-based binding assay with a working concentration range of several orders of magnitude and a sub-picomolar detection limit.
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165
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Bhawalkar SP, Qian J, Heiber MC, Jia L. Development of a colloidal lithography method for patterning nonplanar surfaces. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2010; 26:16662-6. [PMID: 20949914 DOI: 10.1021/la1035147] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
A colloidal lithography method has been developed for patterning nonplanar surfaces. Hexagonal noncontiguously packed (HNCP) colloidal particles 127 nm-2.7 μm in diameter were first formed at the air-water interface and then adsorbed onto a substrate coated with a layer of polymer adhesive ∼17 nm thick. The adhesive layer plays the critical role of securing the order of the particles against the destructive lateral capillary force generated by a thin film of water after the initial transfer of the particles from the air-water interface. The soft lithography method is robust and very simple to carry out. It is applicable to a variety of surface curvatures and for both inorganic and organic colloidal particles.
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166
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Skardal A, Zhang J, McCoard L, Oottamasathien S, Prestwich GD. Dynamically crosslinked gold nanoparticle - hyaluronan hydrogels. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:4736-40. [PMID: 20730818 DOI: 10.1002/adma.201001436] [Citation(s) in RCA: 116] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/17/2023]
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167
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Schirmer NC, Kullmann C, Schmid MS, Burg BR, Schwamb T, Poulikakos D. On ejecting colloids against capillarity from sub-micrometer openings: on-demand dielectrophoretic nanoprinting. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:4701-4705. [PMID: 20803534 DOI: 10.1002/adma.201001355] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
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168
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Gather MC, Kronenberg NM, Meerholz K. Monolithic integration of multi-color organic LEDs by grayscale lithography. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:4634-4638. [PMID: 20818648 DOI: 10.1002/adma.201002033] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
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169
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Kjellander BKC, Smaal WTT, Anthony JE, Gelinck GH. Inkjet printing of TIPS-PEN on soluble polymer insulating films: a route to high-performance thin-film transistors. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:4612-6. [PMID: 20957764 DOI: 10.1002/adma.201001697] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/17/2023]
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170
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Wei X. Recent developments in the fabrication of ordered nanostructure arrays based on nanosphere lithography. RECENT PATENTS ON NANOTECHNOLOGY 2010; 4:194-204. [PMID: 20670212 DOI: 10.2174/187221010792483681] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/07/2010] [Accepted: 07/01/2010] [Indexed: 05/29/2023]
Abstract
Since it was invented two decades ago, Nanosphere Lithography (NSL) has been widely studied as a low cost and flexible technique to fabricate nanostructures. Based on the registered patents and some selected papers, this review will discuss recent developments of different NSL strategies for the fabrication of ordered nanostructure arrays. The mechanism of self-assembly process and the techniques for preparing the self-assembled nanosphere template are first briefly introduced. The nanosphere templates are used either as shadow masks or as moulds for pattern transfer. Much more work now combines NSL with other lithographic techniques and material growth methods to form novel nanostructures of complex shape or various materials. Hence, this review finally gives a discussion on some future directions in NSL study.
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171
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Okimoto H, Takenobu T, Yanagi K, Miyata Y, Shimotani H, Kataura H, Iwasa Y. Tunable carbon nanotube thin-film transistors produced exclusively via inkjet printing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:3981-3986. [PMID: 20730813 DOI: 10.1002/adma.201000889] [Citation(s) in RCA: 45] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
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172
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Yang R, Zhang L, Wang Y, Shi Z, Shi D, Gao H, Wang E, Zhang G. An anisotropic etching effect in the graphene basal plane. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:4014-9. [PMID: 20683861 DOI: 10.1002/adma.201000618] [Citation(s) in RCA: 97] [Impact Index Per Article: 6.9] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
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173
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Lee BK, Cha NG, Hong LY, Kim DP, Tanaka H, Lee HY, Kawai T. Photocurable silsesquioxane-based formulations as versatile resins for nanoimprint lithography. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2010; 26:14915-14922. [PMID: 20731343 DOI: 10.1021/la1025119] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
Abstract
Methacrylate octafunctionalized silsesquioxane (SSQMA) was shown to be an ideal material with high performance for ultraviolet (UV)-based nanoimprint lithography (NIL). The total viscosity of SSQMA-based formulations was adjusted to between 0.8 and 50 cP by incorporating low-viscosity acrylic additives, making the formulations suitable for UV-based NIL. The cured SSQMA-based formulations showed numerous desirable characteristics, including low volumetric shrinkage (4%), high Young's modulus (2.445-4.272 GPa), high resistance to oxygen plasma, high transparency to UV light, and high resistance to organic/aqueous media, as a functional imprint material for UV-based NIL and step-and-flash imprint lithography (SFIL). Using both techniques, the SSQMA-based formulations were easily transferred to relief structures with excellent imprint fidelity and minimal residual thickness. Formulations containing 50% SSQMA (wt %) were able to reproduce high-aspect-ratio nanostructures with aspect ratios as high as 4.5 using bilayer SFIL. Transparent rigiflex molds and hard replica molds with sub-50-nm size features were reproducibly duplicated by using UV-NIL with the SSQMA-based resin. Nanostructures with feature sizes down to 50 nm were successfully reproduced using these molds in both UV- and thermal-NIL processes. After repeating 20 imprinting cycles at relatively high temperature and pressure, no detectable collapse or contamination on the replica surface was observed. These properties of the SSQMA-based resins make them suitable as inexpensive and convenient components in all NIL processes that are based on physical contact.
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174
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Dickey MD, Russell KJ, Lipomi DJ, Narayanamurti V, Whitesides GM. Transistors formed from a single lithography step using information encoded in topography. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2010; 6:2050-2057. [PMID: 20715073 DOI: 10.1002/smll.201000554] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
Abstract
This paper describes a strategy for the fabrication of functional electronic components (transistors, capacitors, resistors, conductors, and logic gates but not, at present, inductors) that combines a single layer of lithography with angle-dependent physical vapor deposition; this approach is named topographically encoded microlithography (abbreviated as TEMIL). This strategy extends the simple concept of 'shadow evaporation' to reduce the number and complexity of the steps required to produce isolated devices and arrays of devices, and eliminates the need for registration (the sequential stacking of patterns with correct alignment) entirely. The defining advantage of this strategy is that it extracts information from the 3D topography of features in photoresist, and combines this information with the 3D information from the angle-dependent deposition (the angle and orientation used for deposition from a collimated source of material), to create 'shadowed' and 'illuminated' regions on the underlying substrate. It also takes advantage of the ability of replica molding techniques to produce 3D topography in polymeric resists. A single layer of patterned resist can thus direct the fabrication of a nearly unlimited number of possible shapes, composed of layers of any materials that can be deposited by vapor deposition. The sequential deposition of various shapes (by changing orientation and material source) makes it possible to fabricate complex structures-including interconnected transistors-using a single layer of topography. The complexity of structures that can be fabricated using simple lithographic features distinguishes this procedure from other techniques based on shadow evaporation.
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175
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Knoll AW, Pires D, Coulembier O, Dubois P, Hedrick JL, Frommer J, Duerig U. Probe-based 3-D nanolithography using self-amplified depolymerization polymers. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2010; 22:3361-5. [PMID: 20419710 DOI: 10.1002/adma.200904386] [Citation(s) in RCA: 60] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/19/2023]
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