All-dielectric metamaterials

On the giant enhancement of light in plasmonic or all-dielectric gratings containing nano-voids

We report the possibility of generating tremendous light-field enhancements within shallow nano-trenches made in a high-index dielectric material because of resonant behaviors that are reminiscent of what we get with sub-wavelength plasmonic cavities. High quality factors are explained through a modal analysis which gives explicit design rules. The thin dielectric void gratings could be a relevant alternative to plasmon-based devices for chemical sensing, or could inspire novel efficient wavelength-selective photo-absorbers by taking poorly absorbing materials.

Efficient manipulations of circularly polarized terahertz waves with transmissive metasurfaces

The unrestricted control of circularly polarized (CP) terahertz (THz) waves is important in science and applications, but conventional THz devices suffer from issues of bulky size and low efficiency. Although Pancharatnam-Berry (PB) metasurfaces have shown strong capabilities to control CP waves, transmission-mode PB devices realized in the THz regime are less efficient, limiting their applications in practice. Here, based on Jones matrix analysis, we design a tri-layer structure (thickness of ~λ/5) and experimentally demonstrate that the structure can serve as a highly efficient transmissive meta-atom (relative efficiency of ~90%) to build PB metadevices for manipulating CP THz waves. Two ultrathin THz metadevices are fabricated and experimentally characterized with a z-scan THz imaging system. The first device can realize a photonic spin Hall effect with an experimentally demonstrated relative efficiency of ~90%, whereas the second device can generate a high-quality background-free CP Bessel beam with measured longitudinal and transverse field patterns that exhibit the nondiffracting characteristics of a Bessel beam. All the experimental results are in excellent agreement with full-wave simulations. Our results pave the way to freely manipulate CP THz beams, laying a solid basis for future applications such as biomolecular control and THz signal transportation.

CMOS-compatible Si metasurface at visible wavelengths prepared by low-temperature green laser annealing

A low-temperature laser crystallization is newly devised for producing polycrystalline silicon (poly-Si) thin films of low-loss, low surface roughness enough for nanoscale patterning, applicable to practical Si metasurface elements on complementary metal-oxide semiconductor (CMOS) electronic architectures in visible lights. The method is based on dielectric encapsulation of an amorphous Si film and subsequent laser-induced local crystallization. Such poly-Si thin film yields order-of-magnitude smaller surface roughness and grain size than those obtained with the conventional laser annealing processes. The mechanism of the formation of small and uniform crystalline grains during solidification is studied to ensure the smooth surfaces enough for nanoscale patterning. By obtaining root mean square of surface roughness <2.49 nm and extinction coefficient <4.8 × 10^-2 at 550 nm, visible metasurface color-filter elements are experimentally demonstrated with the resonant transmission-peak efficiency approaching ∼85%. This low-loss poly-Si metasurface is favorably compatible with embedded CMOS electronic architectures in contrast to the conventional thermal annealing processes that often cause failure of electrical device functionalities due to delamination and material-property degradation problems. The proposed fabrication in this study provides a practical method for further development of various Si metasurfaces in the visible domain and their integration with CMOS electronic devices as well.

Active control of anapole states by structuring the phase-change alloy Ge2Sb2Te5

High-index dielectric nanoparticles supporting a distinct series of Mie resonances have enabled a new class of optical antennas with unprecedented functionalities. The great wealth of multipolar responses has not only brought in new physical insight but also spurred practical applications. However, how to make such a colorful resonance palette actively tunable is still elusive. Here, we demonstrate that the structured phase-change alloy Ge2Sb2Te5 (GST) can support a diverse set of multipolar Mie resonances with active tunability. By harnessing the dramatic optical contrast of GST, we realize broadband (Δλ/λ ~ 15%) mode shifting between an electric dipole resonance and an anapole state. Active control of higher-order anapoles and multimodal tuning are also investigated, which make the structured GST serve as a multispectral optical switch with high extinction contrasts (>6 dB). With all these findings, our study provides a new direction for realizing active nanophotonic devices.

A nanophotonic laser on a graph

Conventional nanophotonic schemes minimise multiple scattering to realise a miniaturised version of beam-splitters, interferometers and optical cavities for light propagation and lasing. Here instead, we introduce a nanophotonic network built from multiple paths and interference, to control and enhance light-matter interaction via light localisation. The network is built from a mesh of subwavelength waveguides, and can sustain localised modes and mirror-less light trapping stemming from interference over hundreds of nodes. With optical gain, these modes can easily lase, reaching ~100 pm linewidths. We introduce a graph solution to the Maxwell's equation which describes light on the network, and predicts lasing action. In this framework, the network optical modes can be designed via the network connectivity and topology, and lasing can be tailored and enhanced by the network shape. Nanophotonic networks pave the way for new laser device architectures, which can be used for sensitive biosensing and on-chip optical information processing.

Targeted Double Negative Properties in Silver/Silica Random Metamaterials by Precise Control of Microstructures

The mechanism of negative permittivity/permeability is still unclear in the random metamaterials, where the precise control of microstructure and electromagnetic properties is also a challenge due to its random characteristic. Here silver was introduced into porous SiO2 microsphere matrix by a self-assemble and template method to construct the random metamaterials. The distribution of silver was restricted among the interstices of SiO2 microspheres, which lead to the precise regulation of electrical percolation (from hoping to Drude-type conductivity) with increasing silver content. Negative permittivity came from the plasma-like behavior of silver network, and its value and frequency dispersion were further adjusted by Lorentz-type dielectric response. During this process, the frequency of epsilon-near-zero (ENZ) could be adjusted accordingly. Negative permeability was well explained by the magnetic response of eddy current in silver micronetwork. The calculation results indicated that negative permeability has a linear relation with ω 0.5, showing a relaxation-type spectrum, different from the "magnetic plasma" of periodic metamaterials. Electromagnetic simulations demonstrated that negative permittivity materials and ENZ materials, with the advantage of enhanced absorption (40dB) and intelligent frequency selection even in a thin thickness (0.1 mm), could have potentials for electromagnetic attenuation and shielding. This work provides a clear physical image for the theoretical explanation of negative permittivity and negative permeability in random metamaterials, as well as a novel strategy to precisely control the microstructure of random metamaterials.

Disorder-Induced Phase Transitions in the Transmission of Dielectric Metasurfaces

Light interaction with disordered materials is both complex and fascinating at the same time. Here, we reveal disorder-induced phase transitions in a dielectric Huygens' metasurface made from silicon nanocylinders that simultaneously support an electric and magnetic dipole resonance. Depending on the degree of positional disorder and the spectral detuning of the two resonances, the phase angle of the transmission coefficient exhibits a clear phase transition from normal to anomalous dispersion. Combined with the considerations of whether the resonances of spectrally detuned particles appear as separated or overlapping, we distinguish four different phase states. We study this phenomenon analytically by employing dipole particles and disclose the entire phase diagram, support our insights with full-wave simulations of actual structures, and corroborate the findings with experimental results. Unveiling this phenomenon is a milestone simultaneously in the growing fields of metamaterial-inspired silicon nanophotonics, photonics in disordered media, and the fundamental physics of phase transitions.

Giant Electro-Optical Effect through Electrostriction in a Nanomechanical Metamaterial

Electrostriction is a property of all naturally occurring dielectrics whereby they are mechanically deformed under the application of an electric field. It is demonstrated here that an artificial metamaterial nanostructure comprising arrays of dielectric nanowires, made of silicon and indium tin oxide, is reversibly structurally deformed under the application of an electric field, and that this reconfiguration is accompanied by substantial changes in optical transmission and reflection, thus providing a strong electro-optic effect. Such metamaterials can be used as the functional elements of electro-optic modulators in the visible to near-infrared part of the spectrum. A modulator operating at 1550 nm with effective electrostriction and electro-optic coefficients of order 10^-13 m² V^-2 and 10^-6 m V^-1 , respectively, is demonstrated. Transmission changes of up to 3.5% are obtained with a 500 mV control signal at a modulation frequency of ≈6.5 MHz. With a resonant optical response that can be spectrally tuned by design, modulators based on the artificial electrostrictive effect may be used for laser Q-switching and mode-locking among other applications that require modulation at megahertz frequencies.

Extraordinary optical fields in nanostructures: from sub-diffraction-limited optics to sensing and energy conversion

Along with the rapid development of micro/nanofabrication technology, the past few decades have seen the flourishing emergence of subwavelength-structured materials and interfaces for optical field engineering at the nanoscale. Three remarkable properties associated with these subwavelength-structured materials are the squeezed optical fields beyond the diffraction limit, gradient optical fields in the subwavelength scale, and enhanced optical fields that are orders of magnitude greater than the incident field. These engineered optical fields have inspired fundamental and practical advances in both engineering optics and modern chemistry. The first property is the basis of sub-diffraction-limited imaging, lithography, and dense data storage. The second property has led to the emergence of a couple of thin and planar functional optical devices with a reduced footprint. The third one causes enhanced radiation (e.g., fluorescence), scattering (e.g., Raman scattering), and absorption (e.g., infrared absorption and circular dichroism), offering a unique platform for single-molecule-level biochemical sensing, and high-efficiency chemical reaction and energy conversion. In this review, we summarize recent advances in subwavelength-structured materials that bear extraordinary squeezed, gradient, and enhanced optical fields, with a particular emphasis on their optical and chemical applications. Finally, challenges and outlooks in this promising field are discussed.

Subwavelength Artificial Structures: Opening a New Era for Engineering Optics

In the past centuries, the scale of engineering optics has evolved toward two opposite directions: one is represented by giant telescopes with apertures larger than tens of meters and the other is the rapidly developing micro/nano-optics and nanophotonics. At the nanoscale, subwavelength light-matter interaction is blended with classic and quantum effects in various functional materials such as noble metals, semiconductors, phase-change materials, and 2D materials, which provides unprecedented opportunities to upgrade the performance of classic optical devices and overcome the fundamental and engineering difficulties faced by traditional optical engineers. Here, the research motivations and recent advances in subwavelength artificial structures are summarized, with a particular emphasis on their practical applications in super-resolution and large-aperture imaging systems, as well as highly efficient and spectrally selective absorbers and emitters. The role of dispersion engineering and near-field coupling in the form of catenary optical fields is highlighted, which reveals a methodology to engineer the electromagnetic response of complex subwavelength structures. Challenges and tentative solutions are presented regarding multiscale design, optimization, fabrication, and system integration, with the hope of providing recipes to transform the theoretical and technological breakthroughs on subwavelength hierarchical structures to the next generation of engineering optics, namely Engineering Optics 2.0.

Manipulating the flow of light using Dirac-cone zero-index metamaterials

Metamaterials with a refractive index of zero exhibit properties that are important for integrated optics. Possessing an infinite effective wavelength and zero spatial phase change, zero-index metamaterials may be especially useful for routing on-chip photonic processes and reducing the footprint of nonlinear interactions. Zero-index has only been achieved recently in an integrated platform through a Dirac-cone dispersion, enabling some of these more exciting applications in an integrated platform. This paper presents an overview of Dirac-cone zero-index metamaterials, including the fundamental physics, history and demonstration in the optical regime, as well as current challenges and future directions.

Integrating microsystems with metamaterials towards metadevices

Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

Light Concentration by Metal-Dielectric Micro-Resonators for SERS Sensing

Metal-dielectric micro/nano-composites have surface plasmon resonances in visible and near-infrared domains. Excitation of coupled metal-dielectric resonances is also important. These different resonances can allow enhancement of the electromagnetic field at a subwavelength scale. Hybrid plasmonic structures act as optical antennae by concentrating large electromagnetic energy in micro- and nano-scales. Plasmonic structures are proposed for various applications such as optical filters, investigation of quantum electrodynamics effects, solar energy concentration, magnetic recording, nanolasing, medical imaging and biodetection, surface-enhanced Raman scattering (SERS), and optical super-resolution microscopy. We present the review of recent achievements in experimental and theoretical studies of metal-dielectric micro and nano antennae that are important for fundamental and applied research. The main impact is application of metal-dielectric optical antennae for the efficient SERS sensing.

A high-efficiency dual-wavelength achromatic metalens based on Pancharatnam-Berry phase manipulation

The application of metasurfaces requires the reduction or elimination of their chromatic aberration while maintaining a high efficiency. We propose a method for the design of dual-wavelength operating achromatic metalenses, which can focus two different wavelengths at the same position. Phase manipulation was achieved by crossing two crystalline Si nanorods on each pixel carrying phase information for wavelengths of 780 and 660 nm based on the principal of Pancharatnam-Berry (PB) phase. At 660 nm, chromatic aberration was reduced from 1.28 to 0.46 μm in numerical experiments. The focusing efficiency of the circularly polarized light reached 90.2% for 780 nm and 49.7% for 660 nm. This method can be extended to other wavelengths.

Inverse design of large-area metasurfaces

We present a computational framework for efficient optimization-based "inverse design" of large-area "metasurfaces" (subwavelength-patterned surfaces) for applications such as multi-wavelength/multi-angle optimizations, and demultiplexers. To optimize surfaces that can be thousands of wavelengths in diameter, with thousands (or millions) of parameters, the key is a fast approximate solver for the scattered field. We employ a "locally periodic" approximation in which the scattering problem is approximated by a composition of periodic scattering problems from each unit cell of the surface, and validate it against brute-force Maxwell solutions. This is an extension of ideas in previous metasurface designs, but with greatly increased flexibility, e.g. to automatically balance tradeoffs between multiple frequencies or to optimize a photonic device given only partial information about the desired field. Our approach even extends beyond the metasurface regime to non-subwavelength structures where additional diffracted orders must be included (but the period is not large enough to apply scalar diffraction theory).

Effect of Molecular Weight on the Feature Size in Organic Ice Resists

The feature size of patterns obtained by electron-beam lithography (EBL) depends critically on resist properties, beam parameters, development process, and instrument limitations. Frozen layers of simple organic molecules such as n-alkanes behave as negative-tone resists for EBL. With the unique advantage of an in situ thermal treatment replacing chemical development, the entire lithographic process can be performed within a single instrument, thus removing the influence of chemical developers on the feature size. By using an environmental transmission electron microscope, we can also minimize the influence of instrumental limitations and explore the fundamental link between resist characteristics and feature size. Our results reveal that the onset dose of organic ice resists correlates with the inverse molecular weight and that in the thermal development the role of change in solubility of polymers is mirrored in a shift in the solid/vapor critical temperature of organic ices. With a 0.4 pA beam current, we obtained 4.5, 5.5, and 8.5 nm lines with frozen octane, undecane, and tetradecane, respectively, consistent with the predictions of a model we developed that links beam profile and feature size. The knowledge acquired on the response of small organic molecules to electron irradiation, combined with the flexibility and operational advantages of using them as qualified EBL resists, provides us with new opportunities for the design and production of nanodevices and broadens the reach of EBL especially toward biological applications.

Engineering scattering patterns with asymmetric dielectric nanorods

By controlling interference of Mie resonance modes of various nanostructures, we can achieve a large number of nontrivial effects in nanophotonics. In this work, we propose a cylindrical structure in which the spectral overlap of the Mie-type modes can be controlled by drilling a hole parallel to the axis, thus changing unidirectional scattering. We further demonstrate that the scattering patterns can be tailored by rotating the structure to achieve almost arbitrary scattered wave direction.

Illusion and cloaking using dielectric conformal metasurfaces

Decoration of curved topological objects with an ultrathin layer of meta-atoms, which creates a conformal metasurface, allows the scattering wavefront to be modulated willingly. Here, we demonstrate adaptive conformal metasurfaces, which are composed of subwavelength dielectric TiO₂ nano-posts on curved surfaces. Further, these surfaces support novel phenomena, such as focusing, tunable anomalous refraction, cloaking, and illusion (curved holography) in the visible range. The polarization-independent cloaking is demonstrated successfully by using these high-efficiency dielectric conformal metasurfaces. Besides, the metasurfaces's performance under small oblique angles of incidence angles was similar to its performance under normal angles of incidence. Conformal metasurfaces loaded on curved objects are promising platforms for applications in miniaturized optical systems, such as medical devices, wearable electronics, and communication devices.

A slanted-nanoaperture metal lens: subdiffraction-limited focusing of light in the intermediate field region

Diffraction of light limits the resolution of beam focusing with conventional lenses, as dictated by the Abbe limit, that is, approximately half the wavelength. Numerous techniques have been explored to overcome this limit. One of the most intensively explored approaches is to design a lens that operates in the near-field region, that is, with a focal length on the order of 10 nm, where evanescent fields can carry and project large in-plane wave-vectors (greater than free-space wave-vectors) to a focal plane. From a practical perspective, however, the requirement of such an ultra-short focal length puts too much constraint, since much longer focal length is commonly desired for intermediate or far-field operation. Here we report a method to beat the Abbe limit while operating with focal length greater than wavelength λ. Our approach is to tailor the radiation patterns of nanoaperture transmission by tilting aperture axes away from the surface of a metal film such that each slanted aperture transmits a highly directed, tilt-oriented beam onto a common focal point carrying maximal in-plane wave-vector components. The proposed nanoaperture array lens was fabricated by forming tilted nanoslits in a Ag, Al, or Cr film. We demonstrate minimal spot size of λ/3 (210-nm or 110-nm full-width half-maximum at λ = 633 nm or 325 nm, respectively) with 1-4λ focal length in air, beating the Abbe limit.

Generalized Brewster effect in high-refractive-index nanorod-based metasurfaces

The interference between electric and magnetic dipolar fields is known to lead to asymmetric angular distributions of the scattered intensity from small high refractive index (HRI) particles. Properly designed all-dielectric metasurfaces based on HRI spheres have been shown to exhibit zero reflectivity, a generalized Brewster's effect, potentially for any angle, wavelength and polarization of choice. At normal incidence, the effect is related to the absence of backscattering from small dielectric spheres or disks at the, so-called, first Kerker condition. In contrast, homogeneous HRI cylinders do not fulfil the first Kerker condition due to the mismatch between the local electric and magnetic density of states. In this work, we show that although a zero back-scattering condition can never be achieved for individual cylinders, when they are arranged in a periodic array their mutual interaction leads to an anomalous Kerker condition, leading to a generalized Brewster's effect in a nanorod-based metasurface. We derive a coupled electric and magnetic dipole (CEMD) analytical formulation to describe the properties of a periodic array of HRI nanorods in full agreement with exact numerical calculations.

Plasmonic nanoantenna-dielectric nanocavity hybrids for ultrahigh local electric field enhancement

A dielectric nanostructure with a high refractive index can exhibit strong optical resonances with considerable electric field enhancement around the entire structure volume. Here we show theoretically that a dielectric structure with this feature can boost the local electric field of a small plasmonic nanoantenna placed nearby. We construct a hybrid system of a plasmonic nanoantenna and a dielectric nanocavity, where the nanocavity is a concentric disk-ring structure with a lossless material n = 3.3 and the nanoantenna is a gold nanorod dimer. The resonant electric field enhancement at the gap center of the antenna in the hybrid structure reaches more than one order of magnitude higher than that of the individual antenna. The dielectric structure plays two roles in the hybrid system, namely the amplified excitation field and an environment causing the redshift of the antenna resonance. The hybrid configuration is applicable to the cases with various geometries and different materials of the hybrid system. Our results can find applications in enhanced nanoscale light-matter interactions such as surface-enhanced Raman scattering, nonlinear optics, and plasmon-exciton couplings.

Dielectric metamaterials with electric response

Dielectric metamaterials are usually studied as low-loss media with magnetic response. However, control over the electric response is more promising for applications in photonics. Here we report an all-dielectric metamaterial with electric response. The structure consists of high-index dielectric rods arranged in a square lattice. We present a phase diagram that includes regions of metamaterials with magnetic and electric response. A metamaterial behavior is demonstrated for homogeneous ϵ-near zero modes, which are observed regardless of a lattice orientation and a structure boundary. The ϵ-near zero modes make it possible to enhance electric field intensity by two orders of magnitude, which can be used for applications exploiting light-matter interactions.

Light-Emitting Metasurfaces: Simultaneous Control of Spontaneous Emission and Far-Field Radiation

Light-emitting sources and devices permeate every aspect of our lives and are used in lighting, communications, transportation, computing, and medicine. Advances in multifunctional and "smart lighting" would require revolutionary concepts in the control of emission spectra and directionality. Such control might be possible with new schemes and regimes of light-matter interaction paired with developments in light-emitting materials. Here we show that all-dielectric metasurfaces made from III-V semiconductors with embedded emitters have the potential to provide revolutionary lighting concepts and devices, with new functionality that goes far beyond what is available in existing technologies. Specifically, we use Mie-resonant metasurfaces made from semiconductor heterostructures containing epitaxial quantum dots. By controlling the symmetry of the resonant modes, their overlap with the emission spectra, and other structural parameters, we can enhance the brightness by 2 orders of magnitude, as well as reduce its far-field divergence significantly.

Ultrathin van der Waals Metalenses

Ultrathin and flat optical lenses are essential for modern optical imaging, spectroscopy, and energy harvesting. Dielectric metasurfaces comprising nanoscale quasi-periodic resonator arrays are promising for such applications, as they can tailor the phase, amplitude, and polarization of light at subwavelength resolution, enabling multifunctional optical elements. To achieve 2π phase coverage, however, most dielectric metalenses need a thickness comparable to the wavelength, requiring the fabrication of high-aspect-ratio scattering elements. We report ultrathin dielectric metalenses made of van der Waals (vdW) materials, leveraging their high refractive indices and the incomplete phase design approach to achieve device thicknesses down to ∼λ/10, operating at infrared and visible wavelengths. These materials have generated strong interest in recent years due to their advantageous optoelectronic properties. Using vdW metalenses, we demonstrate near-diffraction-limited focusing and imaging and exploit their layered nature to transfer the fabricated metalenses onto flexible substrates to show strain-induced tunable focusing. Our work enables further downscaling of optical elements and opportunities for the integration of metasurface optics in ultraminiature optoelectronic systems.

Giant enhancement of the effective Raman susceptibility in metasurfaces made of silicon photonic crystal nanocavities

We demonstrate that stimulated Raman amplification can be enhanced by more than four orders of magnitude in a silicon metasurface consisting of a periodic distribution of specially engineered photonic crystal (PhC) cavities in a silicon PhC slab waveguide. In particular, by designing the PhC cavities so as they possess two optical modes separated by the Raman frequency of silicon, one can achieve large optical field enhancement at both the pump and Stokes frequencies. As a consequence, the effective Raman susceptibility of the nonlinear metasurface, calculated using a novel homogenization technique, is significantly larger than the intrinsic Raman susceptibility of silicon. Implications to technological applications of our theoretical study are discussed, too.

Pancharatnam–Berry Optical Elements for Spin and Orbital Angular Momentum Division Demultiplexing

A Pancharatnam–Berry optical element is designed, fabricated, and optically characterized for the demultiplexing of beams with different polarization and orbital angular momentum states at the telecom wavelength of 1310 nm. The geometric phase control is achieved by fabricating properly-oriented subwavelength gratings on a silicon substrate, inducing a spatially-variant form birefringence. The digital grating pattern is transferred to the silicon substrate with a two-step nanofabrication protocol, using inductively coupled plasma reactive ion etching to transfer the resist pattern generated with high-resolution electron beam lithography. The optical characterization of the sample confirms the expected capability to sort circularly polarized optical beams with different handedness and orbital angular momentum. Encompassing optical element design and silicon photonics, the designed silicon metasurface paves the way to innovative devices for total angular momentum mode division multiplexing with unprecedented levels of integration.

Generalized Hartmann-Shack array of dielectric metalens sub-arrays for polarimetric beam profiling

To define and characterize optical systems, obtaining the amplitude, phase, and polarization profile of optical beams is of utmost importance. Traditional polarimetry is well established to characterize the polarization state. Recently, metasurfaces have successfully been introduced as compact optical components. Here, we take the metasurface concept to the system level by realizing arrays of metalenses, allowing the determination of the polarization profile of an optical beam. We use silicon-based metalenses with a numerical aperture of 0.32 and a mean measured focusing efficiency in transmission mode of 28% at a wavelength of 1550 nm. Our system is extremely compact and allows for real-time beam diagnostics by inspecting the foci amplitudes. By further analyzing the foci displacements in the spirit of a Hartmann-Shack wavefront sensor, we can simultaneously detect phase-gradient profiles. As application examples, we diagnose the profiles of a radially polarized beam, an azimuthally polarized beam, and of a vortex beam.

Obtaining information on the amplitude, phase and polarization profile of optical beams is of huge interest. Here, the authors create a generalized Hartmann-Shack array with metalenses which measures phase and phase-gradient profiles of optical beams but also measures spatial polarization profiles at the same time.

Metasurface eyepiece for augmented reality

Recently, metasurfaces composed of artificially fabricated subwavelength structures have shown remarkable potential for the manipulation of light with unprecedented functionality. Here, we first demonstrate a metasurface application to realize a compact near-eye display system for augmented reality with a wide field of view. A key component is a see-through metalens with an anisotropic response, a high numerical aperture with a large aperture, and broadband characteristics. By virtue of these high-performance features, the metalens can overcome the existing bottleneck imposed by the narrow field of view and bulkiness of current systems, which hinders their usability and further development. Experimental demonstrations with a nanoimprinted large-area see-through metalens are reported, showing full-color imaging with a wide field of view and feasibility of mass production. This work on novel metasurface applications shows great potential for the development of optical display systems for future consumer electronics and computer vision applications.

Quantitative Nanoplasmonics

Plasmonics, the study of the interactions between photons and collective oscillations of electrons, has seen tremendous advances during the past decade. Controllable nanometer- and sub-nanometer-scale engineering in plasmonic resonance and electromagnetic field localization at the subwavelength scale have propelled diverse studies in optics, materials science, chemistry, biotechnology, energy science, and various applications in spectroscopy. However, for translation of these accomplishments from research into practice, major hurdles including low reproducibility and poor controllability in target structures must be overcome, particularly for reliable quantification of plasmonic signals and functionalities. This Outlook introduces and summarizes the recent attempts and findings of many groups toward more quantitative and reliable nanoplasmonics, and discusses the challenges and possible future directions.

High permittivity processed SrTiO3 for metamaterials applications at terahertz frequencies

High permittivity SrTiO₃ for the realization of all-dielectric metamaterials operating at terahertz frequencies was fabricated. A comparison of different processing methods demonstrates that Spark Plasma Sintering is the most effective sintering process to yield high density ceramic with high permittivity. We compare this sintering process with two other processes. The fabricated samples are characterized in the low frequency and in the terahertz frequency ranges. Their relative permittivities are compared with that of a reference SrTiO₃ single crystal. The permittivity of the sample fabricated by Spark Plasma Sintering is as high as that of the single crystal. The role of the signal-to-noise ratio in the measurements at terahertz frequency is detailed.

On-chip silicon photonic signaling and processing: a review

The arrival of the big data era has driven the rapid development of high-speed optical signaling and processing, ranging from long-haul optical communication links to short-reach data centers and high-performance computing, and even micro-/nano-scale inter-chip and intra-chip optical interconnects. On-chip photonic signaling is essential for optical data transmission, especially for chip-scale optical interconnects, while on-chip photonic processing is a critical technology for optical data manipulation or processing, especially at the network nodes to facilitate ultracompact data management with low power consumption. In this paper, we review recent research progress in on-chip photonic signaling and processing on silicon photonics platforms. Firstly, basic key devices (lasers, modulators, detectors) are introduced. Secondly, for on-chip photonic signaling, we present recent works on on-chip data transmission of advanced multi-level modulation signals using various silicon photonic integrated devices (microring, slot waveguide, hybrid plasmonic waveguide, subwavelength grating slot waveguide). Thirdly, for on-chip photonic processing, we summarize recent works on on-chip data processing of advanced multi-level modulation signals exploiting linear and nonlinear effects in different kinds of silicon photonic integrated devices (strip waveguide, directional coupler, 2D grating coupler, microring, silicon-organic hybrid slot waveguide). Various photonic processing functions are demonstrated, such as photonic switch, filtering, polarization/wavelength/mode (de)multiplexing, wavelength conversion, signal regeneration, optical logic and computing. Additionally, we also introduce extended silicon+ photonics and show recent works on on-chip graphene-silicon photonic signal processing. The advances in on-chip silicon photonic signaling and processing with favorable performance pave the way to integrate complete optical communication systems on a monolithic chip and integrate silicon photonics and silicon nanoelectronics on a chip. It is believed that silicon photonics will enable more and more emerging advanced applications even beyond silicon photonic signaling and processing.

Near-absolute polarization insensitivity in grapheme based ultra-narrowband perfect visible light absorber

Strong light-graphene interaction is essential for the integration of graphene to nanophotonic and optoelectronic devices. The plasmonic response of graphene in terahertz and mid-infrared regions enhances this interaction, and other resonance mechanisms can be adopted in near-infrared and visible ranges to achieve perfect light absorption. However, obtaining near-absolute polarization insensitivity with ultra-narrow absorption bandwidth in the visible and near-infrared regimes remains a challenge. In this regard, we numerically propose a graphene perfect absorber, utilizing the excitation of guided-modes of a dielectric slab waveguide by a novel sub-wavelength dielectric grating structure. When the guided-mode resonance is critically coupled to the graphene, we obtain perfect absorption with an ultra-narrow bandwidth (full-width at half-maximum) of 0.8 nm. The proposed design not only preserves the spectral position of the resonance, but also maintains >98% absorption at all polarization angles. The spectral position of the resonance can be tuned as much as 400 nm in visible and near-infrared regimes by tailoring geometrical parameters. The proposed device has great potential in efficient, tunable, ultra-sensitive, compact and easy-to-fabricate advanced photodetectors and color filters.

Printable all-dielectric water-based absorber

The phase interplay between overlapping electric and magnetic dipoles of equal amplitude generated by exclusively alldielectric structures presents an intriguing paradigm in the manipulation of electromagnetic energy. Here, we offer a holistic implementation by proposing an additive manufacturing route and associated design principles that enable the programming and fabrication of synthetic multi-material microstructures. In turn, we compose, manufacture and experimentally validate the first demonstrable 3d printed all-dielectric electromagnetic broadband absorbers that point the way to circumventing the technical limitations of conventional metal-dielectric absorber configurations. One of the key innovations is to judicially distribute a dispersive soft matter with a high-dielectric constant, such as water, in a low-dielectric matrix to enhance wave absorption at a reduced length scale. In part, these results extend the promise of additive manufacturing and illustrate the power of topology optimisation to create carefully crafted magnetic and electric responses that are sure to find new applications across the electromagnetic spectrum.

Utilization of Resist Stencil Lithography for Multidimensional Fabrication on a Curved Surface

The limited ability to fabricate nanostructures on nonplanar rugged surfaces has severely hampered the applicability of many emerging technologies. Here we report a resist stencil lithography based approach for in situ fabrication of multidimensional nanostructures on both planar and uneven substrates. By using the resist film as a flexible stencil to form a suspending membrane with predesigned patterns, a variety of nanostructures have been fabricated on curved or uneven substrates of diverse morphologies on demand. The ability to realize 4 in. wafer scale fabrication of nanostructures as well as line width resolution of sub-20 nm is also demonstrated. Its extraordinary capacity is highlighted by the fabrication of three-dimensional wavy nanostructures with diversified cell morphologies on substrates of different curvatures. A robust general scheme is also developed to construct various complex 3D nanostructures. The use of conventional resists and processing ensures the versatility of the method. Such an in situ lithography technique has offered exciting possibilities to construct nanostructures with high dimensionalities that can otherwise not be achieved with existing nanofabrication methods.

Tailoring diamond's optical properties via direct femtosecond laser nanostructuring

We demonstrate a rapid, accurate, and convenient method for tailoring the optical properties of diamond surfaces by employing laser induced periodic surface structuring (LIPSSs). The characteristics of the fabricated photonic surfaces were adjusted by tuning the laser wavelength, number of impinging pulses, angle of incidence and polarization state. Using Finite Difference Time Domain (FDTD) modeling, the optical transmissivity and bandwidth was calculated for each fabricated LIPSSs morphology. The highest transmission of ~99.5% was obtained in the near-IR for LIPSSs structures with aspect ratios of the order of ~0.65. The present technique enabled us to identify the main laser parameters involved in the machining process, and to control it with a high degree of accuracy in terms of structure periodicity, morphology and aspect ratio. We also demonstrate and study the conditions for fabricating spatially coherent nanostructures over large areas maintaining a high degree of nanostructure repeatability and optical performance. While our experimental demonstrations have been mainly focused on diamond anti-reflection coatings and gratings, the technique can be easily extended to other materials and applications, such as integrated photonic devices, high power diamond optics, or the construction of photonic surfaces with tailored characteristics in general.

All-optical wireless wavelength multiplexing and demultiplexing using resonant cavity

The potential capability of wireless wavelength multiplexing and demultiplexing can enable the next development of smaller photonic counterparts for network architectures. This paper numerically represents a new design of a wireless transmission in C-band infrared wavelengths within two identical resonant cavities between photonic chips. This system consists of an H1 rod-type two-dimensional photonic crystal (PhC) microcavity, which can be operated as both a transmitter and a receiver without interfering with the signal in each PhC waveguide. By using the point-to-point oscillatory light-field exchange between resonant cavities, two independent photonic circuits are linked with each other. The obtained results show that the multi-resonance wavelengths in one chip can be transferred to another chip located far away by ten times the highest resonance wavelength. Such a device can be useful for integrated optical circuit interconnect and small-scale sensors between photonic chips.

Effective surface conductivity of optical hyperbolic metasurfaces: from far-field characterization to surface wave analysis

Metasurfaces offer great potential to control near- and far-fields through engineering optical properties of elementary cells or meta-atoms. Such perspective opens a route to efficient manipulation of the optical signals both at nanoscale and in photonics applications. In this paper we show that a local surface conductivity tensor well describes optical properties of a resonant plasmonic hyperbolic metasurface both in the far-field and in the near-field regimes, where spatial dispersion usually plays a crucial role. We retrieve the effective surface conductivity tensor from the comparative analysis of experimental and numerical reflectance spectra of a metasurface composed of elliptical gold nanoparticles. Afterwards, the restored conductivities are validated by semi-analytic parameters obtained with the nonlocal discrete dipole model with and without interaction contribution between meta-atoms. The effective parameters are further used for the dispersion analysis of surface plasmons localized at the metasurface. The obtained effective conductivity describes correctly the dispersion law of both quasi-TE and quasi-TM plasmons in a wide range of optical frequencies as well as the peculiarities of their propagation regimes, in particular, topological transition from the elliptical to hyperbolic regime with eligible accuracy. The analysis in question offers a simple practical way to describe properties of metasurfaces including ones in the near-field zone with effective conductivity tensor extracting from the convenient far-field characterization.

Parametric study on photoluminescence enhancement of high-quality zinc oxide single-crystal capping with dielectric microsphere array

A dielectric microsphere is a multifunctional platform to manipulate light in microscale by nanofocusing, optical whispering gallery resonance, and unidirectional antenna. Dielectric microsphere arrays (MSAs) have demonstrated the capability for photoluminescence (PL) and Raman enhancement without plasmonics. In this work, we investigate the effects of excitation power, tilting angle, and temperature on PL enhancement of high-quality zinc oxide (ZnO) single-crystal capping with fused silica MSAs. The microsphere diameter is optimized to 3.5-5.5 μm, achieving the maximum UV-PL enhancement ratio of intensity (ERI) up to tenfold by strong focusing and unidirectional antenna effects. Under the excitation power <0.2  mW, the incident light focused by the MSA increases the localized exciton state density for a higher ERI of ∼15-fold. The angle-sensitive PL intensity from the MSA enhancer provides a simple approach achieving unidirectional UV emission from planar ZnO. The 16-fold enhancement for UV-PL near 130°C is also demonstrated, for the first time, owing to thermal ionization of hydrogen-related donor that increases free-exciton concentration. The high temperature stability and reproducibility of PL enhancement up to 400°C promote the nonplasmonic MSAs superior to surface plasmon-related metal nanostructures for ZnO-based highly efficient luminescence and highly sensitive photon detection above room temperature.

Finite-Size Effects in Metasurface Lasers Based on Resonant Dark States

The quest for subwavelength coherent light sources has recently led to the exploration of dark-mode based surface lasers, which allow for independent adjustment of the lasing state and its coherent radiation output. To understand how this unique design performs in real experiments, we need to consider systems of finite size and quantify finite-size effects not present in the infinite dark-mode surface laser model. Here we find that, depending on the size of the system, distinct and even counterintuitive behavior of the lasing state is possible, determined by a balanced competition between multiple loss channels, including dissipation, intentional out-coupling of coherent radiation, and leakage from the edges of the finite system. The conclusions are crucial for the design of future experiments that will enable the realization of ultrathin coherent light sources.

Design of random and sparse metalens with matrix pencil method

We propose a matrix pencil method for designing one- or two- dimensional (1D or 2D) metalenses with randomly distributed meta-atoms. In contrast to the standard random synthesis algorithm that only randomizes the position of the meta-atoms, the proposed method designs both the position and phase of each meta-atom rigorously. Several all-dielectric random metalenses, in both 1D and 2D operating at 220 GHz, are presented by using our proposed algorithm. Minimum reduction of focusing efficiency can be achieved with respect to a standard metalens with periodically arranged meta-atoms. In contrast to previously reported random metalenses, our random metalenses achieve much higher efficiency, while staying polarization-independent. This synthesis method will pave a way for future random-metasurface-based device designs, which could have more degrees of freedom to information multiplexing.

Near-field probing the magnetic field vector of visible light with a silicon nanoparticle probe and nanopolarimetry

Magnetic light-matter interaction plays a crucial role in nanophysics, such as in photonic topological insulators and metamaterials. Recent advances in all-dielectric nanophotonics especially demand vectorial mapping of magnetic light at visible wavelengths. Here, we report that a novel functional nanoprobe decorated with a silicon nanoparticle predominantly senses both the vertical and lateral magnetic field, that is, the magnetic field vector, complementary to a metal nanoparticle probe detecting the local electric field vector. As a proof-of-principle experiment, we demonstrate the mapping of magnetic field vectors in a transverse electric (TE) evanescent standing wave by this probe in a scanning near-field optical microscope (SNOM) with nanopolarimetry. It is for the first time that the full magnetic field vector of visible light, whose frequency exceeds 550 THz, can be directly detected with deep subwavelength resolution. Such functional probe and nanopolarimetry may pave the way toward complete vectorial near-field characterization over the whole visible band for nano-optics and subwavelength optics.

Metallic mesh devices-based terahertz parallel-plate resonators: characteristics and applications

The capability to design, fabricate, and optimize metamaterials based on various structures and material platforms has been crucial for the rapid development of modern terahertz (THz) technology. While the detailed structures of artificial unit cells within a metamaterial is certainly worth investigating, there has been increasing demand to integrate novel metamaterials with a traditional functional photonic device to form a hybrid device, whose performance is so significantly improved as to be promising for real-world applications. In this study, we proposed, for the first time, a THz parallel-plate resonator based on metallic mesh devices (MMDs) for chemical sensing applications. We studied the influences of various structural parameters through simulations, fabricated MMD-based resonator devices, and fully characterized the device performance through THz spectroscopy experiments. Furthermore, we experimentally demonstrated that our device can detect a doxycycline hydrochloride aqueous solution whose concentrations is as low as 1 mg L^-1 through resonance frequency shifts, evidencing the device sensitivity capable of delicate chemical sensing tasks. Our work presents a practical and low cost architecture for chemical sensing using THz radiation, which opens new avenues for numerous useful THz devices based on metamaterials.

Sub-wavelength field enhancement in the mid-IR: photonics versus plasmonics versus phononics

The ability to concentrate the electrical field into sub-wavelength volumes is a key benefit sought and, to a certain degree, found within the discipline of plasmonics. This ability is restricted only by the ohmic loss in noble metals and, recently, in the infrared region, metals are beginning to face a challenge from emerging alternative media: phononic (i.e., relying on surface phonon polaritons) and photonic (i.e., relying on high refractive index) all-dielectric structures, and highly doped semiconductors, all of them having smaller intrinsic loss than metals. In this Letter, we compare the degree of enhancement and its spectral selectivity for different media and confirm that, while one can obtain sharper resonant features with all-dielectric structures, the magnitude of the field enhancement is invariably higher with metals such as gold and copper, primarily due to a higher density of electrons. On the whole, depending on the application, metals and dielectrics have their own unique advantages.

Vacuum Ultraviolet Light-Generating Metasurface

Vacuum ultraviolet (VUV) light has important applications in many fields, ranging from device fabrication to photochemistry, from environmental remediation to microscopy and spectroscopy. Methods to produce coherent VUV light frequently utilize high harmonic generation in media such as rare gases or atomic vapors; nonlinear optical crystals that support second harmonic generation into the VUV are quite rare. Here, we demonstrate an all-dielectric metasurface designed for the nonlinear optical generation of VUV light. Consisting of an array of zinc oxide nanoresonators, the device exhibits a magnetic dipole resonance at a wavelength of 394 nm. When excited with ultrafast laser pulses at this wavelength, the second harmonic at 197 nm is readily generated. Manipulation of the metasurface design enables control over the radiation pattern. This work has the potential to open the door toward simple and compact VUV sources for new applications.

Metalenses Based on Symmetric Slab Waveguide and c-TiO₂: Efficient Polarization-Insensitive Focusing at Visible Wavelengths

A key goal of metalens research is to achieve wavefront shaping of light using optical elements with thicknesses on the order of the wavelength. Here we demonstrate ultrathin highly efficient crystalline titanium dioxide metalenses at blue, green, and red wavelengths (λ₀ = 453 nm, 532 nm, and 633 nm, respectively) based on symmetric slab waveguide theory. These metalenses are less than 488 nm-thick and capable of focusing incident light into very symmetric diffraction-limited spots with strehl ratio and efficiency as high as 0.96 and 83%, respectively. Further quantitative characterizations about metalenses' peak focusing intensities and focal spot sizes show good agreement with theoretical calculation. Besides, the metalenses suffer only about 10% chromatic deviation from the ideal spots in visible spectrum. In contrast with Pancharatnam⁻Berry phase mechanism, which limit their incident light at circular polarization, the proposed method enables metalenses polarization-insensitive to incident light.

Harnessing magnetic dipole resonance in novel dielectric nanomaterials

Photonic manipulation with plasmonic materials is typically associated with high ohmic losses, which has triggered interest in alternative strategies based on low loss dielectric materials. Here we describe a novel dielectric nanomaterial capable of supporting strong Mie resonances from the visible to IR regimes. The fundamental block of this metamaterial is based on nanopillars in a core-shell configuration, with a large refractive index (RI) contrast between the (low RI) core and the (high RI) shell. The material showed strongly tunable optical resonances that varied from visible to near and mid IR as a function of shell thickness, core diameter and inter-pillar spacing. The numerical simulations, which are in good agreement with the experimental results, suggest the optical response to be dominated by magnetic dipole resonances. This versatile material platform is CMOS compatible, can be fabricated in a scalable manner as thin films, can act as strong scatterers in colloidal suspensions and thereby can provide several promising technological opportunities in nanophotonics.

Subwavelength integrated photonics

In the late nineteenth century, Heinrich Hertz demonstrated that the electromagnetic properties of materials are intimately related to their structure at the subwavelength scale by using wire grids with centimetre spacing to manipulate metre-long radio waves. More recently, the availability of nanometre-scale fabrication techniques has inspired scientists to investigate subwavelength-structured metamaterials with engineered optical properties at much shorter wavelengths, in the infrared and visible regions of the spectrum. Here we review how optical metamaterials are expected to enhance the performance of the next generation of integrated photonic devices, and explore some of the challenges encountered in the transition from concept demonstration to viable technology.

Modelling of free-form conformal metasurfaces

Artificial electromagnetic surfaces, metasurfaces, control light in the desired manner through the introduction of abrupt changes of electromagnetic fields at interfaces. Current modelling of metasurfaces successfully exploits generalised sheet transition conditions (GSTCs), a set of boundary conditions that account for electric and magnetic metasurface-induced optical responses. GSTCs are powerful theoretical tools but they are not readily applicable for arbitrarily shaped metasurfaces. Accurate and computationally efficient algorithms capable of implementing artificial boundary conditions are highly desired for designing free-form photonic devices. To address this challenge, we propose a numerical method based on conformal boundary optics with a modified finite difference time-domain (FDTD) approach which accurately calculates the electromagnetic fields across conformal metasurfaces. Illustrative examples of curved meta-optics are presented, showing results in good agreement with theoretical predictions. This method can become a powerful tool for designing and predicting optical functionalities of conformal metasurfaces for new lightweight, flexible and wearable photonic devices.

Predicting and modelling the responses of free-from photonics devices remain challenging with conventional computational tools. Here, the authors propose an efficient algorithm based on conformal boundary optics and modified finite difference time-domain to calculate the electromagnetic fields across conformal metasurfaces.

Silk protein nanowires patterned using electron beam lithography

Nanofabrication approaches to pattern proteins at the nanoscale are useful in applications ranging from organic bioelectronics to cellular engineering. Specifically, functional materials based on natural polymers offer sustainable and environment-friendly substitutes to synthetic polymers. Silk proteins (fibroin and sericin) have emerged as an important class of biomaterials for next generation applications owing to excellent optical and mechanical properties, inherent biocompatibility, and biodegradability. However, the ability to precisely control their spatial positioning at the nanoscale via high throughput tools continues to remain a challenge. In this study electron beam lithography (EBL) is used to provide nanoscale patterning using methacrylate conjugated silk proteins that are photoreactive 'photoresists' materials. Very low energy electron beam radiation can be used to pattern silk proteins at the nanoscale and over large areas, whereby such nanostructure fabrication can be performed without specialized EBL tools. Significantly, using conducting polymers in conjunction with these silk proteins, the formation of protein nanowires down to 100 nm is shown. These wires can be easily degraded using enzymatic degradation. Thus, proteins can be precisely and scalably patterned and doped with conducting polymers and enzymes to form degradable, organic bioelectronic devices.