Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception

Resistance behavior of Sb7Se3 thin films based on flexible mica substrate

In this paper, we explored the resistivity behavior of Sb7Se3 thin films on flexible mica. The films maintained their resistance characteristics through various thicknesses and bending cycles. With increasing bends, resistivity and phase transition temperature of both amorphous and crystalline states rose, while the resistance drift coefficient gradually increased. Raman and near infrared experiments confirmed the internal structural changes and bandgap enhancement after bending. Transmission electron microscopy showed enhanced crystallization and uniform element distribution after annealing. Atomic force microscopy observed cracks, explaining the property changes. Additionally, we developed a flexible Sb7Se3 thin-film resistive device with swift reversibility (∼10 ns) regardless of bending, opening new avenues for flexible information storage.

Stretchable Piezoresistive Pressure Sensor Array with Sophisticated Sensitivity, Strain-Insensitivity, and Reproducibility

This study delves into the development of a novel 10 by 10 sensor array featuring 100 pressure sensor pixels, achieving remarkable sensitivity up to 888.79 kPa-1, through the innovative design of sensor structure. The critical challenge of strain sensitivity inherent is addressed in stretchable piezoresistive pressure sensors, a domain that has seen significant interest due to their potential for practical applications. This approach involves synthesizing and electrospinning polybutadiene-urethane (PBU), a reversible cross-linking polymer, subsequently coated with MXene nanosheets to create a conductive fabric. This fabrication technique strategically enhances sensor sensitivity by minimizing initial current values and incorporating semi-cylindrical electrodes with Ag nanowires (AgNWs) selectively coated for optimal conductivity. The application of a pre-strain method to electrode construction ensures strain immunity, preserving the sensor's electrical properties under expansion. The sensor array demonstrated remarkable sensitivity by consistently detecting even subtle airflow from an air gun in a wind sensing test, while a novel deep learning methodology significantly enhanced the long-term sensing accuracy of polymer-based stretchable mechanical sensors, marking a major advancement in sensor technology. This research presents a significant step forward in enhancing the reliability and performance of stretchable piezoresistive pressure sensors, offering a comprehensive solution to their current limitations.

A Suspended, 3D Morphing Sensory System for Robots to Feel and Protect

Artificial sensory systems with synergistic touch and pain perception hold substantial promise for environment interaction and human-robot communication. However, the realization of biological skin-like functional integration of sensors with sensitive touch and pain perception still remains a challenge. Here, a concept is proposed of suspended electronic skins enabling 3D deformation-mechanical contact interactions for achieving synergetic ultrasensitive touch and adjustable pain perception. The suspended sensory system can sensitively capture tiny touch stimuli as low as 0.02 Pa and actively perceive pain response with reliable 5200 cycles via 3D deformation and mechanical contact mechanism, respectively. Based on the touch-pain effect, a visualized feedback demo with miniaturized sensor arrays on artificial fingers is rationally designed to give a pain perception mapping on sharp surfaces. Furthermore, the capability is shown of the suspended electronic skin serving as a safe human-robot communication interface from active and passive view through a feedback control system, demonstrating potential in bionic electronics and intelligent robotics.

All-Printed Finger-Inspired Tactile Sensor Array for Microscale Texture Detection and 3D Reconstruction

Electronic skins are expected to replicate a human-like tactile sense, which significantly detects surface information, including geometry, material, and temperature. Although most texture features can be sensed in the horizontal direction, the lack of effective approaches for detecting vertical properties limits the development of artificial skin based on tactile sensors. In this study, an all-printed finger-inspired tactile sensor array is developed to realize the 3D detection and reconstruction of microscale structures. A beam structure with a suspended multilayer membrane is proposed, and a tactile sensor array of 12 units arranged in a dual-column layout is developed. This architecture enables the tactile sensor array to obtain comprehensive geometric information of micro-textures, including 3D morphology and clearance characteristics, and optimizes the 3D reconstruction patterns by self-calibration. Moreover, an innovative screen-printing technology incorporating multilayer printing and sacrificial-layer techniques is adopted to print the entire device. In additon, a Braille recognition system utilizing this tactile sensor array is developed to interpret Shakespeare's quotes printed in Grade 2 Braille. The abovementioned demonstrations reveal an attractive future vision for endowing bioinspired robots with the unique capability of touching and feeling the microscale real world and reconstructing it in the cyber world.

Integrated Firefighting Textile with Temperature and Pressure Monitoring for Personal Defense

Although electronic textiles that can detect external stimuli show great promise for fire rescue, existing firefighting clothing is still scarce for simultaneously integrating reliable early fire warning and real-time motion sensing, hardly providing intelligent personal protection under complex high-temperature conditions. Herein, we introduce an "all-in-one" hierarchically sandwiched fabric (HSF) sensor with a simultaneous temperature and pressure stimulus response for developing intelligent personal protection. A cross-arranged structure design has been proposed to tackle the serious mutual interference challenge during multimode sensing using two separate sets of core-sheath composite yarns and arrayed graphene-coated aerogels. The functional design of the HSF sensor not only possesses wide-range temperature sensing from 25 to 400 °C without pressure disturbance but also enables highly sensitive pressure response with good thermal adaptability (up to 400 °C) and wide pressure detection range (up to 120 kPa). As a proof of concept, we integrate large-scalable HSF sensors onto conventional firefighting clothing for passive/active fire warning and also detecting spatial pressure and temperature distribution when a firefighter is exposed to high-temperature flames, which may provide a useful design strategy for the application of intelligent firefighting protective clothing.

Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle

Flexible sensors have been widely studied for use in motion monitoring, human‒machine interactions (HMIs), personalized medicine, and soft intelligent robots. However, their practical application is limited by their low output performance, narrow measuring range, and unidirectional force detection. Here, to achieve flexibility and high performance simultaneously, we developed a flexible wide-range multidimensional force sensor (FWMFS) similar to bones embedded in muscle structures. The adjustable magnetic field endows the FWMFS with multidimensional perception for detecting forces in different directions. The multilayer stacked coils significantly improved the output from the μV to the mV level while ensuring FWMFS miniaturization. The optimized FWMFS exhibited a high voltage sensitivity of 0.227 mV/N (0.5-8.4 N) and 0.047 mV/N (8.4-60 N) in response to normal forces ranging from 0.5 N to 60 N and could detect lateral forces ranging from 0.2-1.1 N and voltage sensitivities of 1.039 mV/N (0.2-0.5 N) and 0.194 mV/N (0.5-1.1 N). In terms of normal force measurements, the FWMFS can monitor finger pressure and sliding trajectories in response to finger taps, as well as measure plantar pressure for assessing human movement. The plantar pressure signals of five human movements collected by the FWMFS were analyzed using the k-nearest neighbors classification algorithm, which achieved a recognition accuracy of 92%. Additionally, an artificial intelligence biometric authentication system is being developed that classifies and recognizes user passwords. Based on the lateral force measurement ability of the FWMFS, the direction of ball movement can be distinguished, and communication systems such as Morse Code can be expanded. This research has significant potential in intelligent sensing and personalized spatial recognition.

Ultrawide linear range, high sensitivity, and large-area pressure sensor arrays enabled by pneumatic spraying broccoli-like microstructures

Large-area pressure sensor arrays with a wide linear response range and high sensitivity are beneficial to map the inhomogeneous interface pressure, which is significant in practical applications. Here, we demonstrate a pneumatic spraying method to prepare large-area microstructure films (PSMF) for high performance pressure sensor arrays. The sprayed surface morphology is designable by controlling the spraying parameters. It is worth noting that the constructed "broccoli" like morphology with a swollen top and shrunken bottom inspired a new mechanism to enlarge the linear response range by decreasing the series resistance with pressure increasing. At the same time, the pneumatic sprayed "broccoli" has a rough surface due to droplet stacking, which reduces the initial current effectively. Hence, the sensor achieves a 10 000 kPa ultrawide linear response range with a high sensitivity (98.71 kPa-1), and low detection (5 Pa). The prepared sensor has a small static response error (4.4%) and 5000 cycle full-range dynamic response durability. Finally, the constructed sensor arrays can distinguish the pressure distribution in different ranges clearly, which indicates a great potential in health care, motion detection, and the tire industry.

3D Printing of Capacitive Pressure Sensors with Tuned Wide Detection Range and High Sensitivity Inspired by Bio-Inspired Kapok Structures

Flexible pressure sensors have drawn considerable attention for their potential applications as electronic skins with both sensitivity and pressure response range. Although the introduction of surface microstructures effectively enhances sensitivity, the confined volume of their compressible structures results in a limited pressure response range. To address this issue, a biomimetic kapok structure is proposed and implemented for constructing the dielectric layer of flexible capacitive pressure sensors employing 3D printing technology. The structure is designed with easily deformable concave and rotational structures, enabling continuous deformation under pressure. This design results in a significant expansion of the pressure response range and improvement in sensitivity. Further, the study purposively analyses crucial parameters of the devised structure that affect its compressibility and stability. These include the concave angle θ, height ratio d1/d2, rotation angle α, and width k. As a result, the ultimate pressure sensors demonstrate remarkable features such as high sensitivity (≈2.38 kPa-1 in the range of 0-10 kPa), broad detection range (734 kPa), fast response time (23 ms), and outstanding pressure resolution (0.4% at 500 kPa). This study confirms the viability of bionic structures for flexible sensors, and their potential to expand the scope of wearable electronic devices.

Linear Capacitive Pressure Sensor with Gradient Architecture through Laser Ablation on MWCNT/Ecoflex Film

The practical application of flexible pressure sensors, including electronic skins, wearable devices, human-machine interaction, etc., has attracted widespread attention. However, the linear response range of pressure sensors remains an issue. Ecoflex, as a silicone rubber, is a common material for flexible pressure sensors. Herein, we have innovatively designed and fabricated a pressure sensor with a gradient micro-cone architecture generated by CO2 laser ablation of MWCNT/Ecoflex dielectric layer film. In cooperation with the gradient micro-cone architecture and a dielectric layer of MWCNT/Ecoflex with a variable high dielectric constant under pressure, the pressure sensor exhibits linearity (R2 = 0.990) within the pressure range of 0-60 kPa, boasting a sensitivity of 0.75 kPa-1. Secondly, the sensor exhibits a rapid response time of 95 ms, a recovery time of 129 ms, hysteresis of 6.6%, and stability over 500 cycles. Moreover, the sensor effectively exhibited comprehensive detection of physiological signals, airflow detection, and Morse code communication, thereby demonstrating the potential for various applications.

Capacitive Pressure Sensor Combining Dual Dielectric Layers with Integrated Composite Electrode for Wearable Healthcare Monitoring

Foot activity can reflect numerous physiological abnormalities in the human body, making gait a valuable metric in health monitoring. Research on flexible sensors for gait monitoring has focused on high sensitivity, wide working range, fast response, and low detection limit, but challenges remain in areas such as elasticity, antibacterial activity, user-friendliness, and long-term stability. In this study, we have developed a novel capacitive pressure sensor that offers an ultralow detection limit of 1 Pa, wide detection ranges from 1 Pa to 2 MPa, a high sensitivity of 0.091 kPa-1, a fast response time of 71 ms, and exceptional stability over 6000 cycles. This sensor not only has the ability of accurately discriminating mechanical stimuli but also meets the requirements of elasticity, antibacterial activity, wearable comfort, and long-term stability for gait monitoring. The fabrication method of a dual dielectric layer and integrated composite electrode is simple, cost-effective, stable, and amenable to mass production. Thereinto, the introduction of a dual dielectric layer, based on an optimized electrospinning network and micropillar array, has significantly improved the sensitivity, detection range, elasticity, and antibacterial performance of the sensor. The integrated flexible electrodes are made by template method using composite materials of carbon nanotubes (CNTs), two-dimensional titanium carbide Ti3C2Tx (MXene), and polydimethylsiloxane (PDMS), offering synergistic advantages in terms of conductivity, stability, sensitivity, and practicality. Additionally, we designed a smart insole that integrates the as-prepared sensors with a miniature instrument as a wearable platform for gait monitoring and disease warning. The developed sensor and wearable platform offer a cutting-edge solution for monitoring human activity and detecting diseases in a noninvasive manner, paving the way for future wearable devices and personalized healthcare technologies.

Synergistic advancements in high-performance flexible capacitive pressure sensors: structural modifications, AI integration, and diverse applications

The development of flexible pressure sensors for monitoring human motion and physiological signals has attracted extensive scientific research. However, achieving low monitoring limits, a wide detection range, large bending stresses, and excellent mechanical stability simultaneously remains a serious challenge. With the aim of developing a high-performance capacitive pressure sensor (CPS), this paper introduces the successful preparation of a single-walled carbon nanotube (SWNT)/polydimethylsiloxane (S-PDMS) composite dielectric with a foam-like structure (high permittivity and low elasticity modulus) and MXene/SWNT (S-MXene) composite film electrodes with a micro-crumpled structure. The above structurally modified CPS (SMCPS) demonstrated an excellent response output during pressure loading, achieving a wide pressure detection range (up to 700 kPa), a low detection limit (16.55 Pa), fast response/recovery characteristics (48/60 ms), enhanced sensitivity across a wide pressure range, long-term stability under repeated heavy loading and unloading (40 kPa, >2000 cycles), and reliable performance under various temperature and humidity conditions. The SMCPS demonstrated a precise and stable capacitive response in monitoring subtle physiological signals and detecting motion, owing to its unique electrode structure. The flexible device was integrated with an Internet of Things module to create a smart glove system that enables real-time tracking of dynamic gestures. This system demonstrates exceptional performance in gesture recognition and prediction with artificial intelligence analysis, highlighting the potential of the SMCPS in human-machine interface applications.

Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors

In this work, we propose porous fluororubber/thermoplastic urethane nanocomposites (PFTNs) and explore their intrinsic piezoresistive sensitivity to pressure. Our experiments reveal that the intrinsic sensitivity of the PFTN-based sensor to pressure up to 10 kPa increases up to 900% compared to the porous thermoplastic urethane nanocomposite (PTN) counterpart and up to 275% compared to the porous fluororubber nanocomposite (PFN) counterpart. For pressures exceeding 10 kPa, the resistance-pressure relationship of PFTN follows a logarithmic function, and the sensitivity is 221% and 125% higher than that of PTN and PFN, respectively. With the excellent intrinsic sensitivity of the thick PFTN film, a single sensing unit with integrated electrode design can imitate human skin for touch detection, pressure perception and traction sensation. The sensing range of our multimodal tactile sensor reaches ~150 Pa, and it exhibits a linear fit over 97% for both normal pressure and shear force. We also demonstrate that an electronic skin, made of an array of sensing units, is capable of accurately recognizing complex tactile interactions including pinch, spread, and tweak motions.

High-Sensitivity and Wide-Range Flexible Ionic Piezocapacitive Pressure Sensors with Porous Hemisphere Array Electrodes

The development of high-performance flexible pressure sensors with porous hierarchical microstructures is limited by the complex and time-consuming preparation processes of porous hierarchical microstructures. In this study, a simple modified heat curing process was first proposed to achieve one-step preparation of porous hemispherical microstructures on a polydimethylsiloxane (PDMS) substrate. In this process, a laser-prepared template was used to form surface microstructures on PDMS film. Meanwhile, the thermal decomposition of glucose monohydrate additive during heat curing of PDMS led to the formation of porous structures within PDMS film. Further, based on the obtained PDMS/CNTs electrodes with porous hemisphere array and ionic polymer dielectric layers, high-performance ionic piezocapacitive sensors were realized. Under the synergistic effect of the low-stiffness porous hemisphere microstructure and the electric double layer of the ionic polymer film, the sensor based on an ionic polymer film with a 1:0.75 ratio of P(VDF-HFP):[EMIM][TFSI] not only achieves a sensitivity of up to 106.27 kPa-1 below 3 kPa, but also has a wide measurement range of over 400 kPa, which has obvious advantages in existing flexible piezocapacitive sensors. The rapid response time of 110 s and the good stability of 2300 cycles of the sensor further elucidate its practicality. The application of the sensor in pulse monitoring, speech recognition, and detection of multiple dynamic loads verifies its excellent sensing performance. In short, the proposed heat curing process can simultaneously form porous structures and surface microstructures on PDMS films, greatly simplifying the preparation process of porous hierarchical microstructures and providing a simple and feasible way to obtain high-performance flexible pressure sensors.

PDMS-assisted GaN optical hardness sensors

In this Letter, an optical hardness sensor is fabricated based on a GaN-based device combined with finger-shaped PDMS. The chip-scale 1 mm × 1 mm GaN-based device is monolithically integrated with a light emitter and receiver responsible for light emission and photodetection, respectively. The micropatterned PDMS layer can effectively convert the hardness information of the measured object into an optical change detected by the receiver. Verified by experiment measurements, the sensor exhibits a linear response in a hardness range of 1-84 HA, a sensitivity of 0.24 µA/HA, a fast response time of 1.2 ms, and a high degree of repeatability and stability. The optical sensor has the characteristics of tiny size, high compactness, inexpensive fabrication cost, wide measurement range, and high stability, making it suitable for hardness measurement in practical applications.

Bioinspired Engineering of Fillable Gradient Structure into Flexible Capacitive Pressure Sensor Toward Ultra-High Sensitivity and Wide Working Range

Tactile sensing is required for electronic skin and intelligent robots to function properly. However, the dielectric layer's poor structural compressibility in conventional pressure sensors results in a limited pressure sensing range and low sensitivity. To solve this issue, a flexible pressure sensor with a crocodile-inspired fillable gradient structure is provided. The fillable gradient structure and grooves in the pressure sensor accommodate the deformed microstructure that permits the enhancement of the media layer compressibility via COMSOL finite element simulation and optimization. The pressure sensor exhibits a high sensitivity of up to 0.97 k Pa-1 (0-4 kPa), a wide pressure detection range (7 Pa-380 kPa), and outstanding repeatability. The sensor can detect Morse code, robotic grabbing, and human motion monitoring. As a result, flexible sensors with a bionic fillable gradient structure pave the way for wearable devices and offer a novel method for achieving highly precise tactile perception.

Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing

Flexible pressure sensors can be used in human-computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa-1), a wide linear sensing range (0-280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.

A Review of Epidermal Flexible Pressure Sensing Arrays

In recent years, flexible pressure sensing arrays applied in medical monitoring, human-machine interaction, and the Internet of Things have received a lot of attention for their excellent performance. Epidermal sensing arrays can enable the sensing of physiological information, pressure, and other information such as haptics, providing new avenues for the development of wearable devices. This paper reviews the recent research progress on epidermal flexible pressure sensing arrays. Firstly, the fantastic performance materials currently used to prepare flexible pressure sensing arrays are outlined in terms of substrate layer, electrode layer, and sensitive layer. In addition, the general fabrication processes of the materials are summarized, including three-dimensional (3D) printing, screen printing, and laser engraving. Subsequently, the electrode layer structures and sensitive layer microstructures used to further improve the performance design of sensing arrays are discussed based on the limitations of the materials. Furthermore, we present recent advances in the application of fantastic-performance epidermal flexible pressure sensing arrays and their integration with back-end circuits. Finally, the potential challenges and development prospects of flexible pressure sensing arrays are discussed in a comprehensive manner.