Challenges in the Synthesis and Processing of Hydrosilanes as Precursors for Silicon Deposition

Hydrosilanes are highly attractive compounds, which can be processed as liquids with printing technology to amorphous silicon films on nearly any solid substrate. The silicon layers can be processed for electronic devices like transistors or thin-film solar cells. The endothermic character of hydrosilanes with their positive enthalpies of formation results in favorable properties for processing. The larger the molecules, the lower their decomposition temperature and the higher their photoactivity. Cyclic hydrosilanes such as cyclopentasilane and cyclohexasilane can be easily deposited. The branched neopentasilane is more difficult to deposit but yields better-quality films after processing. The key challenge is the complex synthesis of the precursors and the hydrosilanes. The available preparative methods are presented in this review and their advantages and disadvantages are evaluated. The following synthesis methods are presented and discussed in this article: Wurtz coupling and other reductive coupling processes, dehydrogenative coupling of silanes, plasma synthesis of chlorinated polysilanes, amine- or chloride-induced disproportionations, and transformation of monosilane to higher silanes. Plasma synthesis is already carried out today as a continuous industrial process. The most effective synthesis methods in the laboratory are currently amine- and chloride-induced disproportionations. There is a great need to further optimize the syntheses of hydrosilanes and to develop new simple synthesis variants.

Iterative Synthesis of Oligosilanes Using Methoxyphenyl- or Hydrogen-Substituted Silylboronates as Building Blocks: A General Synthetic Method for Complex Oligosilanes

Organosilanes have attracted the attention of researchers for more than 150 years due to their unique properties, and they have become indispensable industrial assets. However, many synthesized oligosilanes with multiple Si-Si bonds are relatively simple, i.e., they often only contain a single repeating unit. More laborious customized synthetic routes can lead to more complex oligosilanes, but compared to carbon-based molecules, their structural diversity remains limited. The development of effective and practical synthetic routes to complex oligosilanes that contain mixed substituents constitutes a long-standing challenge. Here, we describe an iterative synthesis of oligosilanes using methoxyphenyl- or hydrogen-substituted silylboronates, which were obtained via transition-metal-catalyzed Si-H borylation reactions. The first key reaction is a cross-Si-Si bond-forming reaction between chloro(oligo)silanes and silylboronates activated by MeLi. The second key reaction is the selective chlorination of the methoxyphenyl group or the hydrogen atom at the terminal of the oligosilanes. Iteration of these two key reactions enables the synthesis of various oligosilanes that are otherwise difficult to access. As a demonstration of the synthetic utility of this iterative synthetic approach, oligosilanes with different sequences were prepared by simply changing the order of the reaction of four different silicon units. Furthermore, a bespoke tree-shaped oligosilane is easily obtained via the present iterative synthesis. The solid-state structures of several of these oligosilanes were unequivocally determined using single-crystal X-ray diffraction analysis.

Hydrogen-Bridged Oligosilanylsilyl Mono- and Oligosilanylsilyl Dications

Hydrogen‐bridged oligosilanylsilyl borates 8 [B(C₆F₅)₄], 9[B(C₆F₅)₄] and diborates 10 [B(C₆F₅)₄]₂ have been prepared by hydride transfer between α‐ω‐dihydrido‐ (11) and branched tetrahydrido‐oligosilanes (13) and trityl cation. The obtained cyclic intramolecularly stabilized silylium ions 8, 9 and bissilylium ion 10 were characterized by low temperature NMR spectroscopy supported by the results of density functional calculations. The branched Si−H−Si monocation 9 undergoes at low temperatures a fast degenerate rearrangement, which exchanges the Si−H groups with a barrier of 31 kJ mol⁻¹ via an antarafacial transition state. Reaction of the branched monocation 9 with a second equivalent of trityl cation or of the branched oligosilane 13 with two equivalents of trityl cation, gives at −80 °C the corresponding bissilylium ion 10, an example for a new class of highly reactive poly‐Lewis acids.

The Power of the Proton: From Superacidic Media to Superelectrophile Catalysis

Superacidic media became famous in connection with carbocations. Yet not all reactive intermediates can be generated, characterized, and eventually isolated from these Brønsted acid/Lewis acid cocktails. The counteranion, that is the conjugate base, in these systems is often too nucleophilic and/or engages in redox chemistry with the newly formed cation. The Brønsted acidity, especially superacidity, is in fact often not even crucial unless protonation of extremely weak bases needs to be achieved. Instead, it is the chemical robustness of the aforementioned counteranion that determines the success of the protolysis. The advent of molecular Brønsted superacids derived from weakly coordinating, redox-inactive counteranions that do withstand the enormous reactivity of superelectrophiles such as silicon cations completely changed the whole field. This Perspective summarizes general aspects of medium and molecular Brønsted acidity and shows how applications of molecular Brønsted superacids have advanced from stoichiometric reactions to catalytic processes involving protons and in situ generated superelectrophiles.

Silicon Tetrakis(trifluoromethanesulfonate): A Simple Neutral Silane Acting as a Soft and Hard Lewis Superacid

A facile synthesis and isolation of pristine silicon tetrakis(trifluoromethanesulfonate), Si(OTf)4 , is reported, acting as the first neutral silicon-based Lewis superacid suitable towards soft and hard Lewis bases. Its OTf groups have a dual function: they are excellent leaving groups and modulate the degree of reactivity towards soft and hard Lewis bases. Exposed to soft Lewis donors, Si(OTf)4 leads to [L2 Si(OTf)4 ] complexes (L=isocyanide, thioether and carbonyl compounds) with retention of all Si-OTf bonds. In contrast, it can cleave C-X bonds (X=F, Cl) of hard organic Lewis bases with a high tendency to form SiX4 (X=F, Cl) after halide/triflate exchange. Most notable, Si(OTf)4 allows a gentle oxydefluorination of mono- and bis(trifluoromethyl)benzenes, resulting in the formation of the corresponding benzoylium species, which are stabilized by the weakly coordinating [Si(OTf)6 ] dianion.

Stereocontrolled Syntheses of Functionalized cis- and trans-Siladecalins

We report the synthesis of both diastereomers of an all-silicon analog of decalin. Carbocyclic decalin is a ubiquitous bicyclic structural motif. The siladecalin synthesis provides materials functionalized with either Si-Ph or Si-H groups, versatile entry points for further chemical diversification. The synthesis of silicon-stereogenic silanes is significantly less precedented than the synthesis of asymmetric carbon centers, and strategies for control of relative stereochemistry in oligosilanes are hardly described. This study offers insights of potential generality, such as the epimerization of the cis-isomer to the thermodynamically downhill trans-isomer via a hypothesized pentavalent intermediate. Decalin is a classic example in the conformational analysis of organic ring systems, and the carbocyclic diastereomers have highly divergent conformational profiles. Like the carbocycle, we observe different conformational properties in cis- and trans-siladecalins with consequences for NMR spectroscopy, optical properties, and vibrational spectroscopy. This study showcases the utility of targeted synthesis for preparing complex and functionalized polycyclic silanes.

Synthesis and Properties of Branched Hydrogenated Nonasilanes and Decasilanes

Branched higher silicon hydrides Si _nH_{2 n+2} with n > 6 were recently found to be excellent precursors for the liquid phase deposition of silicon films. Herein we report the gram-scale synthesis of the novel nona- and decasilanes (H₃Si)₃Si(SiH₂) _nSi(SiH₃)₃ (2: n = 1, 5: n = 2) from (H₃Si)₃SiLi and Cl(SiPh₂) _nCl by a combined salt elimination/dephenylation/hydrogenation approach. Structure elucidation of the target molecules was performed by NMR spectroscopy and X-ray crystallography. 2 and 5 are nonpyrophoric and exhibit a bathochromically shifted UV absorption compared to neopentasilane and the structurally related octasilane (H₃Si)₃SiSi(SiH₃)₃. TG-MS analysis elucidated increased decomposition temperatures and decreased ceramic yields for branched hydrosilanes relative to cyclopentasilane. Otherwise, very similar thermal properties were observed for hydrosilane oligomers with linear and branched structures.

Stereospecific Synthesis of α-Amino Allylsilane Derivatives through a [3,3]-Allyl Cyanate Rearrangement. Mild Formation of Functionalized Disiloxanes

An efficient asymmetric synthesis of α-amino allylsilane derivatives is reported. The strategy is based on a [3,3]-allyl cyanate sigmatropic rearrangement from enantioenriched γ-hydroxy alkenylsilyl compounds. The isocyanate intermediate can be trapped by several nucleophiles, opening the way for the preparation of unknown chiral functionalized compounds such as the α-ureido allylsilanes as well as carbamate derivatives. A computational study was conducted to rationalize the complete 1,3-chirality transfer of this kind of rearrangement. Moreover, starting from products bearing a phenyldimethyl silyl substituent, the α-amino silane derivatives or the corresponding disiloxanes can be obtained under hydrogenation conditions in an exclusive way according to the used catalyst.

Selective Synthesis and Derivatization of Germasilicon Hydrides

Mixed Si/Ge hydrides SixGeyHz are valuable precursors for the deposition of binary Si-Ge alloys. This work describes the synthesis and full characterization of the previously unknown germaisotetrasilane Ph3GeSi(SiH3)3 (2) on a multigram scale from the reaction of the lithium silanide LiSi(SiH3)3 with Ph3GeCl. The stability of the Si-Ge bond in 2 versus electrophiles and nucleophiles has been investigated with the primary aim of developing new approaches to mixed sila-H-germanes (H3Ge)xSi(SiH3)4-x. With 1 equiv of MeLi, 2 reacted cleanly under cleavage of one Si-Si bond to give Ph3GeSi(SiH3)2Li, which is a valuable synthon for further derivatization. In contrast, the dephenylation reaction of 2 with 1 or 2 equiv of CF3SO3H/iBu2AlH proceeded much less selectively and afforded the desired Ph/H-germasilanes Ph2HGeSi(SiH3)3 and PhH2GeSi(SiH3)3 along with considerable amounts of Si-Ge scission products.

σ-Bond electron delocalization of branched oligogermanes and germanium containing oligosilanes

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Oligogermanes and germaoligosilanes isostructural to oligosilanes were synthesized.

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UV absorption data and X-ray diffraction revealed only marginal differences.

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Conformational flexibility is directly reflected in the UV absorption spectrum.

In order to evaluate the influence of germanium atoms in oligo- and polysilanes, a number of oligosilane compounds were prepared where two or more silicon atoms were replaced by germanium. While it can be expected that the structural features of thus altered molecules do not change much, the more interesting question is, whether this modification would have a profound influence on the electronic structure, in particular on the property of σ-bond electron delocalization.

The UV-spectroscopic comparison of the oligosilanes with germanium enriched oligosilanes and also with oligogermanes showed a remarkable uniform picture. The expected bathochromic shift for oligogermanes and Ge-enriched oligosilanes was observed but its extent was very small. For the low energy absorption band the bathochromic shift from a hexasilane chain (256 nm) to a hexagermane chain with identical substituent patterns (259 nm) amounts to a mere 3 nm.

Synthesis and structural study of precursors of novel methylsilanediols by IR and Raman spectroscopies, single-crystal X-ray diffraction and DFT calculations

On the way towards the development of a synthetic route aimed at obtaining new methylsilanediol derivatives with an aminocarbonyl group in β to silicon (which may have a potential biological interest), we have synthesized, isolated and purified five diphenylic possible precursors, namely chloromethyl(methyl)diphenylsilane, 2-{[methyl(diphenyl)silyl]methyl}-1H-isoindole-1,3(2H)-dione, N-[(methyl(diphenyl) silanyl)-methyl]-benzamide, N-[(methyl(diphenyl)silyl)-methyl]-acetamide and N-[(methyl(diphenyl)silyl)-methyl]-formamide. The conformational landscape of the five species in this study are explored by means of DFT calculations at the B3LYP/6-311++G(∗∗) level. The theoretical molecular structures predicted are confirmed by the reproduction of their respective IR and Raman spectral profiles, that are completely assigned. Some evidence in the vibrational spectra points to the occurrence of conformational mixtures in the samples. Further, single-crystal X-ray diffraction has allowed the elucidation of the crystalline structure of 2-{[methyl(diphenyl)silyl]methyl}-1H-isoindole-1,3(2H)-dione.

Ring-Opening Protonolysis of Sila[1]ferrocenophanes as a Route to Stabilized Silylium Ions

The ring-opening reactions of a series of sila[1]ferrocenophanes with protic acids of anions with various degrees of noncoordinating character have been explored. Ferrocenyl-substituted silyl triflates FcSiMe2OTf (5 a) and Fc(3)SiOTf (5 b) (Fc=(eta5-C5H4)Fe(eta5-C5H5)) were synthesized by means of HOTf-induced ring-opening protonolysis of strained sila[1]ferrocenophanes fcSiMe2 (3 a) and fcSiFc2 (3 b) (fc=(eta5-C5H4)2Fe). Reaction of 3 a and 3 b with HBF4 yielded fluorosubstituted ferrocenylsilanes FcSiMe2F (6 a) and Fc3SiF (6 b) and suggested the intermediacy of a highly reactive silylium ion capable of abstracting F- from the [BF4]- ion. Generation of the solvated silylium ions [FcSiMe2THF]+ (7a+), [Fc3SiTHF]+ (7b+) and [FcSiiPr2OEt2]+ (7c+) at low temperatures, by reaction of the corresponding sila[1]ferrocenophanes (3 a, 3 b, and fcSiiPr2 (3 c), respectively) with H(OEt2)(S)TFPB (S=Et2O or THF; TFPB=tetrakis[3,5-bis(trifluoromethyl)phenyl]borate) was monitored by using low-temperature 1H, 13C, and 29Si NMR spectroscopy. In situ reaction of 7a+, 7b+, and 7c+ with excess pyridine generated [FcSiMe2py]+ (8a+), [Fc3Sipy]+ (8b+), and [FcSiiPr2py]+ (8c+), respectively, as observed by 1H, 13C, and 29Si NMR spectroscopy. A preparative-scale reaction of 3 b with H(OEt2)(THF)TFPB at -60 degrees C and subsequent addition of excess pyridine gave isolable red crystals of 8b-[TFPB]CHCl3, which were characterized by 1H and 29Si NMR spectroscopy as well as by single-crystal X-ray diffraction.

Silanediol peptidomimetics. Evaluation of four diastereomeric ACE inhibitors

Four diastereomers of a Phe-Ala peptide mimic incorporating a central silanediol group have been individually prepared and tested as inhibitors of angiotensin-converting enzyme (ACE). Three of the silanediols exhibit levels of inhibition that are similar to those of corresponding ketones reported by Almquist. For the fourth diastereomer, with both stereogenic carbons inverted relative to the most active isomer, the ketone gives the least enzyme inhibition whereas the silanediol shows a surprisingly low IC50 value.

A concise synthesis of silanediol-based transition-state isostere inhibitors of proteases

[reaction: see text] An efficient synthesis of silanediol-based transition-state inhibitors of proteases is described. A new convergent synthesis has been optimized by using a two-step sequence of hydrosilylation followed by the addition of a silyllithio species to an imine. The method should be applicable to the synthesis of a wide variety of silanediol isosteres to probe the utility of this unique transition-state isostere.

Geminal bis(hypersilyl) compounds — the synthesis and structure of bis[tris(trimethylsilyl)silyl]silanes

Protodesilylation of diphenylsilane with trifluoromethanesulfonic acid and subsequent reaction of the obtained bis(trifluoromethanesulfonyloxy)silane with tris(trimethylsilyl)silyllithium (1) (molar ratio 1:2) afforded bis[tris(trimethylsilyl)silyl]silane (8). Methyl-bis[tris(trimethylsilyl)silyl]silane (3) and phenyl-bis[tris(trimethylsilyl)silyl]silane (10) were obtained by coupling reactions of 1 with MeHSiCl2 or PhHSiCl2, respectively, (2:1). By treatment with HCBr3, the H-silanes 3, 8, and10 were converted into the bromosilanes [(Me3Si)3Si]2SiR1R2 (9: R1 = R2 = Br; 11: R1 = Me, R2 = Br; 12: R1 = Ph, R2 = Br). X-ray crystal structure analyses, performed for 3, 10 and 12, confirmed the expected distortions of the molecular skeletons of the compounds. Thus, e.g., in 10, the spatial demand of the two extended hemispherical hypersilyl groups forces a widening of the Si-Si-Si angle at the central Si atom to a value of 128.3°.Key words: silanes, sterically congested, bis(hypersilyl)silanes, hypersilylsilanes, bis(hypersilyl)germanes, tris(trimethylsilyl)silylsilanes.

Experimental and theoretical vibrational study of silyl trifluoromethanesulfonate, CF3SO2OSiH3

Infrared and Raman spectra were obtained for liquid silyl trifluoromethanesulfonate, a silylating agent of limited stability. The molecular geometry was optimized by means of density functional theory and Möller-Plesset second order perturbation theory methods, using different basis sets. The optimized structure presents a gauche conformation, similar to that adopted by methyl trifluoromethanesulfonate, which was determined experimentally a short time ago. The wavenumbers for the normal modes of vibration and the corresponding force constants were also calculated, facilitating the interpretation of the vibrational data. The harmonic force constants given by theory were scaled to reproduce adequately the experimental wavenumbers.