Advanced lithography materials: From fundamentals to applications

The semiconductor industry has long been driven by advances in a nanofabrication technology known as lithography, and the fabrication of nanostructures on chips relies on an important coating, the photoresist layer. Photoresists are typically spin-coated to form a film and have a photolysis solubility transition and etch resistance that allow for rapid fabrication of nanostructures. As a result, photoresists have attracted great interest in both fundamental research and industrial applications. Currently, the semiconductor industry has entered the era of extreme ultraviolet lithography (EUVL) and expects photoresists to be able to fabricate sub-10 nm structures. In order to realize sub-10 nm nanofabrication, the development of photoresists faces several challenges in terms of sensitivity, etch resistance, and molecular size. In this paper, three types of lithographic mechanisms are reviewed to provide strategies for designing photoresists that can enable high-resolution nanofabrication. The discussion of the current state of the art in optical lithography is presented in depth. Practical applications of photoresists and related recent advances are summarized. Finally, the current achievements and remaining issues of photoresists are discussed and future research directions are envisioned.

Development of a chromatographic method for optimizing the thiol-maleimide coupling of polyoxometalate-polymer hybrids

The covalent attachment of polyoxometalates (POMs) to polymers has been developed as a strategic approach for the advancement of POM-based hybrid materials with versatile applications. In this study, we utilized thiol-maleimide Michael addition to investigate the kinetics and efficacy of the "one-to-one" conjugation between Keggin type POM and polystyrene. We explored the effects of solvent polarity, catalyst, molecular weight of PS and synthetic strategies on the reaction kinetics and efficiency, by means of reverse-phase high-performance liquid chromatography (RP-HPLC). A series of comparative analysis affirmed the superior efficiency of the one-pot method, particularly when facilitated by the addition of a high-polarity solvent and an excess of maleimide. These findings offer valuable insights into the intricate interplay between reaction conditions, kinetics, and selectivity in thiol-maleimide reactions of POMs and polymers. They hold profound implications for advancing the study of POM-based multifunctional materials and the synthesis of complex hybrid molecules.

Polyoxometalates as chemically and structurally versatile components in self-assembled materials

Polyoxometalates (POMs) are anionic molecular metal oxides with expansive diversity in terms of their composition, structure, nuclearity and charge. Within this vast collection of compounds are dominant structural motifs (POM platforms), that are amenable to significant chemical tuning with minimal perturbation of the inorganic oxide molecular structure. Consequently, this enables the systematic investigation of these compounds as inorganic additives within materials whereby structure and charge can be tuned independently i.e. [PW12O40]3- vs. [SiW12O40]4- while also investigating the impact of varying the charge balancing cations on self-assembly. The rich surface chemistry of POMs also supports their functionalisation by organic components to yield so-called inorganic-organic hybrids which will be the key focus of this perspective. We will introduce the modifications possible for each POM platform, as well as discussing the range of nanoparticles, microparticles and surfaces that have been developed using both surfactant and polymer building blocks. We will also illustrate important examples of POM-hybrids alongside their potential utility in applications such as imaging, therapeutic delivery and energy storage.

Post-functionalization through covalent modification of organic counter ions: a stepwise and controlled approach for novel hybrid polyoxometalate materials

Post-functionalization of Class I type polyoxometalate-organic hybrids through covalent modification of the organic counter ions in a step-wise and controlled manner is reported for the first time. The properties of the post-functionalized hybrids have been studied and compared with those of their parent hybrids revealing marked differences in properties.

Hybrid polyoxometalates as post-functionalization platforms: from fundamentals to emerging applications

Polyoxometalates (POMs) represent an important group of metal-oxo nanoclusters, typically comprised of early transition metals in high oxidation states (mainly V, Mo and W). Many plenary POMs exhibit good pH, solvent, thermal and redox stability, which makes them attractive components for the design of covalently integrated hybrid organic-inorganic molecules, herein referred to as hybrid-POMs. Until now, thousands of organic hybrid-POMs have been reported; however, only a small fraction can be further functionalized using other organic molecules or metal cations. This emerging class of 'post-functionalizable' hybrid-POMs constitute a valuable modular platform that permits coupling of POM properties with different organic and metal cation functionalities, thereby expanding the key physicochemical properties that are relevant for application in (photo)catalysis, bioinorganic chemistry and materials science. The post-functionalizable hybrid-POM platforms offer an opportunity to covalently link multi-electron redox responsive POM cores with virtually any (bio)organic molecule or metal cation, generating a wide range of materials with tailored properties. Over the past few years, these materials have been showcased in the preparation of framework materials, functional surfaces, surfactants, homogeneous and heterogeneous catalysts and light harvesting materials, among others. This review article provides an overview on the state of the art in POM post-functionalization and highlights the key design and structural features that permit the discovery of new hybrid-POM platforms. In doing so, we aim to make the subject more comprehensible, both for chemists and for scientists with different materials science backgrounds interested in the applications of hybrid (POM) materials. The review article goes beyond the realms of polyoxometalate chemistry and encompasses emerging research domains such as reticular materials, surfactants, surface functionalization, light harvesting materials, non-linear optics, charge storing materials, and homogeneous acid-base catalysis among others.

Twining Poly(polyoxometalate) Chains into Nanoropes

Organic polymers and inorganic clusters belong to two different disciplines and have completely different properties and structures. When a cluster is attached to the backbone of a polymer as a pendant, the resultant hybrid polymers (polyclusters) exhibit unique behaviours totally different from those of conventional polymers owing to the nanoscale size of the cluster and its particular interactions. Herein, the aggregation of a poly(polyoxometalate)-a polynorbornene backbone with inorganic polyoxometalate cluster pendants-upon addition of a non-solvent to its dilute solution is reported. A three-dimensional network of tangled and snake-like nanothreads was observed. Direct visualisation of individual nanoscale clusters enabled identification of single chains within the nanothreads. These observations suggest that during the process of aggregation, the hybrid polymer forms curved or extended chains as a consequence of an armouring effect in which the collapsed cluster pendants wrap around the backbone. The collapse occurs because they become less soluble in the solvent/non-solvent mixture. The extended chains then become entwined and form nanoropes consisting of multiple chains wound around each other. This study provides a deeper understanding of the nature of polyclusters and should also prove useful for their future development and application.

Polyoxometalate-Polymer Hybrid Materials as Proton Exchange Membranes for Fuel Cell Applications

As one of the most efficient pathways to provide clean energy, fuel cells have attracted great attention in both academic and industrial communities. Proton exchange membranes (PEMs) or proton-conducting electrolytes are the key components in fuel cell devices, which require the characteristics of high proton conductivity as well as high mechanical, chemical and thermal stabilities. Organic-inorganic hybrid PEMs can provide a fantastic platform to combine both advantages of two components to meet these demands. Due to their extremely high proton conductivity, good thermal stability and chemical adjustability, polyoxometalates (POMs) are regarded as promising building blocks for hybrid PEMs. In this review, we summarize a number of research works on the progress of POM-polymer hybrid materials and related applications in PEMs. Firstly, a brief background of POMs and their proton-conducting properties are introduced; then, the hybridization strategies of POMs with polymer moieties are discussed from the aspects of both noncovalent and covalent concepts; and finally, we focus on the performance of these hybrid materials in PEMs, especially the advances in the last five years. This review will provide a better understanding of the challenges and perspectives of POM-polymer hybrid PEMs for future fuel cell applications.

EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

A detailed investigation to understand the mechanism of the resist action at a fundamental level is essential for future Extreme Ultraviolet Lithography (EUVL) resists. The photodynamics study of a newly developed hybrid nonchemically amplified 2.15%-MAPDSA-MAPDST resist using synchrotron radiation excitation at 103.5 eV (12 nm) is presented. Antimony was incorporated in the resist as a heavy metal absorption center in the form of antimonate (2.15%). The results showed the fast decomposition rate of the radiation sensitive sulfonium triflate. HR-XPS and sulfur L-NEXAFS spectra of the copolymer films revealed that after irradiation the Ar-S+-(CH3)2 sulfonium group bonded to the phenyl ring resisted the EUV excitation. Those results confirmed the polarity switching mechanism from hydrophilic sulfonium triflates to hydrophobic aromatic sulfides obtained in previous results. The inorganic component SbF6 - included in the resist formulations as an EUV absorption enhancer was particularly illustrative of the photofragmentation process. F 1s and O 1s HR-XPS spectra showed that fluorine remains linked to the antimony, even after 15 min of irradiation. A change of the antimony oxidation state was also observed with an increase in irradiation time. The presence of the heavy metal may control the high energy deposited on the resist which finally led to very well resolved 20 nm isolated line patterns by EUVL. The 10 times improved sensitivity compared with previous poly-MAPDST resists studied in the past showed the potential of this class of hybrid resists for next generation semiconductor industry applications.

The Heck reaction as a tool to expand polyoxovanadates towards thiol-sensitive organic–inorganic hybrid fluorescent switches

Pd-catalysed Heck cross-coupling reactions between organically-tailored polyoxovanadates and a variety of olefins were realised. The synthesised organic–inorganic hybrids pave the way for the redox-driven luminescence switching, opening up great perspectives in tracing smart reducing agents such as e.g. toxic thiols.

An Investigation of Polyoxometalate Hybrid Materials as Patternable Dielectrics and Lithographic Resists

Polyoxometalate (POM) hybrid materials have shown potential as spin-coatable, patternable dielectric thin-films and components for lithographic resists. In particular, the octamolybdate cluster has been shown to possess good spin-coating properties and the patterning capabilities of hybrid octamolybdate thin-films were explored using a combination of broadband UV and electron beam lithography (EBL) techiniques. Dielectric properties of these films were determined by ellipsometry, and octamolybdate clusters were subsequently investigated as negative resists in various blends for potential uses in next-generation photolithography, where contrast, sensitivity, and line edge roughness characteristics were determined. Preliminary evidence for the suppression of the diffusion of photo-generated acids is presented.

A mild post-functionalization method for the vanadium substituted P2W15V3 Wells–Dawson polyoxometalate based on a copper catalyzed azide–alkyne cycloaddition

A novel post-functionalization method for the vanadium substituted P₂W₁₅V₃ Wells–Dawson polyoxometalate has been developed using a copper catalyzed azide–alkyne cycloaddition.

Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist

Given the importance of complex nanofeatures in the filed of micro-/nanoelectronics particularly in the area of high-density magnetic recording, photonic crystals, information storage, micro-lens arrays, tissue engineering and catalysis, the present work demonstrates the development of new methodology for patterning complex nanofeatures using a recently developed non-chemically amplified photoresist (n-CARs) poly(4-(methacryloyloxy)phenyl)dimethylsulfoniumtriflate) (polyMAPDST) with the help of extreme ultraviolet lithography (EUVL) as patterning tool. The photosensitivity of polyMAPDST is mainly due to the presence of radiation sensitive trifluoromethanesulfonate unit (triflate group) which undergoes photodegradation upon exposure with EUV photons, and thus brings in polarity change in the polymer structure. Integration of such radiation sensitive unit into polymer network avoids the need of chemical amplification which is otherwise needed for polarity switching in the case of chemically amplified photoresists (CARs). Indeed, we successfully patterned highly ordered wide-raging dense nanofeatures that include nanodots, nanowaves, nanoboats, star-elbow etc. All these developed nanopatterns have been well characterized by FESEM and AFM techniques. Finally, the potential of polyMAPDST has been established by successful transfer of patterns into silicon substrate through adaptation of compatible etch recipes.

Versatility of the ionic assembling method to design highly luminescent PMMA nanocomposites containing [M6Qi8La6]n− octahedral nano-building blocks

Strongly luminescent hybrid nanocomposites were designed by integrating via an ionic technique high content of different transition metal clusters.

Design, development, EUVL applications and nano mechanical properties of a new HfO2 based hybrid non-chemically amplified resist

A new HfO₂-based hybrid n-CAR resist material has been developed for EUVL applications and its nano-mechanical properties have been reported.

Recent advances in non-chemically amplified photoresists for next generation IC technology

The present article reviews the recent advances in the area of non-chemically amplified photoresists particularly for sub-30 nm nodes.

Covalently-linked polyoxometalate–polymer hybrids: optimizing synthesis, appealing structures and prospective applications

In this perspective, the field of covalent polyoxometalate–polymer hybrids has been reviewed and some perspectives are provided.

Biofunctionalization of Polyoxometalates with DNA Primers, Their Use in the Polymerase Chain Reaction (PCR) and Electrochemical Detection of PCR Products

The bioconjugation of polyoxometalates (POMs), which are inorganic metal oxido clusters, to DNA strands to obtain functional labeled DNA primers and their potential use in electrochemical detection have been investigated. Activated monooxoacylated polyoxotungstates [SiW11 O39 {Sn(CH2 )2 CO}](8-) and [P2 W17 O61 {Sn(CH2 )2 CO}](6-) have been used to link to a 5'-NH2 terminated 21-mer DNA forward primer through amide coupling. The functionalized primer was characterized by using a battery of techniques, including electrophoresis, mass spectrometry, as well as IR and Raman spectroscopy. The functionality of the POM-labeled primers was demonstrated through hybridization with a surface-immobilized probe. Finally, the labeled primers were successfully used in the polymerase chain reaction (PCR) and the PCR products were characterized by using electrophoresis.

Synthesis, structure, self-assembly and genotoxicity evaluation of a series of Mn-Anderson cluster based polyoxometalate–organic hybrids

A new series of POM–organic hybrids have been developed which show less genotoxicity compared to the parent polyoxometalate cluster.

A radiation sensitive hybrid polymer based on an Mn-Anderson polyoxometalate cluster and a UV active organic monomer: synergistic effects lead to improved photocurrent in a photoresponse device

A new radiation sensitive polyoxometalate/polymer hybrid has been developed which shows good photocurrent generation in a photoresponse device.