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For: Graf M, Räuchle E, Urban H, Kaiser M, Alberts L, Emmerich R, Elsner P. FEM-Simulation von Mikrowellenfeldern für die Entwicklung von Mikrowellen- und Plasmaanlagen. CHEM-ING-TECH 2005. [DOI: 10.1002/cite.200590028] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]

For:	Graf M, Räuchle E, Urban H, Kaiser M, Alberts L, Emmerich R, Elsner P. FEM-Simulation von Mikrowellenfeldern für die Entwicklung von Mikrowellen- und Plasmaanlagen. CHEM-ING-TECH 2005. [DOI: 10.1002/cite.200590028] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]

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Pauly S, Schulz A, Walker M, Gorath M, Baumgärtner K, Tovar GEM. Modeling and Experimental Study of a Remote Microwave Plasma Source for High‐Rate Etching. CHEM-ING-TECH 2022. [DOI: 10.1002/cite.202100144] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]