Micromachined silicon attenuated total reflectance infrared spectroscopy: An emerging detection method in micro/nanofluidics

Terahertz time-domain attenuated total reflection spectroscopy integrated with a microfluidic chip

The integration of a microfluidic chip into terahertz time-domain attenuated total reflection (THz TD-ATR) spectroscopy is highly demanded for the accurate measurement of aqueous samples. Hitherto, however little work has been reported on this regard. Here, we demonstrate a strategy of fabricating a polydimethylsiloxane microfluidic chip (M-chip) suitable for the measurement of aqueous samples, and investigate the effects of its configuration, particularly the cavity depth of the M-chip on THz spectra. By measuring pure water, we find that the Fresnel formulae of two-interface model should be applied to analyze the THz spectral data when the depth is smaller than 210 μm, but the Fresnel formula of one-interface model can be applied when the depth is no less than 210 μm. We further validate this by measuring physiological solution and protein solution. This work can help promote the application of THz TD-ATR spectroscopy in the study of aqueous biological samples.

Sensing and structure analysis byin situIR spectroscopy: from mL flow cells to microfluidic applications

In situmid-infrared (MIR) spectroscopy in liquids is an emerging field for the analysis of functional surfaces and chemical reactions. Different basic geometries exist forin situMIR spectroscopy in milliliter (mL) and microfluidic flow cells, such as attenuated total reflection (ATR), simple reflection, transmission and fiber waveguides. After a general introduction of linear opticalin situMIR techniques, the methodology of ATR, ellipsometric and microfluidic applications in single-reflection geometries is presented. Selected examples focusing on thin layers relevant to optical, electronical, polymer, biomedical, sensing and silicon technology are discussed. The development of an optofluidic platform translates IR spectroscopy to the world of micro- and nanofluidics. With the implementation of SEIRA (surface enhanced infrared absorption) interfaces, the sensitivity of optofluidic analyses of biomolecules can be improved significantly. A large variety of enhancement surfaces ranging from tailored nanostructures to metal-island film substrates are promising for this purpose. Meanwhile, time-resolved studies, such as sub-monolayer formation of organic molecules in nL volumes, become available in microscopic or laser-based set-ups. With the adaption of modern brilliant IR sources, such as tunable and broadband IR lasers as well as frequency comb sources, possible applications of far-field IR spectroscopy inin situsensing with high lateral (sub-mm) and time (sub-s) resolution are considerably extended.

Microfluidics and catalyst particles

In this review article, we discuss the latest advances and future perspectives of microfluidics for micro/nanoscale catalyst particle synthesis and analysis. In the first section, we present an overview of the different methods to synthesize catalysts making use of microfluidics and in the second section, we critically review catalyst particle characterization using microfluidics. The strengths and challenges of these approaches are highlighted with various showcases selected from the recent literature. In the third section, we give our opinion on the future perspectives of the combination of catalytic nanostructures and microfluidics. We anticipate that in the synthesis and analysis of individual catalyst particles, generation of higher throughput and better understanding of transport inside individual porous catalyst particles are some of the most important benefits of microfluidics for catalyst research.

Attenuated Total Reflection Fourier Transform Infrared (ATR FT-IR) Spectromicroscopy Using Synchrotron Radiation and Micromachined Silicon Wafers for Microfluidic Applications

A custom-designed optical configuration compatible with the use of micromachined multigroove internal reflection elements (μ-groove IREs) for attenuated total reflectance Fourier transform infrared (ATR FT-IR) spectroscopy and imaging applications in microfluidic devices is described. The μ-groove IREs consist of several face-angled grooves etched into a single, monolithic silicon chip. The optical configuration permits individual grooves to be addressed by focusing synchrotron sourced IR light through a 150 µm pinhole aperture, restricting the beam spot size to a dimension smaller than that of the groove walls. The effective beam spot diameter at the ATR sampling plane is determined through deconvolution of the measured detector response and found to be 70 µm. The μ-groove IREs are highly compatible with standard photolithographic techniques as demonstrated by printing a 400 µm wide channel in an SU-8 film spin-coated on the IRE surface. Attenuated total reflection FT-IR mapping as a function of sample position across the channel illustrates the potential application of this approach for rapid prototyping of microfluidic devices.

10 nm deep, sub-nanoliter fluidic nanochannels on germanium for attenuated total reflection infrared (ATR-IR) spectroscopy

Nanoslits with a depth of ∼10 nm were manufactured on a germanium internal reflection element for attenuated internal reflection infrared spectroscopy.

Combining microfluidics and FT-IR spectroscopy: towards spatially resolved information on chemical processes

This review outlines the combination of infrared spectroscopy and continuous microfluidic processes.